JP2021501984A - イメージセンサモジュール及びその製造方法 - Google Patents
イメージセンサモジュール及びその製造方法 Download PDFInfo
- Publication number
- JP2021501984A JP2021501984A JP2019568341A JP2019568341A JP2021501984A JP 2021501984 A JP2021501984 A JP 2021501984A JP 2019568341 A JP2019568341 A JP 2019568341A JP 2019568341 A JP2019568341 A JP 2019568341A JP 2021501984 A JP2021501984 A JP 2021501984A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- image sensor
- bonding layer
- wafer
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 claims abstract description 55
- 239000010410 layer Substances 0.000 claims description 184
- 230000008569 process Effects 0.000 claims description 28
- 239000002243 precursor Substances 0.000 claims description 11
- 239000000853 adhesive Substances 0.000 claims description 9
- 230000001070 adhesive effect Effects 0.000 claims description 9
- 238000000206 photolithography Methods 0.000 claims description 7
- 238000007650 screen-printing Methods 0.000 claims description 7
- 239000012790 adhesive layer Substances 0.000 claims description 6
- 229920006254 polymer film Polymers 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000003848 UV Light-Curing Methods 0.000 claims 2
- 239000006260 foam Substances 0.000 claims 2
- 238000001723 curing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 abstract description 20
- 235000012431 wafers Nutrition 0.000 description 184
- 239000000463 material Substances 0.000 description 20
- 238000010438 heat treatment Methods 0.000 description 8
- 230000017525 heat dissipation Effects 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 239000002390 adhesive tape Substances 0.000 description 5
- 230000005855 radiation Effects 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- WBHQEUPUMONIKF-UHFFFAOYSA-N PCB180 Chemical compound C1=C(Cl)C(Cl)=CC(Cl)=C1C1=CC(Cl)=C(Cl)C(Cl)=C1Cl WBHQEUPUMONIKF-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- -1 buyers (vias) Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000012858 packaging process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241001137251 Corvidae Species 0.000 description 1
- 229910000570 Cupronickel Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- QCEUXSAXTBNJGO-UHFFFAOYSA-N [Ag].[Sn] Chemical compound [Ag].[Sn] QCEUXSAXTBNJGO-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000010062 adhesion mechanism Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- QRJOYPHTNNOAOJ-UHFFFAOYSA-N copper gold Chemical compound [Cu].[Au] QRJOYPHTNNOAOJ-UHFFFAOYSA-N 0.000 description 1
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 1
- YCKOAAUKSGOOJH-UHFFFAOYSA-N copper silver Chemical compound [Cu].[Ag].[Ag] YCKOAAUKSGOOJH-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008093 supporting effect Effects 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14634—Assemblies, i.e. Hybrid structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14632—Wafer-level processed structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14687—Wafer level processing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/1469—Assemblies, i.e. hybrid integration
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/83894—Direct bonding, i.e. joining surfaces by means of intermolecular attracting interactions at their interfaces, e.g. covalent bonds, van der Waals forces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06513—Bump or bump-like direct electrical connections between devices, e.g. flip-chip connection, solder bumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/94—Batch processes at wafer-level, i.e. with connecting carried out on a wafer comprising a plurality of undiced individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/162—Disposition
- H01L2924/16235—Connecting to a semiconductor or solid-state bodies, i.e. cap-to-chip
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
Claims (18)
- イメージセンサモジュールの製造方法であって、
複数の第1チップを備える第1ウェハの第1表面を第1キャリアウェハに接着することと、
少なくともパターン化ボンディング層または透明ボンディング層を含む永久ボンディング層を前記第1ウェハの第2表面に形成することと、
第2チップと前記第1ウェハの各第1チップとを、前記永久ボンディング層を介してボンディングさせることとを含み、
前記第1チップは、イメージセンサチップと透明フィルタチップのうちの一方からなり、前記第2チップは、前記イメージセンサチップと前記透明フィルタチップのうちの他方からなり、前記イメージセンサチップは、前記透明フィルタチップに対向する感光領域を備える、イメージセンサモジュールの製造方法。 - 前記第1チップは、前記イメージセンサチップからなり、
前記第1チップの前記第2表面は、前記感光領域と、
前記第1チップのボンディング領域上に形成される複数の接続パッドとを含み、
前記第1チップは、前記感光領域の外側に位置する前記永久ボンディング層にボンディングされる、
請求項1に記載のイメージセンサモジュールの製造方法。 - 前記永久ボンディング層が前記透明ボンディング層である場合、前記第1チップと前記第2チップとの間隔は、前記透明ボンディング層の厚さ以下である、
請求項1に記載のイメージセンサモジュールの製造方法。 - 前記透明ボンディング層は、透明接着剤を含む、
請求項3に記載のイメージセンサモジュールの製造方法。 - 前記永久ボンディング層が前記パターン化ボンディング層である場合、前記第1チップ、前記第2チップ及び前記パターン化ボンディング層によってキャビティが形成され、
前記イメージセンサチップの前記感光領域は、前記キャビティ内に露出される、
請求項1に記載のイメージセンサモジュールの製造方法。 - フォトリソグラフィ工程によって前記パターン化ボンディング層を形成することをさらに含む、
請求項1に記載のイメージセンサモジュールの製造方法。 - 前記パターン化ボンディング層は、パターン化ドライフィルムを含み、
前記パターン化ドライフィルムは、
各第1チップにドライフィルムを形成し、
前記フォトリソグラフィ工程によって前記ドライフィルムをパターン化して形成される、
請求項6に記載のイメージセンサモジュールの製造方法。 - スクリーン印刷工程によって前記パターン化ボンディング層を形成することをさらに含み、
前記パターン化ボンディング層は、構造接着剤、UV両面ボンディング層、透明接着剤、またはこれらの組み合わせを含む、
請求項1に記載のイメージセンサモジュールの製造方法。 - 前記第1ウェハの前記第1表面を前記第1キャリアウェハに接着することは、
前記第1ウェハの前記第2表面を第2キャリアウェハに仮接着することと、
前記第2キャリアウェハにおける前記第1ウェハの前記第1表面を薄化(thinning)することと、
薄化の後に前記第1キャリアウェハを前記第1ウェハの前記第1表面に仮接着することと、
前記第2キャリアウェハを除去して、前記第1キャリアウェハにおける前記第1ウェハの前記第2表面を露出させることとを含む、
請求項1に記載のイメージセンサモジュールの製造方法。 - 薄化の後に前記第1ウェハの前記第2表面を前記第2キャリアウェハに仮接着する工程と、前記第1キャリアウェハを前記第1ウェハの前記第1表面に仮接着する工程は、いずれも、
静電ボンディング工程または仮ボンディング層によって、仮接着を実現する、
請求項9に記載のイメージセンサモジュールの製造方法。 - 前記静電ボンディング工程を利用する場合、前記永久ボンディング層を前記第1ウェハの前記第2表面に形成することは、スクリーン印刷工程を含む、
請求項10に記載のイメージセンサモジュールの製造方法。 - 前記仮ボンディング層を利用する場合、前記仮ボンディング層は、多層構造の両面接着剤層を備える放熱層を含み、
前記多層構造は、発泡接着剤層、感圧層及び前記発泡接着剤層と前記感圧層との間に介在されたポリマーフィルムを含む、
請求項10に記載のイメージセンサモジュールの製造方法。 - 前記永久ボンディング層がUV両面ボンディング層を含む場合、前記永久ボンディング層を前記第1ウェハの前記第2表面に形成する工程及び前記第2チップと前記第1ウェハの各第1チップとを前記永久ボンディング層を介してボンディングさせる工程は、
前記第1ウェハの前記第2表面にUV硬化プリカーサをコーティングすることと、
スクリーン印刷工程によって、前記UV硬化プリカーサを前記第1ウェハの各第1チップに対応させるようにパターン化させることと、
各第1チップにおける前記UV硬化プリカーサに前記第2チップを配置させることと、
前記第1チップと前記第2チップの間に位置する前記UV硬化プリカーサを硬化させることにより、前記UV両面ボンディング層を前記永久ボンディング層として形成することとを含む、
請求項1に記載のイメージセンサモジュールの製造方法。 - 前記第2チップと各第1チップとを前記永久ボンディング層を介してボンディングさせることは、
約130℃〜170℃の温度、及び約0.1分間〜5分間の時間の条件で、前記パターン化ドライフィルムを介して、前記第1チップと前記第2チップをボンディングすることを含む、
請求項7に記載のイメージセンサモジュールの製造方法。 - 前記第2チップのボンディングが行われた後に、前記第1ウェハを複数の前記第1チップに分割することにより、第前記1キャリアウェハに複数のパッケージ構造を形成することをさらに含み、
各パッケージ構造は、第1チップと、第2チップと、前記第1チップと前記第2チップとの間に介在された前記永久ボンディング層とを含む、
請求項1に記載のイメージセンサモジュールの製造方法。 - 前記第2チップと各第1チップとのボンディング、または前記第1ウェハの分割が行われた後に、前記第1キャリアウェハを除去することをさらに含む、
請求項15に記載のイメージセンサモジュールの製造方法。 - 複数の前記パッケージ構造における複数の前記第1チップの前記第1表面をプリント基板(PCB)に装着することをさらに含み、
前記プリント基板は、剛性プリント基板または可撓性プリント基板を含み、
前記プリント基板に装着された複数の前記第1チップは、イメージセンサチップからなる、
請求項15に記載のイメージセンサモジュールの製造方法。 - 前記プリント基板に装着される支持要素を含むレンズアセンブリを各パッケージ構造に装着することをさらに含み、
前記支持要素は、前記パッケージ構造の上方に位置する、
請求項17に記載のイメージセンサモジュールの製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2018/106870 WO2020056707A1 (en) | 2018-09-21 | 2018-09-21 | Image sensor module and method for forming the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021501984A true JP2021501984A (ja) | 2021-01-21 |
JP7072266B2 JP7072266B2 (ja) | 2022-05-20 |
Family
ID=68617893
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019568341A Active JP7072266B2 (ja) | 2018-09-21 | 2018-09-21 | イメージセンサモジュール及びその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10490589B1 (ja) |
JP (1) | JP7072266B2 (ja) |
KR (1) | KR102333727B1 (ja) |
CN (1) | CN111295759A (ja) |
WO (1) | WO2020056707A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220181369A1 (en) * | 2019-03-08 | 2022-06-09 | Dexerials Corporation | Method of manufacturing connection structure, connection structure, film structure, and method of manufacturing film structure |
CN112630922B (zh) * | 2020-11-30 | 2022-11-11 | 江西联创电子有限公司 | 镜头模组及其装配方法 |
CN117855240B (zh) * | 2024-03-07 | 2024-05-24 | 合肥晶合集成电路股份有限公司 | 一种bsi图像传感器及其制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006190956A (ja) * | 2005-01-05 | 2006-07-20 | Advanced Chip Engineering Technology Inc | イメージ・センサ用fbga及びcobパッケージ構造 |
JP2007027713A (ja) * | 2005-07-11 | 2007-02-01 | Samsung Electronics Co Ltd | 透明カバーが付着されている光学装置の製造方法及びそれを利用した光学装置モジュールの製造方法 |
JP2013254927A (ja) * | 2012-06-07 | 2013-12-19 | Kyokutoku Kagi Kofun Yugenkoshi | パッケージキャリアボード及びその製造方法 |
JP2015517201A (ja) * | 2012-03-16 | 2015-06-18 | スス マイクロテク リソグラフィー,ゲーエムベーハー | 極薄ウェハーの仮接合の方法及び装置 |
WO2017160609A1 (en) * | 2016-03-14 | 2017-09-21 | 3M Innovative Properties Company | Surface protection film and related methods |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7335870B1 (en) * | 2006-10-06 | 2008-02-26 | Advanced Chip Engineering Technology Inc. | Method for image sensor protection |
US20100021993A1 (en) * | 2006-11-21 | 2010-01-28 | Ge Healthcare Bio-Sciences Corp. | System for assembling and utilizing sensors in containers |
US7851818B2 (en) | 2008-06-27 | 2010-12-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fabrication of compact opto-electronic component packages |
US8351219B2 (en) * | 2009-09-03 | 2013-01-08 | Visera Technologies Company Limited | Electronic assembly for an image sensing device |
KR101647779B1 (ko) * | 2009-09-09 | 2016-08-11 | 삼성전자 주식회사 | 이미지 센서, 그 제조 방법, 및 상기 이미지 센서를 포함하는 장치 |
US20120098080A1 (en) * | 2010-10-26 | 2012-04-26 | Jabil Circuit, Inc | Method and package for an electro-optical semiconductor device |
US9640574B2 (en) * | 2010-12-30 | 2017-05-02 | Stmicroelectronics Pte. Ltd. | Image sensor circuit, system, and method |
US8212297B1 (en) * | 2011-01-21 | 2012-07-03 | Hong Kong Applied Science and Technology Research Institute Company Limited | High optical efficiency CMOS image sensor |
-
2018
- 2018-09-21 JP JP2019568341A patent/JP7072266B2/ja active Active
- 2018-09-21 CN CN201880002617.3A patent/CN111295759A/zh not_active Withdrawn
- 2018-09-21 WO PCT/CN2018/106870 patent/WO2020056707A1/en active Application Filing
- 2018-09-21 KR KR1020197036841A patent/KR102333727B1/ko active IP Right Grant
- 2018-10-12 US US16/159,382 patent/US10490589B1/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006190956A (ja) * | 2005-01-05 | 2006-07-20 | Advanced Chip Engineering Technology Inc | イメージ・センサ用fbga及びcobパッケージ構造 |
JP2007027713A (ja) * | 2005-07-11 | 2007-02-01 | Samsung Electronics Co Ltd | 透明カバーが付着されている光学装置の製造方法及びそれを利用した光学装置モジュールの製造方法 |
JP2015517201A (ja) * | 2012-03-16 | 2015-06-18 | スス マイクロテク リソグラフィー,ゲーエムベーハー | 極薄ウェハーの仮接合の方法及び装置 |
JP2013254927A (ja) * | 2012-06-07 | 2013-12-19 | Kyokutoku Kagi Kofun Yugenkoshi | パッケージキャリアボード及びその製造方法 |
WO2017160609A1 (en) * | 2016-03-14 | 2017-09-21 | 3M Innovative Properties Company | Surface protection film and related methods |
Also Published As
Publication number | Publication date |
---|---|
JP7072266B2 (ja) | 2022-05-20 |
CN111295759A (zh) | 2020-06-16 |
WO2020056707A1 (en) | 2020-03-26 |
KR102333727B1 (ko) | 2021-12-01 |
KR20200035236A (ko) | 2020-04-02 |
US10490589B1 (en) | 2019-11-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
USRE41369E1 (en) | Semiconductor device and method of manufacturing the same | |
TWI404196B (zh) | 固體攝像元件模組之製造方法 | |
TWI534999B (zh) | 影像感測晶片封裝體及其形成方法 | |
US9998643B2 (en) | Methods of forming curved image sensors | |
JP7072266B2 (ja) | イメージセンサモジュール及びその製造方法 | |
TWI263319B (en) | Method of making camera module in wafer level | |
US8772070B2 (en) | Method for manufacturing solid-state imaging device | |
US7521657B2 (en) | Assembly having wafer with image sensor chips, a photo-sensitive adhesive pattern and plate thereof and method of manufacturing the same | |
US8659137B2 (en) | Stacked semiconductor device and manufacturing method thereof | |
JP2003198897A (ja) | 光モジュール、回路基板及び電子機器 | |
JP2005158948A (ja) | 固体撮像装置及びその製造方法 | |
JP7019203B2 (ja) | イメージセンサモジュール及びその製造方法 | |
JP2010103490A (ja) | 光学素子、光学素子ウエハ、光学素子ウエハモジュール、光学素子モジュール、光学素子モジュールの製造方法、電子素子ウエハモジュール、電子素子モジュールの製造方法、電子素子モジュールおよび電子情報機器 | |
KR20200063103A (ko) | 촬영 어셈블리 및 이의 패키징 방법, 렌즈 모듈, 전자 기기 | |
JP2008047665A (ja) | 固体撮像装置の製造方法、及び固体撮像装置 | |
KR20190045091A (ko) | 반도체 장치의 제조 방법 | |
JP2002026301A (ja) | 光電変換装置およびその製造方法 | |
JP4361300B2 (ja) | 光モジュール及びその製造方法並びに電子機器 | |
JP2004096638A (ja) | 撮像装置およびその製造方法 | |
CN217405439U (zh) | 芯片封装结构 | |
CN115020501A (zh) | 芯片封装方法及封装结构 | |
CN113949790A (zh) | 一种镜头模组的制作方法 | |
JP2016219454A (ja) | 固体撮像装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191206 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210302 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210517 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210907 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211129 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220426 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220427 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7072266 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |