JP2021076577A - 検査装置及び検査方法 - Google Patents
検査装置及び検査方法 Download PDFInfo
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Abstract
Description
発光量L=R+T…(1)
反射光量R=(R1+R2)*W/2…(2)
透過光量T=(T1+T2)*W/2…(3)
波長シフトパラメータS=(T−R)/(T+R)=0…(4)
R1´=R1−aΔλ…(5)
R2´=R2−aΔλ…(6)
T1´=T1+aΔλ…(7)
T2´=T2+aΔλ…(8)
反射光量R´=(R1´+R2´)*W/2=R−aWΔλ…(9)
透過光量T´=(T1´+T2´)*W/2=T+aWΔλ…(10)
波長シフトパラメータS´=(T´−R´)/(T´+R´)=2aWΔλ/L…(11)
L/W=R1+T1=100%=1…(12)
(11)及び(12)式より、
S´=2aΔλ/(100%)=2aΔλ…(13)
(13)式より、
Δλ=S´/2a…(14)
図6は、カメラ81,82における視野内の位置に応じた入射角度の違いを説明する図である。図6には、サンプルSからの蛍光をダイクロイックミラー60方向に導く対物レンズ51と、ダイクロイックミラー60とが示されている。なお、ここでの対物レンズ51及びダイクロイックミラー60は、図1に示される対物レンズ51及びダイクロイックミラー60と同様の構成であり、同様の位置関係にあるとする。ここで、一般に無限遠補正された対物レンズ51を用いると、サンプルSの一点から発した光(蛍光)は、対物レンズ51を通過した後において平行光になる。このことは、カメラ81,82の視野内の各点(各画素)において成り立つ。しかしながら、各点において光束は平行であるものの、異なる点の光束同士は平行ではない。このため、ダイクロイックミラー60に入射する光の角度は、カメラ81,82の視野内のどの点(画素)からの光かによって異なることとなる。そして、ダイクロイックミラー60の光学特性は、蛍光の入射角度によって変化する。すなわち、ダイクロイックミラー60においては、蛍光の入射角度(すなわち視野内における画素の位置)に応じて、透過率が50%になる波長(中心波長)が変化する。
次に、励起光の照明輝度調整について説明する。半導体デバイスであるサンプルSに対して励起光を照射し蛍光観察を行う場合においては、サンプルSにおける不純物又は欠陥箇所から発せられる蛍光(異常な蛍光)の波長を含むブロードな蛍光を取得する。すなわち、蛍光観察においては、本来の蛍光の波長及び異常な蛍光の波長の双方を含むブロードな蛍光を取得する。ここで、異常な蛍光については励起光の照明輝度に対してほぼ比例して強くなるのに対して、本来の蛍光は励起光の照明輝度に対しておよそ2乗程度に強くなる。このため、励起光の照明輝度が比較的低い場合には、本来の蛍光の輝度(本来の蛍光強度:第1蛍光強度)と異常な蛍光の輝度(異常な蛍光強度:第2蛍光強度)との差が小さいのに対して、励起光の照明輝度が比較的高い場合には、第1蛍光強度と第2蛍光強度との差が大きくなる。
次に、波長のばらつきに応じた発光素子の良否判定手法について説明する。本手法は、発明者らが、「サンプルSにおける各発光素子の蛍光波長の重心(中心波長)は、不良品である輝度帯ほど揺らぎやすい(ばらつく」ことに着目し、蛍光波長の重心のばらつきに応じて良否判定を行うものである。このようなばらつきは、不良品では、不純物やリーク電流によって電圧が下がりエネルギー量が減少するために、長波長方向に蛍光がシフトしやすくなることにより生じるものと考えられる。
Claims (1)
- 複数の発光素子が形成された対象物を検査する検査装置であって、
前記対象物に照射される励起光を生成する励起光源と、
前記対象物からの蛍光を波長に応じて透過又は反射することにより分離する光学素子と、
前記光学素子において反射された蛍光を撮像する第1の撮像部と、
前記光学素子を透過した蛍光を撮像する第2の撮像部と、
前記第1の撮像部によって取得された第1の蛍光画像と、前記第2の撮像部によって取得された第2の蛍光画像とに基づき、発光素子の色斑情報を導出する処理部と、を備え、
前記光学素子における、波長の変化に応じて透過率及び反射率が変化する波長帯の幅であるエッジ変移幅は、前記発光素子の正常蛍光スペクトルの半値全幅よりも広い、検査装置。
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KR20230079215A (ko) * | 2020-11-09 | 2023-06-05 | 코니카 미놀타 가부시키가이샤 | 파장 측정 장치 및 파장 측정 방법 |
TWI758088B (zh) * | 2021-02-05 | 2022-03-11 | 佰驟智能有限公司 | 陣列式發光效率檢測方法 |
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CN114252394B (zh) * | 2021-12-06 | 2023-11-07 | 深圳铭毅智造科技有限公司 | 一种二向色镜自动反馈补偿方法 |
CN116660285B (zh) * | 2023-07-26 | 2023-11-17 | 浙江大学 | 一种晶圆特征光谱在线检测装置 |
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