JP2021505837A5 - - Google Patents

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Publication number
JP2021505837A5
JP2021505837A5 JP2020531016A JP2020531016A JP2021505837A5 JP 2021505837 A5 JP2021505837 A5 JP 2021505837A5 JP 2020531016 A JP2020531016 A JP 2020531016A JP 2020531016 A JP2020531016 A JP 2020531016A JP 2021505837 A5 JP2021505837 A5 JP 2021505837A5
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JP
Japan
Prior art keywords
substrate
process gas
infrared
transport direction
emitter
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Granted
Application number
JP2020531016A
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English (en)
Japanese (ja)
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JP7114712B2 (ja
JP2021505837A (ja
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Priority claimed from DE102017129017.6A external-priority patent/DE102017129017A1/de
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Publication of JP2021505837A publication Critical patent/JP2021505837A/ja
Publication of JP2021505837A5 publication Critical patent/JP2021505837A5/ja
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Publication of JP7114712B2 publication Critical patent/JP7114712B2/ja
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JP2020531016A 2017-12-06 2018-12-03 基材を乾燥させる方法、該方法を実施するための乾燥機モジュールおよび乾燥機システム Active JP7114712B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102017129017.6 2017-12-06
DE102017129017.6A DE102017129017A1 (de) 2017-12-06 2017-12-06 Verfahren zum Trocknen eines Substrats, Trocknermodul zur Durchführung des Verfahrens sowie Trocknersystem
PCT/EP2018/083303 WO2019110484A1 (de) 2017-12-06 2018-12-03 Verfahren zum trocknen eines substrats, trocknermodul zur durchführung des verfahrens sowie trocknersystem

Publications (3)

Publication Number Publication Date
JP2021505837A JP2021505837A (ja) 2021-02-18
JP2021505837A5 true JP2021505837A5 (https=) 2021-12-23
JP7114712B2 JP7114712B2 (ja) 2022-08-08

Family

ID=64650377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020531016A Active JP7114712B2 (ja) 2017-12-06 2018-12-03 基材を乾燥させる方法、該方法を実施するための乾燥機モジュールおよび乾燥機システム

Country Status (6)

Country Link
US (2) US12025375B2 (https=)
EP (1) EP3720716B1 (https=)
JP (1) JP7114712B2 (https=)
CN (1) CN111465501B (https=)
DE (1) DE102017129017A1 (https=)
WO (1) WO2019110484A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017129017A1 (de) 2017-12-06 2019-06-06 Heraeus Noblelight Gmbh Verfahren zum Trocknen eines Substrats, Trocknermodul zur Durchführung des Verfahrens sowie Trocknersystem
DE102019126701A1 (de) * 2019-10-02 2021-04-08 Heraeus Noblelight Gmbh Infrarot-Trocknermodul und Trocknersystem
DE202020002017U1 (de) * 2020-05-08 2020-05-25 Gunther Ackermann Vorrichtung zur Bestrahlung eines Substrates
CN115483357B (zh) * 2021-06-15 2025-07-08 深圳市易天自动化设备股份有限公司 一种oled及其基板清洗后风干机及其风干工艺
DE102022124575A1 (de) * 2022-09-23 2024-03-28 Duo Technik Gmbh Vorrichtung zum Trocknen von Flächengebilden
DE102023200207A1 (de) * 2023-01-12 2024-07-18 Bhs Corrugated Maschinen- Und Anlagenbau Gmbh Vorrichtung zum Trocknen einer bedruckten Materialbahn
DE202023103004U1 (de) * 2023-05-31 2023-07-18 Gunther Ackermann Umluft-Prozess-System
DE102024203235A1 (de) * 2024-04-09 2025-10-09 Bhs Corrugated Maschinen- Und Anlagenbau Gmbh Anlage, mit einer Trockenstrecke, Trockenstrecke und Verfahren zum Betrieb einer Anlage mit Trockenstrecke

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