JP2021136337A - 薄膜キャパシタ及びこれを内蔵する回路基板、並びに、薄膜キャパシタの製造方法 - Google Patents
薄膜キャパシタ及びこれを内蔵する回路基板、並びに、薄膜キャパシタの製造方法 Download PDFInfo
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- 239000003990 capacitor Substances 0.000 title claims abstract description 61
- 239000010409 thin film Substances 0.000 title claims abstract description 61
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 238000000034 method Methods 0.000 claims description 31
- 238000001039 wet etching Methods 0.000 claims description 13
- 238000005530 etching Methods 0.000 description 19
- 239000004020 conductor Substances 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 239000000243 solution Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 4
- 229910002113 barium titanate Inorganic materials 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/012—Form of non-self-supporting electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
- H01G4/306—Stacked capacitors made by thin film techniques
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/33—Thin- or thick-film capacitors
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- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
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- H01L23/64—Impedance arrangements
- H01L23/642—Capacitive arrangements
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- H—ELECTRICITY
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- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
- H01G4/1227—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates based on alkaline earth titanates
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- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1236—Ceramic dielectrics characterised by the ceramic dielectric material based on zirconium oxides or zirconates
- H01G4/1245—Ceramic dielectrics characterised by the ceramic dielectric material based on zirconium oxides or zirconates containing also titanates
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- H—ELECTRICITY
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- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1254—Ceramic dielectrics characterised by the ceramic dielectric material based on niobium or tungsteen, tantalum oxides or niobates, tantalates
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16238—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bonding area protruding from the surface of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15313—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a land array, e.g. LGA
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- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
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Abstract
Description
1a,10a,20a,20b,30a,30b 貫通孔
2 回路基板
3 ロール
10 下部電極層
20 上部電極層
41〜43 絶縁樹脂層
50 半導体チップ
61G グランド端子
61S 信号端子
61V 電源端子
62G〜64G グランドパターン
62S〜64S 信号パターン
62V〜64V 電源パターン
65G〜67G,65S〜67S,65V〜67V ビア導体
P 電解メッキ層
R1〜R3 マスク
S シード層
SL スリット
T1〜T3 テーパー面
θ1,θ2 テーパー角
Claims (9)
- 下部電極層と、
上部電極層と、
前記下部電極層と前記上部電極層の間に配置された誘電体層と、を備え、
前記誘電体層は貫通孔を有しており、
前記貫通孔の内壁面は、第1のテーパー面及び前記第1のテーパー面よりも前記貫通孔の中心側に位置する第2のテーパー面を有し、
前記第1及び第2のテーパー面は、前記上部電極層で覆われておらず、
前記第1及び第2のテーパー面は、前記下部電極層の表面に対してそれぞれ第1及び第2のテーパー角を有し、
前記第1のテーパー角よりも前記第2のテーパー角の方が小さいことを特徴とする薄膜キャパシタ。 - 前記第2のテーパー面は、前記第1のテーパー面より長いことを特徴とする請求項1に記載の薄膜キャパシタ。
- 前記第1のテーパー面の長さは0.1μm以上、3μm以下であり、前記第2のテーパー面の長さは1μm以上、10μm以下であることを特徴とする請求項2に記載の薄膜キャパシタ。
- 前記第1のテーパー角は5°以上、75°以下であり、前記第2のテーパー角は3°以上、45°以下であることを特徴とする請求項1乃至3のいずれか一項に記載の薄膜キャパシタ。
- 前記下部電極層がNiからなることを特徴とする請求項1乃至4のいずれ一項に記載の薄膜キャパシタ。
- 請求項1乃至5のいずれ一項に記載の薄膜キャパシタを内蔵する回路基板。
- 下部電極層の表面に誘電体層を形成する第1の工程と、
前記誘電体層の表面に上部電極層を形成する第2の工程と、
前記上部電極層及び前記誘電体層に貫通孔を形成する第3の工程と、を備え、
前記第3の工程は、前記誘電体層に形成される前記貫通孔の内壁面が、第1のテーパー面及び前記第1のテーパー面よりも前記貫通孔の中心側に位置する第2のテーパー面を有し、前記第1及び第2のテーパー面は、前記下部電極層の表面に対してそれぞれ第1及び第2のテーパー角を有し、前記第1のテーパー角よりも前記第2のテーパー角の方が小さくなるよう、ウェットエッチングによって行うことを特徴とする薄膜キャパシタの製造方法。 - 前記第3の工程は、前記誘電体層の貫通孔よりも径の小さい第1のマスクを介して前記誘電体層をウェットエッチングする第1のウェットエッチング工程と、前記第1のマスクよりも径の大きい第2のマスクを介して前記誘電体層をウェットエッチングすることにより、前記第1のマスクで覆われ、前記第2のマスクの開口部と重なる領域に前記第1のテーパー面を形成し、前記第1及び第2のマスクの開口部と重なる領域に前記第2のテーパー面を形成する第2のウェットエッチング工程とを含むことを特徴とする請求項7に記載の薄膜キャパシタの製造方法。
- 前記第3の工程は、前記誘電体層の貫通孔よりも径の小さいマスクを介して前記誘電体層をウェットエッチングすることにより、前記マスクで覆われた領域に前記第1のテーパー面を形成し、前記マスクの開口部と重なる領域に前記第2のテーパー面を形成することを特徴とする請求項7に記載の薄膜キャパシタの製造方法。
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JP2020031758A JP7471861B2 (ja) | 2020-02-27 | 2020-02-27 | 薄膜キャパシタ及びこれを内蔵する回路基板 |
US17/165,339 US11676767B2 (en) | 2020-02-27 | 2021-02-02 | Thin film capacitor having a dielectric layer having a through hole whose inner surface has first and second tapered surfaces, circuit board incorporating the same, and thin film capacitor manufacturing method |
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JP2006228907A (ja) * | 2005-02-16 | 2006-08-31 | Kyocera Corp | 薄膜コンデンサおよび配線基板 |
JP2007184324A (ja) * | 2006-01-04 | 2007-07-19 | Nec Corp | キャパシタ、チップキャリア型キャパシタ、半導体装置および実装基板ならびにキャパシタの製造方法 |
JP2008085291A (ja) * | 2006-08-30 | 2008-04-10 | Kyocera Corp | コンデンサ及び高周波部品 |
JP2016219588A (ja) * | 2015-05-20 | 2016-12-22 | イビデン株式会社 | 薄膜キャパシタ |
JP2018063979A (ja) * | 2016-10-11 | 2018-04-19 | Tdk株式会社 | 薄膜コンデンサ |
JP2018063990A (ja) * | 2016-10-11 | 2018-04-19 | Tdk株式会社 | 薄膜キャパシタを製造する方法及び薄膜キャパシタ |
JP2019071336A (ja) * | 2017-10-06 | 2019-05-09 | Tdk株式会社 | 薄膜コンデンサおよびその製造方法 |
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