JP2021510628A5 - - Google Patents

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Publication number
JP2021510628A5
JP2021510628A5 JP2020538938A JP2020538938A JP2021510628A5 JP 2021510628 A5 JP2021510628 A5 JP 2021510628A5 JP 2020538938 A JP2020538938 A JP 2020538938A JP 2020538938 A JP2020538938 A JP 2020538938A JP 2021510628 A5 JP2021510628 A5 JP 2021510628A5
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JP
Japan
Prior art keywords
substrate
liquid
work surface
real
stroboscope
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JP2020538938A
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English (en)
Japanese (ja)
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JPWO2019140423A5 (https=
JP7357844B2 (ja
JP2021510628A (ja
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Priority claimed from PCT/US2019/013588 external-priority patent/WO2019140423A1/en
Publication of JP2021510628A publication Critical patent/JP2021510628A/ja
Publication of JPWO2019140423A5 publication Critical patent/JPWO2019140423A5/ja
Publication of JP2021510628A5 publication Critical patent/JP2021510628A5/ja
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JP2020538938A 2018-01-15 2019-01-15 流体分配及びカバレージ制御のためのシステム及び方法 Active JP7357844B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862617345P 2018-01-15 2018-01-15
US62/617,345 2018-01-15
PCT/US2019/013588 WO2019140423A1 (en) 2018-01-15 2019-01-15 System and method for fluid dispense and coverage control

Publications (4)

Publication Number Publication Date
JP2021510628A JP2021510628A (ja) 2021-04-30
JPWO2019140423A5 JPWO2019140423A5 (https=) 2022-01-21
JP2021510628A5 true JP2021510628A5 (https=) 2022-01-21
JP7357844B2 JP7357844B2 (ja) 2023-10-10

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JP2020538938A Active JP7357844B2 (ja) 2018-01-15 2019-01-15 流体分配及びカバレージ制御のためのシステム及び方法

Country Status (6)

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US (4) US10946411B2 (https=)
JP (1) JP7357844B2 (https=)
KR (1) KR102735312B1 (https=)
CN (1) CN111587479B (https=)
TW (1) TWI804563B (https=)
WO (1) WO2019140423A1 (https=)

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