CN114787959B - 闪烁器、测量装置、质量分析装置以及电子显微镜 - Google Patents

闪烁器、测量装置、质量分析装置以及电子显微镜

Info

Publication number
CN114787959B
CN114787959B CN202080085111.0A CN202080085111A CN114787959B CN 114787959 B CN114787959 B CN 114787959B CN 202080085111 A CN202080085111 A CN 202080085111A CN 114787959 B CN114787959 B CN 114787959B
Authority
CN
China
Prior art keywords
layer
quantum well
scintillator
well structure
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080085111.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN114787959A (zh
Inventor
今村伸
楠敏明
高桥惠理
关口好文
神田隆之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Publication of CN114787959A publication Critical patent/CN114787959A/zh
Application granted granted Critical
Publication of CN114787959B publication Critical patent/CN114787959B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/62—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing gallium, indium or thallium
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/1606—Measuring radiation intensity with other specified detectors not provided for in the other sub-groups of G01T1/16
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Luminescent Compositions (AREA)
  • Electron Tubes For Measurement (AREA)
CN202080085111.0A 2019-12-24 2020-11-19 闪烁器、测量装置、质量分析装置以及电子显微镜 Active CN114787959B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019233378A JP7373391B2 (ja) 2019-12-24 2019-12-24 シンチレータ、計測装置、質量分析装置および電子顕微鏡
JP2019-233378 2019-12-24
PCT/JP2020/043186 WO2021131436A1 (ja) 2019-12-24 2020-11-19 シンチレータ、計測装置、質量分析装置および電子顕微鏡

Publications (2)

Publication Number Publication Date
CN114787959A CN114787959A (zh) 2022-07-22
CN114787959B true CN114787959B (zh) 2025-09-02

Family

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Family Applications (1)

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CN202080085111.0A Active CN114787959B (zh) 2019-12-24 2020-11-19 闪烁器、测量装置、质量分析装置以及电子显微镜

Country Status (5)

Country Link
US (1) US12072454B2 (enExample)
EP (1) EP4053245A4 (enExample)
JP (1) JP7373391B2 (enExample)
CN (1) CN114787959B (enExample)
WO (1) WO2021131436A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021005743A1 (ja) * 2019-07-10 2021-01-14 株式会社日立ハイテク 荷電粒子線装置用シンチレータおよび荷電粒子線装置
JP7557589B1 (ja) 2023-09-13 2024-09-27 浜松ホトニクス株式会社 発光体、荷電粒子検出器、電子顕微鏡及び質量分析装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005298603A (ja) * 2004-04-08 2005-10-27 Hamamatsu Photonics Kk 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
JP2017135039A (ja) * 2016-01-29 2017-08-03 株式会社日立ハイテクノロジーズ 荷電粒子検出器、及び荷電粒子線装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100591705B1 (ko) * 2000-09-21 2006-06-20 샤프 가부시키가이샤 질화물 반도체 발광소자 및 그것을 포함한 광학장치
TWI287255B (en) * 2004-10-21 2007-09-21 Hoya Corp Apparatus and method for depositing fine particles, and manufacturing method of light-emitting element
JP5844545B2 (ja) * 2010-05-31 2016-01-20 富士フイルム株式会社 放射線撮影装置
US9929310B2 (en) * 2013-03-14 2018-03-27 Applied Materials, Inc. Oxygen controlled PVD aluminum nitride buffer for gallium nitride-based optoelectronic and electronic devices
WO2016048000A2 (ko) * 2014-09-22 2016-03-31 전남대학교산학협력단 광 발생 장치
JP6774189B2 (ja) * 2016-03-03 2020-10-21 日本碍子株式会社 発光体、発光体の製造方法、および、発光体粉末の製造方法
EP3440714A1 (en) 2016-04-04 2019-02-13 Glo Ab Through backplane laser irradiation for die transfer
JP6666626B2 (ja) * 2017-01-31 2020-03-18 株式会社日立ハイテク 荷電粒子検出器及び荷電粒子線装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005298603A (ja) * 2004-04-08 2005-10-27 Hamamatsu Photonics Kk 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
JP2017135039A (ja) * 2016-01-29 2017-08-03 株式会社日立ハイテクノロジーズ 荷電粒子検出器、及び荷電粒子線装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
酸化ガリウム（Ga2O3）結晶成長およびデバイス応用;東脇 正高等;表面科学;20141231;第35卷(第2期);102-107 *

Also Published As

Publication number Publication date
EP4053245A1 (en) 2022-09-07
WO2021131436A1 (ja) 2021-07-01
EP4053245A4 (en) 2023-11-15
JP7373391B2 (ja) 2023-11-02
US20220413169A1 (en) 2022-12-29
CN114787959A (zh) 2022-07-22
JP2021103612A (ja) 2021-07-15
US12072454B2 (en) 2024-08-27

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