JP2022077986A - 赤外線カットフィルター構造 - Google Patents
赤外線カットフィルター構造 Download PDFInfo
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- JP2022077986A JP2022077986A JP2021180130A JP2021180130A JP2022077986A JP 2022077986 A JP2022077986 A JP 2022077986A JP 2021180130 A JP2021180130 A JP 2021180130A JP 2021180130 A JP2021180130 A JP 2021180130A JP 2022077986 A JP2022077986 A JP 2022077986A
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- JP
- Japan
- Prior art keywords
- cut filter
- infrared cut
- refractive index
- glass substrate
- multilayer film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 claims abstract description 54
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 239000000463 material Substances 0.000 claims abstract description 26
- 230000003287 optical effect Effects 0.000 claims abstract description 18
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 claims description 2
- 239000002356 single layer Substances 0.000 claims description 2
- 238000002834 transmittance Methods 0.000 abstract description 16
- 238000010521 absorption reaction Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 239000000470 constituent Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 241001464837 Viridiplantae Species 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
- G02B5/282—Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0694—Halides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
- G02B5/287—Interference filters comprising deposited thin solid films comprising at least one layer of organic material
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B11/00—Filters or other obturators specially adapted for photographic purposes
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Inorganic Chemistry (AREA)
- Optical Filters (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
20 第1多層膜
21 第2多層膜
Claims (9)
- ガラス基板と、
前記ガラス基板の上側面に設置され、複数の高屈折率材料及び複数の低屈折率材料が交互に堆積されて形成され、入射角0度及び30度について900nm~1100nmの波長範囲内の光の光学密度がOD3~OD7である第1多層膜と、
前記ガラス基板の下側面に設置され、複数の高屈折率材料及び複数の低屈折率材料が交互に堆積されて形成され、700nm~900nmの波長範囲内の光線の光学密度がOD3~OD6である第2多層膜と、
を含む赤外線カットフィルター構造。 - 前記ガラス基板は、白ガラスである請求項1に記載の赤外線カットフィルター構造。
- 前記ガラス基板は、青ガラスである請求項1に記載の赤外線カットフィルター構造。
- 前記ガラス基板は、白ガラス上に一層の赤外線を吸収する有機膜層をコーティングした青系ガラス基板である請求項1に記載の赤外線カットフィルター構造。
- 第1多層膜の高屈折率材料は、Ti3O5、TiO2、Ta2O5又はNb2O5のいずれか1つである請求項1に記載の赤外線カットフィルター構造。
- 第1多層膜の低屈折率材料は、SiO2又はMgF2のいずれか1つである請求項1に記載の赤外線カットフィルター構造。
- 第2多層膜の高屈折率材料は、Ti3O5、TiO2、Ta2O5又はNb2O5のいずれか1つである請求項1に記載の赤外線カットフィルター構造。
- 前記第2多層膜の低屈折率材料は、SiO2又はMgF2のいずれか1つである請求項1に記載の赤外線カットフィルター構造。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW109135981A TWI752677B (zh) | 2020-11-12 | 2020-11-12 | 紅外截止濾光片結構 |
TW109135981 | 2020-11-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022077986A true JP2022077986A (ja) | 2022-05-24 |
JP7295198B2 JP7295198B2 (ja) | 2023-06-20 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2021180130A Active JP7295198B2 (ja) | 2020-11-12 | 2021-11-04 | 赤外線カットフィルター構造 |
Country Status (5)
Country | Link |
---|---|
US (2) | US11480720B2 (ja) |
JP (1) | JP7295198B2 (ja) |
CN (2) | CN114488376A (ja) |
DE (1) | DE102021128589A1 (ja) |
TW (1) | TWI752677B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108897085A (zh) * | 2018-08-06 | 2018-11-27 | 信阳舜宇光学有限公司 | 滤光片及包含该滤光片的红外图像传感系统 |
Citations (3)
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JP2017062479A (ja) * | 2011-06-06 | 2017-03-30 | 旭硝子株式会社 | 光学フィルタおよび固体撮像素子 |
WO2017051867A1 (ja) * | 2015-09-25 | 2017-03-30 | 旭硝子株式会社 | 光学フィルタおよび撮像装置 |
JP2020173294A (ja) * | 2019-04-08 | 2020-10-22 | Jsr株式会社 | 光学フィルターおよびその用途 |
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TW557439B (en) | 2000-05-08 | 2003-10-11 | Mitac Technology Corp | Method for activating specific mechanism of computer |
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JP5741283B2 (ja) | 2010-12-10 | 2015-07-01 | 旭硝子株式会社 | 赤外光透過フィルタ及びこれを用いた撮像装置 |
TW201235762A (en) * | 2011-02-23 | 2012-09-01 | Asia Optical Co Inc | Infrared cut filter |
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-
2020
- 2020-11-12 TW TW109135981A patent/TWI752677B/zh active
-
2021
- 2021-08-19 US US17/406,364 patent/US11480720B2/en active Active
- 2021-10-29 CN CN202111270010.3A patent/CN114488376A/zh active Pending
- 2021-10-29 CN CN202122622697.4U patent/CN216485612U/zh active Active
- 2021-11-03 DE DE102021128589.5A patent/DE102021128589A1/de active Pending
- 2021-11-04 JP JP2021180130A patent/JP7295198B2/ja active Active
-
2022
- 2022-09-16 US US17/933,034 patent/US20230028949A1/en active Pending
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JP2020173294A (ja) * | 2019-04-08 | 2020-10-22 | Jsr株式会社 | 光学フィルターおよびその用途 |
Also Published As
Publication number | Publication date |
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CN114488376A (zh) | 2022-05-13 |
JP7295198B2 (ja) | 2023-06-20 |
TW202219556A (zh) | 2022-05-16 |
TWI752677B (zh) | 2022-01-11 |
US20220146723A1 (en) | 2022-05-12 |
US20230028949A1 (en) | 2023-01-26 |
CN216485612U (zh) | 2022-05-10 |
DE102021128589A1 (de) | 2022-05-12 |
US11480720B2 (en) | 2022-10-25 |
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