JP2021167812A - 可変拡散板を利用した光学システム - Google Patents
可変拡散板を利用した光学システム Download PDFInfo
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- 230000007547 defect Effects 0.000 claims abstract description 167
- 238000007689 inspection Methods 0.000 claims abstract description 140
- 238000013135 deep learning Methods 0.000 claims description 41
- 238000000034 method Methods 0.000 claims description 39
- 238000003860 storage Methods 0.000 claims description 18
- 239000004973 liquid crystal related substance Substances 0.000 claims description 10
- 238000004590 computer program Methods 0.000 claims description 7
- 230000002950 deficient Effects 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000013528 artificial neural network Methods 0.000 description 65
- 238000005286 illumination Methods 0.000 description 45
- 230000008859 change Effects 0.000 description 20
- 238000009792 diffusion process Methods 0.000 description 20
- 238000004891 communication Methods 0.000 description 19
- 238000012545 processing Methods 0.000 description 19
- 230000003287 optical effect Effects 0.000 description 14
- 230000008569 process Effects 0.000 description 14
- 239000000463 material Substances 0.000 description 12
- 238000012549 training Methods 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 10
- 230000006870 function Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 230000008901 benefit Effects 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000000284 extract Substances 0.000 description 5
- 241000282326 Felis catus Species 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000004422 calculation algorithm Methods 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000006855 networking Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000012780 transparent material Substances 0.000 description 3
- 239000004983 Polymer Dispersed Liquid Crystal Substances 0.000 description 2
- 238000013527 convolutional neural network Methods 0.000 description 2
- 230000008451 emotion Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000010801 machine learning Methods 0.000 description 2
- 230000005055 memory storage Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000003607 modifier Substances 0.000 description 2
- 210000002569 neuron Anatomy 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000306 recurrent effect Effects 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013136 deep learning model Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/02—Diffusing elements; Afocal elements
- G02B5/0205—Diffusing elements; Afocal elements characterised by the diffusing properties
- G02B5/021—Diffusing elements; Afocal elements characterised by the diffusing properties the diffusion taking place at the element's surface, e.g. by means of surface roughening or microprismatic structures
- G02B5/0226—Diffusing elements; Afocal elements characterised by the diffusing properties the diffusion taking place at the element's surface, e.g. by means of surface roughening or microprismatic structures having particles on the surface
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8812—Diffuse illumination, e.g. "sky"
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/063—Illuminating optical parts
- G01N2201/0634—Diffuse illumination
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1334—Constructional arrangements; Manufacturing methods based on polymer dispersed liquid crystals, e.g. microencapsulated liquid crystals
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20081—Training; Learning
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
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Abstract
【解決手段】本開示の一実施例に基づき、検査対象物体におけるアノマリーの有無を判断するための欠陥検査装置が図示される。前述の欠陥検査装置は、前述の検査対象物体に光を照射するための光源と、前述の光源と検査対象物体との間に位置し、検査対象物体に投光される光の拡散度を調節できる可変ディフューザーと、を含む照明計、及び前述の検査対象物体の特徴に基づき、前述の可変ディフューザーを制御する1つ以上のプロセッサー、を含むことができる。
【選択図】図1
Description
Claims (14)
- 検査対象物体におけるアノマリーの有無を判断するための欠陥検査装置であって、
前記検査対象物体に光を照射するための光源と、前記光源と検査対象物体との間に位置し、検査対象物体に投光される光の拡散度を調節できる可変ディフューザーと、を含む照明計、及び
前記検査対象物体の特性に基づき前記可変ディフューザーを制御する1つ以上のプロセッサー、
を含む、
欠陥検査装置。 - 請求項1において、
前記可変ディフューザーを通過する光の拡散度は
前記プロセッサーの電気信号に沿って調節される、
欠陥検査装置。 - 請求項1において、
前記可変ディフューザーは、
前記プロセッサーの電気信号に沿って透明度が調節される液晶フィルムを含む、
欠陥検査装置。 - 請求項1において、
前記可変ディフューザーは
前記プロセッサーの制御信号に沿って、配置状態が調節されるディフューザーである、
欠陥検査装置。 - 請求項1において、
前記可変ディフューザーは、
検査対象物体の表面の特徴によって、検査対象物体の表面の各領域に対しそれぞれ異なる拡散度を持つ光を投光するように、前記プロセッサーによって制御される、
欠陥検査装置。 - 請求項1において、
画像データを獲得するための撮影部、
をさらに含み、
前記プロセッサーは、
前記獲得された画像データから検査対象物体を認識し、
前記認識された検査対象物体に基づき、検査対象物体に投光される光の拡散度を決め、さらに
前記決められた光の拡散度に沿って前記可変ディフューザーを制御する、
欠陥検査装置。 - 請求項1において、
画像データを獲得するための撮影部、
をさらに含み、
前記プロセッサーは、
前記獲得された画像データから検査対象物体の表面における光の反射度を認識し、
前記認識された検査対象物体の表面における光の反射度に基づき、前記検査対象物体に投光される光の拡散度を決め、さらに
前記決められた拡散度に沿って前記可変ディフューザーを制御する、
欠陥検査装置。 - 請求項1において、
画像データを獲得するための撮影部、
をさらに含み、
前記プロセッサーは、
前記撮影部から獲得された画像データから検査対象物体を認識し、さらに、
前記検査対象物体の表面の少なくとも一領域において求められる光の拡散度が残りの他の領域と異なる場合、前記可変ディフューザーが互いに異なる2つ以上の透明度を持つように制御する、
欠陥検査装置。 - 請求項8において、
前記プロセッサーは、
前記可変ディフューザーに含まれている2つ以上の領域がそれぞれ異なる透明度を持つように制御する、
欠陥検査装置。 - 請求項8において
前記プロセッサーは、
前記可変ディフューザーが互いに異なる2つ以上の透明度を持つように順次制御する、
欠陥検査装置。 - 請求項1において、
画像データを獲得するための撮影部と、
ディープラーニングに基づくモデルを保存するメモリーと、
をさらに含み、
前記プロセッサーは、
前記ディープラーニングに基づくモデルに含まれている1つ以上のサブモデルを利用して前記画像データに含まれた検査対象物体の欠陥を判断し、
前記1つ以上のサブモデルは、前記可変ディフューザーが持つ互いに異なる透明度それぞれについて学習されている、
欠陥検査装置。 - 請求項11において、
前記プロセッサーは、
前記可変ディフューザーが投光される光を拡散させない場合、獲得された非拡散光画像データを前記ディープラーニングに基づくモデルの第1サブモデルに入力させ、前記画像データに含まれた検査対象物体の欠陥を判断し、
前記可変ディフューザーが投光される光を拡散させる場合、獲得された拡散光の画像データを前記ディープラーニングに基づくモデルの第2サブモデルに入力させ前記画像データに含まれた検査対象物体の欠陥を判断する、
欠陥検査装置。 - コンピューター可読保存媒体に保存されたコンピュータープログラムであって、
前記コンピュータープログラムは、請求項1の欠陥検査装置の1つ以上のプロセッサーにおいて実行される場合、検査対象物体に欠陥があるか否かを判断するための動作を実行するようにするコンピューター可読保存媒体に保存されたコンピュータープログラム。 - 請求項1の欠陥検査装置において実行される検査対象物体の表面におけるアノマリーの有無を検査するための方法。
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JP7188821B1 (ja) | 2021-12-17 | 2022-12-13 | バイスリープロジェクツ株式会社 | 検査システム |
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JP7281041B2 (ja) * | 2018-11-29 | 2023-05-25 | 京セラドキュメントソリューションズ株式会社 | 種類判別システム |
KR102268909B1 (ko) * | 2020-04-10 | 2021-06-23 | 코그넥스코오포레이션 | Edge Field와 딥러닝 기반 검사 방법 |
CN116091500B (zh) * | 2023-04-07 | 2023-07-04 | 成都数之联科技股份有限公司 | 扩散板缺陷检测方法、模型训练方法、装置、设备和介质 |
Citations (8)
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JPS635247A (ja) * | 1986-06-25 | 1988-01-11 | Matsushita Electric Ind Co Ltd | 外観自動検査用照明装置 |
JPH09250989A (ja) * | 1996-03-15 | 1997-09-22 | Adomon Sci Kk | プリント基板の検査装置 |
JP2001221745A (ja) * | 2000-02-10 | 2001-08-17 | Nippon Steel Corp | 疵検査用照明装置 |
WO2003102562A1 (fr) * | 2002-05-31 | 2003-12-11 | Olympus Corporation | Dispositif de macro-illumination |
JP3098369U (ja) * | 2003-06-06 | 2004-02-26 | 有限会社 フロンティアシステム | 発泡シート材のピンホール検査装置 |
WO2008143228A1 (ja) * | 2007-05-21 | 2008-11-27 | Nikon Corporation | ウエハ端面検査装置 |
JP2015161613A (ja) * | 2014-02-27 | 2015-09-07 | 株式会社キーエンス | 画像測定器 |
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JP7399906B2 (ja) | 2023-12-18 |
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