EP3798608A4 - NORMAL INCIDENCE ELLIPSOMETER AND METHOD OF MEASUREMENT OF OPTICAL PROPERTIES OF A SAMPLE USING THE SAME - Google Patents

NORMAL INCIDENCE ELLIPSOMETER AND METHOD OF MEASUREMENT OF OPTICAL PROPERTIES OF A SAMPLE USING THE SAME Download PDF

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Publication number
EP3798608A4
EP3798608A4 EP19833613.3A EP19833613A EP3798608A4 EP 3798608 A4 EP3798608 A4 EP 3798608A4 EP 19833613 A EP19833613 A EP 19833613A EP 3798608 A4 EP3798608 A4 EP 3798608A4
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EP
European Patent Office
Prior art keywords
sample
same
optical properties
normal incidence
measuring optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP19833613.3A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP3798608A1 (en
Inventor
Yong Jai Cho
Won Chegal
Hyun Mo Cho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Research Institute of Standards and Science
Original Assignee
Korea Research Institute of Standards and Science
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Filing date
Publication date
Application filed by Korea Research Institute of Standards and Science filed Critical Korea Research Institute of Standards and Science
Publication of EP3798608A1 publication Critical patent/EP3798608A1/en
Publication of EP3798608A4 publication Critical patent/EP3798608A4/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/13—Moving of cuvettes or solid samples to or from the investigating station
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/023—Controlling conditions in casing
    • G01N2201/0231—Thermostating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0633—Directed, collimated illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/068—Optics, miscellaneous
    • G01N2201/0683—Brewster plate; polarisation controlling elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
EP19833613.3A 2018-07-12 2019-07-03 NORMAL INCIDENCE ELLIPSOMETER AND METHOD OF MEASUREMENT OF OPTICAL PROPERTIES OF A SAMPLE USING THE SAME Withdrawn EP3798608A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020180081169A KR102139988B1 (ko) 2018-07-12 2018-07-12 수직입사 타원계측기 및 이를 이용한 시편의 광물성 측정 방법
PCT/KR2019/008147 WO2020013517A1 (ko) 2018-07-12 2019-07-03 수직입사 타원계측기 및 이를 이용한 시편의 광물성 측정 방법

Publications (2)

Publication Number Publication Date
EP3798608A1 EP3798608A1 (en) 2021-03-31
EP3798608A4 true EP3798608A4 (en) 2022-02-09

Family

ID=69142874

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19833613.3A Withdrawn EP3798608A4 (en) 2018-07-12 2019-07-03 NORMAL INCIDENCE ELLIPSOMETER AND METHOD OF MEASUREMENT OF OPTICAL PROPERTIES OF A SAMPLE USING THE SAME

Country Status (6)

Country Link
US (1) US11493433B2 (enExample)
EP (1) EP3798608A4 (enExample)
JP (1) JP7316355B2 (enExample)
KR (1) KR102139988B1 (enExample)
CN (1) CN112469987B (enExample)
WO (1) WO2020013517A1 (enExample)

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JP7460080B2 (ja) * 2020-10-19 2024-04-02 浜松ホトニクス株式会社 光学特性評価装置および光学特性評価方法
CN113218635B (zh) * 2021-04-30 2023-02-28 重庆大学 一种非接触式矢量偏振光场测试系统
CN113588216B (zh) * 2021-08-02 2023-09-19 中国科学院光电技术研究所 一种偏振片光学零位快速高精度定标装置和方法
EP4141415A1 (en) * 2021-08-26 2023-03-01 Université de Strasbourg Device and method for polarimetric imaging
KR20230174618A (ko) * 2022-06-21 2023-12-28 삼성전자주식회사 영상 타원편광기 및 이를 이용한 정렬 오차 측정 방법
CN115265812A (zh) * 2022-07-22 2022-11-01 上海如海光电科技有限公司 一种基于Zynq的高通量光谱数据采集与传输装置及方法
KR102734584B1 (ko) * 2022-12-27 2024-11-25 중앙대학교 산학협력단 외부환경 차단을 위한 경통형 분광분석 시스템
US20250086358A1 (en) * 2023-09-12 2025-03-13 Google Llc Optical critical dimension metrology aided by deep learning
CN117889754B (zh) * 2024-03-15 2024-06-04 苏州大学 一种二维薄膜静态位移的测量装置及方法
CN118500338B (zh) * 2024-07-19 2024-09-17 江苏双奇地板有限公司 一种地板外形检测装置
CN119413729B (zh) * 2024-10-31 2025-11-21 华中科技大学 一种四光弹调制器型穆勒矩阵偏振系统的参数校准方法及系统
KR102944184B1 (ko) 2025-05-30 2026-03-27 동신공영주식회사 안전점검 및 진단을 위한 슈미트 해머 수직도 조절장치

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EP3035034A1 (de) * 2014-12-19 2016-06-22 Leibniz - Institut für Analytische Wissenschaften - ISAS - E.V. Anordnung zur erfassung von reflexions-anisotropie
US20180113069A1 (en) * 2015-03-13 2018-04-26 Korea Research Institute Of Standards And Science Achromatic rotating-element ellipsometer and method for measuring mueller-matrix elements of sample using the same

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EP3035034A1 (de) * 2014-12-19 2016-06-22 Leibniz - Institut für Analytische Wissenschaften - ISAS - E.V. Anordnung zur erfassung von reflexions-anisotropie
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Also Published As

Publication number Publication date
JP7316355B2 (ja) 2023-07-27
US11493433B2 (en) 2022-11-08
US20210181090A1 (en) 2021-06-17
CN112469987B (zh) 2024-09-13
KR102139988B1 (ko) 2020-07-31
KR20200007267A (ko) 2020-01-22
CN112469987A (zh) 2021-03-09
JP2021529328A (ja) 2021-10-28
WO2020013517A1 (ko) 2020-01-16
EP3798608A1 (en) 2021-03-31

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