JP2021064606A5 - - Google Patents
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- Publication number
- JP2021064606A5 JP2021064606A5 JP2020170634A JP2020170634A JP2021064606A5 JP 2021064606 A5 JP2021064606 A5 JP 2021064606A5 JP 2020170634 A JP2020170634 A JP 2020170634A JP 2020170634 A JP2020170634 A JP 2020170634A JP 2021064606 A5 JP2021064606 A5 JP 2021064606A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- kev
- ion beam
- image
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000523 sample Substances 0.000 claims 35
- 238000010884 ion-beam technique Methods 0.000 claims 17
- 238000000034 method Methods 0.000 claims 16
- 239000002245 particle Substances 0.000 claims 4
- 238000010801 machine learning Methods 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 2
- 238000013507 mapping Methods 0.000 claims 2
- 238000013528 artificial neural network Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 238000000386 microscopy Methods 0.000 claims 1
- 230000004044 response Effects 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/596,538 US11355305B2 (en) | 2019-10-08 | 2019-10-08 | Low keV ion beam image restoration by machine learning for object localization |
| US16/596,538 | 2019-10-08 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021064606A JP2021064606A (ja) | 2021-04-22 |
| JP2021064606A5 true JP2021064606A5 (enExample) | 2023-10-18 |
| JP7544320B2 JP7544320B2 (ja) | 2024-09-03 |
Family
ID=72811636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020170634A Active JP7544320B2 (ja) | 2019-10-08 | 2020-10-08 | オブジェクト位置特定のための機械学習による低ｋｅＶイオンビーム画像復元 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11355305B2 (enExample) |
| EP (1) | EP3806131A3 (enExample) |
| JP (1) | JP7544320B2 (enExample) |
| CN (1) | CN112712473A (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11955311B2 (en) | 2019-03-25 | 2024-04-09 | Nissin Ion Equipment Co., Ltd. | Ion beam irradiation apparatus and program therefor |
| US11462385B2 (en) * | 2019-03-25 | 2022-10-04 | Nissin Ion Equipment Co., Ltd. | Ion beam irradiation apparatus and program therefor |
| DE102020211900A1 (de) * | 2019-09-25 | 2021-03-25 | Hitachi High-Tech Science Corporation | Ladungsträgerstrahlvorrichtung |
| US11355305B2 (en) * | 2019-10-08 | 2022-06-07 | Fei Company | Low keV ion beam image restoration by machine learning for object localization |
| EP3961670A1 (en) * | 2020-08-31 | 2022-03-02 | FEI Company | Method of examining a sample using a charged particle beam apparatus |
| US11703468B2 (en) * | 2021-07-01 | 2023-07-18 | Fei Company | Method and system for determining sample composition from spectral data |
| US12228484B2 (en) * | 2022-05-19 | 2025-02-18 | Fei Company | Broad ion beam (BIB) systems for more efficient processing of multiple samples |
| CN115631349A (zh) * | 2022-08-29 | 2023-01-20 | 江苏第三代半导体研究院有限公司 | 一种聚焦离子束辅助加工方法、装置、设备及存储介质 |
| CN115575364B (zh) * | 2022-09-30 | 2023-08-04 | 中国科学院生物物理研究所 | 基于光学显微成像的离子束加工方法 |
| JPWO2024142280A1 (enExample) * | 2022-12-27 | 2024-07-04 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7809155B2 (en) * | 2004-06-30 | 2010-10-05 | Intel Corporation | Computing a higher resolution image from multiple lower resolution images using model-base, robust Bayesian estimation |
| US8912490B2 (en) * | 2011-06-03 | 2014-12-16 | Fei Company | Method for preparing samples for imaging |
| US8704176B2 (en) * | 2011-08-10 | 2014-04-22 | Fei Company | Charged particle microscope providing depth-resolved imagery |
| US8740209B2 (en) * | 2012-02-22 | 2014-06-03 | Expresslo Llc | Method and apparatus for ex-situ lift-out specimen preparation |
| CN104303257B (zh) * | 2012-05-21 | 2018-03-30 | Fei 公司 | 用于tem观察的薄片的制备 |
| JP6113842B2 (ja) | 2012-07-16 | 2017-04-12 | エフ・イ−・アイ・カンパニー | 集束イオン・ビーム処理の終点決定 |
| US10465293B2 (en) * | 2012-08-31 | 2019-11-05 | Fei Company | Dose-based end-pointing for low-kV FIB milling TEM sample preparation |
| EP2787523B1 (en) * | 2013-04-03 | 2016-02-10 | Fei Company | Low energy ion milling or deposition |
| US9911573B2 (en) * | 2014-03-09 | 2018-03-06 | Ib Labs, Inc. | Methods, apparatuses, systems and software for treatment of a specimen by ion-milling |
| JP6207081B2 (ja) | 2014-03-24 | 2017-10-04 | 株式会社日立ハイテクサイエンス | 集束イオンビーム装置 |
| JP6552383B2 (ja) | 2014-11-07 | 2019-07-31 | エフ・イ−・アイ・カンパニー | 自動化されたｔｅｍ試料調製 |
| US10107769B2 (en) * | 2016-01-11 | 2018-10-23 | Carl Zeiss X-Ray Microscopy Inc. | Multimodality mineralogy segmentation system and method |
| JP6668278B2 (ja) * | 2017-02-20 | 2020-03-18 | 株式会社日立ハイテク | 試料観察装置および試料観察方法 |
| US10395362B2 (en) * | 2017-04-07 | 2019-08-27 | Kla-Tencor Corp. | Contour based defect detection |
| EP3499459A1 (en) * | 2017-12-18 | 2019-06-19 | FEI Company | Method, device and system for remote deep learning for microscopic image reconstruction and segmentation |
| JP6964031B2 (ja) * | 2018-03-27 | 2021-11-10 | Ｔａｓｍｉｔ株式会社 | パターンエッジ検出方法 |
| US11355305B2 (en) * | 2019-10-08 | 2022-06-07 | Fei Company | Low keV ion beam image restoration by machine learning for object localization |
-
2019
- 2019-10-08 US US16/596,538 patent/US11355305B2/en active Active
-
2020
- 2020-10-08 EP EP20200687.0A patent/EP3806131A3/en not_active Withdrawn
- 2020-10-08 JP JP2020170634A patent/JP7544320B2/ja active Active
- 2020-10-09 CN CN202011071181.9A patent/CN112712473A/zh active Pending
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