JP2021530101A - 選択的二重層誘電体再成長を用いた完全な自己整合ビア - Google Patents
選択的二重層誘電体再成長を用いた完全な自己整合ビア Download PDFInfo
- Publication number
- JP2021530101A JP2021530101A JP2020571839A JP2020571839A JP2021530101A JP 2021530101 A JP2021530101 A JP 2021530101A JP 2020571839 A JP2020571839 A JP 2020571839A JP 2020571839 A JP2020571839 A JP 2020571839A JP 2021530101 A JP2021530101 A JP 2021530101A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric layer
- conductive
- layer
- dielectric
- conductive cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims abstract description 85
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000012545 processing Methods 0.000 claims abstract description 23
- 230000008569 process Effects 0.000 claims description 36
- 239000004065 semiconductor Substances 0.000 claims description 28
- 238000005530 etching Methods 0.000 claims description 26
- 239000003989 dielectric material Substances 0.000 claims description 24
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 238000011282 treatment Methods 0.000 claims description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 9
- 229910052707 ruthenium Inorganic materials 0.000 claims description 9
- 230000004888 barrier function Effects 0.000 claims description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 239000010937 tungsten Substances 0.000 claims description 7
- 229910017052 cobalt Inorganic materials 0.000 claims description 6
- 239000010941 cobalt Substances 0.000 claims description 6
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 319
- 235000012431 wafers Nutrition 0.000 description 27
- 239000000463 material Substances 0.000 description 20
- 238000000059 patterning Methods 0.000 description 12
- 238000010926 purge Methods 0.000 description 12
- 238000000151 deposition Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 9
- 229910044991 metal oxide Inorganic materials 0.000 description 9
- 150000004706 metal oxides Chemical class 0.000 description 9
- 238000001465 metallisation Methods 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 239000004020 conductor Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 239000002243 precursor Substances 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 230000005855 radiation Effects 0.000 description 6
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000005137 deposition process Methods 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 238000009832 plasma treatment Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- -1 Al 2 O 3 Chemical class 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 238000000921 elemental analysis Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- IYWJIYWFPADQAN-LNTINUHCSA-N (z)-4-hydroxypent-3-en-2-one;ruthenium Chemical compound [Ru].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O IYWJIYWFPADQAN-LNTINUHCSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- CUJRVFIICFDLGR-UHFFFAOYSA-N acetylacetonate Chemical compound CC(=O)[CH-]C(C)=O CUJRVFIICFDLGR-UHFFFAOYSA-N 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005352 clarification Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
- H01L21/76808—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures involving intermediate temporary filling with material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76816—Aspects relating to the layout of the pattern or to the size of vias or trenches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76831—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches, e.g. non-conductive sidewall liners
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76834—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers formation of thin insulating films on the sidewalls or on top of conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
- H01L21/76846—Layer combinations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/7685—Barrier, adhesion or liner layers the layer covering a conductive structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5226—Via connections in a multilevel interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76832—Multiple layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
- H01L21/76849—Barrier, adhesion or liner layers formed in openings in a dielectric the layer being positioned on top of the main fill metal
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Bipolar Transistors (AREA)
Abstract
Description
本出願は、2018年6月27日に出願された米国仮特許出願第62/690,838号明細書の利益を主張するものであり、この仮特許出願の内容全体が参照により本明細書に組み込まれる。
Claims (20)
- 基板を処理するための方法であって、
基板を提供するステップであって、前記基板は第1の誘電体層を含み、前記第1の誘電体層内には複数の導電性構造が形成され、前記第1の誘電体層の上面は前記導電性構造の上面と同じ高さである、ステップと、
前記導電性構造の上に導電性キャップ層を形成するステップであって、前記導電性キャップ層は、上面及び側壁を有して、前記導電性構造の上に選択的に配置される、ステップと、
前記第1の誘電体層の上に第2の誘電体層を形成するステップであって、前記第2の誘電体層は、前記導電性キャップ層の前記上面が覆われていない状態になり、前記導電性キャップ層の前記側壁が前記第2の誘電体層によって取り囲まれるように、前記第1の誘電体層の上に選択的に配置される、ステップと、
前記第2の誘電体層の上に第3の誘電体層を形成するステップであって、前記第3の誘電体層は、前記導電性キャップ層の前記上面が覆われていない状態になり、且つ前記第3の誘電体層の上面よりも低くなるように、前記第2の誘電体層の上に選択的に配置される、ステップと、
前記複数の導電性構造及び前記第3の誘電体層の上に第4の誘電体層を形成するステップと、
前記第4の誘電体層の内部に相互接続構造を形成するステップであって、前記相互接続構造はビア構造を含み、前記ビア構造は第1の部分及び第2の部分を有し、前記第1の部分は、前記導電性キャップ層の上に配置され、前記第1の部分の側壁は前記第3の誘電体層によって取り囲まれ、前記第2の部分は、前記第1の部分及び前記第3の誘電体層の上に配置される、ステップと
を含む方法。 - 前記導電性キャップ層は、前記第2の誘電体層が形成された後で、前記複数の導電性構造の上に選択的に堆積される、請求項1に記載の方法。
- 前記ビア構造の前記第2の部分は、トレンチ構造と前記ビア構造の前記第1の部分との間に配置され、前記ビア構造のビア抵抗を低減するように、前記ビア構造の前記第1の部分よりも大きな限界寸法を有する、請求項1に記載の方法。
- 前記導電性キャップ層は、ルテニウム、タングステン、ニッケル、又はコバルトのうちの少なくとも1つを含む、請求項1に記載の方法。
- 前記第2の誘電体層の高さは、前記第3の誘電体層の高さの少なくとも2倍である、請求項1に記載の方法。
- 前記第3の誘電体層は金属含有誘電体材料でできている、請求項1に記載の方法。
- 前記第2の誘電体層及び前記第3の誘電体層の両方が同じ堆積チャンバ内で形成される、請求項1に記載の方法。
- 前記導電性キャップ層、前記第2及び前記第3の誘電体層は、共通の処理ツールを使用することにより形成され、前記共通の処理ツールは、前記導電性キャップ層、前記第2の誘電体層、及び前記第3の誘電体層をそれぞれ形成するように構成されている1つ又は複数のチャンバを含む、請求項1に記載の方法。
- 前記第4の誘電体層の内部に前記相互接続構造を形成するステップは、更に、
エッチングプロセスを通じて前記第4の誘電体層内に相互接続開口部を形成するステップであって、前記相互接続開口部は、トレンチ開口部、及び前記トレンチ開口部の下に配置され、前記複数の導電性構造のうちの1つを露出させるビア開口部を含む、ステップと、
バリア層を形成して、前記相互接続開口部、及び前記複数の導電性構造のうちの前記覆われていない1つを覆うステップと、
導電層を前記バリア層の上に形成して前記相互接続開口部を充填するステップであって、前記導電層は、前記第4の誘電体層の上面を更に覆う、ステップと、
表面平坦化処理を実施して、前記第4の誘電体層の前記上面上の過剰な導電層を除去するステップと、を含む、請求項1に記載の方法。 - 前記第3の誘電体層は、前記相互接続開口部が前記第4の誘電体層内に形成されるときに、エッチング処理から前記第2の誘電体層を保護するように構成されている、請求項9に記載の方法。
- 前記第2の誘電体層が、前記導電性構造と前記相互接続構造との間の電気的短絡を防止するように、前記第2の誘電体層の高さは3nm〜15nmの範囲内である、請求項5に記載の方法。
- 半導体デバイスであって、
第1の誘電体層内に形成される複数の導電性構造であって、前記複数の導電性構造の上面及び前記第1の誘電体層の上面は、同一平面上にある、複数の導電性構造と、
上面及び側壁を有して、前記導電性構造の上に選択的に配置される導電性キャップ層と、
第2の誘電体層であって、前記導電性キャップ層の前記側壁が前記第2の誘電体層によって取り囲まれるように、前記第1の誘電体層の上に選択的に配置される、第2の誘電体層と、
第3の誘電体層であって、前記導電性キャップ層の上面が、前記第3の誘電体層の上面よりも低くなるように、前記第2の誘電体層の上に選択的に配置される、第3の誘電体層と、
前記複数の導電性構造及び前記第3の誘電体層の上に配置された第4の誘電体層と、
前記第4の誘電体層内に形成される相互接続構造であって、前記相互接続構造はトレンチ構造、及び前記トレンチ構造の下に配置され前記トレンチ構造に接続されるビア構造を含み、前記ビア構造は第1の部分及び第2の部分を有し、前記第1の部分は前記導電性キャップ層の上に配置され、前記第1の部分の側壁は前記第3の誘電体層によって取り囲まれ、前記第2の部分は前記第1の部分及び前記第3の誘電体層の上に配置される、相互接続構造と
を含む半導体デバイス。 - 前記ビア構造の前記第2の部分は、前記トレンチ構造と前記ビア構造の前記第1の部分との間に配置され、前記ビア構造のビア抵抗を低減するように、前記ビア構造の前記第1の部分よりも大きな限界寸法を有する、請求項12に記載の半導体デバイス。
- 前記ビア構造の前記第1の部分は、前記複数の導電性構造のうちの前記1つに電気的に結合されている、請求項12に記載の半導体デバイス。
- 前記導電性キャップ層は、ルテニウム、タングステン、ニッケル、又はコバルトのうちの少なくとも1つを含む、請求項12に記載の半導体デバイス。
- 前記第2の誘電体層の高さは、前記第3の誘電体層の高さの少なくとも2倍である、請求項12に記載の半導体デバイス。
- 前記第3の誘電体層は金属含有誘電体材料でできている、請求項12に記載の半導体デバイス。
- 半導体デバイスであって、
第1の誘電体層内に形成される第1の導電性構造であって、前記第1の導電性構造は、前記第1の誘電体層の上面から前記第1の誘電体層の中へと延びる、第1の導電性構造と、
上面及び側壁を有して、前記第1の導電性構造の上に選択的に配置される、導電性キャップ層と、
前記第1の誘電体層の上に選択的に配置される誘電体スタックであって、前記導電性キャップ層の前記側壁は前記誘電体スタックによって取り囲まれ、前記誘電体スタックの上面は前記導電性キャップ層の前記上面よりも高い、誘電体スタックと、
前記第1の導電性構造の上に形成される第2の導電性構造であって、前記第2の導電性構造は第1の部分及び第2の部分を有し、前記第1の部分は前記導電性キャップ層の上に配置され、前記第1の部分の側壁は前記誘電体スタックによって取り囲まれ、前記第2の部分は前記第1の部分及び前記誘電体スタックの上に配置され、前記第2の導電性構造の前記第2の部分は、前記第2の導電性構造の抵抗を低減するように、前記第2の導電性構造の前記第1の部分よりも大きな限界寸法を有する、第2の導電性構造と
を含む半導体デバイス。 - 前記誘電体スタックは、前記第1の誘電体層の上に配置された第2の誘電体層と、前記第2の誘電体層の上に配置された第3の誘電体層と、を含む、請求項18に記載の半導体デバイス。
- 前記第2の誘電体層の高さは、前記第3の誘電体層の高さの少なくとも2倍である、請求項19に記載の半導体デバイス。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862690838P | 2018-06-27 | 2018-06-27 | |
US62/690,838 | 2018-06-27 | ||
PCT/US2019/039260 WO2020006087A1 (en) | 2018-06-27 | 2019-06-26 | Fully self-aligned via with selective bilayer dielectric regrowth |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2021530101A true JP2021530101A (ja) | 2021-11-04 |
JPWO2020006087A5 JPWO2020006087A5 (ja) | 2022-03-07 |
JP7339481B2 JP7339481B2 (ja) | 2023-09-06 |
Family
ID=68987240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020571839A Active JP7339481B2 (ja) | 2018-06-27 | 2019-06-26 | 選択的二重層誘電体再成長を用いた完全な自己整合ビア |
Country Status (6)
Country | Link |
---|---|
US (2) | US11031287B2 (ja) |
JP (1) | JP7339481B2 (ja) |
KR (1) | KR20210014127A (ja) |
CN (1) | CN112368822B (ja) |
TW (1) | TWI816819B (ja) |
WO (1) | WO2020006087A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019182913A1 (en) * | 2018-03-20 | 2019-09-26 | Tokyo Electron Limited | Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using same |
US11121025B2 (en) * | 2018-09-27 | 2021-09-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Layer for side wall passivation |
US11515203B2 (en) | 2020-02-05 | 2022-11-29 | Tokyo Electron Limited | Selective deposition of conductive cap for fully-aligned-via (FAV) |
US11508572B2 (en) * | 2020-04-01 | 2022-11-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
US20220238323A1 (en) * | 2021-01-28 | 2022-07-28 | Tokyo Electron Limited | Method for selective deposition of dielectric on dielectric |
TWI825807B (zh) * | 2022-05-25 | 2023-12-11 | 南亞科技股份有限公司 | 具有插塞結構之半導體元件的製備方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030148618A1 (en) * | 2002-02-07 | 2003-08-07 | Applied Materials, Inc. | Selective metal passivated copper interconnect with zero etch stops |
US20060118962A1 (en) * | 2004-12-03 | 2006-06-08 | Huang Jui J | Damascene interconnect structure with cap layer |
US20160218034A1 (en) * | 2015-01-23 | 2016-07-28 | GlobalFoundries, Inc. | Methods for fabricating integrated circuits including back-end-of-the-line interconnect structures |
US9530691B1 (en) * | 2016-02-19 | 2016-12-27 | Globalfoundries Inc. | Methods, apparatus and system for forming a dielectric field for dual orientation self aligned vias |
US20170110397A1 (en) * | 2015-10-20 | 2017-04-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and apparatus for forming self-aligned via with selectively deposited etching stop layer |
US20180076027A1 (en) * | 2016-09-13 | 2018-03-15 | Tokyo Electron Limited | Selective metal oxide deposition using a self-assembled monolayer surface pretreatment |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6287961B1 (en) * | 1999-01-04 | 2001-09-11 | Taiwan Semiconductor Manufacturing Company | Dual damascene patterned conductor layer formation method without etch stop layer |
JP4910231B2 (ja) * | 2000-10-25 | 2012-04-04 | ソニー株式会社 | 半導体装置の製造方法 |
US20050082089A1 (en) * | 2003-10-18 | 2005-04-21 | Stephan Grunow | Stacked interconnect structure between copper lines of a semiconductor circuit |
TWI220774B (en) * | 2003-11-03 | 2004-09-01 | Univ Nat Sun Yat Sen | Method for patterning low dielectric constant film and method for manufacturing dual damascene structure |
KR100590205B1 (ko) * | 2004-01-12 | 2006-06-15 | 삼성전자주식회사 | 반도체 장치의 배선 구조체 및 그 형성 방법 |
US20070228571A1 (en) * | 2006-04-04 | 2007-10-04 | Chen-Hua Yu | Interconnect structure having a silicide/germanide cap layer |
KR100790452B1 (ko) * | 2006-12-28 | 2008-01-03 | 주식회사 하이닉스반도체 | 다마신 공정을 이용한 반도체 소자의 다층 금속배선형성방법 |
US7776743B2 (en) * | 2008-07-30 | 2010-08-17 | Tel Epion Inc. | Method of forming semiconductor devices containing metal cap layers |
KR100953736B1 (ko) * | 2009-07-27 | 2010-04-19 | 주식회사 아토 | 증착 장치 및 반도체 소자의 제조 방법 |
TWI424529B (zh) * | 2010-10-28 | 2014-01-21 | Macronix Int Co Ltd | 半導體結構及其製造方法 |
JP5665557B2 (ja) * | 2011-01-14 | 2015-02-04 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置の製造方法 |
US9269612B2 (en) * | 2011-11-22 | 2016-02-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Mechanisms of forming damascene interconnect structures |
US8803321B2 (en) * | 2012-06-07 | 2014-08-12 | International Business Machines Corporation | Dual damascene dual alignment interconnect scheme |
US8652962B2 (en) * | 2012-06-19 | 2014-02-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Etch damage and ESL free dual damascene metal interconnect |
US9583429B2 (en) * | 2013-11-14 | 2017-02-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structure and method of forming same |
US9659857B2 (en) * | 2013-12-13 | 2017-05-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor structure and method making the same |
DE102015114405A1 (de) * | 2015-08-28 | 2017-03-02 | Infineon Technologies Dresden Gmbh | Halbleitervorrichtung mit sich durch eine zwischenschicht erstreckenden kontaktstrukturen und herstellungsverfahren |
KR102616823B1 (ko) * | 2015-12-16 | 2023-12-22 | 삼성전자주식회사 | 반도체 장치 |
KR102449200B1 (ko) * | 2017-07-04 | 2022-09-30 | 삼성디스플레이 주식회사 | 클럭 배선을 포함하는 표시 장치 |
WO2019182913A1 (en) * | 2018-03-20 | 2019-09-26 | Tokyo Electron Limited | Self-aware and correcting heterogenous platform incorporating integrated semiconductor processing modules and method for using same |
-
2019
- 2019-06-26 KR KR1020207036487A patent/KR20210014127A/ko not_active Application Discontinuation
- 2019-06-26 CN CN201980042746.XA patent/CN112368822B/zh active Active
- 2019-06-26 US US16/453,473 patent/US11031287B2/en active Active
- 2019-06-26 JP JP2020571839A patent/JP7339481B2/ja active Active
- 2019-06-26 WO PCT/US2019/039260 patent/WO2020006087A1/en active Application Filing
- 2019-06-27 TW TW108122579A patent/TWI816819B/zh active
-
2021
- 2021-04-06 US US17/223,831 patent/US11705369B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030148618A1 (en) * | 2002-02-07 | 2003-08-07 | Applied Materials, Inc. | Selective metal passivated copper interconnect with zero etch stops |
US20060118962A1 (en) * | 2004-12-03 | 2006-06-08 | Huang Jui J | Damascene interconnect structure with cap layer |
US20160218034A1 (en) * | 2015-01-23 | 2016-07-28 | GlobalFoundries, Inc. | Methods for fabricating integrated circuits including back-end-of-the-line interconnect structures |
US20170110397A1 (en) * | 2015-10-20 | 2017-04-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and apparatus for forming self-aligned via with selectively deposited etching stop layer |
US9530691B1 (en) * | 2016-02-19 | 2016-12-27 | Globalfoundries Inc. | Methods, apparatus and system for forming a dielectric field for dual orientation self aligned vias |
US20180076027A1 (en) * | 2016-09-13 | 2018-03-15 | Tokyo Electron Limited | Selective metal oxide deposition using a self-assembled monolayer surface pretreatment |
Also Published As
Publication number | Publication date |
---|---|
JP7339481B2 (ja) | 2023-09-06 |
KR20210014127A (ko) | 2021-02-08 |
US20210249305A1 (en) | 2021-08-12 |
CN112368822A (zh) | 2021-02-12 |
US11705369B2 (en) | 2023-07-18 |
TW202006886A (zh) | 2020-02-01 |
WO2020006087A1 (en) | 2020-01-02 |
US11031287B2 (en) | 2021-06-08 |
TWI816819B (zh) | 2023-10-01 |
US20200006140A1 (en) | 2020-01-02 |
CN112368822B (zh) | 2023-09-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7339481B2 (ja) | 選択的二重層誘電体再成長を用いた完全な自己整合ビア | |
US8916472B2 (en) | Interconnect formation using a sidewall mask layer | |
KR101515278B1 (ko) | 금속의 접촉 저항을 줄이기 위한 방법 | |
US11676852B2 (en) | Patterning methods for semiconductor devices | |
US11984355B2 (en) | Method for manufacturing an interconnection structure having a bottom via spacer | |
US10784155B2 (en) | Multi-metal fill with self-align patterning | |
US11257673B2 (en) | Dual spacer metal patterning | |
KR20110081833A (ko) | 하드 마스크와 이중 노광에 의해 형성된 반도체 디바이스의 콘택과 비아들 | |
US20230386911A1 (en) | Improved contact resistance between via and conductive line | |
US11769691B2 (en) | Semiconductor device and formation method thereof | |
CN110931354B (zh) | 半导体结构以及半导体结构的制造方法 | |
US20230116440A1 (en) | Top via structure made with bi-layer template | |
US20180138050A1 (en) | Topographic planarization method for lithography process | |
US20240128084A1 (en) | Semiconductor device structure with patterns having coplanar bottom surfaces and method for preparing the same | |
US11011417B2 (en) | Method and structure of metal cut | |
US10170310B1 (en) | Method of forming patterned structure | |
TW202336841A (zh) | 積體電路裝置及其製造方法以及製造半導體裝置的方法 | |
TW202305876A (zh) | 斜向沉積及蝕刻製程 | |
CN113284792A (zh) | 半导体元件的形成方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220225 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220225 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230307 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230417 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230711 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20230719 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230719 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7339481 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |