JP2022050485A - 高アスペクト構造からのデブリ除去 - Google Patents
高アスペクト構造からのデブリ除去 Download PDFInfo
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Images
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/72—Repair or correction of mask defects
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7049—Technique, e.g. interferometric
- G03F9/7053—Non-optical, e.g. mechanical, capacitive, using an electron beam, acoustic or thermal waves
- G03F9/7061—Scanning probe microscopy, e.g. AFM, scanning tunneling microscopy
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N15/1456—Electro-optical investigation, e.g. flow cytometers without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
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- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
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- G01Q80/00—Applications, other than SPM, of scanning-probe techniques
Abstract
Description
本特許出願は、2007年9月17日出願の米国特許出願第11/898,836号(米国特許第8,287,653号として交付された)の継続出願である、2012年10月15日出願の米国特許出願第13/652,114号(米国特許第8,696,818号として交付された)の分割出願である、2014年2月28日出願の米国特許出願第14/193,725号の一部継続出願である、2016年1月29日出願の同時係属中の米国特許出願第15/011,411号の一部継続出願であり、本特許出願の優先利益を主張する。これら全ては、援用により全体が本明細書に組み込まれる。
本開示は一般に、ナノ加工プロセスに関する。より詳細には、本開示は、ナノ加工プロセス中及び/又はナノ加工プロセス後のデブリ除去に関する。更に、本開示のデブリ除去処理は、基板に対する何らかの異物の除去に適用することができる。
G(p,T)=U+pV-TS
として与えられるギブズ自由エネルギーであり、
ここで、
U=内部エネルギー
p=圧力
V=体積
T=温度、及び
S=エントロピーである。
dG=-P*dl+γ*dA
ここで、
γ=表面エネルギー密度[J/m2]、及び
A=表面積[m2]
18 基板
102 基板支持組立体
104 チップ支持組立体
106 基部
108 固定具
110 基板ステージ組立体
112 x方向
114 y方向
116 z方向
118 アクチュエータ
120 第1ステージ
122 第2ステージ
124 第1アクチュエータ
126 第2アクチュエータ
130 チップステージ組立体
132 チップカンチレバー
134 アクチュエータ
136 コントローラ
138 手動ユーザ入力
140 メモリ
142 第1パッチ
144 第2パッチ
200 デブリ回収及び計測装置
202 計測システム
204 エネルギー源
206 エネルギー検出器
208 入射エネルギービーム
210 試料エネルギービーム
Claims (15)
- 走査型プローブ顕微鏡(SPM)チップを使用して、粒子の組成を特定する方法であって、
前記粒子を前記SPMチップに移送するステップと、
照射源からの第1の入射する照射を前記SPMチップに照射するステップと、
前記第1の入射する照射によって引き起こされた第1の試料照射を照射検出器により検出するステップと、
前記第1の試料照射に応答した前記照射検出器からの第1の信号に基づいて、前記SPMチップと前記照射源及び前記照射検出器のうちの少なくとも1つとの間に相対移動を生じさせるステップと、
を含む、方法。 - 前記第1の信号に基づいて前記第1の試料照射の第1の周波数領域スペクトルを生成するステップと、
前記第1の周波数領域スペクトルからバックグラウンド周波数領域スペクトルを差し引くことによって第2の周波数領域スペクトルを生成するステップと、
前記第2の周波数領域スペクトルに基づいて前記SPMチップと前記照射源及び前記照射検出器のうちの少なくとも1つとの間に相対移動を生じさせるステップと、
を更に含む、請求項1に記載の方法。 - 前記SPMチップが実質的に汚染物質を含まない場合に、前記SPMチップの照射に対する前記照射検出器の応答に基づいて前記バックグラウンド周波数領域スペクトルを生成するステップを更に含む、請求項2に記載の方法。
- 前記照射源からの第2の入射する照射を前記SPMチップに照射するステップと、
前記第2の入射する照射によって引き起こされた第2の試料照射を前記照射検出器により検出するステップと、
前記第2試料照射に応答した前記照射検出器からの第2の信号に基づいて、前記SPMチップと前記照射源及び前記照射検出器のうちの少なくとも1つとの間に相対移動を生じさせるステップと、
を更に含む、請求項1に記載の方法。 - 前記第2の信号と前記第1の信号との間の差違に基づいて、前記SPMチップと前記照射源及び前記照射検出器のうちの少なくとも1つとの間に相対移動を生じさせるステップを更に含む、請求項4に記載の方法。
- 前記照射源からの前記第1の入射する照射が、X線、可視光、赤外光、紫外光、電子ビーム、及びレーザのうちの少なくとも1つである、請求項1に記載の方法。
- 前記照射源からの前記第2の入射する照射が、X線、可視光、赤外光、紫外光、電子ビーム、及びレーザのうちの少なくとも1つである、請求項4に記載の方法。
- 前記第2の入射する照射は、前記第1の入射する照射とは異なるタイプの照射である、請求項7に記載の方法。
- 前記第1の試料照射は、前記第1の入射する照射が前記SPMチップと相互作用することによって生成される、請求項1に記載の方法。
- 前記第1の試料照射は、前記第1の入射する照射が前記SPMチップ上に配置されたデブリと相互作用することによって生成される、請求項1に記載の方法。
- 前記照射源からの前記第1の入射する照射の強度又は周波数を調整するステップを更に含む、請求項1に記載の方法。
- 前記照射源からの前記第2の入射する照射の強度又は周波数を調整するステップを更に含む、請求項4に記載の方法。
- 基板から除去された粒子の組成を特定するための方法であって、
前記基板から走査プローブ顕微鏡(SPM)チップに粒子を移送するステップと、
照射源からの第1の入射する照射を前記粒子に照射するステップと、
照射検出器にて前記粒子から前記第1の入射する照射によって引き起こされる第1の試料照射を受けるステップと、
を含む、方法。 - 前記粒子からの前記第1の試料照射は、前記粒子が前記SPMチップ上に配置されている間に前記照射検出器によって受け取られる、請求項13に記載の方法。
- 前記SPMチップから、粒子回収器上に定められた計測位置を有する該粒子回収器に前記粒子を移送するステップを更に含み、前記粒子からの前記第1の試料照射は、前記粒子が前記計測位置上に配置されている間に前記照射検出器によって受け取られる、請求項13に記載の方法。
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Citations (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08254817A (ja) * | 1994-12-27 | 1996-10-01 | Siemens Ag | ホトマスクをクリーニングする方法および装置 |
JPH08278315A (ja) * | 1995-04-04 | 1996-10-22 | Mitsubishi Electric Corp | 走査プローブ顕微鏡の使用方法 |
US5824470A (en) * | 1995-05-30 | 1998-10-20 | California Institute Of Technology | Method of preparing probes for sensing and manipulating microscopic environments and structures |
JP2002503345A (ja) * | 1997-06-27 | 2002-01-29 | ザ ガバメント オブ ザ ユナイテッド ステイツ オブ アメリカ アズ リプリゼンティッド バイ ザ セクレタリー オブ ザ デパートメント オブ ヘルス アンド ヒューマン サービシーズ | レーザ捕獲顕微解剖のための凸形状接着性フィルムシステム |
US6353221B1 (en) * | 1999-01-29 | 2002-03-05 | Veeco Instruments Inc. | Method and apparatus for cleaning a tip of a probe of a probe-based measuring instrument |
JP2002243594A (ja) * | 2001-02-14 | 2002-08-28 | Mitsubishi Electric Corp | サンプリング用治具及びそれを用いた赤外分光測定法 |
JP2005043373A (ja) * | 2003-07-25 | 2005-02-17 | Waters Investment Ltd | 熱重量分析装置のオートサンプラ用密封サンプル・パン |
JP2005515645A (ja) * | 2002-01-18 | 2005-05-26 | フォームファクター,インコーポレイテッド | テストプローブの洗浄装置および方法 |
US20050151385A1 (en) * | 2004-01-05 | 2005-07-14 | Kellar Autumn | Self-cleaning adhesive structure and methods |
US20050208304A1 (en) * | 2003-02-21 | 2005-09-22 | California Institute Of Technology | Coatings for carbon nanotubes |
JP2005326250A (ja) * | 2004-05-14 | 2005-11-24 | Sumitomo Electric Ind Ltd | プローブ用クリーニングシート及びクリーニング方法 |
CN1733596A (zh) * | 2004-10-22 | 2006-02-15 | 中国科学院上海应用物理研究所 | 分离并再放置纳米颗粒的方法 |
JP2006513048A (ja) * | 2002-12-09 | 2006-04-20 | ザ ユニバーシティ オブ ノース カロライナ アット チャペル ヒル | ナノ構造を含む材料を集めるおよび分類する方法および関連する物品 |
JP2006339472A (ja) * | 2005-06-03 | 2006-12-14 | Matsushita Electric Ind Co Ltd | プローブカード触針のクリーニング装置およびクリーニング方法 |
US20070035724A1 (en) * | 2003-07-10 | 2007-02-15 | Yissum Research Development Company Of The Hebrew University Of Jerusalem | Nanoparticles functionalized probes and methods for preparing such probes |
WO2007126141A1 (ja) * | 2006-04-28 | 2007-11-08 | University Of Yamanashi | エレクトロスプレーによるイオン化方法および装置 |
JP2007298858A (ja) * | 2006-05-02 | 2007-11-15 | Hoya Corp | マスクブランク用基板の製造方法、マスクブランクの製造方法、及び露光用マスクの製造方法、並びに、マスクブランク、及び露光用マスク |
JP2008145242A (ja) * | 2006-12-08 | 2008-06-26 | Sii Nanotechnology Inc | 原子間力顕微鏡の加工用ダイヤモンド探針の観察方法及び加工方法 |
JP2008209544A (ja) * | 2007-02-26 | 2008-09-11 | Sii Nanotechnology Inc | フォトマスク上の異物の組成分析方法 |
JP2009006378A (ja) * | 2007-06-29 | 2009-01-15 | Sii Nanotechnology Inc | 微細加工方法及び微細加工装置 |
JP2010170019A (ja) * | 2009-01-26 | 2010-08-05 | Toshiba Corp | リソグラフィ原版の異物除去方法及びリソグラフィ原版の製造方法 |
JP2010539714A (ja) * | 2007-09-17 | 2010-12-16 | レイヴ,エルエルシー | 高アスペクト構造における破片除去 |
US20110303062A1 (en) * | 2008-06-18 | 2011-12-15 | Rave Llc | Method for Fabricating High Aspect Ratio Nanostructures |
JP2013068786A (ja) * | 2011-09-22 | 2013-04-18 | Toppan Printing Co Ltd | フォトマスクの洗浄方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6827979B2 (en) * | 1999-01-07 | 2004-12-07 | Northwestern University | Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
US6545492B1 (en) * | 1999-09-20 | 2003-04-08 | Europaisches Laboratorium Fur Molekularbiologie (Embl) | Multiple local probe measuring device and method |
US7770231B2 (en) * | 2007-08-02 | 2010-08-03 | Veeco Instruments, Inc. | Fast-scanning SPM and method of operating same |
JP2009160689A (ja) * | 2008-01-07 | 2009-07-23 | Sii Nanotechnology Inc | 走査型プローブ顕微鏡を用いた異物除去方法 |
DE102011079382B4 (de) * | 2011-07-19 | 2020-11-12 | Carl Zeiss Smt Gmbh | Verfahren und Vorrichtung zum Analysieren und zum Beseitigen eines Defekts einer EUV Maske |
-
2017
- 2017-05-10 TW TW106115392A patent/TWI770024B/zh active
- 2017-05-10 TW TW111122279A patent/TWI829197B/zh active
- 2017-05-19 KR KR1020170062373A patent/KR102448873B1/ko active IP Right Grant
- 2017-05-22 DE DE202017007361.7U patent/DE202017007361U1/de active Active
- 2017-05-22 JP JP2017100802A patent/JP7244986B2/ja active Active
- 2017-05-22 EP EP17172136.8A patent/EP3272432B1/en active Active
- 2017-05-22 EP EP23191761.8A patent/EP4254065A3/en active Pending
- 2017-05-22 PL PL17172136.8T patent/PL3272432T3/pl unknown
-
2021
- 2021-12-27 JP JP2021211903A patent/JP2022050485A/ja active Pending
-
2023
- 2023-11-10 JP JP2023192195A patent/JP2023184753A/ja active Pending
Patent Citations (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08254817A (ja) * | 1994-12-27 | 1996-10-01 | Siemens Ag | ホトマスクをクリーニングする方法および装置 |
JPH08278315A (ja) * | 1995-04-04 | 1996-10-22 | Mitsubishi Electric Corp | 走査プローブ顕微鏡の使用方法 |
US5824470A (en) * | 1995-05-30 | 1998-10-20 | California Institute Of Technology | Method of preparing probes for sensing and manipulating microscopic environments and structures |
JP2002503345A (ja) * | 1997-06-27 | 2002-01-29 | ザ ガバメント オブ ザ ユナイテッド ステイツ オブ アメリカ アズ リプリゼンティッド バイ ザ セクレタリー オブ ザ デパートメント オブ ヘルス アンド ヒューマン サービシーズ | レーザ捕獲顕微解剖のための凸形状接着性フィルムシステム |
US6353221B1 (en) * | 1999-01-29 | 2002-03-05 | Veeco Instruments Inc. | Method and apparatus for cleaning a tip of a probe of a probe-based measuring instrument |
JP2002243594A (ja) * | 2001-02-14 | 2002-08-28 | Mitsubishi Electric Corp | サンプリング用治具及びそれを用いた赤外分光測定法 |
JP2005515645A (ja) * | 2002-01-18 | 2005-05-26 | フォームファクター,インコーポレイテッド | テストプローブの洗浄装置および方法 |
JP2006513048A (ja) * | 2002-12-09 | 2006-04-20 | ザ ユニバーシティ オブ ノース カロライナ アット チャペル ヒル | ナノ構造を含む材料を集めるおよび分類する方法および関連する物品 |
US20050208304A1 (en) * | 2003-02-21 | 2005-09-22 | California Institute Of Technology | Coatings for carbon nanotubes |
US20070035724A1 (en) * | 2003-07-10 | 2007-02-15 | Yissum Research Development Company Of The Hebrew University Of Jerusalem | Nanoparticles functionalized probes and methods for preparing such probes |
JP2005043373A (ja) * | 2003-07-25 | 2005-02-17 | Waters Investment Ltd | 熱重量分析装置のオートサンプラ用密封サンプル・パン |
US20050151385A1 (en) * | 2004-01-05 | 2005-07-14 | Kellar Autumn | Self-cleaning adhesive structure and methods |
JP2005326250A (ja) * | 2004-05-14 | 2005-11-24 | Sumitomo Electric Ind Ltd | プローブ用クリーニングシート及びクリーニング方法 |
CN1733596A (zh) * | 2004-10-22 | 2006-02-15 | 中国科学院上海应用物理研究所 | 分离并再放置纳米颗粒的方法 |
JP2006339472A (ja) * | 2005-06-03 | 2006-12-14 | Matsushita Electric Ind Co Ltd | プローブカード触針のクリーニング装置およびクリーニング方法 |
WO2007126141A1 (ja) * | 2006-04-28 | 2007-11-08 | University Of Yamanashi | エレクトロスプレーによるイオン化方法および装置 |
JP2007298858A (ja) * | 2006-05-02 | 2007-11-15 | Hoya Corp | マスクブランク用基板の製造方法、マスクブランクの製造方法、及び露光用マスクの製造方法、並びに、マスクブランク、及び露光用マスク |
JP2008145242A (ja) * | 2006-12-08 | 2008-06-26 | Sii Nanotechnology Inc | 原子間力顕微鏡の加工用ダイヤモンド探針の観察方法及び加工方法 |
JP2008209544A (ja) * | 2007-02-26 | 2008-09-11 | Sii Nanotechnology Inc | フォトマスク上の異物の組成分析方法 |
JP2009006378A (ja) * | 2007-06-29 | 2009-01-15 | Sii Nanotechnology Inc | 微細加工方法及び微細加工装置 |
JP2010539714A (ja) * | 2007-09-17 | 2010-12-16 | レイヴ,エルエルシー | 高アスペクト構造における破片除去 |
US20110303062A1 (en) * | 2008-06-18 | 2011-12-15 | Rave Llc | Method for Fabricating High Aspect Ratio Nanostructures |
JP2010170019A (ja) * | 2009-01-26 | 2010-08-05 | Toshiba Corp | リソグラフィ原版の異物除去方法及びリソグラフィ原版の製造方法 |
JP2013068786A (ja) * | 2011-09-22 | 2013-04-18 | Toppan Printing Co Ltd | フォトマスクの洗浄方法 |
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