JP2021075739A - 基板を処理する装置、処理ガスを濃縮する装置、及び基板を処理する方法 - Google Patents
基板を処理する装置、処理ガスを濃縮する装置、及び基板を処理する方法 Download PDFInfo
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- JP2021075739A JP2021075739A JP2019200886A JP2019200886A JP2021075739A JP 2021075739 A JP2021075739 A JP 2021075739A JP 2019200886 A JP2019200886 A JP 2019200886A JP 2019200886 A JP2019200886 A JP 2019200886A JP 2021075739 A JP2021075739 A JP 2021075739A
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Abstract
Description
前記基板が収容されたチャンバと、
前記基板を処理するための処理ガスの原料が収容された原料タンクと、
前記原料タンクにキャリアガスを供給するように構成されたキャリアガス供給部と、
前記原料タンクに接続され、前記処理ガスの原料から得た処理ガスと前記キャリアガスとの混合ガスが流通する混合ガス流路と、
前記混合ガス流路の下流に接続され、前記混合ガスに含まれる前記処理ガスが優先的に吸着されるように構成された金属有機構造体を含む多孔質部材が収容された濃縮タンクと、
前記多孔質部材に吸着された前記処理ガスを脱離させるように構成された脱離機構と、
前記濃縮タンクと前記チャンバとの間に設けられ、前記多孔質部材から脱離された前記処理ガスが前記チャンバへ供給される濃縮ガス流路と、を有する。
(a)銅イオンと1,3,5−ベンゼントリカルボン酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体
(b)鉄イオンと1,3,5−ベンゼントリカルボン酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体
(c)クロムイオンとテレフタル酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体
(d)ランタンイオンと1,3,5−トリス(4−カルボキシフェニル)ベンゼンとの配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体
なお以下の説明では、多孔質部材53とこれを構成する金属有機構造体とを区別せずに「多孔質部材53の細孔」、「多孔質部材53への吸着」などと記載する場合がある。
さらにまた、濃縮ガス流路6には原料ガス給断バルブ61の上流側に、キャリアガスを排出するための排出路63が接続されており、この排出路63はバルブ631を備えている。排出路63は図示しない排気機構に接続されている。
反応ガス供給部は、反応ガスをチャンバ10へ供給するように構成され、反応ガスの供給源641と、当該供給源641からチャンバ10へ反応ガスを供給する反応ガス供給路64と、を有するものである。反応ガスは、原料ガスと反応して、膜を形成するガスであり、例えばAlCl3との反応により窒化アルミニウム(AlN)を生成するアンモニア(NH3)ガスが用いられる。例えば反応ガス供給路64は、反応ガスの供給、停止を行うように構成された反応ガス給断バルブ642と、反応ガスの流量調節を実施する流量調節部643と、を備えている。
なお、原料ガスの脱離と濃縮ガスのチャンバ10への供給とは、同時に行ってもよい。この場合には、図4に示すように原料ガス給断バルブ61を開いた状態で多孔質部材53を加熱し、脱離させた原料ガスをそのままチャンバ10へと供給する。
(a)銅イオンと1,3,5−ベンゼントリカルボン酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体(実施例1)
(b)鉄イオンと1,3,5−ベンゼントリカルボン酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体(実施例2)
(c)クロムイオンとテレフタル酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体(実施例3)
(d)ランタンイオンと1,3,5−トリス(4−カルボキシフェニル)ベンゼンとの配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体(実施例4)
2 原料タンク
22 気化機構
4 混合ガス流路
5 原料ガス濃縮装置
51 濃縮タンク
52 脱離機構
53 多孔質部材
6 濃縮ガス流路
W 半導体ウエハ
Claims (17)
- 半導体装置を製造するための基板を処理する装置であって、
前記基板が収容されたチャンバと、
前記基板を処理するための処理ガスの原料が収容された原料タンクと、
前記原料タンクにキャリアガスを供給するように構成されたキャリアガス供給部と、
前記原料タンクに接続され、前記処理ガスの原料から得た処理ガスと前記キャリアガスとの混合ガスが流通する混合ガス流路と、
前記混合ガス流路の下流に接続され、前記混合ガスに含まれる前記処理ガスが優先的に吸着されるように構成された金属有機構造体を含む多孔質部材が収容された濃縮タンクと、
前記多孔質部材に吸着された前記処理ガスを脱離させるように構成された脱離機構と、
前記濃縮タンクと前記チャンバとの間に設けられ、前記多孔質部材から脱離された前記処理ガスが前記チャンバへ供給される濃縮ガス流路と、を有する装置。 - 前記原料は液体または固体であり、
前記原料タンクは、前記処理ガスの原料を気化させて前記処理ガスを得るように構成された気化機構を備える、請求項1に記載の装置。 - 前記脱離機構は、前記濃縮タンク内の前記多孔質部材を加熱して前記処理ガスを脱離させるように構成された多孔質部材加熱機構を含む、請求項1または2に記載の装置。
- 前記金属有機構造体は、下記(a)〜(d)に記載の金属有機構造体群から選択されたものである、請求項1ないし3のいずれか一つに記載の装置。
(a)銅イオンと1,3,5−ベンゼントリカルボン酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体
(b)鉄イオンと1,3,5−ベンゼントリカルボン酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体
(c)クロムイオンとテレフタル酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体
(d)ランタンイオンと1,3,5−トリス(4−カルボキシフェニル)ベンゼンとの配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体 - 前記濃縮ガス流路は、前記処理ガスの流量調節を実施するように構成された流量調節部を備える、請求項1ないし4のいずれか一つに記載の装置。
- 前記気化機構は、液体である前記原料に前記キャリアガスをバブリングして、前記原料を気化するように構成されたバブリング機構、または、液体または固体である前記原料を加熱して、前記原料を気化するように構成された原料加熱機構である、請求項2ないし5のいずれか一つに記載の装置。
- 前記処理は基板に膜を形成する処理であり、前記原料は前記膜の原料であるハロゲン化金属である、請求項1ないし6のいずれか一つに記載の装置。
- 前記ハロゲン化金属は、塩化アルミニウム、五塩化タングステン及び四塩化チタンからなるハロゲン化金属群から選択されたものである、請求項7に記載の装置。
- 前記濃縮ガス流路に設けられ、前記チャンバへの前記処理ガスの供給、停止を行うように構成された処理ガス給断バルブと、
前記処理ガスと反応して前記膜を形成する反応ガスを供給するように構成されると共に、前記チャンバへの反応ガスの供給、停止を行うように構成された反応ガス給断バルブを備えた反応ガス供給部と、
制御部と、を有し、
前記制御部は、前記チャンバに対して前記処理ガスと反応ガスとが交互に供給されるように、前記処理ガス給断バルブ及び前記反応ガス給断バルブを制御するように構成される、請求項7または8に記載の装置。 - 半導体装置を製造するための基板の処理に用いられる処理ガスを濃縮する装置であって、
前記処理ガスとその他のガスとを含む混合ガスが供給され、前記混合ガスに含まれる前記処理ガスが優先的に吸着されるように構成された金属有機構造体を含む多孔質部材が収容された濃縮タンクと、
前記多孔質部材に吸着された前記処理ガスを脱離させるように構成された脱離機構と、を有する装置。 - 前記脱離機構は、前記濃縮タンク内の前記多孔質部材を加熱して前記処理ガスを脱離させるように構成された多孔質部材加熱機構である、請求項10に記載の装置。
- 半導体装置を製造するための基板を処理する方法であって、
前記基板を処理するための処理ガスの原料を収容した原料タンクにキャリアガスを供給して、処理ガスと前記キャリアガスとの混合ガスを得る工程と、
金属有機構造体を含む多孔質部材が収容された濃縮タンクに前記混合ガスを供給し、前記多孔質部材に対して前記混合ガス中の前記処理ガスを優先的に吸着させる工程と、
前記多孔質部材に吸着された前記処理ガスを脱離させる工程と、
前記脱離させた前記処理ガスを、基板が収容されたチャンバへ供給し、前記基板の処理を行なう工程と、を有する方法。 - 前記原料は、液体または固体であり、
原料を収容した原料タンクにて、前記処理ガスの原料を気化させて前記処理ガスを得る工程を有する、請求項12に記載の方法。 - 前記処理ガスを脱離させる工程では、前記濃縮タンク内の前記多孔質部材を加熱して前記処理ガスを脱離させる、請求項12又は13に記載の方法。
- 前記金属有機構造体は、下記(a)〜(d)に記載の金属有機構造体群から選択されたものである、請求項12ないし14のいずれか一つに記載の方法。
(a)銅イオンと1,3,5−ベンゼントリカルボン酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体
(b)鉄イオンと1,3,5−ベンゼントリカルボン酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体
(c)クロムイオンとテレフタル酸との配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体
(d)ランタンイオンと1,3,5−トリス(4−カルボキシフェニル)ベンゼンとの配位結合によって構成される金属錯体を含み、前記金属錯体の複数が集積して形成された細孔構造を有する金属有機構造体 - 前記処理は基板に膜を形成する処理であり、前記原料は前記膜の原料であるハロゲン化金属である、請求項12ないし15のいずれか一つに記載の方法。
- 前記ハロゲン化金属は、塩化アルミニウム、五塩化タングステン及び四塩化チタンからなるハロゲン化金属群から選択されたものである、請求項16に記載の方法。
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KR20230029414A (ko) * | 2021-08-24 | 2023-03-03 | 삼성전자주식회사 | Ale용 배치-타입 장치, 및 그 장치에 기반한 ale 방법과 반도체 소자 제조방법 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS535279B2 (ja) | 1971-08-20 | 1978-02-25 | ||
JP2611009B2 (ja) * | 1989-09-12 | 1997-05-21 | 株式会社エステック | 有機金属化合物の気化供給装置 |
US6101816A (en) * | 1998-04-28 | 2000-08-15 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system |
JP4174941B2 (ja) * | 2000-02-03 | 2008-11-05 | 株式会社デンソー | 薄膜製造方法及び薄膜製造装置 |
JP2003342260A (ja) * | 2002-05-23 | 2003-12-03 | Osaka Gas Co Ltd | 三次元型金属錯体、吸着材および分離材 |
US7396381B2 (en) * | 2004-07-08 | 2008-07-08 | Air Products And Chemicals, Inc. | Storage and delivery systems for gases held in liquid medium |
JP4340221B2 (ja) * | 2004-12-03 | 2009-10-07 | キヤノンアネルバ株式会社 | 窒化金属膜作製装置及び窒化金属膜作製方法 |
JP4566787B2 (ja) * | 2005-02-28 | 2010-10-20 | 株式会社日立国際電気 | 基板処理装置および半導体装置の製造方法 |
JP5066981B2 (ja) * | 2007-03-30 | 2012-11-07 | 東京エレクトロン株式会社 | 成膜方法、成膜装置及び記憶媒体 |
JP5233562B2 (ja) * | 2008-10-04 | 2013-07-10 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
KR101158456B1 (ko) * | 2009-11-19 | 2012-06-19 | 한국화학연구원 | 결정성의 다공성 유무기 혼성체 및 그의 제조 방법 |
JP5656186B2 (ja) | 2010-06-23 | 2015-01-21 | Jx日鉱日石エネルギー株式会社 | 多孔性金属錯体及びその製造方法、ガス吸着方法並びにガス分離方法 |
JP5720406B2 (ja) * | 2011-05-10 | 2015-05-20 | 東京エレクトロン株式会社 | ガス供給装置、熱処理装置、ガス供給方法及び熱処理方法 |
JP5895712B2 (ja) * | 2012-05-31 | 2016-03-30 | 東京エレクトロン株式会社 | 原料ガス供給装置、成膜装置、原料ガスの供給方法及び記憶媒体 |
JP5953994B2 (ja) * | 2012-07-06 | 2016-07-20 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
JP2014083482A (ja) * | 2012-10-22 | 2014-05-12 | Kuraray Co Ltd | 炭化水素を含む混合ガスのガス分離材 |
JP6107327B2 (ja) | 2013-03-29 | 2017-04-05 | 東京エレクトロン株式会社 | 成膜装置及びガス供給装置並びに成膜方法 |
CN105813711B (zh) * | 2013-08-05 | 2019-09-24 | 纽麦特科技公司 | 用于电子气体储存的金属有机骨架材料 |
JP6036747B2 (ja) | 2014-05-09 | 2016-11-30 | 株式会社豊田中央研究所 | ガス貯蔵・供給システム |
KR102301071B1 (ko) * | 2014-12-04 | 2021-09-14 | 누맷 테크놀로지스, 인코포레이티드 | 전자 가스의 저감 및 정제 및 탄화수소 스트림으로부터의 수은제거를 위한 다공성 중합체 |
EP3257014B1 (en) * | 2015-02-12 | 2022-03-30 | Entegris, Inc. | Smart package |
JP5944549B2 (ja) * | 2015-03-25 | 2016-07-05 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置および半導体装置 |
WO2019071067A2 (en) * | 2017-10-05 | 2019-04-11 | Numat Technologies, Inc. | IN SITU PURIFICATION OF ELECTRONIC GAS |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20230042562A (ko) | 2021-09-21 | 2023-03-28 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치 및 기판 처리 방법 |
KR20230042563A (ko) | 2021-09-21 | 2023-03-28 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치 및 기판 처리 방법 |
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