CN112712473A - 通过机器学习对对象定位进行低kev离子束图像恢复 - Google Patents

通过机器学习对对象定位进行低kev离子束图像恢复 Download PDF

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CN112712473A
CN112712473A CN202011071181.9A CN202011071181A CN112712473A CN 112712473 A CN112712473 A CN 112712473A CN 202011071181 A CN202011071181 A CN 202011071181A CN 112712473 A CN112712473 A CN 112712473A
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sample
image
ion beam
low
kev
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Chinese (zh)
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R·J·P·郭伊尔茨
P·波托塞克
M·皮曼
O·马彻克
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    • H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching for microworking, e. g. etching of gratings or trimming of electrical components
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  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pulmonology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
CN202011071181.9A 2019-10-08 2020-10-09 通过机器学习对对象定位进行低kev离子束图像恢复 Pending CN112712473A (zh)

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US16/596538 2019-10-08
US16/596,538 US11355305B2 (en) 2019-10-08 2019-10-08 Low keV ion beam image restoration by machine learning for object localization

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CN115631349A (zh) * 2022-08-29 2023-01-20 江苏第三代半导体研究院有限公司 一种聚焦离子束辅助加工方法、装置、设备及存储介质
CN117086702A (zh) * 2022-05-19 2023-11-21 Fei 公司 用于更有效地处理多个样本的宽离子束（bib）系统

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US11462385B2 (en) * 2019-03-25 2022-10-04 Nissin Ion Equipment Co., Ltd. Ion beam irradiation apparatus and program therefor
DE102020211900A1 (de) * 2019-09-25 2021-03-25 Hitachi High-Tech Science Corporation Ladungsträgerstrahlvorrichtung
US11355305B2 (en) * 2019-10-08 2022-06-07 Fei Company Low keV ion beam image restoration by machine learning for object localization
EP3961670A1 (en) * 2020-08-31 2022-03-02 FEI Company Method of examining a sample using a charged particle beam apparatus
US11703468B2 (en) * 2021-07-01 2023-07-18 Fei Company Method and system for determining sample composition from spectral data
CN115575364B (zh) * 2022-09-30 2023-08-04 中国科学院生物物理研究所 基于光学显微成像的离子束加工方法
JPWO2024142280A1 (enExample) * 2022-12-27 2024-07-04

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US20160126060A1 (en) * 2012-07-16 2016-05-05 Scott Edward Fuller Endpointing for focused ion beam processing
CN103674635A (zh) * 2012-08-31 2014-03-26 Fei公司 在TEM样品制备中用于低kV FIB铣削的基于剂量的端点确定
US20150270102A1 (en) * 2014-03-24 2015-09-24 Hitachi High-Tech Science Corporation Focused ion beam apparatus
CN105588742A (zh) * 2014-11-07 2016-05-18 Fei公司 自动化tem样本制备
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117086702A (zh) * 2022-05-19 2023-11-21 Fei 公司 用于更有效地处理多个样本的宽离子束（bib）系统
CN115631349A (zh) * 2022-08-29 2023-01-20 江苏第三代半导体研究院有限公司 一种聚焦离子束辅助加工方法、装置、设备及存储介质

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