JP2022096579A - 電子黒体空洞及び二次電子検出装置 - Google Patents
電子黒体空洞及び二次電子検出装置 Download PDFInfo
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 159
- 239000002041 carbon nanotube Substances 0.000 claims description 127
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- C01B32/00—Carbon; Compounds thereof
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- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/10—Scattering devices; Absorbing devices; Ionising radiation filters
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
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Abstract
Description
101、2011 内面
102、2012 空洞
103、2013 開口部
104、2014、2022 多孔炭素材料層
202 二次電子検出素子
2021 二次電子プローブ
2023 基板
2024 試験ユニット
2025 導線
Claims (5)
- 内面と、空洞と、開口部と、を含む電子黒体空洞であって、
前記空洞は、前記内面によって囲まれ形成され、
前記開口部は、電子ビームが前記空洞に入るために使用され、
前記空洞の前記内面に第一多孔炭素材料層が設置され、
前記第一多孔炭素材料層は複数の第一炭素材料粒子を含み、
複数の前記第一炭素材料粒子の間に微小な間隙があり、複数の前記第一炭素材料粒子間の間隙はナノメートルスケールまたはマイクロメートルスケールであることを特徴とする電子黒体空洞。 - 前記第一炭素材料粒子はカーボンファイバー、カーボンマイクロワイヤー、カーボンナノチューブ、カーボンナノボール、カーボンミクロボールのいずれか一種または多種であることを特徴とする、請求項1に記載の電子黒体空洞。
- 前記第一多孔炭素材料層はカーボンナノチューブアレイ或いはカーボンナノチューブネットワーク構造体であることを特徴とする、請求項1に記載の電子黒体空洞。
- 請求項1~3の任意の前記電子黒体空洞と、二次電子検出要素と、を含む二次電子検出装置であって、前記二次電子検出要素は前記電子黒体空洞の中に設置されることを特徴とする二次電子検出装置。
- 二次電子プローブを含み、前記二次電子プローブは第二多孔炭素材料層を含み、前記第二多孔炭素材料層は前記第一多孔炭素材料層と絶縁して設置され、前記第二多孔炭素材料層は複数の第二炭素材料粒子間を含み、複数の第二炭素材料粒子間にナノメートルまたはマイクロメートルの間隙があることを特徴とする、請求項4に記載の二次電子検出装置。
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CN202011497833.5A CN114644335B (zh) | 2020-12-17 | 2020-12-17 | 电子黑体腔体及二次电子探测装置 |
CN202011497833.5 | 2020-12-17 |
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JP2022096579A true JP2022096579A (ja) | 2022-06-29 |
JP7164131B2 JP7164131B2 (ja) | 2022-11-01 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS58115383A (ja) * | 1981-12-29 | 1983-07-09 | Shimadzu Corp | 反射電子検出器 |
JP2005032542A (ja) * | 2003-07-11 | 2005-02-03 | Mie Tlo Co Ltd | 電子反射抑制材及びその製造方法 |
JP2018147764A (ja) * | 2017-03-07 | 2018-09-20 | 日本電子株式会社 | 走査電子顕微鏡 |
JP2020009779A (ja) * | 2016-08-02 | 2020-01-16 | 松定プレシジョン株式会社 | 荷電粒子線装置 |
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US6374150B2 (en) * | 1998-07-30 | 2002-04-16 | Applied Materials, Inc. | Method and apparatus for monitoring and/or end point detecting a process |
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US6700127B2 (en) * | 2002-01-09 | 2004-03-02 | Biomed Solutions Llc | Point source for producing electrons beams |
US7119028B1 (en) * | 2003-10-29 | 2006-10-10 | The United States Of America As Represented By The Secretary Of The Navy | Surface imprinted films with carbon nanotubes |
CN101239712B (zh) | 2007-02-09 | 2010-05-26 | 清华大学 | 碳纳米管薄膜结构及其制备方法 |
CN101314464B (zh) | 2007-06-01 | 2012-03-14 | 北京富纳特创新科技有限公司 | 碳纳米管薄膜的制备方法 |
CN101823688B (zh) * | 2009-03-02 | 2014-01-22 | 清华大学 | 碳纳米管复合材料及其制备方法 |
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JP5934965B2 (ja) * | 2012-04-26 | 2016-06-15 | 国立研究開発法人理化学研究所 | 電子線装置 |
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JP5903465B2 (ja) | 2014-03-31 | 2016-04-13 | ツィンファ ユニバーシティ | カーボンナノチューブアレイの転移方法及びカーボンナノチューブ構造体の製造方法 |
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- 2021-04-08 US US17/225,702 patent/US11527335B2/en active Active
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58115383A (ja) * | 1981-12-29 | 1983-07-09 | Shimadzu Corp | 反射電子検出器 |
JP2005032542A (ja) * | 2003-07-11 | 2005-02-03 | Mie Tlo Co Ltd | 電子反射抑制材及びその製造方法 |
JP2020009779A (ja) * | 2016-08-02 | 2020-01-16 | 松定プレシジョン株式会社 | 荷電粒子線装置 |
JP2018147764A (ja) * | 2017-03-07 | 2018-09-20 | 日本電子株式会社 | 走査電子顕微鏡 |
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CN114644335A (zh) | 2022-06-21 |
US11527335B2 (en) | 2022-12-13 |
US20220199279A1 (en) | 2022-06-23 |
JP7164131B2 (ja) | 2022-11-01 |
TW202226309A (zh) | 2022-07-01 |
TWI766542B (zh) | 2022-06-01 |
CN114644335B (zh) | 2023-07-18 |
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