JP2021156815A - ひずみゲージ - Google Patents
ひずみゲージ Download PDFInfo
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- JP2021156815A JP2021156815A JP2020059640A JP2020059640A JP2021156815A JP 2021156815 A JP2021156815 A JP 2021156815A JP 2020059640 A JP2020059640 A JP 2020059640A JP 2020059640 A JP2020059640 A JP 2020059640A JP 2021156815 A JP2021156815 A JP 2021156815A
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 208
- 239000002184 metal Substances 0.000 claims abstract description 208
- 239000000463 material Substances 0.000 claims abstract description 65
- 229920005989 resin Polymers 0.000 claims abstract description 26
- 239000011347 resin Substances 0.000 claims abstract description 26
- 229910052804 chromium Inorganic materials 0.000 claims description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000005336 cracking Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 215
- 239000011651 chromium Substances 0.000 description 59
- 239000002346 layers by function Substances 0.000 description 58
- 239000010408 film Substances 0.000 description 47
- 238000000034 method Methods 0.000 description 19
- 230000004048 modification Effects 0.000 description 14
- 238000012986 modification Methods 0.000 description 14
- 239000013078 crystal Substances 0.000 description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 11
- 230000000694 effects Effects 0.000 description 9
- 239000010936 titanium Substances 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 238000005452 bending Methods 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 239000004696 Poly ether ether ketone Substances 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 229920002530 polyetherether ketone Polymers 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000008685 targeting Effects 0.000 description 4
- 239000004734 Polyphenylene sulfide Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- -1 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 229920000069 polyphenylene sulfide Polymers 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920005672 polyolefin resin Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000570 Cupronickel Inorganic materials 0.000 description 1
- 229910002482 Cu–Ni Inorganic materials 0.000 description 1
- 229910002555 FeNi Inorganic materials 0.000 description 1
- 229910000604 Ferrochrome Inorganic materials 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010038 TiAl Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000000805 composite resin Substances 0.000 description 1
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000013076 target substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
図1は、第1実施形態に係るひずみゲージを例示する平面図である。図2は、第1実施形態に係るひずみゲージを例示する断面図であり、図1のA−A線に沿う断面を示している。図3は、第1実施形態に係るひずみゲージを例示する部分拡大断面図であり、図1のB−B線に沿う断面を示している。図1〜図3を参照すると、ひずみゲージ1は、基材10と、抵抗体30と、配線41と、電極50とを有している。
第1実施形態の変形例1では、配線上にも第2金属層を積層する例を示す。なお、第1実施形態の変形例1において、既に説明した実施形態と同一構成部についての説明は省略する場合がある。
第1実施形態の変形例2では、電極の形状のバリエーションの例を示す。なお、第1実施形態の変形例2において、既に説明した実施形態と同一構成部についての説明は省略する場合がある。
Claims (10)
- 可撓性を有する樹脂製の基材と、
前記基材上にCr、CrN、及びCr2Nを含む膜から形成された抵抗体と、
前記基材上に形成され、前記抵抗体と電気的に接続された一対の電極と、を有し、
前記電極は、
前記抵抗体の両端部から延在する一対の第1金属層と、
各々の前記第1金属層上に、前記第1金属層よりも低抵抗の材料から形成された第2金属層と、を含み、
前記第1金属層の上面と前記第2金属層の側面とのなす角度が鈍角である部分を有するひずみゲージ。 - 前記第1金属層は、前記抵抗体と同一材料により一体に形成されている請求項1に記載のひずみゲージ。
- 前記抵抗体及び前記第1金属層の厚さが0.05μm〜2μmであり、前記第2金属層の厚さが前記第1金属層の厚さよりも厚い請求項1又は2に記載のひずみゲージ。
- 前記第2金属層の厚さが前記第1金属層の厚さの2倍以上である請求項3に記載のひずみゲージ。
- 前記鈍角の部分において、前記第2金属層の側面の断面形状は凹型R形状である請求項1乃至4の何れか一項に記載のひずみゲージ。
- 前記第2金属層の平面形状は矩形状であり、
前記鈍角の部分は、前記第2金属層の4つの角部を含む請求項1乃至5の何れか一項に記載のひずみゲージ。 - 前記第2金属層の平面形状は円形状であり、
前記鈍角の部分は、前記第2金属層の外周部全体である請求項1乃至5の何れか一項に記載のひずみゲージ。 - 各々の前記第1金属層は配線を介して前記抵抗体の両端部と電気的に接続され、
前記第2金属層は、前記第1金属層上から前記配線上に延在し、
前記配線の上面と前記配線上に延在する前記第2金属層の側面とのなす角度が鈍角である部分を有する請求項1乃至7の何れか一項に記載のひずみゲージ。 - 前記抵抗体に含まれるCrN及びCr2Nは、20重量%以下である請求項1乃至8の何れか一項に記載のひずみゲージ。
- 前記CrN及び前記Cr2N中の前記Cr2Nの割合は、80重量%以上90重量%未満である請求項9に記載のひずみゲージ。
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JP2020059640A JP7469933B2 (ja) | 2020-03-30 | 2020-03-30 | ひずみゲージ |
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JP2020059640A JP7469933B2 (ja) | 2020-03-30 | 2020-03-30 | ひずみゲージ |
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JP2021156815A true JP2021156815A (ja) | 2021-10-07 |
JP7469933B2 JP7469933B2 (ja) | 2024-04-17 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022092203A1 (ja) * | 2020-10-30 | 2022-05-05 | 日東電工株式会社 | 歪みセンサーおよび積層体 |
WO2023214537A1 (ja) * | 2022-05-02 | 2023-11-09 | ミネベアミツミ株式会社 | ひずみゲージ |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012243984A (ja) * | 2011-05-20 | 2012-12-10 | Fujikura Ltd | 半導体装置および半導体装置の製造方法 |
WO2017212873A1 (ja) * | 2016-06-10 | 2017-12-14 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP2018049716A (ja) * | 2016-09-21 | 2018-03-29 | 株式会社東芝 | 電極構造体、二次電池、電池パック及び車両 |
WO2018179023A1 (ja) * | 2017-03-27 | 2018-10-04 | 三菱電機株式会社 | 半導体装置、電力変換装置および半導体装置の製造方法 |
JP2019100883A (ja) * | 2017-12-04 | 2019-06-24 | ミネベアミツミ株式会社 | ひずみゲージ |
Family Cites Families (2)
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JP2017150931A (ja) | 2016-02-24 | 2017-08-31 | 株式会社タニタ | ひずみゲージ |
JP2019113411A (ja) | 2017-12-22 | 2019-07-11 | ミネベアミツミ株式会社 | ひずみゲージ、センサモジュール |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012243984A (ja) * | 2011-05-20 | 2012-12-10 | Fujikura Ltd | 半導体装置および半導体装置の製造方法 |
WO2017212873A1 (ja) * | 2016-06-10 | 2017-12-14 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
JP2018049716A (ja) * | 2016-09-21 | 2018-03-29 | 株式会社東芝 | 電極構造体、二次電池、電池パック及び車両 |
WO2018179023A1 (ja) * | 2017-03-27 | 2018-10-04 | 三菱電機株式会社 | 半導体装置、電力変換装置および半導体装置の製造方法 |
JP2019100883A (ja) * | 2017-12-04 | 2019-06-24 | ミネベアミツミ株式会社 | ひずみゲージ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022092203A1 (ja) * | 2020-10-30 | 2022-05-05 | 日東電工株式会社 | 歪みセンサーおよび積層体 |
WO2023214537A1 (ja) * | 2022-05-02 | 2023-11-09 | ミネベアミツミ株式会社 | ひずみゲージ |
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