JP2021526318A - 抗偏向層を有する半導体デバイス - Google Patents
抗偏向層を有する半導体デバイス Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 31
- 230000006835 compression Effects 0.000 claims abstract description 63
- 238000007906 compression Methods 0.000 claims abstract description 63
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 47
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 46
- 238000000151 deposition Methods 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 39
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 30
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 13
- 239000010703 silicon Substances 0.000 claims abstract description 13
- 230000001590 oxidative effect Effects 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 22
- 230000008021 deposition Effects 0.000 claims description 12
- 238000005240 physical vapour deposition Methods 0.000 claims description 11
- 238000005452 bending Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 29
- 230000007704 transition Effects 0.000 abstract description 8
- 238000012545 processing Methods 0.000 abstract description 5
- 150000001875 compounds Chemical class 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 151
- 239000010408 film Substances 0.000 description 16
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 229910052715 tantalum Inorganic materials 0.000 description 6
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000009931 harmful effect Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000000313 electron-beam-induced deposition Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005289 physical deposition Methods 0.000 description 1
- 229910021426 porous silicon Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- -1 tantalum nitrides Chemical class 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
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- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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Abstract
Description
前記主要表面を覆う圧縮層;を含み、前記引張層及び前記圧縮層の両方が、前記基板に力を加えて、前記基板が湾曲しないよう保持する。
Claims (20)
- 半導体デバイスであって:
基板;
前記基板の主要表面を覆う引張層;
前記主要表面を覆う圧縮層;
を含み、
前記引張層及び前記圧縮層の両方が、前記基板に力を加えて、前記基板が湾曲しないよう保持する、半導体デバイス。 - 前記引張層と前記圧縮層との間に中間層をさらに備え、
前記中間層は前記引張層と前記圧縮層との間で応力を伝達する、請求項1に記載の半導体デバイス。 - 前記中間層が前記圧縮層及び前記引張層よりも薄い、請求項2に記載の半導体デバイス。
- 前記中間層が前記圧縮層又は前記引張層の酸化表面である、請求項2に記載の半導体デバイス。
- 前記引張層は、前記圧縮層よりも前記基板に近接している、請求項1乃至4のいずれか一項に記載の半導体デバイス。
- 前記引張層は、窒化ケイ素層であり、
前記圧縮層は、酸化ケイ素層である、
請求項1乃至5のいずれか1項に記載の半導体デバイス。 - 引張層と圧縮層との間の中間層をさらに備え;
前記中間層は、シリコンオキシ窒化物層である、請求項6に記載の半導体デバイス。 - 前記引張層の引張力が、前記圧縮層の圧縮力にバランスをとる、請求項1乃至7のいずれか一項に記載の半導体デバイス。
- 半導体デバイスを製造する方法であって:
当該半導体デバイスの基板の主要表面を覆う引張層を堆積するステップ;
前記主要表面を覆う圧縮層を堆積するステップ;
を含み、
前記引張層及び前記圧縮層の両方が、前記基板に力を加えて、前記基板が湾曲しないよう保持する、方法。 - 前記圧縮層を堆積するステップの前に、前記引張層を堆積するステップが生じ、
前記圧縮層は前記引張層の上に堆積される、ことを特徴とする請求項9に記載の方法。 - 前記引張層と前記圧縮層との間に中間層を形成するステップをさらに含む、請求項9又は10に記載の方法。
- 前記引張層を堆積するステップの後、前記圧縮層を堆積するステップの前に、前記中間層が形成される、請求項11に記載の方法。
- 前記中間層は、前記引張層の表面を酸化することによって形成される、請求項12に記載の方法。
- 前記引張層を堆積するステップは、窒化ケイ素を堆積するステップを含む、請求項11乃至13のいずれか一項に記載の方法。
- 前記窒化ケイ素を堆積するステップは、物理蒸着によって前記窒化ケイ素を堆積するステップを含む、請求項14に記載の方法。
- 前記窒化ケイ素を堆積するステップは、前記窒化ケイ素の柱状堆積を含む、請求項14に記載の方法。
- 前記中間層を形成するステップは、前記窒化ケイ素の表面を酸化して、シリコンオキシ窒化物を形成する酸化ステップを含む、請求項14乃至16のいずれか一項に記載の方法。
- 前記酸化ステップは、前記窒化ケイ素の表面を空気に曝すことを含む、請求項17に記載の方法。
- 前記圧縮層を堆積するステップは、前記シリコンオキシ窒化物の上に酸化ケイ素を堆積するステップを含む、請求項17又は18に記載の方法。
- 前記酸化ケイ素を堆積するステップは、物理蒸着によって前記酸化ケイ素を堆積するステップを含む、請求項19に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/010,571 US10515905B1 (en) | 2018-06-18 | 2018-06-18 | Semiconductor device with anti-deflection layers |
US16/010,571 | 2018-06-18 | ||
PCT/US2019/030856 WO2019245660A1 (en) | 2018-06-18 | 2019-05-06 | Semiconductor device with anti-deflection layers |
Publications (2)
Publication Number | Publication Date |
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JP2021526318A true JP2021526318A (ja) | 2021-09-30 |
JP7072121B2 JP7072121B2 (ja) | 2022-05-19 |
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Application Number | Title | Priority Date | Filing Date |
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JP2021516524A Active JP7072121B2 (ja) | 2018-06-18 | 2019-05-06 | 抗偏向層を有する半導体デバイス |
Country Status (10)
Country | Link |
---|---|
US (1) | US10515905B1 (ja) |
EP (1) | EP3807928A1 (ja) |
JP (1) | JP7072121B2 (ja) |
KR (1) | KR102478822B1 (ja) |
CN (1) | CN112640092A (ja) |
CA (1) | CA3104245C (ja) |
IL (1) | IL276506B (ja) |
SG (1) | SG11202012678WA (ja) |
TW (1) | TWI720487B (ja) |
WO (1) | WO2019245660A1 (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
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US10896821B2 (en) * | 2018-09-28 | 2021-01-19 | Lam Research Corporation | Asymmetric wafer bow compensation by physical vapor deposition |
US11410937B2 (en) * | 2020-03-06 | 2022-08-09 | Raytheon Company | Semiconductor device with aluminum nitride anti-deflection layer |
JP7076490B2 (ja) | 2020-03-24 | 2022-05-27 | 株式会社Kokusai Electric | 基板処理方法、半導体装置の製造方法、基板処理装置、およびプログラム |
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US10515905B1 (en) | 2019-12-24 |
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IL276506A (en) | 2020-09-30 |
JP7072121B2 (ja) | 2022-05-19 |
CN112640092A (zh) | 2021-04-09 |
WO2019245660A1 (en) | 2019-12-26 |
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