JP2022043568A - 基板処理装置、基板処理方法及び記憶媒体 - Google Patents
基板処理装置、基板処理方法及び記憶媒体 Download PDFInfo
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Abstract
Description
図1に示される基板処理システム1は、ワークWに対し、感光性被膜の形成、当該感光性被膜の露光、及び当該感光性被膜の現像を施すシステムである。処理対象のワークWは、例えば基板、あるいは所定の処理が施されることで膜及び回路等が形成された状態の基板である。ワークWに含まれる基板は、一例として、シリコンを含むウェハである。ワークW(基板)は、円形に形成されていてもよい。処理対象のワークWは、ガラス基板、マスク基板、FPD(Flat Panel Display)などであってもよく、これらの基板等に所定の処理が施されて得られる中間体であってもよい。感光性被膜は、例えばレジスト膜である。
以下、基板処理装置の一例として、塗布・現像装置2の構成を説明する。図1及び図2に示されるように、塗布・現像装置2は、キャリアブロック4と、処理ブロック5と、インタフェースブロック6とを備える。
続いて、処理モジュール12の塗布ユニットU1について詳細に説明する。図3に示すように、処理モジュール12の塗布ユニットU1は、スピンチャック21(基板保持部)と、回転駆動部22と、支持ピン23と、ガイドリング25と、カップ26と、排気管28と、排液口29と、を含む。また、塗布ユニットU1は、第1処理液供給部31と、第2処理液供給部32と、第3処理液供給部33と、第4処理液供給部34と、を含む。
次に、処理モジュール12において行われる基板処理方法の一例を説明する。ここでは、液処理方法として、ワークWの周縁部にレジスト膜による塗布膜を形成する方法について説明する。図5は、周縁部に塗布膜Rが形成されたワークWの一例を示している。処理モジュール12では、ワークWの表面W1のうち周縁部以外にも塗布膜(レジスト膜)が形成されるが、周縁部以外の塗布膜については説明を省略する。ワークWの周縁部に塗布される塗布膜Rは、ワークWの表面W1のうちレジストパターンが形成される中央部分とは異なる領域を保護するために設けられる。
図6及び図7に示した基板処理方法の変更例について、図8を参照しながら説明する。変更例に係る基板処理方法も、図6に示したフロー図と同様の順序で処理を行うが、一部のステップにおける具体的な処理の仕方が、上述の基板処理方法とは異なる。以下の説明では、変更された箇所を中心に説明する。
次に、図9を参照しながら、基板処理方法におけるステップS03の変更例について説明する。ステップS03では、ワークWに付着した第1薬液R1の一部が除去されるが、除去の方法は、上記で説明したノズル31aによる第1溶剤F1の吐出方法に限定されない。
上記の基板処理装置(塗布・現像装置2)及び基板処理方法によれば、ワークWの裏面W2を含むワークWの周縁に第1薬液R1を供給した後に、ワークWの表面W1と側面W3の少なくとも一部とに付着した第1薬液R1が除去される。その後、ワークWの表面W1及び側面に第2薬液R2を供給した後に、第2溶剤F2によってワークW上に残留する第1薬液R1(第1薬液R1’)が除去される。このように、塗布膜Rを形成するための第2薬液R2を供給する際には、ワークWの裏面は第1薬液R1が付着した状態であるので、第2薬液R2がワークWの裏面に付着することが防がれるため、ワークWの表面W1と側面に塗布膜Rを形成することができる。そのため、ワークWの裏面に塗布膜が形成されることを防ぎながら、ワークWの表面W1の周縁と側面とを含む周縁部に対して塗布膜を形成することができる。
Claims (9)
- 基板の表面の周縁と側面とを含む周縁部に対して塗布膜を形成する基板処理装置であって、
前記基板を回転可能に保持するように構成された基板保持部と、
前記基板の裏面を含む前記基板の周縁に第1薬液を供給するように構成された第1薬液供給部と、
前記基板上に供給された前記第1薬液のうち、前記基板の表面と側面の少なくとも一部とに付着した前記第1薬液を除去する一部除去部と、
前記基板の表面及び側面に前記塗布膜を形成するための第2薬液を供給するように構成された第2薬液供給部と、
前記第2薬液が付着した前記基板上に残留する前記第1薬液を除去する第1薬液除去部と、
前記基板保持部と、前記第1薬液供給部と、前記一部除去部と、第2薬液供給部と、前記第1薬液除去部とを、制御する制御部と、
を含む、基板処理装置。 - 前記第1薬液供給部は、前記基板の裏面側に設けられて、前記基板の周縁に前記第1薬液を吐出する第1ノズルを含み、
前記第2薬液供給部は、前記基板の表面側に設けられて、前記基板の表面及び前記基板の側面に前記第2薬液を吐出する第2ノズルを含む、請求項1に記載の基板処理装置。 - 前記第1薬液供給部は、前記基板の表面側に設けられて、前記基板の周縁に前記第1薬液を吐出する第1ノズルを含み、
前記第2薬液供給部は、前記基板の表面側に設けられて、前記基板の表面及び前記基板の側面に前記第2薬液を吐出する第2ノズルを含む、請求項1に記載の基板処理装置。 - 前記一部除去部は、前記基板の表面側に設けられて、前記基板上に前記第1薬液を除去可能な溶剤を吐出する第3ノズルを含み、
前記制御部は、前記基板を回転させた状態で、前記基板上に前記溶剤を吐出するように、前記基板保持部及び前記一部除去部を制御する、請求項1~3のいずれか一項に記載の基板処理装置。 - 前記制御部は、前記基板を回転させた状態で前記第2薬液を供給するように、前記基板保持部及び前記第2薬液供給部を制御し、
前記一部除去部によって前記溶剤を供給する際の前記基板の回転数と比べて、前記第2薬液供給部によって前記第2薬液を供給する際の前記基板の回転数が小さい、請求項4に記載の基板処理装置。 - 前記第3ノズルは、前記基板上に前記溶剤を霧状に噴霧する、請求項4または5に記載の基板処理装置。
- 前記一部除去部は、前記基板保持部によって前記基板を回転した状態で、前記基板の表面及び側面に対して当接することで前記第1薬液を除去することが可能な除去部材を含む、請求項1~3のいずれか一項に記載の基板処理装置。
- 基板の表面の周縁と側面とを含む周縁部に対して塗布膜を形成する基板処理方法であって、
前記基板の裏面を含む前記基板の周縁に第1薬液を供給することと、
前記基板上に供給された前記第1薬液のうち、前記基板の表面と側面の少なくとも一部とに付着した前記第1薬液を除去することと、
前記基板の表面及び側面に前記塗布膜を形成するための第2薬液を供給することと、
前記第2薬液が付着した前記基板上に残留する前記第1薬液を除去することと、
を含む、基板処理方法。 - 請求項8に記載の方法を装置に実行させるためのプログラムを記憶した、コンピュータ読み取り可能な記憶媒体。
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