JP7316355B2 - 垂直入射エリプソメータおよびこれを用いた試験片の光物性の測定方法 - Google Patents

垂直入射エリプソメータおよびこれを用いた試験片の光物性の測定方法 Download PDF

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JP7316355B2
JP7316355B2 JP2021520898A JP2021520898A JP7316355B2 JP 7316355 B2 JP7316355 B2 JP 7316355B2 JP 2021520898 A JP2021520898 A JP 2021520898A JP 2021520898 A JP2021520898 A JP 2021520898A JP 7316355 B2 JP7316355 B2 JP 7316355B2
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normal incidence
test piece
polarizer
incidence ellipsometer
ellipsometer
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JP2021529328A5 (enExample
JP2021529328A (ja
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ヨン ジャイ チョ，
ウォン チェガル，
ヒュン モ チョ，
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コリア リサーチ インスティトゥート オブ スタンダーズ アンド サイエンス
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/13—Moving of cuvettes or solid samples to or from the investigating station
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical
    • G01N2201/023—Controlling conditions in casing
    • G01N2201/0231—Thermostating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G01N2201/0612—Laser diodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0633—Directed, collimated illumination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/068—Optics, miscellaneous
    • G01N2201/0683—Brewster plate; polarisation controlling elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2021520898A 2018-07-12 2019-07-03 垂直入射エリプソメータおよびこれを用いた試験片の光物性の測定方法 Active JP7316355B2 (ja)

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KR10-2018-0081169 2018-07-12
KR1020180081169A KR102139988B1 (ko) 2018-07-12 2018-07-12 수직입사 타원계측기 및 이를 이용한 시편의 광물성 측정 방법
PCT/KR2019/008147 WO2020013517A1 (ko) 2018-07-12 2019-07-03 수직입사 타원계측기 및 이를 이용한 시편의 광물성 측정 방법

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JP2021529328A5 JP2021529328A5 (enExample) 2022-07-22
JP7316355B2 true JP7316355B2 (ja) 2023-07-27

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EP (1) EP3798608A4 (enExample)
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CN (1) CN112469987B (enExample)
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JP7460080B2 (ja) * 2020-10-19 2024-04-02 浜松ホトニクス株式会社 光学特性評価装置および光学特性評価方法
CN113218635B (zh) * 2021-04-30 2023-02-28 重庆大学 一种非接触式矢量偏振光场测试系统
CN113588216B (zh) * 2021-08-02 2023-09-19 中国科学院光电技术研究所 一种偏振片光学零位快速高精度定标装置和方法
EP4141415A1 (en) * 2021-08-26 2023-03-01 Université de Strasbourg Device and method for polarimetric imaging
KR20230174618A (ko) * 2022-06-21 2023-12-28 삼성전자주식회사 영상 타원편광기 및 이를 이용한 정렬 오차 측정 방법
CN115265812A (zh) * 2022-07-22 2022-11-01 上海如海光电科技有限公司 一种基于Zynq的高通量光谱数据采集与传输装置及方法
KR102734584B1 (ko) * 2022-12-27 2024-11-25 중앙대학교 산학협력단 외부환경 차단을 위한 경통형 분광분석 시스템
US20250086358A1 (en) * 2023-09-12 2025-03-13 Google Llc Optical critical dimension metrology aided by deep learning
CN117889754B (zh) * 2024-03-15 2024-06-04 苏州大学 一种二维薄膜静态位移的测量装置及方法
CN118500338B (zh) * 2024-07-19 2024-09-17 江苏双奇地板有限公司 一种地板外形检测装置
CN119413729B (zh) * 2024-10-31 2025-11-21 华中科技大学 一种四光弹调制器型穆勒矩阵偏振系统的参数校准方法及系统
KR102944184B1 (ko) 2025-05-30 2026-03-27 동신공영주식회사 안전점검 및 진단을 위한 슈미트 해머 수직도 조절장치

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US11493433B2 (en) 2022-11-08
US20210181090A1 (en) 2021-06-17
CN112469987B (zh) 2024-09-13
KR102139988B1 (ko) 2020-07-31
KR20200007267A (ko) 2020-01-22
EP3798608A4 (en) 2022-02-09
CN112469987A (zh) 2021-03-09
JP2021529328A (ja) 2021-10-28
WO2020013517A1 (ko) 2020-01-16
EP3798608A1 (en) 2021-03-31

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