JP2021063802A - 強制および測定装置のモード切り替えのための堅牢なアーキテクチャ - Google Patents
強制および測定装置のモード切り替えのための堅牢なアーキテクチャ Download PDFInfo
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Abstract
Description
一例では、システムが強制電流モードで動作しているとき、強制電流回路に接続された強制電流スイッチ112及び114が閉じて、強制電圧スイッチ116及び118が開き、フィードフォワードコンデンサ126を充電する。クランプされる電圧に応答して、強制電流スイッチ112及び114が開き、強制電圧スイッチ116及び118が閉じてコンデンサを安定化回路に接続する。電圧がクランプされている間、逆バッファ128は、回路がモードを切り替えるとき、上記図2に示され説明されるように、DUT 104上の電圧スパイク又は同様のグリッチを低減、抑制、又は最小化し得るように、フィードフォワードコンデンサ126を充電し得る。
102 強制増幅器
104 DUT
106 バッファ回路
108 バッファ回路
112 強制電流スイッチ
114 強制電流スイッチ
116 強制電圧スイッチ
118 強制電圧スイッチ
120 補償ネットワーク
122 安定化回路
124 事前充電回路
126 逆バッファ
128 逆バッファ
130 コンデンサ
132 コンデンサ
134 抵抗
136 抵抗
138 バイパススイッチ
140 コンデンサ
142 スイッチ
144 スイッチ
150 出力ノード
152 電圧クランプ
154 電流クランプ
200 入力電圧
202 電圧
300 入力電圧
302 電圧
400 デジタル−アナログ変換器(DAC)
402 補償ノード
404 バイアスステージ
406 ステージ
408 カスコードステージ
410 トランジスタ
412 トランジスタ
Claims (20)
- 試験中のデバイス(DUT)に結合するために出力ノードに送達される電圧又は電流を強制し、前記DUTでの前記電圧又は前記電流のうちの他方を測定するための試験システムであって、
電圧フィードバック経路及び電流クランプを含むか、又は前記電圧フィードバック経路及び前記電流クランプに結合された強制電圧回路と、
電流フィードバック経路及び電圧クランプを含むか、又は前記電流フィードバック経路及び前記電圧クランプに結合された強制電流回路と、
前記強制電圧回路又は前記強制電流回路のうちの少なくとも1つに結合された調整可能な安定化回路であって、前記電流クランプ又は前記電圧クランプのうちの少なくとも1つが能動クランプモードで動作しているかどうかに応答して調整可能に構成可能な安定化回路と、を備える、試験システム。 - 前記安定化回路を動作モード間でモード切り替えするための前記安定化回路の少なくとも一部を初期化するように構成された事前充電回路を備える、請求項1に記載のシステム。
- 前記事前充電回路は、コンデンサと、前記出力ノードでの電圧に基づいて前記コンデンサを充電するための逆バッファとを含む、請求項2に記載のシステム。
- 前記調整可能な安定化回路は、(1)強制電圧動作モード、又は(2)前記電圧クランプが能動クランプモードで動作している強制電流動作モードのうちの少なくとも1つの間に切り替えられる補償ネットワークを含む、請求項1に記載のシステム。
- 前記補償ネットワークは、フィードフォワードコンデンサを含む、請求項4に記載のシステム。
- 前記調整可能な安定化回路は、前記出力ノードで電圧を強制するために、又は前記出力ノードで電流を強制するために使用される増幅器の補償ノード又はバッファ回路に結合された切り替え式抵抗−コンデンサネットワークを含む、請求項1に記載のシステム。
- 前記電流クランプ作動に応答して、第1のスイッチは閉じて、前記切り替え式抵抗−コンデンサネットワーク内のコンデンサに第1の抵抗を接続する、請求項6に記載のシステム。
- 前記電圧クランプ作動に応答して、第2のスイッチは閉じて、前記切り替え式抵抗−コンデンサネットワーク内のコンデンサに第2の抵抗を接続する、請求項6に記載のシステム。
- 前記補償ノードは、前記増幅器又はバッファに含まれており、前記増幅器又はバッファの入力ステージと前記増幅器又はバッファの出力ステージとの間に接続されている、請求項6に記載のシステム。
- 試験中のデバイス(DUT)に結合するために出力ノードに送達される電圧又は電流を強制し、前記DUTで前記電圧又は電流のうちの他方を測定するための試験システムであって、
電圧フィードバック経路及び電流クランプを含む強制電圧回路と、
電流フィードバック経路及び電圧クランプを含む強制電流回路と、
補償ネットワークと、
動作モード間で前記補償ネットワークをモード切り替えするために前記補償ネットワークを初期化するように構成された事前充電回路と、を備える、試験システム。 - 前記補償ネットワークは、前記電流クランプ又は前記電圧クランプのうちの少なくとも1つが能動クランプモードで動作しているかどうかに応答して構成可能である、請求項10に記載のシステム。
- 前記補償ネットワークは、(1)強制電圧動作モード、又は(2)前記電圧クランプが能動クランプモードで動作している強制電流動作モードのうちの少なくとも1つの間に切り替えられる調整可能な安定化回路を含む、請求項10に記載のシステム。
- 前記事前充電回路は、動作モード間の切り替えによって引き起こされる電圧スパイクを低減、抑制、又は最小化のうちの少なくとも1つをするためにフィードフォワードコンデンサに接続された逆バッファを含む、請求項12に記載のシステム。
- 前記補償ネットワークは、前記出力ノードで電圧を強制するために、又は前記出力ノードで電流を強制するために使用される増幅器の補償ノード又はバッファ回路に結合された切り替え式抵抗−コンデンサネットワークを含む、請求項10に記載のシステム。
- 前記電流クランプ作動に応答して、第1のスイッチは閉じて、前記切り替え式抵抗−コンデンサネットワーク内のコンデンサに第1の抵抗を接続する、請求項14に記載のシステム。
- 前記電圧クランプ作動に応答して、第2のスイッチは閉じて、前記切り替え式抵抗−コンデンサネットワーク内のコンデンサに第2の抵抗を接続する、請求項14に記載のシステム。
- 前記補償ノードは、第1の入力ステージと第2の出力ステージとの間の前記増幅器又はバッファに含まれる、請求項14に記載のシステム。
- 試験中のデバイス(DUT)に結合するために出力ノードに送達される電圧又は電流を強制し、前記DUTで前記電圧又は電流のうちの他方を測定するための方法であって、
前記出力ノードで電圧又は電流のうちの1つを強制することと、
前記出力ノードで電圧クランプ又は電流クランプのうちの少なくとも1つが発生しているかどうかに応答して、調整可能な安定化回路を使用して、前記強制電流又は前記強制電圧のうちの少なくとも1つを安定化することと、を含む、方法。 - 動作モード間で前記安定化回路をモード切り替えするために前記安定化回路の少なくとも一部を初期化することをさらに含む、
請求項18に記載の方法。 - 前記電圧又は電流のうちの少なくとも1つが能動的にクランプされているかどうかに応答して、前記安定化回路を構成することをさらに含む、
請求項19に記載の方法。
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JP7053752B2 (ja) | 2022-04-12 |
CN112650349B (zh) | 2022-07-29 |
DE102020125058A1 (de) | 2021-04-15 |
CN112650349A (zh) | 2021-04-13 |
US11105843B2 (en) | 2021-08-31 |
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