JP2022076841A - 搬送車 - Google Patents
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- JP2022076841A JP2022076841A JP2020187454A JP2020187454A JP2022076841A JP 2022076841 A JP2022076841 A JP 2022076841A JP 2020187454 A JP2020187454 A JP 2020187454A JP 2020187454 A JP2020187454 A JP 2020187454A JP 2022076841 A JP2022076841 A JP 2022076841A
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- 230000003028 elevating effect Effects 0.000 claims description 72
- 230000032258 transport Effects 0.000 claims description 53
- 230000033001 locomotion Effects 0.000 claims description 23
- 230000007704 transition Effects 0.000 claims description 8
- 230000007423 decrease Effects 0.000 claims description 7
- 238000012546 transfer Methods 0.000 description 37
- 239000000758 substrate Substances 0.000 description 14
- 230000005540 biological transmission Effects 0.000 description 13
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- 238000000034 method Methods 0.000 description 4
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
Description
搬送車の第1の実施形態について、図面(図1~図8、図24)を参照して説明する。
搬送車の第2の実施形態について、図面(図9~図13)を参照して説明する。以下では、本実施形態の搬送車について、第1の実施形態との相違点を中心に説明する。特に明記しない点については、第1の実施形態と同様であり、同一の符号を付して詳細な説明は省略する。
搬送車の第3の実施形態について、図面(図14~図18)を参照して説明する。以下では、本実施形態の搬送車について、第2の実施形態との相違点を中心に説明する。特に明記しない点については、第2の実施形態と同様であり、同一の符号を付して詳細な説明は省略する。
搬送車の第4の実施形態について、図面(図19~図23)を参照して説明する。以下では、本実施形態の搬送車について、第1の実施形態との相違点を中心に説明する。特に明記しない点については、第1の実施形態と同様であり、同一の符号を付して詳細な説明は省略する。
次に、搬送車のその他の実施形態について説明する。
以下、上記において説明した搬送車の概要について説明する。
2:移動経路
10:本体部
20:保持装置
21:支持部
22:支持面
22a:第1支持面
22b:第2支持面
23:当接部
30:傾斜領域
31:第1傾斜領域
32:第2傾斜領域
41:第1水平領域
42:第2水平領域
50:昇降装置
60:対象領域
71:昇降駆動部
72:保持駆動部
90:物品
90b:側面
90c:底面
91:被保持部
91a:被支持面
92:開口部
A:第1方向
A1:第1方向第1側
A2:第1方向第2側
B:第2方向
B1:第2方向第1側
B2:第2方向第2側
C1:第1姿勢
C2:第2姿勢
D1:第1傾斜方向
D2:第2傾斜方向
V1:上方
V2:下方
ΔA:第1幅
Claims (13)
- 物品を搬送する搬送車であって、
移動経路に沿って移動する本体部と、前記物品を保持する保持装置と、前記保持装置を前記本体部に対して昇降させる昇降装置と、を備え、
前記物品は、当該物品の底面と平行に配置される面であって、下方を向く被支持面が形成された被保持部を備え、
前記保持装置は、前記被支持面を下方から支持する支持面をそれぞれ備えた一対の支持部と、一対の前記支持部を第1方向に互いに接近及び離間させる保持駆動部と、を備え、
前記被保持部の前記第1方向の幅を第1幅として、
前記保持駆動部は、一対の前記支持部の間隔を前記第1幅よりも大きくするように離間させた第1姿勢と、一対の前記支持部の間隔を前記第1幅よりも小さくするように接近させた第2姿勢と、に一対の前記支持部を駆動し、
一対の前記支持部を前記第1姿勢とすると共に、一対の前記支持部のそれぞれの少なくとも一部が前記被保持部よりも下方に位置し且つ一対の前記支持部の間に前記被保持部が位置するように一対の前記支持部を配置した状態から、一対の前記支持部を前記第2姿勢とする動作を姿勢変更動作として、
少なくとも前記保持装置が前記姿勢変更動作を実行することで、一対の前記支持部のそれぞれの前記支持面が前記被支持面に対して下方から接する保持状態が実現され、
一対の前記支持部は、前記保持状態で前記被支持面を水平面に対して傾斜させて支持するように構成されている、搬送車。 - 平面視で前記第1方向に直交する方向を第2方向とし、前記第2方向の一方側を第2方向第1側として、
前記支持面は、前記第2方向第1側へ向かうに従って下方へ向かう第1傾斜方向に傾斜する傾斜領域を備えている、請求項1に記載の搬送車。 - 一対の前記支持部のそれぞれは、前記第2方向第1側から前記被保持部に当接する当接部を更に備えている、請求項2に記載の搬送車。
- 一対の前記支持部のそれぞれにおいて、前記第1方向における他方の前記支持部に近づく側を第1方向第1側として、
前記傾斜領域における少なくとも一部の領域は、前記第1方向第1側へ向かうに従って下方へ向かう第2傾斜方向にも傾斜している、請求項2又は3に記載の搬送車。 - 前記支持面は、前記傾斜領域に対して前記第1方向第1側に、水平面に沿う第1水平領域を備えている、請求項4に記載の搬送車。
- 前記第1方向第1側とは反対側を第1方向第2側とし、前記第2方向第1側とは反対側を第2方向第2側として、
前記傾斜領域における少なくとも前記第2方向の中央部に対して前記第2方向第2側の領域は、前記第1方向第1側から前記第1方向第2側へ向かうに従って、前記第1傾斜方向及び前記第2傾斜方向の双方に傾斜する第1傾斜領域と、前記第1傾斜方向に傾斜すると共に前記第2傾斜方向に傾斜しない第2傾斜領域とを順に備えている、請求項5に記載の搬送車。 - 前記第1方向第1側とは反対側を第1方向第2側として、
前記傾斜領域における前記第1傾斜方向及び前記第2傾斜方向の双方に傾斜している領域は、前記第1方向第1側から前記第1方向第2側へ向かうに従って、水平面に対する傾斜角度が次第に大きくなった後、当該傾斜角度が次第に小さくなるような曲面状に形成されている、請求項4から6のいずれか一項に記載の搬送車。 - 前記支持面は、前記傾斜領域に対して前記第2方向第1側に、水平面に沿う第2水平領域を備えている、請求項2から7のいずれか一項に記載の搬送車。
- 一対の前記支持部の一方が備える前記支持面を第1支持面とし、一対の前記支持部の他方が備える前記支持面を第2支持面として、
前記第1支持面は、前記第2支持面よりも上方に配置されている、請求項1に記載の搬送車。 - 一対の前記支持部のそれぞれにおいて、前記第1方向における他方の前記支持部に近づく側を第1方向第1側として、
前記第1支持面は、前記第1方向第1側へ向かうに従って下方へ向かう方向に傾斜する対象領域を備えている、請求項9に記載の搬送車。 - 前記第1方向第1側とは反対側を第1方向第2側として、
前記対象領域は、前記第1方向第1側から前記第1方向第2側へ向かうに従って、水平面に対する傾斜角度が次第に大きくなった後、当該傾斜角度が次第に小さくなるような曲面状に形成されている、請求項10に記載の搬送車。 - 前記昇降装置は、前記保持装置を昇降させる昇降駆動部を備え、
前記保持装置が前記姿勢変更動作を実行することで、一対の前記支持部のそれぞれの前記支持面が前記被支持面に対して下方から対向する保持可能状態が実現され、その後、前記昇降装置が前記昇降駆動部により前記保持装置を上昇させることで、前記保持状態が実現され、
前記保持装置が昇降される期間に、前記保持可能状態と前記保持状態との間の状態遷移に伴い前記物品の姿勢が変化する第1期間と、前記保持状態において前記保持装置が昇降する第2期間とが含まれ、
前記昇降駆動部は、前記第1期間における前記保持装置の昇降速度を、前記第2期間における前記保持装置の昇降速度よりも低くする、請求項1から11のいずれか一項に記載の搬送車。 - 前記物品は、側面に開口部を有する容器であり、
前記保持装置は、前記開口部が斜め上方を向く姿勢で前記物品を保持する、請求項1から12のいずれか一項に記載の搬送車。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020187454A JP7306364B2 (ja) | 2020-11-10 | 2020-11-10 | 搬送車 |
TW110141355A TW202226431A (zh) | 2020-11-10 | 2021-11-05 | 搬送車 |
KR1020210152046A KR20220063740A (ko) | 2020-11-10 | 2021-11-08 | 반송차 |
CN202111325741.3A CN114455263A (zh) | 2020-11-10 | 2021-11-10 | 输送车 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020187454A JP7306364B2 (ja) | 2020-11-10 | 2020-11-10 | 搬送車 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022076841A true JP2022076841A (ja) | 2022-05-20 |
JP7306364B2 JP7306364B2 (ja) | 2023-07-11 |
Family
ID=81406580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2020187454A Active JP7306364B2 (ja) | 2020-11-10 | 2020-11-10 | 搬送車 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7306364B2 (ja) |
KR (1) | KR20220063740A (ja) |
CN (1) | CN114455263A (ja) |
TW (1) | TW202226431A (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11154700A (ja) * | 1997-11-21 | 1999-06-08 | Toshiba Corp | 基板運搬具 |
JP2006213216A (ja) * | 2005-02-04 | 2006-08-17 | Daifuku Co Ltd | 搬送車 |
JP2009176854A (ja) * | 2008-01-23 | 2009-08-06 | Seiko Epson Corp | 基板収納カセット |
US20190229003A1 (en) * | 2018-01-20 | 2019-07-25 | Boris Kesil | Overhead Transportation System for Transporting Objects between Multiple Work Stations |
KR20200050973A (ko) * | 2017-09-06 | 2020-05-12 | 가부시키가이샤 다이후쿠 | 반송차, 및 반송 설비 |
-
2020
- 2020-11-10 JP JP2020187454A patent/JP7306364B2/ja active Active
-
2021
- 2021-11-05 TW TW110141355A patent/TW202226431A/zh unknown
- 2021-11-08 KR KR1020210152046A patent/KR20220063740A/ko unknown
- 2021-11-10 CN CN202111325741.3A patent/CN114455263A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11154700A (ja) * | 1997-11-21 | 1999-06-08 | Toshiba Corp | 基板運搬具 |
JP2006213216A (ja) * | 2005-02-04 | 2006-08-17 | Daifuku Co Ltd | 搬送車 |
JP2009176854A (ja) * | 2008-01-23 | 2009-08-06 | Seiko Epson Corp | 基板収納カセット |
KR20200050973A (ko) * | 2017-09-06 | 2020-05-12 | 가부시키가이샤 다이후쿠 | 반송차, 및 반송 설비 |
US20190229003A1 (en) * | 2018-01-20 | 2019-07-25 | Boris Kesil | Overhead Transportation System for Transporting Objects between Multiple Work Stations |
Also Published As
Publication number | Publication date |
---|---|
JP7306364B2 (ja) | 2023-07-11 |
KR20220063740A (ko) | 2022-05-17 |
CN114455263A (zh) | 2022-05-10 |
TW202226431A (zh) | 2022-07-01 |
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