JP2020177032A - 検査装置及び検査方法 - Google Patents
検査装置及び検査方法 Download PDFInfo
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- JP2020177032A JP2020177032A JP2020133216A JP2020133216A JP2020177032A JP 2020177032 A JP2020177032 A JP 2020177032A JP 2020133216 A JP2020133216 A JP 2020133216A JP 2020133216 A JP2020133216 A JP 2020133216A JP 2020177032 A JP2020177032 A JP 2020177032A
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- 238000007689 inspection Methods 0.000 title claims abstract description 51
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Abstract
Description
l(i,j)=l´(i,j)(1−4a)+a(l(i−1,j)+l(i+1,j)+l(i,j−1)+l(i,j+1))・・・(1)
なお、本来であれば、a(l(i−1,j)+l(i+1,j)+l(i,j−1)+l(i,j+1))のlもl´としなければならないが、当該式においては平均化が行われているため、大きな差異はないと考え、計測値であるlを用いている。
l(i,j)=l´(i,j)(1−a−b−c−d)+a(l(i−1,j))+b(l(i+1,j))+c(l(i,j−1))+d(l(i,j+1))・・・(2)
L=Pm×Qn・・・(3)
Claims (1)
- 第1の発光素子及び該第1の発光素子の周辺に配置された第2の発光素子を含む複数の発光素子が形成された対象物を検査する検査装置であって、
前記対象物に照射される励起光を生成する励起光源と、
前記対象物からの蛍光を撮像する撮像部と、
前記撮像部によって撮像された前記第1の発光素子からの蛍光及び前記第2の発光素子からの蛍光に基づいて、前記第1の発光素子からの蛍光の相対輝度を算出し、前記第1の発光素子からの蛍光の絶対輝度及び相対輝度に基づく算出値と所定の閾値とを比較することにより、前記第1の発光素子の良否判定を行う判定部と、を備える検査装置。
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JP2019062983A Division JP6746744B1 (ja) | 2019-03-28 | 2019-03-28 | 検査装置及び検査方法 |
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JP2020177032A true JP2020177032A (ja) | 2020-10-29 |
JP2020177032A5 JP2020177032A5 (ja) | 2022-04-04 |
JP7291676B2 JP7291676B2 (ja) | 2023-06-15 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63250835A (ja) * | 1987-04-08 | 1988-10-18 | Hitachi Cable Ltd | エピタキシヤルウエハの検査方法 |
JP2008145226A (ja) * | 2006-12-08 | 2008-06-26 | Olympus Corp | 欠陥検査装置及び欠陥検査方法 |
JP2015010834A (ja) * | 2013-06-26 | 2015-01-19 | 東レエンジニアリング株式会社 | 発光体の発光波長推定方法とその装置 |
JP2015148447A (ja) * | 2014-02-04 | 2015-08-20 | 東レエンジニアリング株式会社 | 自動外観検査装置 |
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- 2020-08-05 JP JP2020133216A patent/JP7291676B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63250835A (ja) * | 1987-04-08 | 1988-10-18 | Hitachi Cable Ltd | エピタキシヤルウエハの検査方法 |
JP2008145226A (ja) * | 2006-12-08 | 2008-06-26 | Olympus Corp | 欠陥検査装置及び欠陥検査方法 |
JP2015010834A (ja) * | 2013-06-26 | 2015-01-19 | 東レエンジニアリング株式会社 | 発光体の発光波長推定方法とその装置 |
JP2015148447A (ja) * | 2014-02-04 | 2015-08-20 | 東レエンジニアリング株式会社 | 自動外観検査装置 |
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