CA3055249A1 - High speed scanning system with acceleration tracking - Google Patents

High speed scanning system with acceleration tracking Download PDF

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Publication number
CA3055249A1
CA3055249A1 CA3055249A CA3055249A CA3055249A1 CA 3055249 A1 CA3055249 A1 CA 3055249A1 CA 3055249 A CA3055249 A CA 3055249A CA 3055249 A CA3055249 A CA 3055249A CA 3055249 A1 CA3055249 A1 CA 3055249A1
Authority
CA
Canada
Prior art keywords
velocity
tracking mirror
stage
substrate
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CA3055249A
Other languages
English (en)
French (fr)
Inventor
Windsor Owens
Bryan Staker
Rob HARTLAGE
Edvinas ZIZMINSKAS
David Stern
Paul Heilman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pacific Biosciences of California Inc
Original Assignee
Apton Biosystems LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Apton Biosystems LLC filed Critical Apton Biosystems LLC
Publication of CA3055249A1 publication Critical patent/CA3055249A1/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/64Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
    • G02B27/644Imaging systems using optical elements for stabilisation of the lateral and angular position of the image compensating for large deviations, e.g. maintaining a fixed line of sight while a vehicle on which the system is mounted changes course
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746Linear encoders
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6452Individual samples arranged in a regular 2D-array, e.g. multiwell plates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64Fluorescence; Phosphorescence
    • G01N21/645Specially adapted constructive features of fluorimeters
    • G01N21/6456Spatial resolved fluorescence measurements; Imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/101Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60Control of cameras or camera modules
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N3/00Scanning details of television systems; Combination thereof with generation of supply voltages
    • H04N3/02Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only
    • H04N3/08Scanning details of television systems; Combination thereof with generation of supply voltages by optical-mechanical means only having a moving reflector
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60Control of cameras or camera modules
    • H04N23/68Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • H04N23/682Vibration or motion blur correction
    • H04N23/685Vibration or motion blur correction performed by mechanical compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Studio Devices (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
CA3055249A 2017-03-03 2018-03-02 High speed scanning system with acceleration tracking Pending CA3055249A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762467048P 2017-03-03 2017-03-03
US62/467,048 2017-03-03
PCT/US2018/020737 WO2018161013A1 (en) 2017-03-03 2018-03-02 High speed scanning system with acceleration tracking

Publications (1)

Publication Number Publication Date
CA3055249A1 true CA3055249A1 (en) 2018-09-07

Family

ID=63355049

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3055249A Pending CA3055249A1 (en) 2017-03-03 2018-03-02 High speed scanning system with acceleration tracking

Country Status (6)

Country Link
US (5) US10585296B2 (enExample)
EP (2) EP3589998B1 (enExample)
JP (2) JP7144457B2 (enExample)
CN (2) CN114967111A (enExample)
CA (1) CA3055249A1 (enExample)
WO (1) WO2018161013A1 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10829816B2 (en) 2012-11-19 2020-11-10 Apton Biosystems, Inc. Methods of analyte detection
DK2920725T3 (da) 2012-11-19 2022-02-07 Apton Biosystems Inc Digital analyse af molekylære analytter ved hjælp af enkeltmolekyledetektering
MX2016002210A (es) 2013-08-22 2016-06-06 Apton Biosystems Inc Analisis digital de analitos moleculares usando metodos electricos.
JP7144457B2 (ja) 2017-03-03 2022-09-29 アプトン バイオシステムズ インコーポレイテッド 加速度追跡による高速走査システム
CN114921537A (zh) 2017-03-17 2022-08-19 雅普顿生物系统公司 测序和高分辨率成像
US11095809B2 (en) * 2018-03-30 2021-08-17 Drs Network & Imaging Systems, Llc Method and system for scanning of a focal plane array during earth observation imaging
EP3853382A4 (en) 2018-09-19 2022-06-22 Apton Biosystems, Inc. Densely-packed analyte layers and detection methods
US11421272B2 (en) * 2018-12-26 2022-08-23 Genemind Biosciences Company Limited Positioning method, positioning apparatus and sequencing system
CN110361827B (zh) * 2019-06-14 2020-05-12 中国科学院西安光学精密机械研究所 一种降低两轴快速反射镜中x轴和y轴耦合的控制方法
US12228716B2 (en) * 2019-09-02 2025-02-18 Leica Microsystems Cms Gmbh Microscope and method for imaging an object using a microscope
AU2020341679A1 (en) 2019-09-05 2022-04-21 Pacific Biosciences Of California, Inc. High speed scanning systems for super resolution imaging
US11647287B1 (en) 2019-12-03 2023-05-09 Waymo Llc Autofocus actuator
US11223756B1 (en) 2019-12-03 2022-01-11 Waymo Llc Position sensor and hybrid substrate for camera focus management
EP4093574A1 (en) * 2020-01-24 2022-11-30 Novanta Corporation Systems and methods for improving accuracy in large area laser processing using position feedforward compensation
CN111596456A (zh) * 2020-05-08 2020-08-28 山东大学 一种激光指向稳定控制系统
EP3913906A1 (en) * 2020-05-18 2021-11-24 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO Physical object processing system and method
WO2022098553A1 (en) 2020-11-06 2022-05-12 Illumina, Inc. Apparatus and method of obtaining an image of a sample in motion
CN116457689B (zh) * 2020-11-19 2025-11-11 株式会社电装 光学测距装置
CN113253471B (zh) * 2021-07-12 2022-04-29 清华大学 旋转式三维光激发装置
TW202336423A (zh) 2021-10-01 2023-09-16 美商伊路米納有限公司 用於傳輸光之設備及方法
US11680786B2 (en) 2021-11-05 2023-06-20 Waymo Llc Capacitive position sensing for camera focus management
CN116953904A (zh) * 2022-04-18 2023-10-27 南京微纳科技研究院有限公司 光学系统、三维成像系统及三维成像方法
KR102804207B1 (ko) * 2022-10-04 2025-05-09 세메스 주식회사 기판 검사 장치 및 방법
JP2024064598A (ja) 2022-10-28 2024-05-14 三菱重工業株式会社 アンモニア除害システム、浮体、及びアンモニア除害方法
WO2024102889A1 (en) * 2022-11-10 2024-05-16 Ultima Genomics, Inc. Methods and systems for counter scan area mode imaging
CN116091341B (zh) * 2022-12-15 2024-04-02 南京信息工程大学 一种低光图像的曝光差增强方法及装置
US12327741B2 (en) * 2023-02-28 2025-06-10 Kla Corporation Oscillating secondary stage for frame-mode overlay metrology
US20250102822A1 (en) * 2023-09-27 2025-03-27 Onto Innovation Inc. Blur reduction techniques for semiconductor inspection
TWI884657B (zh) * 2023-12-27 2025-05-21 錼創顯示科技股份有限公司 加工與檢測設備及檢測設備

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4516023A (en) 1982-06-03 1985-05-07 Klimsch/Optronics Scanner/plotter optical system
DD285836A5 (de) * 1989-07-05 1991-01-03 Veb Carl Zeiss Jena,Dd Verfahren zur geometrieinvarianten bilderzeugung
JPH09250912A (ja) * 1996-03-14 1997-09-22 Nikon Corp パターン測定装置
EP1028456A4 (en) * 1997-09-19 2003-03-05 Nikon Corp CARRIER DEVICE, SCAN ALIGNER, AND SCAN EXPOSURE METHOD, AND A COMPONENT MADE THEREOF
FR2784189B3 (fr) * 1998-10-05 2000-11-03 Commissariat Energie Atomique Biopuce et dispositif de lecture d'une biopuce comportant une pluralite de zones de reconnaissance moleculaire
JP4348455B2 (ja) * 1998-12-09 2009-10-21 レーザーテック株式会社 撮像装置
US6555169B2 (en) 2000-04-25 2003-04-29 William Tenckhoff System and method for masking door hinges during painting
JP3859459B2 (ja) * 2000-04-26 2006-12-20 松下電器産業株式会社 撮像装置
JP2001332595A (ja) 2000-05-25 2001-11-30 Sony Corp 焦点合わせ制御機構及びこれを用いた検査装置
US7561270B2 (en) 2000-08-24 2009-07-14 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
US6624894B2 (en) * 2001-06-25 2003-09-23 Veeco Instruments Inc. Scanning interferometry with reference signal
JP2006106378A (ja) * 2004-10-06 2006-04-20 Yokogawa Electric Corp 共焦点顕微鏡
JP2007194779A (ja) * 2006-01-18 2007-08-02 Pentax Corp 三次元撮影装置
US8084706B2 (en) 2006-07-20 2011-12-27 Gsi Group Corporation System and method for laser processing at non-constant velocities
EP2434327A1 (en) * 2006-12-22 2012-03-28 Nikon Corporation Laser scan confocal microscope
US8115170B2 (en) * 2007-01-09 2012-02-14 International Business Machines Corporation Method and apparatus for creating time-resolved emission images of integrated circuits using a single-point single-photon detector and a scanning system
US8089436B1 (en) * 2007-02-21 2012-01-03 Lockheed Martin Corporation Image stability in liquid crystal displays
EP2291539B1 (en) * 2008-06-25 2018-03-14 Okura, Michael Apparatus for melting curve analysis of nucleic acids in microarray format
BRPI0917740A2 (pt) * 2008-12-15 2016-02-16 Koninkl Philips Electronics Nv microscópio de varredura
US7924422B2 (en) * 2009-02-12 2011-04-12 Tokyo Electron Limited Calibration method for optical metrology
JP5574792B2 (ja) * 2010-04-13 2014-08-20 キヤノン株式会社 撮影装置
US8428390B2 (en) * 2010-06-14 2013-04-23 Microsoft Corporation Generating sharp images, panoramas, and videos from motion-blurred videos
SG2014011217A (en) * 2011-09-09 2014-06-27 Ventana Med Syst Inc Focus and imaging system and techniques using error signal
JP2013152429A (ja) 2011-12-27 2013-08-08 Canon Inc 画像処理装置、画像処理方法、およびプログラム
US9628676B2 (en) * 2012-06-07 2017-04-18 Complete Genomics, Inc. Imaging systems with movable scan mirrors
US9488823B2 (en) 2012-06-07 2016-11-08 Complete Genomics, Inc. Techniques for scanned illumination
DK2920725T3 (da) 2012-11-19 2022-02-07 Apton Biosystems Inc Digital analyse af molekylære analytter ved hjælp af enkeltmolekyledetektering
WO2014190027A1 (en) * 2013-05-22 2014-11-27 Massachusetts Institute Of Technology Methods, systems, and apparatus for imaging spectroscopy
US10136063B2 (en) * 2013-07-12 2018-11-20 Hanwha Aerospace Co., Ltd Image stabilizing method and apparatus
US9581798B2 (en) * 2013-07-22 2017-02-28 Fundacio Institut De Ciencies Fotoniques Light sheet-based imaging device with extended depth of field
JP5729622B2 (ja) * 2013-10-22 2015-06-03 国立大学法人 東京大学 ブラーレス画像撮像システム
US9581640B2 (en) * 2014-10-08 2017-02-28 Eastman Kodak Company Vision-guided alignment method
JP7144457B2 (ja) 2017-03-03 2022-09-29 アプトン バイオシステムズ インコーポレイテッド 加速度追跡による高速走査システム
CN114921537A (zh) 2017-03-17 2022-08-19 雅普顿生物系统公司 测序和高分辨率成像
CN110031907B (zh) 2019-04-18 2024-09-20 西安天和防务技术股份有限公司 光机扫描成像系统
AU2020341679A1 (en) 2019-09-05 2022-04-21 Pacific Biosciences Of California, Inc. High speed scanning systems for super resolution imaging

Also Published As

Publication number Publication date
CN110582715B (zh) 2022-04-29
US20250172820A1 (en) 2025-05-29
CN110582715A (zh) 2019-12-17
JP2022173295A (ja) 2022-11-18
EP3589998B1 (en) 2023-08-23
US20180252936A1 (en) 2018-09-06
US12259564B2 (en) 2025-03-25
EP3589998A4 (en) 2020-12-16
JP7144457B2 (ja) 2022-09-29
JP7644738B2 (ja) 2025-03-12
US20230400701A1 (en) 2023-12-14
EP4296654A2 (en) 2023-12-27
WO2018161013A1 (en) 2018-09-07
US10585296B2 (en) 2020-03-10
CN114967111A (zh) 2022-08-30
US20220214557A1 (en) 2022-07-07
JP2020512599A (ja) 2020-04-23
EP3589998A1 (en) 2020-01-08
US20200393691A1 (en) 2020-12-17
EP4296654A3 (en) 2024-02-28

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