JP2022033032A - 基板搬送装置、基板処理装置、及び基板搬送方法 - Google Patents
基板搬送装置、基板処理装置、及び基板搬送方法 Download PDFInfo
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Abstract
Description
1700 ハンド
1742 ベース板
1744 安着板
1746 吸着ホール
1800 真空圧供給部
1900 制御部
Claims (20)
- 基板搬送装置において、
真空圧で基板を吸着固定する搬送ハンドと、
前記搬送ハンドに真空圧を供給する真空圧供給部と、
真空圧が前記搬送ハンドに供給又は遮断されるように前記真空圧供給部を制御する制御部と、を含み、
前記制御部は、
前記搬送ハンドが基板支持部材の上部に位置した状態で基板を前記基板支持部材にローディングするためのダウン動作中に真空圧を遮断する基板搬送装置。 - 前記真空圧供給部は、
真空圧ラインと、
前記真空圧ラインに設置され、前記制御部の制御信号によって作動される開閉バルブと、を含む請求項1に記載の基板搬送装置。 - 前記制御部が真空圧を遮断する時点は、
基板が前記基板支持部材に置かれる時点を基準に前記開閉バルブの作動の時、ディレイタイムを超過する請求項2に記載の基板搬送装置。 - 基板搬送装置において、
真空圧で基板を吸着固定する、そして互いに異なる高さに位置する搬送ハンドと、
前記搬送ハンドの各々に真空圧を供給する真空圧供給部と、
真空圧が前記搬送ハンドの各々に供給及び遮断されるように前記真空圧供給部を制御する制御部と、を含み、
前記制御部は、
前記搬送ハンドの真空圧オフ時点が基板支持部材から同一な高さで行われるように前記真空圧供給部を制御する基板搬送装置。 - 前記搬送ハンドは、真空圧のオフの後、移動距離が同一である請求項4に記載の基板搬送装置。
- 前記真空圧供給部は、
真空圧ラインと、
前記真空圧ラインに設置され、前記制御部の制御信号によって作動される開閉バルブと、を含む請求項4に記載の基板搬送装置。 - 前記搬送ハンドが真空圧のオフの後、ダウンされる移動時間は、
基板が前記基板支持部材に置かれる時点を基準に前記開閉バルブの作動の時、ディレイタイムを超過する請求項6に記載の基板搬送装置。 - 基板処理装置において、
基板が置かれる基板支持部材を有する工程チャンバーと、
前記基板支持部材に基板をローディングする基板搬送装置と、を含み、
前記基板搬送装置は、
真空圧で基板を吸着固定する、そして互いに異なる高さに位置する搬送ハンドを含み、
前記搬送ハンドは、前記基板支持部材から同一な高さで真空圧がオフされる基板処理装置。 - 前記基板搬送装置は、
前記搬送ハンドの各々に真空圧を供給する真空圧供給部と、
真空圧が前記搬送ハンドの各々に供給及び遮断されるように前記真空圧供給部を制御する制御部と、をさらに含み、
前記制御部は、
前記搬送ハンドの真空圧オフ時点が真空圧のオフの後、ダウンされる移動距離が同一な高さで前記真空圧供給部を制御する請求項8に記載の基板処理装置。 - 前記真空圧供給部は、
前記搬送ハンドの各々に連結された真空圧ラインに設置され、前記制御部の制御信号によって作動される開閉バルブを含み、
前記搬送ハンドが真空圧のオフの後、ダウンされる移動時間は、
基板が前記基板支持部材に置かれる時点を基準に前記開閉バルブの作動の時、ディレイタイムを超過する請求項9に記載の基板処理装置。 - 前記工程チャンバーでは、
エッジビーズ除去(edge bead removal)工程が行われる請求項8に記載の基板処理装置。 - 前記工程チャンバーでは、
エッジ露光(edge exposure of wafer)工程が行われる請求項8に記載の基板処理装置。 - 前記基板支持部材は、
スピンチャックと、
前記搬送ハンドから基板を引き受けて前記スピンチャックに置くリフトピンを含む請求項8に記載の基板処理装置。 - 真空圧で基板を支持している搬送ハンドが基板を前記基板支持部材にローディングするためにダウン移動する段階で、
前記基板を吸着する真空圧のオフ時点は、前記基板が前記基板支持部材に置かれる前のダウン移動中に行われる基板搬送方法。 - 前記ダウン移動する段階で真空圧のオフ時点は、
前記基板が前記基板支持部材に置かれる時点を基準に真空圧を遮断する開閉バルブの作動の時、ディレイタイムを超過する請求項14に記載の基板搬送方法。 - 互いに異なる高さに位置する搬送ハンドが基板を基板支持部材にローディングするためにダウン動作する段階で、
前記基板を吸着する真空圧のオフ時点は、真空圧のオフの後、ダウンされる移動距離が同一であるように前記基板支持部材から同一な高さで行われる基板搬送方法。 - 前記真空圧のオフ時点は、
前記基板が前記基板支持部材に置かれる時点を基準に真空圧を遮断する開閉バルブの作動の時、ディレイタイムを超過する請求項16に記載の基板搬送方法。 - 互いに異なる高さに提供される第1搬送ハンド及び第2搬送ハンドを有する基板搬送装置に基板を搬送し、
前記第1搬送ハンドは、第1基板を真空圧によって吸着して工程チャンバーの基板支持部材に搬送し、前記第2搬送ハンドは、第2基板を真空圧によって吸着して前記基板支持部材に搬送し、
前記第1搬送ハンドが前記基板支持部材の垂直上部でダウン動作によって前記基板支持部材に第1基板をローディングする時、前記基板支持部材から第1高さで前記真空圧をオフし、
前記第2搬送ハンドが前記基板支持部材の垂直上部でダウン動作によって前記基板支持部材に第2基板をローディングする時、前記基板支持部材から第2高さで前記真空圧をオフし、前記第1高さと前記第2高さは、互いに同一な高さである基板搬送方法。 - 前記基板支持部材は、
スピンチャックと、
前記搬送ハンドから基板を引き受けて前記スピンチャックに置くリフトピンをさらに含み、
前記第1高さと前記第2高さは、前記スピンチャックから突出された前記リフトピンの上端から高さである請求項18に記載の基板搬送方法。 - 前記工程チャンバーでは、
エッジビーズ除去(edge bead removal)工程又はエッジ露光(edge exposure of wafer)工程が行われる請求項18に記載の基板搬送方法。
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