JP2021103612A5 - - Google Patents
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- Publication number
- JP2021103612A5 JP2021103612A5 JP2019233378A JP2019233378A JP2021103612A5 JP 2021103612 A5 JP2021103612 A5 JP 2021103612A5 JP 2019233378 A JP2019233378 A JP 2019233378A JP 2019233378 A JP2019233378 A JP 2019233378A JP 2021103612 A5 JP2021103612 A5 JP 2021103612A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ingan
- gan
- quantum well
- scintillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000470 constituent Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019233378A JP7373391B2 (ja) | 2019-12-24 | 2019-12-24 | シンチレータ、計測装置、質量分析装置および電子顕微鏡 |
| EP20905041.8A EP4053245A4 (en) | 2019-12-24 | 2020-11-19 | SCINTILLATOR, MEASURING DEVICE, MASS SPECTROMETER AND ELECTRONIC MICROSCOPE |
| US17/787,617 US12072454B2 (en) | 2019-12-24 | 2020-11-19 | Scintillator, measuring device, mass spectrometer, and electron microscope |
| PCT/JP2020/043186 WO2021131436A1 (ja) | 2019-12-24 | 2020-11-19 | シンチレータ、計測装置、質量分析装置および電子顕微鏡 |
| CN202080085111.0A CN114787959B (zh) | 2019-12-24 | 2020-11-19 | 闪烁器、测量装置、质量分析装置以及电子显微镜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019233378A JP7373391B2 (ja) | 2019-12-24 | 2019-12-24 | シンチレータ、計測装置、質量分析装置および電子顕微鏡 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021103612A JP2021103612A (ja) | 2021-07-15 |
| JP2021103612A5 true JP2021103612A5 (enExample) | 2022-08-09 |
| JP7373391B2 JP7373391B2 (ja) | 2023-11-02 |
Family
ID=76575377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019233378A Active JP7373391B2 (ja) | 2019-12-24 | 2019-12-24 | シンチレータ、計測装置、質量分析装置および電子顕微鏡 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US12072454B2 (enExample) |
| EP (1) | EP4053245A4 (enExample) |
| JP (1) | JP7373391B2 (enExample) |
| CN (1) | CN114787959B (enExample) |
| WO (1) | WO2021131436A1 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021005743A1 (ja) * | 2019-07-10 | 2021-01-14 | 株式会社日立ハイテク | 荷電粒子線装置用シンチレータおよび荷電粒子線装置 |
| JP7557589B1 (ja) | 2023-09-13 | 2024-09-27 | 浜松ホトニクス株式会社 | 発光体、荷電粒子検出器、電子顕微鏡及び質量分析装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100591705B1 (ko) * | 2000-09-21 | 2006-06-20 | 샤프 가부시키가이샤 | 질화물 반도체 발광소자 및 그것을 포함한 광학장치 |
| JP4365255B2 (ja) * | 2004-04-08 | 2009-11-18 | 浜松ホトニクス株式会社 | 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置 |
| TWI287255B (en) * | 2004-10-21 | 2007-09-21 | Hoya Corp | Apparatus and method for depositing fine particles, and manufacturing method of light-emitting element |
| JP5844545B2 (ja) * | 2010-05-31 | 2016-01-20 | 富士フイルム株式会社 | 放射線撮影装置 |
| US9929310B2 (en) * | 2013-03-14 | 2018-03-27 | Applied Materials, Inc. | Oxygen controlled PVD aluminum nitride buffer for gallium nitride-based optoelectronic and electronic devices |
| WO2016048000A2 (ko) * | 2014-09-22 | 2016-03-31 | 전남대학교산학협력단 | 광 발생 장치 |
| JP6576257B2 (ja) * | 2016-01-29 | 2019-09-18 | 株式会社日立ハイテクノロジーズ | 荷電粒子検出器、及び荷電粒子線装置 |
| JP6774189B2 (ja) * | 2016-03-03 | 2020-10-21 | 日本碍子株式会社 | 発光体、発光体の製造方法、および、発光体粉末の製造方法 |
| EP3440714A1 (en) | 2016-04-04 | 2019-02-13 | Glo Ab | Through backplane laser irradiation for die transfer |
| JP6666626B2 (ja) * | 2017-01-31 | 2020-03-18 | 株式会社日立ハイテク | 荷電粒子検出器及び荷電粒子線装置 |
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2019
- 2019-12-24 JP JP2019233378A patent/JP7373391B2/ja active Active
-
2020
- 2020-11-19 CN CN202080085111.0A patent/CN114787959B/zh active Active
- 2020-11-19 EP EP20905041.8A patent/EP4053245A4/en active Pending
- 2020-11-19 WO PCT/JP2020/043186 patent/WO2021131436A1/ja not_active Ceased
- 2020-11-19 US US17/787,617 patent/US12072454B2/en active Active