JP2021529328A5 - - Google Patents

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Publication number
JP2021529328A5
JP2021529328A5 JP2021520898A JP2021520898A JP2021529328A5 JP 2021529328 A5 JP2021529328 A5 JP 2021529328A5 JP 2021520898 A JP2021520898 A JP 2021520898A JP 2021520898 A JP2021520898 A JP 2021520898A JP 2021529328 A5 JP2021529328 A5 JP 2021529328A5
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Japan
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constant
polarizer
incidence ellipsometer
specimen
velocity
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JP2021520898A
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Japanese (ja)
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JP7316355B2 (ja
JP2021529328A (ja
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Priority claimed from KR1020180081169A external-priority patent/KR102139988B1/ko
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JP2021520898A 2018-07-12 2019-07-03 垂直入射エリプソメータおよびこれを用いた試験片の光物性の測定方法 Active JP7316355B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2018-0081169 2018-07-12
KR1020180081169A KR102139988B1 (ko) 2018-07-12 2018-07-12 수직입사 타원계측기 및 이를 이용한 시편의 광물성 측정 방법
PCT/KR2019/008147 WO2020013517A1 (ko) 2018-07-12 2019-07-03 수직입사 타원계측기 및 이를 이용한 시편의 광물성 측정 방법

Publications (3)

Publication Number Publication Date
JP2021529328A JP2021529328A (ja) 2021-10-28
JP2021529328A5 true JP2021529328A5 (enExample) 2022-07-22
JP7316355B2 JP7316355B2 (ja) 2023-07-27

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JP2021520898A Active JP7316355B2 (ja) 2018-07-12 2019-07-03 垂直入射エリプソメータおよびこれを用いた試験片の光物性の測定方法

Country Status (6)

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US (1) US11493433B2 (enExample)
EP (1) EP3798608A4 (enExample)
JP (1) JP7316355B2 (enExample)
KR (1) KR102139988B1 (enExample)
CN (1) CN112469987B (enExample)
WO (1) WO2020013517A1 (enExample)

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JP7460080B2 (ja) * 2020-10-19 2024-04-02 浜松ホトニクス株式会社 光学特性評価装置および光学特性評価方法
CN113218635B (zh) * 2021-04-30 2023-02-28 重庆大学 一种非接触式矢量偏振光场测试系统
CN113588216B (zh) * 2021-08-02 2023-09-19 中国科学院光电技术研究所 一种偏振片光学零位快速高精度定标装置和方法
EP4141415A1 (en) * 2021-08-26 2023-03-01 Université de Strasbourg Device and method for polarimetric imaging
KR20230174618A (ko) * 2022-06-21 2023-12-28 삼성전자주식회사 영상 타원편광기 및 이를 이용한 정렬 오차 측정 방법
CN115265812A (zh) * 2022-07-22 2022-11-01 上海如海光电科技有限公司 一种基于Zynq的高通量光谱数据采集与传输装置及方法
KR102734584B1 (ko) * 2022-12-27 2024-11-25 중앙대학교 산학협력단 외부환경 차단을 위한 경통형 분광분석 시스템
US20250086358A1 (en) * 2023-09-12 2025-03-13 Google Llc Optical critical dimension metrology aided by deep learning
CN117889754B (zh) * 2024-03-15 2024-06-04 苏州大学 一种二维薄膜静态位移的测量装置及方法
CN118500338B (zh) * 2024-07-19 2024-09-17 江苏双奇地板有限公司 一种地板外形检测装置
CN119413729B (zh) * 2024-10-31 2025-11-21 华中科技大学 一种四光弹调制器型穆勒矩阵偏振系统的参数校准方法及系统
KR102944184B1 (ko) 2025-05-30 2026-03-27 동신공영주식회사 안전점검 및 진단을 위한 슈미트 해머 수직도 조절장치

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