JP2022083412A - 基板処理システム - Google Patents
基板処理システム Download PDFInfo
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- JP2022083412A JP2022083412A JP2021184746A JP2021184746A JP2022083412A JP 2022083412 A JP2022083412 A JP 2022083412A JP 2021184746 A JP2021184746 A JP 2021184746A JP 2021184746 A JP2021184746 A JP 2021184746A JP 2022083412 A JP2022083412 A JP 2022083412A
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- exhaust
- exhaust pipe
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- 239000000758 substrate Substances 0.000 title claims abstract description 115
- 238000012545 processing Methods 0.000 title claims abstract description 104
- 238000000034 method Methods 0.000 claims abstract description 149
- 230000008569 process Effects 0.000 claims abstract description 149
- 239000010909 process residue Substances 0.000 claims abstract description 12
- 238000007789 sealing Methods 0.000 claims description 10
- 238000007865 diluting Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 126
- 238000012423 maintenance Methods 0.000 description 22
- 239000000126 substance Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 230000009977 dual effect Effects 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000007774 longterm Effects 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 231100000331 toxic Toxicity 0.000 description 3
- 230000002588 toxic effect Effects 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 231100000419 toxicity Toxicity 0.000 description 2
- 230000001988 toxicity Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000000979 retarding effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/005—Protection or supervision of installations of gas pipelines, e.g. alarm
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/02—Preventing, monitoring, or locating loss
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Vapour Deposition (AREA)
- Photoreceptors In Electrophotography (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Weting (AREA)
Abstract
Description
11:第1の方向
12:第2の方向
100:基板処理システム
110:工程チューブ
111:排気ポート
115:基板ボート
120:排気モジュール
121:排気管
121a:第1の排気管
121b:第2の排気管
122:気密ケース
122a:第1のケーシング部
122b:第2のケーシング部
123:局所排気部
124:漏れ感知部
125:接続部
125a:第1のフランジ
125b:第2のフランジ
125c:シール部材
125d:蛇腹
126:漏れガス希釈部
127:真空センサー部
130:下チャンバー
140:ガス供給モジュール
150:制御モジュール
Claims (14)
- 基板に対する処理空間を与える工程チューブと、
前記工程チューブの排気ポートに接続されて、前記処理空間内の工程残渣を外部に排気する排気モジュールと、
を備え、
前記排気モジュールは、
前記排気ポートに接続される排気管と、
前記排気管の少なくとも一部を収める気密ケースと、
前記気密ケースに配設され、前記気密ケースの内部を排気する局所排気部と、
を備える基板処理システム。 - 前記排気モジュールは、前記気密ケースに配設されて前記排気管の排ガスの漏れを感知する漏れ感知部をさらに備える請求項1に記載の基板処理システム。
- 前記排気モジュールは、前記排気管と前記工程チューブの排気ポートとを接続する接続部をさらに備える請求項1に記載の基板処理システム。
- 前記接続部は、
前記工程チューブに配設される第1のフランジと、
前記排気管の一方の端に配設される第2のフランジと、
前記第1のフランジと前記第2のフランジとの間に配設されるシール部材と、
を備える請求項3に記載の基板処理システム。 - 前記接続部は、伸縮性を有する蛇腹をさらに備える請求項4に記載の基板処理システム。
- 前記排気管は、前記排気ポートに接続されて第1の方向に延びる第1の排気管を備え、
前記気密ケースは、前記第1の排気管を収める第1のケーシング部を備える請求項1に記載の基板処理システム。 - 前記工程チューブの下部に配設される下チャンバーをさらに備え、
前記排気管は、前記第1の排気管に接続されて下方に延びる第2の排気管をさらに備え、
前記気密ケースは、前記下チャンバーと離間し、前記第2の排気管を収める第2のケーシング部をさらに備える請求項6に記載の基板処理システム。 - 複数枚の基板が多段に積載されて、前記工程チューブに収められる基板ボートをさらに備える請求項1に記載の基板処理システム。
- 前記工程チューブは、複数から構成されて前記排気管の延在方向と交差する方向に並べられ、
前記排気モジュールは、各前記工程チューブにそれぞれ配設される請求項1に記載の基板処理システム。 - 各前記排気モジュールの排気管は、互いに並ぶように配設される請求項9に記載の基板処理システム。
- 各前記工程チューブにそれぞれ配設され、互いに対称的に配置される複数のガス供給モジュールをさらに備える請求項9に記載の基板処理システム。
- 各前記排気モジュールの少なくとも一部は、前記複数のガス供給モジュールの間に配置される請求項11に記載の基板処理システム。
- 前記複数のガス供給モジュールと前記排気モジュールは、少なくとも部分的に並ぶように配置される請求項11に記載の基板処理システム。
- 前記排気モジュールは、前記局所排気部と接続されて漏れた排ガスを希釈する漏れガス希釈部をさらに備える請求項1に記載の基板処理システム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020200159061A KR102418948B1 (ko) | 2020-11-24 | 2020-11-24 | 기판 처리 시스템 |
KR10-2020-0159061 | 2020-11-24 |
Publications (2)
Publication Number | Publication Date |
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JP2022083412A true JP2022083412A (ja) | 2022-06-03 |
JP7304395B2 JP7304395B2 (ja) | 2023-07-06 |
Family
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JP2021184746A Active JP7304395B2 (ja) | 2020-11-24 | 2021-11-12 | 基板処理システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220165588A1 (ja) |
JP (1) | JP7304395B2 (ja) |
KR (1) | KR102418948B1 (ja) |
CN (1) | CN114551289A (ja) |
TW (1) | TWI804057B (ja) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000150387A (ja) * | 1998-11-18 | 2000-05-30 | Applied Materials Inc | 配管系構造及び配管系ユニット |
JP2004335994A (ja) * | 2002-11-08 | 2004-11-25 | Cypress Semiconductor Corp | 高融点金属側壁の代わりにシリコン側壁を酸化させてゲート導体の側壁表面を選択的に酸化する炉システムおよび方法 |
KR20050035449A (ko) * | 2003-10-13 | 2005-04-18 | 삼성전자주식회사 | 반도체 소자 제조 설비 |
KR20060134465A (ko) * | 2005-06-22 | 2006-12-28 | 삼성전자주식회사 | 저압 화학기상 증착설비의 배기장치 |
JP2007242791A (ja) * | 2006-03-07 | 2007-09-20 | Hitachi Kokusai Electric Inc | 基板処理装置 |
KR20080023940A (ko) * | 2006-09-12 | 2008-03-17 | 삼성전자주식회사 | 가스배관 및 이를 구비한 반도체 제조설비 |
JP2019135776A (ja) * | 2019-03-27 | 2019-08-15 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法および記録媒体 |
JP2019195049A (ja) * | 2018-05-03 | 2019-11-07 | ユ−ジーン テクノロジー カンパニー.リミテッド | 基板処理システム |
Family Cites Families (6)
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JP3468577B2 (ja) * | 1994-04-14 | 2003-11-17 | 東京エレクトロン株式会社 | 熱処理装置 |
JP4633269B2 (ja) * | 2001-01-15 | 2011-02-16 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |
KR100989149B1 (ko) | 2006-01-27 | 2010-10-20 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 |
WO2007111351A1 (ja) * | 2006-03-28 | 2007-10-04 | Hitachi Kokusai Electric Inc. | 半導体装置の製造方法 |
JP5967845B2 (ja) * | 2012-07-27 | 2016-08-10 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法およびプログラム |
CN109075070A (zh) * | 2016-06-07 | 2018-12-21 | 株式会社国际电气 | 基板处理装置、炉口部以及半导体装置的制造方法及程序 |
-
2020
- 2020-11-24 KR KR1020200159061A patent/KR102418948B1/ko active IP Right Grant
-
2021
- 2021-11-09 US US17/522,897 patent/US20220165588A1/en active Pending
- 2021-11-12 JP JP2021184746A patent/JP7304395B2/ja active Active
- 2021-11-18 TW TW110142854A patent/TWI804057B/zh active
- 2021-11-23 CN CN202111394603.0A patent/CN114551289A/zh active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000150387A (ja) * | 1998-11-18 | 2000-05-30 | Applied Materials Inc | 配管系構造及び配管系ユニット |
JP2004335994A (ja) * | 2002-11-08 | 2004-11-25 | Cypress Semiconductor Corp | 高融点金属側壁の代わりにシリコン側壁を酸化させてゲート導体の側壁表面を選択的に酸化する炉システムおよび方法 |
KR20050035449A (ko) * | 2003-10-13 | 2005-04-18 | 삼성전자주식회사 | 반도체 소자 제조 설비 |
KR20060134465A (ko) * | 2005-06-22 | 2006-12-28 | 삼성전자주식회사 | 저압 화학기상 증착설비의 배기장치 |
JP2007242791A (ja) * | 2006-03-07 | 2007-09-20 | Hitachi Kokusai Electric Inc | 基板処理装置 |
KR20080023940A (ko) * | 2006-09-12 | 2008-03-17 | 삼성전자주식회사 | 가스배관 및 이를 구비한 반도체 제조설비 |
JP2019195049A (ja) * | 2018-05-03 | 2019-11-07 | ユ−ジーン テクノロジー カンパニー.リミテッド | 基板処理システム |
JP2019135776A (ja) * | 2019-03-27 | 2019-08-15 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法および記録媒体 |
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JP7304395B2 (ja) | 2023-07-06 |
KR20220071667A (ko) | 2022-05-31 |
CN114551289A (zh) | 2022-05-27 |
US20220165588A1 (en) | 2022-05-26 |
KR102418948B1 (ko) | 2022-07-11 |
TWI804057B (zh) | 2023-06-01 |
TW202224076A (zh) | 2022-06-16 |
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