JP2022112480A - 自動移送設備 - Google Patents
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- 238000004146 energy storage Methods 0.000 description 7
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- 239000004065 semiconductor Substances 0.000 description 4
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C7/00—Runways, tracks or trackways for trolleys or cranes
- B66C7/08—Constructional features of runway rails or rail mountings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C7/00—Runways, tracks or trackways for trolleys or cranes
- B66C7/12—Devices for changing direction of travel or for transferring from one runway to another; Crossings; Combinations of tracks of different gauges
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J50/00—Circuit arrangements or systems for wireless supply or distribution of electric power
- H02J50/10—Circuit arrangements or systems for wireless supply or distribution of electric power using inductive coupling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
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- Current-Collector Devices For Electrically Propelled Vehicles (AREA)
- Warehouses Or Storage Devices (AREA)
- Charge And Discharge Circuits For Batteries Or The Like (AREA)
Abstract
Description
前記リフトトラックは、ピックアップコイル、共振回路および前記リフトトラックに沿って配置される補助トラック用給電線を備え、前記延長トラックに配置されたメイン給電線から磁気誘導方式で前記補助トラック用給電線に交流電流を供給し、前記補助トラック用給電線から磁気誘導方式で前記搬送台車に電力を供給するように構成されることを特徴とする。
前記クレーンフォークの移動方向に沿って前記メイントラックの垂直方向に設置され、ピックアップコイル、共振回路および補助トラック用給電線を備え、前記メイントラックに配置されたメイン給電線から磁気誘導方式で前記補助トラック用給電線に交流電流を供給し、前記補助トラック用給電線から磁気誘導方式で前記ストッカの前記クレーンフォークに電力を供給するように構成される補助トラックとを含むことを特徴とする。
112 メイン給電線
114、514 インバータ
116、516、532、534、546、550 共振回路
120 搬送台車
122、144、528、530、544、548 ピックアップコイル
130 延長トラック
140 リフトトラック
142 補助トラック用給電線
520 ストッカ
522 走行部
524 移動式クレーン
526 クレーンフォーク
600 直列キャパシタ
610 並列キャパシタ
612、614 インダクタ
Claims (12)
- 自動移送設備であって、
予め定められた経路に沿って設置されるメイントラックと、
前記メイントラックに支持案内されて物品を搬送する搬送台車と、
前記メイントラックに沿って配置され、磁気誘導方式で前記搬送台車に電力を供給するメイン給電線と、
前記メイントラックに垂直または水平方向に延びて設置され、前記メイントラック上の前記メイン給電線が延びて配置される延長トラックと、
前記延長トラックに対向して前記垂直または水平方向に移動するように構成され、前記搬送台車を昇降または水平移動させるリフトトラックとを含み、
前記リフトトラックは、ピックアップコイル、共振回路および前記リフトトラックに沿って配置される補助トラック用給電線を備え、前記延長トラックに配置されたメイン給電線から磁気誘導方式で前記補助トラック用給電線に交流電流を供給し、前記補助トラック用給電線から磁気誘導方式で前記搬送台車に電力を供給するように構成されることを特徴とする、自動移送設備。 - 自動移送設備であって、
予め定められた経路に沿って設置されるメイントラックと、
前記メイントラック上を走行しながら、物品を移積載する移動式クレーンと上下移動をするクレーンフォークを含むストッカと、
前記メイントラックに沿って配置され、磁気誘導方式で前記ストッカに電力を供給するメイン給電線と、
前記クレーンフォークの移動方向に沿って前記メイントラックの垂直方向に設置され、ピックアップコイル、共振回路および補助トラック用給電線を備え、前記メイントラックに配置されたメイン給電線から磁気誘導方式で前記補助トラック用給電線に交流電流を供給し、前記補助トラック用給電線から磁気誘導方式で前記ストッカの前記クレーンフォークに電力を供給するように構成される補助トラックとを含むことを特徴とする、自動移送設備。 - 前記ピックアップコイルは、
E-タイプ、コ-タイプおよびI-タイプのいずれか一つのタイプのコア上に備えられることを特徴とする、請求項1または請求項2に記載の自動移送設備。 - 前記共振回路は、
前記メイン給電線と同じ共振周波数を有するように構成されることを特徴とする、請求項1または請求項2に記載の自動移送設備。 - 前記共振回路は、
前記共振回路の入力の一端に直列キャパシタが連結され、前記直列キャパシタの他端に前記ピックアップコイルの一端が連結されて構成されることを特徴とする、請求項1または請求項2に記載の自動移送設備。 - 前記共振回路は、
入力の一端に直列インダクタが連結され、前記直列インダクタと入力の他端に並列キャパシタが連結され、前記並列キャパシタの両端に前記ピックアップコイルが連結されて構成されることを特徴とする、請求項1または請求項2に記載の自動移送設備。 - 前記共振回路は、
入力の一端に直列インダクタが連結され、前記直列インダクタと入力の他端に並列キャパシタが連結され、前記並列キャパシタの一端に直列キャパシタが連結され、前記直列キャパシタと前記並列キャパシタの他端に前記ピックアップコイルが連結されて構成されることを特徴とする、請求項1または請求項2に記載の自動移送設備。 - 前記共振回路は、
入力の一端に直列インダクタが連結され、前記直列インダクタと入力の他端に並列キャパシタが連結され、前記並列キャパシタの一端に直列にインダクタが連結され、前記インダクタと前記並列キャパシタの他端に前記ピックアップコイルが連結されて構成されることを特徴とする、請求項1または請求項2に記載の自動移送設備。 - 前記補助トラック用給電線は、
複数ターン以上の巻線を巻いて構成されることを特徴とする、請求項1または請求項2に記載の自動移送設備。 - 前記補助トラック用給電線は、
前記補助トラック用給電線で発生する発熱を検出するための感熱線をさらに含んで構成されることを特徴とする、請求項1または請求項2に記載の自動移送設備。 - 前記感熱線は、
前記補助トラック用給電線に一体型で挿入されることを特徴とする、請求項10に記載の自動移送設備。 - 前記補助トラック用給電線は、
前記メイントラックのメイン給電線上に流れる電流と予め設定された誤差範囲内の同一の電流が印加されるように構成されることを特徴とする、請求項1に記載の自動移送設備。
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Application Number | Priority Date | Filing Date | Title |
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KR1020210008564A KR102290659B1 (ko) | 2021-01-21 | 2021-01-21 | 자동 이송설비 |
KR10-2021-0008564 | 2021-01-21 |
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JP2022112480A true JP2022112480A (ja) | 2022-08-02 |
JP7313417B2 JP7313417B2 (ja) | 2023-07-24 |
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KR (1) | KR102290659B1 (ja) |
CN (1) | CN114803331A (ja) |
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KR102550549B1 (ko) * | 2022-11-28 | 2023-07-04 | (주)그린파워 | 케이블 길이 오차 수용이 가능한 자동반송시스템 |
KR102629134B1 (ko) * | 2023-06-26 | 2024-01-26 | (주)그린파워 | 무선전력 공급시스템 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09240811A (ja) * | 1996-03-11 | 1997-09-16 | Daifuku Co Ltd | 自動倉庫 |
JPH11252704A (ja) * | 1998-02-26 | 1999-09-17 | Shinko Electric Co Ltd | 分割型電流変成器による給電方法及び当該給電方法を適用した搬送システム |
JP2002354710A (ja) * | 2001-05-22 | 2002-12-06 | Murata Mach Ltd | 非接触給電の給電装置 |
JP2014230299A (ja) * | 2013-05-17 | 2014-12-08 | 株式会社東芝 | 異物検出装置および非接触電力伝送装置 |
JP2017070062A (ja) * | 2015-09-29 | 2017-04-06 | トヨタ自動車株式会社 | 送電回路および受電回路 |
KR102005945B1 (ko) * | 2019-02-01 | 2019-10-01 | (주)그린파워 | 무정전 멀티 페일오버 기능이 구비된 무선 전력전송장치 |
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JP4193174B2 (ja) * | 2003-11-05 | 2008-12-10 | 村田機械株式会社 | 搬送車システム |
JP2007182277A (ja) * | 2006-01-05 | 2007-07-19 | Daifuku Co Ltd | スタッカークレーンおよび物品収納設備 |
KR102042455B1 (ko) * | 2019-01-22 | 2019-11-08 | (주)그린파워 | 감열선을 내장한 복합 전력 케이블 및 이를 구비한 과열 보호 장치 |
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- 2021-01-21 KR KR1020210008564A patent/KR102290659B1/ko active IP Right Grant
- 2021-11-30 JP JP2021194484A patent/JP7313417B2/ja active Active
- 2021-12-14 CN CN202111529167.3A patent/CN114803331A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09240811A (ja) * | 1996-03-11 | 1997-09-16 | Daifuku Co Ltd | 自動倉庫 |
JPH11252704A (ja) * | 1998-02-26 | 1999-09-17 | Shinko Electric Co Ltd | 分割型電流変成器による給電方法及び当該給電方法を適用した搬送システム |
JP2002354710A (ja) * | 2001-05-22 | 2002-12-06 | Murata Mach Ltd | 非接触給電の給電装置 |
JP2014230299A (ja) * | 2013-05-17 | 2014-12-08 | 株式会社東芝 | 異物検出装置および非接触電力伝送装置 |
JP2017070062A (ja) * | 2015-09-29 | 2017-04-06 | トヨタ自動車株式会社 | 送電回路および受電回路 |
KR102005945B1 (ko) * | 2019-02-01 | 2019-10-01 | (주)그린파워 | 무정전 멀티 페일오버 기능이 구비된 무선 전력전송장치 |
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CN114803331A (zh) | 2022-07-29 |
KR102290659B1 (ko) | 2021-08-19 |
JP7313417B2 (ja) | 2023-07-24 |
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