JP2021535625A - オン抵抗が低減されたラテラルパワーデバイス - Google Patents
オン抵抗が低減されたラテラルパワーデバイス Download PDFInfo
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- JP2021535625A JP2021535625A JP2021535495A JP2021535495A JP2021535625A JP 2021535625 A JP2021535625 A JP 2021535625A JP 2021535495 A JP2021535495 A JP 2021535495A JP 2021535495 A JP2021535495 A JP 2021535495A JP 2021535625 A JP2021535625 A JP 2021535625A
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 320
- 239000002184 metal Substances 0.000 claims abstract description 320
- 229910000679 solder Inorganic materials 0.000 claims abstract description 50
- 239000004065 semiconductor Substances 0.000 claims abstract description 22
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 25
- 229910002601 GaN Inorganic materials 0.000 description 24
- 230000004888 barrier function Effects 0.000 description 15
- 238000000034 method Methods 0.000 description 14
- 239000000758 substrate Substances 0.000 description 14
- 230000008569 process Effects 0.000 description 10
- 239000012212 insulator Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- 229910016570 AlCu Inorganic materials 0.000 description 3
- 229910002704 AlGaN Inorganic materials 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910007637 SnAg Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Abstract
Description
110 第1の金属層
115 ソース金属バー
120 ドレイン金属バー
125A ビア
125B ビア
130 ビア
135 ソース金属バー
140 ドレイン金属バー
150 第3の金属層
155 ソース金属バー
160 ドレイン金属バー
165 誘電体膜
170 非導電層
175 はんだバンプ
175A はんだバンプ
175B はんだバンプ
180 バリア層
182 チャネル層
184 バッファ層
186 基板
190 絶縁体
194 ゲート層
198 ゲート電極
210 開口部
220 開口部
225 開口部
300 GaNトランジスタデバイス
350 第3の金属層
355 ソース金属バー
355A 広い部分
355B 狭い部分
360 ドレイン金属バー
360A 狭い部分
360B 広い部分
375A はんだバンプ
375B はんだバンプ
400 GaNトランジスタデバイス
410 第1の金属層
415 ソース金属バー
420 ドレイン金属バー
425A ビア
425B ビア
430 第2の金属層
435 ソース金属バー
440 ドレイン金属バー
450 第3の金属層
455 ソース金属バー
460 ドレイン金属バー
465 誘電体膜
470 非導電性層
475 はんだバンプ
475A はんだバンプ
475B はんだバンプ
480 バリア層
484 バッファ層
486 基板
490 絶縁体
494 ゲート層
498 ゲート電極
Claims (10)
- 1つ又は複数のゲート電極と、
前記1つ又は複数のゲート電極と交互配置された複数の第1のソースバー及び複数の第1のドレインバーを含む第1の金属層と、
誘電体によって前記第1の金属層から分離され、複数の第2のソースバー及び複数の第2のドレインバーを含む、第2の金属層であって、前記第1及び第2のソースバーが電気的に接続され、前記第1及び第2のドレインバーが電気的に接続された、第2の金属層と、
前記誘電体によって前記第2の金属層から分離され、複数の第3のソースバー及び複数の第3のドレインバーを含む、第3の金属層であって、前記第2及び第3のソースバーが電気的に接続され、前記第2及び第3のドレインバーが電気的に接続された、第3の金属層と、
前記第3のソースバーに電気的に接続された第1のはんだバンプと、
前記第3のドレインバーに電気的に接続された第2のはんだバンプであって、前記第1、第2及び第3の金属層、並びに、前記第1及び第2のはんだバンプが、複数の電流通路を含み、電流が前記複数の電気通路のうち、最小の抵抗を有する電気通路を通って流れることができるようになる、第2のはんだバンプと、
を備える、ラテラルパワー半導体デバイス。 - 前記第1及び第3の金属層が、互いに実質的に平行であり、前記第2の金属層が、前記第1及び第3の金属層に実質的に垂直である、請求項1に記載のラテラルパワー半導体デバイス。
- 前記第1及び第2のソースバーの幅が、前記第3のソースバーの幅よりも小さく、前記第1及び第2のドレインバーの幅が、前記第3のドレインバーの幅よりも小さい、請求項2に記載のラテラルパワー半導体デバイス。
- 前記第1及び第2の金属層が、互いに実質的に平行であり、前記第3の金属層が、前記第1及び第2の金属層に実質的に垂直である、請求項1に記載のラテラルパワー半導体デバイス。
- 前記第3のソースバーが、より広い部分及びより狭い部分を含み、前記第3のドレインバーが、より広い部分及びより狭い部分を含み、前記第3のソースバーの前記より広い部分が、前記第3のドレインバーの前記より狭い部分と交互配置され、前記第3のソースバーの前記より狭い部分が、前記第3のドレインバーの前記より広い部分と交互配置される、請求項4に記載のラテラルパワー半導体デバイス。
- 前記第1のはんだバンプが、前記第3のソースバーの前記より広い部分に電気的に接続され、前記第2のはんだバンプが、前記第3のドレインバーの前記より広い部分に電気的に接続される、請求項5に記載のラテラルパワー半導体デバイス。
- 前記第3のソースバー及び前記第3のドレインバーが、閾値距離だけ離れている、請求項5に記載のラテラルパワー半導体デバイス。
- 前記閾値距離が、2マイクロメートル離れている、請求項7に記載のラテラルパワー半導体デバイス。
- 前記第3の金属層と前記第1及び第2のはんだバンプとの間に非導電層をさらに含み、前記非導電層が、前記第1のはんだバンプを前記第3のドレインバーから分離し、前記第2のはんだバンプを前記第3のソースバーから分離する、請求項1に記載のラテラルパワー半導体デバイス。
- 前記第1及び第2のはんだバンプが、アンダーバンプ金属からなる、請求項1に記載のラテラルパワー半導体デバイス。
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PCT/US2019/048834 WO2020047270A1 (en) | 2018-08-29 | 2019-08-29 | Lateral power device with reduced on-resistance |
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CN105448998B (zh) * | 2010-10-12 | 2019-09-03 | 高通股份有限公司 | 集成电路芯片和垂直功率器件 |
JP5580230B2 (ja) * | 2011-02-28 | 2014-08-27 | パナソニック株式会社 | 半導体装置 |
US9006099B2 (en) | 2011-06-08 | 2015-04-14 | Great Wall Semiconductor Corporation | Semiconductor device and method of forming a power MOSFET with interconnect structure silicide layer and low profile bump |
US9443839B2 (en) * | 2012-11-30 | 2016-09-13 | Enpirion, Inc. | Semiconductor device including gate drivers around a periphery thereof |
EP2741324B1 (en) * | 2012-12-10 | 2018-10-31 | IMEC vzw | III nitride transistor with source connected heat-spreading plate and method of making the same |
US8928037B2 (en) * | 2013-02-28 | 2015-01-06 | Power Integrations, Inc. | Heterostructure power transistor with AlSiN passivation layer |
TWI577022B (zh) * | 2014-02-27 | 2017-04-01 | 台達電子工業股份有限公司 | 半導體裝置與應用其之半導體裝置封裝體 |
TWI515902B (zh) | 2013-09-10 | 2016-01-01 | 台達電子工業股份有限公司 | 半導體裝置 |
US10236236B2 (en) * | 2013-09-10 | 2019-03-19 | Delta Electronics, Inc. | Heterojunction semiconductor device for reducing parasitic capacitance |
JP5669119B1 (ja) * | 2014-04-18 | 2015-02-12 | 株式会社パウデック | 半導体素子、電気機器、双方向電界効果トランジスタおよび実装構造体 |
KR102272382B1 (ko) * | 2014-11-21 | 2021-07-05 | 삼성전자주식회사 | 반도체 소자 |
US9324819B1 (en) | 2014-11-26 | 2016-04-26 | Delta Electronics, Inc. | Semiconductor device |
US10892337B2 (en) * | 2016-09-30 | 2021-01-12 | Intel Corporation | Backside source/drain replacement for semiconductor devices with metallization on both sides |
US9972571B1 (en) | 2016-12-15 | 2018-05-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Logic cell structure and method |
-
2019
- 2019-08-27 TW TW108130666A patent/TWI748233B/zh active
- 2019-08-29 WO PCT/US2019/048834 patent/WO2020047270A1/en unknown
- 2019-08-29 CN CN201980068467.0A patent/CN112913031A/zh active Pending
- 2019-08-29 EP EP19855368.7A patent/EP3844820A4/en active Pending
- 2019-08-29 US US16/555,564 patent/US11101349B2/en active Active
- 2019-08-29 JP JP2021535495A patent/JP2021535625A/ja active Pending
- 2019-08-29 KR KR1020217009126A patent/KR20210049891A/ko not_active Application Discontinuation
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EP3844820A1 (en) | 2021-07-07 |
TWI748233B (zh) | 2021-12-01 |
EP3844820A4 (en) | 2022-06-01 |
US20200075726A1 (en) | 2020-03-05 |
KR20210049891A (ko) | 2021-05-06 |
US11101349B2 (en) | 2021-08-24 |
WO2020047270A1 (en) | 2020-03-05 |
TW202025482A (zh) | 2020-07-01 |
CN112913031A (zh) | 2021-06-04 |
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