JP2021533275A - アーク放電を低減させた物理的気相堆積(pvd)チャンバ - Google Patents
アーク放電を低減させた物理的気相堆積(pvd)チャンバ Download PDFInfo
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- JP2021533275A JP2021533275A JP2021506995A JP2021506995A JP2021533275A JP 2021533275 A JP2021533275 A JP 2021533275A JP 2021506995 A JP2021506995 A JP 2021506995A JP 2021506995 A JP2021506995 A JP 2021506995A JP 2021533275 A JP2021533275 A JP 2021533275A
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- 238000005240 physical vapour deposition Methods 0.000 title claims description 23
- 238000010891 electric arc Methods 0.000 title description 4
- 238000000034 method Methods 0.000 claims abstract description 142
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 239000002245 particle Substances 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 238000010586 diagram Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 102
- 239000000463 material Substances 0.000 description 19
- 239000000356 contaminant Substances 0.000 description 5
- 238000005137 deposition process Methods 0.000 description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000010943 off-gassing Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- WYEMLYFITZORAB-UHFFFAOYSA-N boscalid Chemical compound C1=CC(Cl)=CC=C1C1=CC=CC=C1NC(=O)C1=CC=CN=C1Cl WYEMLYFITZORAB-UHFFFAOYSA-N 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/228—Gas flow assisted PVD deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32834—Exhausting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/332—Coating
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (15)
- 内部容積部を有するチャンバ本体と、
前記内部容積部に配置された基板支持体と、
前記内部容積部内に配置され、前記基板支持体に対向するターゲットと、
前記内部容積部に配置され、前記ターゲットを囲む上部部分および前記基板支持体を囲む下部部分を有するプロセスシールドであり、前記上部部分が、前記プロセスシールドと前記ターゲットとの間に間隙を画定するために、前記ターゲットの外径よりも大きい内径を有する、プロセスシールドと、
使用中に前記内部容積部からの粒子が前記間隙に入るのを実質的に防止するために、前記間隙を通してまたは前記間隙の前面開口を横切って前記内部容積部にガスを供給するためのガス入口と
を含むプロセスチャンバ。 - 前記チャンバ本体の底壁に隣接して配置された排気口をさらに含む、請求項1に記載のプロセスチャンバ。
- 前記排気口に結合されたポンプをさらに含む、請求項2に記載のプロセスチャンバ。
- 前記プロセスシールドと前記底壁との間に配置された第2のガス入口をさらに含む、請求項3に記載のプロセスチャンバ。
- 前記ガス入口が、第1のガス源に結合され、前記第2のガス入口が、前記第1のガス源から流体的に独立している第2のガス源に結合される、請求項4に記載のプロセスチャンバ。
- 前記第2のガス入口が、前記内部容積部内のガスを前記排気口の方に導くように構成される、請求項4に記載のプロセスチャンバ。
- 前記第2のガス入口が、前記ポンプの反対側の前記基板支持体の側に位置づけられる、請求項4に記載のプロセスチャンバ。
- 前記ガス入口が、前記プロセスシールドに配置される、請求項1〜7のいずれか1項に記載のプロセスチャンバ。
- 前記ガス入口が、前記プロセスシールドと前記ターゲットとの間に置かれた間隙を通して前記ガスを流すように構成される、請求項1〜7のいずれか1項に記載のプロセスチャンバ。
- 前記プロセスシールドが、一体成形金属本体を含む、請求項1〜7のいずれか1項に記載のプロセスチャンバ。
- 前記プロセスシールドが円筒状本体を有する、請求項1〜7のいずれか1項に記載のプロセスチャンバ。
- 基板を処理する方法であって、
プロセスチャンバの内部容積部内で基板に物理的気相堆積(PVD)プロセスを実行することであり、ターゲットの外側側壁およびプロセスシールドの内面が間隙を画定するように、前記プロセスシールドが前記内部容積部で前記ターゲットのまわりに配置される、実行することと、
前記内部容積部からの粒子が前記間隙に入るのを実質的に防止するために、第1のガス入口を介して、前記間隙を通してまたは前記間隙の前面開口を横切って、前記プロセスチャンバ内にガスを注入することと
を含む、方法。 - 前記プロセスチャンバから前記ガスを取り除くためにポンプを使用することをさらに含む、請求項12に記載の方法。
- 前記プロセスチャンバ内の前記ガスを前記ポンプの方に導くために、第2のガス入口を介して前記プロセスチャンバの下部部分の近くに前記ガスを追加として注入することをさらに含む、請求項13に記載の方法。
- 前記第1のガス入口が、前記プロセスシールドと前記ターゲットとの間に配置された間隙を通して前記ガスを流すように構成される、請求項12〜14のいずれか1項に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862717648P | 2018-08-10 | 2018-08-10 | |
US62/717,648 | 2018-08-10 | ||
US16/285,043 US11393665B2 (en) | 2018-08-10 | 2019-02-25 | Physical vapor deposition (PVD) chamber with reduced arcing |
US16/285,043 | 2019-02-25 | ||
PCT/US2019/044688 WO2020033236A1 (en) | 2018-08-10 | 2019-08-01 | Physical vapor deposition (pvd) chamber with reduced arcing |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021533275A true JP2021533275A (ja) | 2021-12-02 |
JPWO2020033236A5 JPWO2020033236A5 (ja) | 2022-08-05 |
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Application Number | Title | Priority Date | Filing Date |
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JP2021506995A Pending JP2021533275A (ja) | 2018-08-10 | 2019-08-01 | アーク放電を低減させた物理的気相堆積(pvd)チャンバ |
Country Status (6)
Country | Link |
---|---|
US (1) | US11393665B2 (ja) |
JP (1) | JP2021533275A (ja) |
KR (1) | KR20210031764A (ja) |
CN (1) | CN112585297B (ja) |
TW (1) | TW202018110A (ja) |
WO (1) | WO2020033236A1 (ja) |
Families Citing this family (1)
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CN113445017B (zh) * | 2021-06-01 | 2022-12-09 | 北京北方华创微电子装备有限公司 | 半导体腔室及半导体工艺设备 |
Citations (6)
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JPH11350118A (ja) * | 1998-06-12 | 1999-12-21 | Applied Materials Inc | 成膜装置 |
US20060037537A1 (en) * | 2003-06-26 | 2006-02-23 | Tokyo Electron Limited | Vacuum-processing chamber-shield and multi-chamber pumping method |
US20070173059A1 (en) * | 2005-11-25 | 2007-07-26 | Applied Materials, Inc. | Process kit components for titanium sputtering chamber |
JP2013122080A (ja) * | 2011-12-12 | 2013-06-20 | Ulvac Japan Ltd | スパッタリング装置 |
JP2016025219A (ja) * | 2014-07-22 | 2016-02-08 | 株式会社アルバック | 真空処理装置 |
JP2017122262A (ja) * | 2016-01-06 | 2017-07-13 | 株式会社アルバック | 成膜方法 |
Family Cites Families (11)
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FR2324755A1 (fr) * | 1975-09-19 | 1977-04-15 | Anvar | Dispositif de pulverisation cathodique de grande vitesse de depot |
JPH05247639A (ja) * | 1992-03-05 | 1993-09-24 | Fujitsu Ltd | スパッタ装置 |
US5487822A (en) * | 1993-11-24 | 1996-01-30 | Applied Materials, Inc. | Integrated sputtering target assembly |
JPH09111446A (ja) * | 1995-10-17 | 1997-04-28 | Applied Materials Inc | スパッタリング装置 |
JPH11302838A (ja) * | 1998-03-27 | 1999-11-02 | Applied Materials Inc | スパッタリング装置 |
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US20070056843A1 (en) * | 2005-09-13 | 2007-03-15 | Applied Materials, Inc. | Method of processing a substrate using a large-area magnetron sputtering chamber with individually controlled sputtering zones |
KR101150142B1 (ko) * | 2006-04-06 | 2012-06-11 | 어플라이드 머티어리얼스, 인코포레이티드 | 대형 기판 상에 아연 산화물 투명 전도성 산화물의 반응성 스퍼터링 |
JP2007277649A (ja) * | 2006-04-07 | 2007-10-25 | Nec Electronics Corp | 真空処理装置 |
US9865440B1 (en) | 2010-11-29 | 2018-01-09 | Seagate Technology Llc | Sputtering shield |
US9957601B2 (en) | 2013-03-15 | 2018-05-01 | Applied Materials, Inc. | Apparatus for gas injection in a physical vapor deposition chamber |
-
2019
- 2019-02-25 US US16/285,043 patent/US11393665B2/en active Active
- 2019-08-01 JP JP2021506995A patent/JP2021533275A/ja active Pending
- 2019-08-01 CN CN201980051491.3A patent/CN112585297B/zh active Active
- 2019-08-01 KR KR1020217006991A patent/KR20210031764A/ko not_active Application Discontinuation
- 2019-08-01 WO PCT/US2019/044688 patent/WO2020033236A1/en active Application Filing
- 2019-08-08 TW TW108128210A patent/TW202018110A/zh unknown
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JPH11350118A (ja) * | 1998-06-12 | 1999-12-21 | Applied Materials Inc | 成膜装置 |
US20060037537A1 (en) * | 2003-06-26 | 2006-02-23 | Tokyo Electron Limited | Vacuum-processing chamber-shield and multi-chamber pumping method |
US20070173059A1 (en) * | 2005-11-25 | 2007-07-26 | Applied Materials, Inc. | Process kit components for titanium sputtering chamber |
JP2013122080A (ja) * | 2011-12-12 | 2013-06-20 | Ulvac Japan Ltd | スパッタリング装置 |
JP2016025219A (ja) * | 2014-07-22 | 2016-02-08 | 株式会社アルバック | 真空処理装置 |
JP2017122262A (ja) * | 2016-01-06 | 2017-07-13 | 株式会社アルバック | 成膜方法 |
Also Published As
Publication number | Publication date |
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US20200051795A1 (en) | 2020-02-13 |
WO2020033236A1 (en) | 2020-02-13 |
KR20210031764A (ko) | 2021-03-22 |
CN112585297A (zh) | 2021-03-30 |
CN112585297B (zh) | 2024-04-16 |
US11393665B2 (en) | 2022-07-19 |
TW202018110A (zh) | 2020-05-16 |
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