JP2021024016A - Grinding device - Google Patents

Abstract

To provide a grinding device which has high versatility and can easily change an axial center position of a spindle.SOLUTION: A grinding device 10 comprises: a chuck table 50 having a holding surface 51 for holding a work-piece W; a grinding part 20 which grinds the work-piece W held on the holding surface 51; and a column 12 which supports the grinding part 20 so that the grinding part can be fed by grinding with respect to the holding surface 51. The grinding part 20 has: a grinding wheel 45 having a magnet 46; a spindle 35 which rotatably and detachably holds the grinding wheel 45; and at least one support part 22a which supports the spindle 35. The support part 22a is provided with an arrangement part 26a along an arrangement direction that is longer toward a horizontal direction and in a direction of approaching and separating with respect to the chuck table 50, and the spindle 35 is so supported as to be movable along a longer direction of the arrangement part 26a. Thus, arrangement of the spindle 35 can be changed along the arrangement part 26a.SELECTED DRAWING: Figure 2

Description

The present invention relates to a grinding device for grinding a workpiece.

Conventionally, there is known a grinding device in which chuck tables are arranged at three concentric positions on a turntable and a grinding apparatus is provided with two grinding portions (for example, Patent Document 1). The grinding device is configured so that the plate-shaped workpieces held on the chuck table are sequentially fed toward each grinding portion while the turntable rotates. The plate-shaped work fed directly under each grinding portion is ground by the grinding portion.

JP 2013-86244

The grinding apparatus of Patent Document 1 feeds a workpiece directly under each grinding portion while rotating a chuck table. Therefore, the relationship between the axial center position of the spindle of the grinding unit and the axial center position of the chuck table is kept constant. That is, a constant positional relationship is maintained at the processing positions where the grinding wheel provided in the grinding portion and the work come into contact with each other.

By the way, in the grinding apparatus of Patent Document 1, when changing the diameter of the work or the diameter of the grinding wheel, it is necessary to change the axial center position of the spindle and the axial center position of the chuck table. However, in the grinding apparatus of Patent Document 1, the axial center position of the spindle and the axial center position of the chuck table are fixed and cannot be changed. Therefore, when changing the diameter of the work or the diameter of the grinding wheel provided for the grinding means, there is a problem that a separate grinding device must be prepared according to the diameter of the work or the diameter of the grinding wheel.

Therefore, according to the present invention, even when the diameter of the work or the diameter of the grinding wheel is changed in the grinding device, various workpieces (corresponding to the work) can be ground without preparing a separate grinding device. It is an object of the present invention to provide a grinding apparatus.

The grinding apparatus of the present invention provided to solve the above-mentioned problems is a chuck table provided with a holding surface for holding a work piece, and a grinding machine for grinding the work piece held on the holding surface of the chuck table. A grinding device including a portion and a column that supports the grinding portion so as to be able to grind and feed the holding surface, wherein the grinding portion includes a grinding wheel having a grindstone for grinding the workpiece. The grinding wheel has a spindle that holds the grinding wheel rotatably and detachably, and at least one support portion that is formed so as to expand in a direction along the chuck table and supports the spindle, and the support portion is the chuck. It is characterized in that an arrangement portion is formed along an arrangement direction that is horizontal and approaches and separates from the table, and the arrangement of the spindle can be changed along the arrangement portion.

According to this configuration, the axial center position of the spindle can be changed in the horizontal direction and the direction in which the spindle approaches and separates from the chuck table, so that even if the diameter of the grinding wheel changes, the grinding wheel The machining position where the workpiece comes into contact can be positioned at a predetermined position. As a result, one grinding device can handle various types of workpieces, so that a highly versatile grinding device can be provided. The arrangement portion may have elongated holes or openings along the arrangement direction. As long as the arrangement of the spindles can be changed, various mechanisms can be adopted for the arrangement portion. For example, the spindle may move along a rail or groove.

Further, the grinding apparatus of the present invention provided to solve the above-mentioned problems is characterized in that the arrangement portion is formed with elongated holes or openings along the arrangement direction.

According to such a configuration, the arrangement of the spindles can be easily changed along the arrangement direction. As the elongated hole or opening as the arrangement portion, various shapes can be adopted as long as the arrangement position of the spindle can be changed. For example, the elongated hole may have a rectangular shape or an elliptical shape. Further, the opening is not limited to an endless shape, but may be, for example, a U-shape or a U-shape with one end open.

Further, in the grinding apparatus of the present invention provided to solve the above-mentioned problems, the holding surface of the chuck table has a plurality of regions in which the holding surface of the chuck table is partitioned according to a plurality of types of outer shapes of the workpiece, and each region. It is characterized in that it is provided with a holding unit that generates an independent holding force for each, and the holding force by the holding unit is configured to be switchable for each region.

According to such a configuration, for example, when grinding a workpiece having a circular outer shape, even if the diameter of the workpiece changes, it can be reliably held without replacing the chuck table, so that the workability of the grinding apparatus And versatility is improved. Further, since the time required for replacing the chuck table can be eliminated, the operating rate of the apparatus can be improved. Further, even when grinding a workpiece having a different outer shape, it is possible to reliably hold the workpiece. The plurality of regions are not limited to a circular shape, and various shapes can be adopted. For example, the region may be rectangular, triangular, elliptical, or the like. Further, when grinding a workpiece on which an orientation flat (also referred to as an orientation flat) or a notch is formed, it is possible to form a region according to the shape of the orientation flat or the notch.

Further, the grinding apparatus of the present invention provided to solve the above-mentioned problems is characterized in that at least one grinding portion is provided and a plurality of chuck tables are provided.

According to this configuration, while the workpiece is being ground by the grinding unit, the workpiece can be supplied, inspected, discharged, etc. in parallel on the chuck table that does not contribute to grinding. .. Thereby, the working efficiency of the grinding apparatus can be improved. Further, by providing a plurality of grinding portions and a plurality of chuck tables, a plurality of workpieces can be machined at the same time, so that the work efficiency of grinding the workpiece is improved. Further, the above-mentioned grinding apparatus of the present invention can perform various machining of the workpiece by setting different conditions for each grinding portion.

Further, the grinding apparatus of the present invention provided to solve the above-mentioned problems has a turntable in which a plurality of chuck tables are arranged in the concentric direction, and the grinding portion is close to the turntable and at least one. It is characterized in that one is arranged.

According to such a configuration, the size of the device can be reduced as compared with the case where a plurality of grinding devices are installed. Further, by arranging a plurality of grinding portions, it is possible to grind the workpiece at each position assigned on the turntable at the same time, so that the work efficiency is improved. Further, by allocating each position of the turntable to, for example, a rough grinding position and a finish grinding position, it is possible to perform a series of machining of the workpiece in one apparatus.

Further, in the grinding apparatus of the present invention provided to solve the above-mentioned problems, at least one of the plurality of grinding wheels constituting the grinding portion is the other one or a plurality of grinding wheels, and the shape and material of the grindstone. It is characterized in that one or both of the above are different.

According to such a configuration, since a different grindstone can be used for each of the grinding parts, various machining of the workpiece can be performed. Further, by using grindstones having different diameters for a plurality of grinding parts, it is possible to process a plurality of types of workpieces with one device.

In such a configuration, the shape of the grindstone includes not only the shape of the grindstone itself but also the arrangement of the grindstone. As the shape of the grindstone itself, various shapes such as a rectangular shape, a circular shape, an arc shape, an elliptical shape, and a triangular shape can be used. Further, the shape of the grindstone is not limited to a block shape, but may be formed in a flat plate shape, for example. Further, the grindstones are not limited to those arranged in an annular shape, but can be arranged in various directions. For example, as the arrangement of the grindstones, various arrangements of grindstones such as those in which a plurality of rows of grindstones are arranged in the concentric direction and those in which a plurality of grindstones are arranged at an angle toward the center can be adopted. Further, the grindstone may be a flat plate for polishing. Further, as the diameter of the grindstone, those having various diameters can be used. As the material of the grindstone, for example, various materials such as those using diamond or CBN for the abrasive grains and those using a metal bond, a resin bond, a vitrified bond for bonding the abrasive grains can be adopted.

Further, in the grinding apparatus of the present invention provided to solve the above-mentioned problems, the support portion has a connecting portion for freely connecting the spindle so as to be detachable, and the position of the connecting portion can be determined in the arrangement portion. It is characterized by being changeable.

According to such a configuration, since the spindle is supported via the connection portion, the axial position of the spindle can be positioned along the arrangement portion without mounting the spindle itself on the support portion. It is possible to change. That is, it is possible to position the spindle at the arrangement position simply by changing the position of the connection portion.

Further, in the grinding apparatus of the present invention provided to solve the above-mentioned problems, the connection portion has a first connection portion provided on the support portion and a second connection portion provided on the spindle. The first connection portion and the second connection portion are detachably connected to each other, and the support portion has a fixing portion for fixing the first connection portion to the support portion, and the arrangement portion. However, the first connection portion can be rearranged in the arrangement direction.

According to such a configuration, since the arrangement portion can change the arrangement of the first connection portion in the arrangement direction, the position where the spindle is arranged can be determined only by positioning the first connection portion at the arrangement position of the spindle. It can be easily determined. Thereby, the position where the spindle is arranged can be determined in advance before the spindle is supported by the support portion. Various mechanisms can be adopted for the first connection portion and the second connection portion. For example, flanges may be adopted, and the respective flanges may be fastened with bolts, pins, or the like. Further, the first connecting portion and the second connecting portion may be engaged with each other by a groove or the like.

Further, in the grinding device of the present invention provided to solve the above-mentioned problems, the connection portion has a first connection portion provided on the support portion, a second connection portion provided on the spindle, and the support portion. The base portion has a base portion that is fixed to and supports the first connection portion, and the base portion changes its position in the circumferential direction with a predetermined axis intersecting with the chuck table as an axial center position. It is dispositionable and supports the first connecting portion at a position deviated from the axial center position, and the arranged portion is oriented in the circumferential direction of the base portion centered on the axial center position. The first connecting portion, which is arranged at a different position according to a change in the position of the connecting portion, can be arranged in a state where it can be connected to the second connecting portion.

According to such a configuration, the axial center position of the spindle corresponding to a plurality of outer diameters can be easily changed. Further, the arrangement position of the first connection portion with respect to the arrangement portion can be changed by changing the position in the circumferential direction with a predetermined axis intersecting the chuck table as the axial center position. ..

For example, the first connection portion is arranged at an eccentric position of the base portion so as to be point-symmetrical, and the first connection portion of the base portion is arranged at two different positions by rotating the base portion 180 degrees. Can be made to. This makes it possible to accurately position the axial center positions of the spindle at two locations. Further, for example, when switching and grinding a workpiece having two types of diameters, the axial center position of the spindle can be easily positioned at a position corresponding to the diameter of the workpiece simply by rotating the connection portion 180 degrees. It becomes possible to do. Further, since the spindle is supported via the connection portion, the axial center position can be changed without mounting the spindle itself. Further, since the axial center position of the spindle can be positioned without mounting the spindle on the support portion, workability is improved. When the first connection portion is arranged on the base portion so that the connection portion is not point-symmetrical, the connection portion is arranged at an appropriate angle by changing the position in the circumferential direction of the base portion. It should be placed in the department.

Further, in the grinding apparatus of the present invention provided to solve the above-mentioned problems, the base portion has a base portion opening formed along the arrangement direction, and the first connection portion has the base portion opening. It is characterized in that the arrangement can be changed according to.

According to such a configuration, the support position for supporting the first connection portion can be changed to the base portion. As a result, the arrangement position of the first connection portion in the arrangement portion can be changed without changing the fixed position between the base portion and the support portion, and the axial center position of the spindle can be easily changed. For example, when the connection portion is formed in a point-symmetrical shape, the support position of the first connection portion can be adjusted at an eccentric position deviating from the axis of symmetry of the connection portion, so that the spindle arrangement position can be adjusted. The degree of freedom of change is improved. That is, the connection portion can correspond to the arrangement position of a plurality of spindles by preparing one type without preparing one corresponding to the outer shape of a plurality of types of workpieces.

Further, the grinding apparatus of the present invention provided to solve the above-mentioned problems is characterized in that the grinding portion and the chuck table are independently configured to be tiltable in the horizontal direction. ..

According to such a configuration, even when the diameter of the grinding wheel to be used is changed, it is possible to adjust the contact state between the grindstone and the workpiece so that the machining conditions are matched to the workpiece. Further, for example, even when a plurality of workpieces are simultaneously machined by a plurality of grinding parts using a turntable, it is possible to grind them under the same conditions or under different conditions. Is. That is, for example, when a grindstone for rough grinding is mounted on one grinding wheel and a grindstone for finish grinding is mounted on another grinding wheel, the inclination can be adjusted in the grinding portion and the chuck table, so that the grinding wheel can be adjusted to each grinding wheel. Optimal adjustment is possible.

According to the grinding device of the present invention, since the axial position of the spindle in the grinding portion can be easily changed, a highly versatile grinding device capable of appropriately processing a workpiece corresponding to a plurality of outer diameters can be obtained. Can be provided.

Is a partially omitted front view of the grinding apparatus according to the first embodiment of the present invention. Is a right side view of FIG. Is a cross-sectional view taken along the line AA in FIG. (A) is a plan view according to an embodiment of a connection portion used in the grinding apparatus of the present invention, and (b) is a front view. Is a plan explanatory view according to an embodiment of a chuck table used in the grinding apparatus of the present invention. (A) and (b) are explanatory views showing a state in which the connection part used in the grinding apparatus of this invention is arranged in the arrangement part. (A) and (b) are explanatory views showing a state in which the connection part used in the grinding apparatus of this invention is arranged in the arrangement part. (A) and (b) are explanatory views of the use state of the grinding apparatus which concerns on 1st Embodiment of this invention. Is a plan view of the grinding apparatus according to the second embodiment of the present invention. (A) and (b) are explanatory views according to the second embodiment of the present invention. Is an explanatory view of a grinding state according to a second embodiment of the present invention.

The first embodiment of the grinding device 10 of the present invention will be described in detail below with reference to FIGS. 1 to 5. As shown in FIGS. 1 to 3, the grinding apparatus 10 includes a machine base 11 and a column 12 or the like erected on the machine base 11. Further, the grinding device 10 includes a grinding unit 20, a chuck table 50 and the like.

The machine base 11 is appropriately fixed to a floor surface or the like in the horizontal direction, and a chuck table 50 for holding the workpiece W by suction or the like is provided on the upper surface of the machine base 11. Further, a column 12 is erected around the chuck table 50 on the machine base 11.

The column 12 is provided with nuts 13 at three locations on the bottom. The nut 13 is screwed into an adjusting bolt 14 erected on the machine base 11 so as to face the nut 13. Thereby, the column 12 can adjust the inclination with respect to the machine base 11.

Two rails 12a and 12a are laid in the vertical direction on the front side of the column 12. Further, a ball screw 15 is rotatably provided between the rails 12a and 12a along the rail 12a. The ball screw 15 is pivotally supported at the bottom of the column 12. Further, the upper portion of the ball screw 15 is connected to the elevating motor 16 provided on the column 12. Therefore, when the elevating motor 16 is driven, the ball screw 15 rotates.

The grinding unit 20 includes a substantially L-shaped elevating frame 21, a spindle 35, a motor 30 that rotationally drives the spindle 35, a grinding wheel 45, and the like.

The elevating frame 21 is provided with a slider 23 on the back surface. The slider 23 is slidably fitted to the rail 12a. Further, a nut 39 is provided on the back surface of the elevating frame 21, and the nut 39 is screwed into the ball screw 15. Therefore, the elevating frame 21 can be elevated and lowered along the rail 12a by driving the elevating motor 16.

The elevating frame 21 has a support portion 22a formed along the horizontal direction of the lower portion of the elevating frame 21. In the present embodiment, the support portion 22b is provided above the support portion 22a at a distance from the support portion 22a. Further, in the elevating frame 21, support frames 24 and 24 are erected on both side surfaces, and the support plate 25 is arranged horizontally above the support frames 24 and 24.

The support portion 22a extends in the horizontal direction toward the front (leftward in FIG. 2). Further, as shown in FIG. 3, the support portion 22a has an elongated hole 26a formed as an arrangement portion of the present invention substantially in the center. The elongated hole 26a is opened in the longitudinal direction toward the front. That is, the elongated holes 26a are formed so as to be in the longitudinal direction toward the arrangement direction (hereinafter, simply referred to as the arrangement direction) which is the horizontal direction and the direction of approaching and separating from the chuck table 50 located below the support portion 22a. Has been done. Further, the support portion 22a is provided with a connecting portion 27 that detachably supports the spindle 35 via the elongated hole 26a. As shown in FIG. 3, a plurality of screw holes 41 are formed around the elongated hole 26a of the support portion 22a, and in the screw hole 41, the first connection portion 36 of the connection portion 27 described later is fixed to the support portion 22a. It forms a fixed part. The first connecting portion 36 is fixed to the supporting portion 22a by screwing a bolt into the screw hole 41. Further, the support portion 22b is formed with an elongated hole 26b similar to the support portion 22a.

As shown in FIG. 2, the connecting portion 27 includes a first connecting portion 36, a second connecting portion 37 provided on the spindle 35, and the like. As shown in FIGS. 4A and 4B, the first connecting portion 36 includes a base portion 28 and a flange portion 29. The base portion 28 is formed in a shape in which two opposite sides of a rectangular plate are chamfered in a circular shape. The base portion 28 has a base portion opening 28a formed from the center of the base portion 28 to an eccentric position. Further, the base portion 28 is provided with screw holes 38 at positions facing each screw hole 41 of the support portion 22a.

The first connecting portion 36 is provided with an opening 29a inside the flange portion 29. The flange portion 29 is erected at an eccentric position of the base portion 28 so that the opening 29a communicates with the base portion opening 28a. The flange portion 29 may be fitted upright and fixed in a recess formed in the base portion 28, for example. If the flange portion 29 is fixed to the recess of the base portion 28 in this way, the flange portion 29 can be easily moved and positioned. The flange portion 29 can be connected to the second connecting portion 37 provided on the spindle 35, which will be described later, with bolts or the like.

When the first connecting portion 36 is attached to the support portion 22a, the flange portion 29 is accommodated in the elongated hole 26a, so that a part of the outer periphery of the flange portion 29 engages with the elongated hole 26a. As a result, the first connecting portion 36 can move along the elongated hole 26a. The first connection portion 36 is fixed to the screw hole 41 as a fixing portion of the support portion 22a in a state of being positioned at a predetermined position in the elongated hole 26a. The first connecting portion 36 can be fixed to the support portion 22a by screwing a bolt (not shown) into the screw hole 41 and the screw hole 38. The first connecting portion 36 attached to the support portion 22a can be removed by removing the bolt. The attachment / detachment of the first connection portion 36 to the support portion 22a is not limited to this, and various types can be adopted. For example, even if a combination of bolts and nuts or an engagement pin is used instead of a bolt. good.

As shown in FIGS. 1 to 3, the spindle 35 includes a second connecting portion 37 provided near the lower end. The second connecting portion 37 is, for example, a flange, and can be connected to the first connecting portion 36 with bolts or the like. The first connecting portion 36 and the second connecting portion 37 may be other than the flange. Further, the spindle 35 can be equipped with a grinding wheel 45 at the lower end. The spindle 35 is erected on the support portion 22a by connecting the first connection portion 36 and the second connection portion 37 of the connection portion 27. At this time, the upper end of the spindle 35 is fixed to the support portion 22b via the elongated hole 26b. As a result, the spindle 35 is supported by the elevating frame 21. Further, a screw hole 40 that communicates with the elongated hole 26a in the horizontal direction is provided at the front end portion of the support portion 22a, and a bolt can be screwed into the screw hole 40. By screwing the bolt into the screw hole 40, it is possible to press one or both of the first connection portion 36 and the second connection portion 37 with the bolt. Therefore, it is possible to finely adjust the arrangement position of the spindle 35 along the longitudinal direction of the elongated hole 26a by pushing and pulling the bolt.

Further, as shown in FIG. 2, a driven pulley 32 is mounted on the upper end of the shaft of the spindle 35. Further, the motor 30 is supported on a support plate 25 provided on the elevating frame 21. The driven pulley 32 is connected to the drive pulley 31 connected to the motor 30 via a belt 33. As a result, the spindle 35 is rotationally driven by driving the motor 30. The support plate 25 is formed with elongated holes 25a so as to allow the motor 30 to move in the front-rear direction (left-right direction in FIG. 2).

In the present embodiment, the grinding wheel 45 uses a plurality of block-shaped grindstones 46 arranged in an annular shape. The grindstone 46 is not limited to this, and various types can be used. The grinding wheel 45 can be rotated by the rotation of the spindle 35. Further, the grinding wheel 45 can be raised and lowered as the lifting frame 21 is raised and lowered. At the time of grinding, the elevating frame 21 is lowered, so that the grinding wheel 45 is grounded and fed toward the workpiece W held by the chuck table 50. The distance between the workpiece W and the grindstone 46 can be controlled by using an appropriate in-process gauge or the like (not shown). Therefore, it is possible to control the grinding amount of the workpiece W.

In this embodiment, one chuck table 50 is provided on the machine base 11. The chuck table 50 is formed with a holding surface 51 that attracts and holds the workpiece W, and can be rotated by a rotation mechanism (not shown). Further, the chuck table 50 is provided with an inclination adjusting mechanism 57, and can be inclined with respect to the horizontal direction. The inclination adjusting mechanism 57 is composed of, for example, three adjustment screws provided on the chuck table 50, and adjusts the inclination in the horizontal direction by adjusting the heights of the three points with the adjustment screws. As a result, it is possible to adjust the machining angle between the workpiece W held by the chuck table 50 and the grindstone 46 on the grinding wheel 45.

As the holding surface 51, various materials (for example, ceramics, cemented carbide, etc.) and shapes can be adopted, such as those having a porous surface and capable of adsorbing and holding on the entire surface, and those having a plurality of drilled holes. Instead of adsorption, the workpiece W may be fixed to the holding surface 51 with wax, an adhesive or the like. As shown in FIG. 5, as the holding surface 51, one capable of switching the suction range according to the outer diameter of the workpiece W can be preferably adopted. The holding surface 51 is divided into three regions 53 by a partition wall 52.

Each region 53 is provided with a suction port 54 as a holding portion on the back surface side of the holding surface 51. A suction source 56 such as a pump is connected to each suction port 54 via a valve 55 for opening and closing. Therefore, the suction force generated in each region 53 can be switched by opening and closing the valve 55, and the suction range can be switched according to the outer diameter of the workpiece W to be held. As a result, even if the outer shape of the workpiece W changes, the workpiece W can be held on the holding surface 51 without replacing the chuck table 50.

As shown in FIGS. 1 and 2, the holding surface 51 is formed in a conical shape in which the central portion is raised by, for example, about 5 to 20 μm. It should be noted that in FIGS. 1 and 2, the swelling of the central portion of the holding surface 51 is exaggerated more than it actually is for easy understanding. Since the holding surface 51 is formed in a conical shape, it is possible to reduce variations in the grinding amount due to the difference in peripheral speed between the outer circumference and the inner circumference of the workpiece W held on the holding surface 51.

The above is the configuration in the first embodiment of the present invention, and then the details of the operation of the grinding device 10 of the present invention will be described with reference to FIGS. 6 and 7.

As shown in FIGS. 6A and 7A, the first connecting portion 36 is arranged so that the flange portion 29 is on the rear side (horizontally and in a direction away from the chuck table 50). The position before rotating the base portion 28 to be arranged is set as the first position 47 of the connecting portion 27. Subsequently, the first connection portion 36 is raised, and the first connection portion 36 is mounted and fixed in the screw hole 41 of the support portion 22a in a state where the flange portion 29 is housed in the elongated hole 26a.

When the first connecting portion 36 is fixed to the support portion 22a as described above, the first connecting portion 36 and the second connecting portion 37 of the spindle 35 are connected by an appropriate fixing method such as a bolt. Further, the motor 30 is also moved according to the position of the spindle 35 and fixed to the support plate 25. As a result, as shown in FIG. 8A, the axis 35a of the spindle 35 is located in the horizontal direction and in the direction away from the axis 50a of the chuck table 50. By moving the axis 35a of the spindle 35 in the direction away from the axis 50a of the chuck table 50 in this way, for example, the diameter of the grinding wheel 45 can be increased. That is, even when the diameter of the workpiece W is increased, the grinding wheel 45 having an appropriate diameter can be used, so that the workpiece W can be processed appropriately.

As shown in FIGS. 6 (b) and 7 (b), the base portion 28 has a symmetry point 28b (the direction in which the first connecting portion 36 is on the front side (horizontal direction and the direction approaching the chuck table 50)). (See FIG. 4 (a)) is rotated (180 degrees in the present embodiment) and arranged. The position where the base portion 28 to be arranged is rotated is set as the second position 48 of the first connecting portion 36. As a result, the base portion 28 can be arranged in the elongated hole 26a by changing the position in the circumferential direction with the symmetry point 28b passing through the axis intersecting the chuck table 50 as the axial center position. Subsequently, the first connecting portion 36 is raised, and the first connecting portion 36 is mounted and fixed to the support portion 22a in a state where the flange portion 29 is housed in the elongated hole 26a. As a result, the position of the base portion 28 changes in the circumferential direction with the symmetry point 28b as the axial center position. Further, the first connecting portion 36 arranged at different second positions 48 can be arranged in the elongated hole 26a in a state where it can be connected to the second connecting portion 37 according to the change in the position of the base portion 28 in the circumferential direction. It is said that.

At this time, since the base portion 28 is formed in a shape that is point-symmetrical with respect to the point of symmetry 28b as described above, the positions of the screw holes 41 of the support portion 22a and the positions of the screw holes 38 of the base portion 28 are different. The first position 47 and the second position 48 are the same. Therefore, the first position 47 and the second position 48 can be easily switched, so that workability is improved. Further, since the first position 47 and the second position 48 can be switched without changing the size of the base portion 28, the grinding device 10 does not become large.

When the first connection portion 36 is fixed to the support portion 22a as described above, the flange portion 29 of the first connection portion 36 and the second connection portion 37 of the spindle 35 are connected by an appropriate fixing method such as a bolt. .. Further, the motor 30 is also moved forward and fixed to the support plate 25 according to the position of the spindle 35. As a result, as shown in FIG. 8B, the axis 35a of the spindle 35 is located in the direction approaching the axis 50a of the chuck table 50. By moving the axis 35a of the spindle 35 in the direction approaching the axis 50a of the chuck table 50 in this way, for example, the diameter of the grinding wheel 45 can be reduced. That is, even when the work piece W has a smaller diameter, the work piece W can be properly processed.

In the present embodiment, the flange portion 29 is eccentrically arranged so that the connecting portion 27 is point-symmetric with respect to the symmetry point 28b, and the shape of the first connecting portion 36 is also point-symmetric with respect to the symmetry point 28b. Is forming. As a result, the axial center position of the spindle 35 can be easily changed by simply rotating the first connecting portion 36 by 180 degrees and mounting it on the support portion 22a. Further, since the axis 35a of the spindle 35 can be positioned in a state where the spindle 35 is not mounted on the grinding unit 20, workability is improved. This embodiment is particularly effective when it corresponds to the outer diameters of two types of workpieces W, and it is possible to accurately adjust the arrangement position of the axis 35a of the spindle 35.

When the positioning of the spindle 35 is completed and the grinding device 10 can be operated as described above, the workpiece W is ground. Examples of the workpiece W include various semiconductor materials such as sapphire, silicon carbide, lithium tantalate, and silicon, and various materials such as ceramics, stone, metal, glass, crystal, quartz, and resin. Further, in the present embodiment, the workpiece W is a circular thin plate, but various shapes such as a rectangular shape, a triangular shape, and an elliptical shape can be processed. Further, it is possible to process a work piece W having an arbitrary thickness.

When grinding the workpiece W, the workpiece W is attracted and held by the holding surface 51 of the chuck table 50. At this time, the suction region 53 of the holding surface 51 is changed in advance according to the outer diameter of the workpiece W. Subsequently, while rotating the grinding wheel 45 and the chuck table 50, the grinding unit 20 is lowered by the drive of the elevating motor 16 to be ground and fed, thereby grinding the workpiece W. The chuck table 50 can be rotated without being rotated or the rotation direction can be changed depending on the conditions.

The above is the first embodiment of the present invention, and then the second embodiment will be described with reference to FIGS. 9 and 10. As shown in FIG. 9, in the second embodiment, the turntable 60 and the above-mentioned grinding unit 20 are provided in a row. In the second embodiment, except for the turntable 60, the configuration is the same as that of the first embodiment, and thus the description of the same configuration portion will be omitted.

The turntable 60 is rotatably provided on the machine base 11. The two grinding units 20 are provided close to the turntable 60 in a direction of 120 degrees from the center of the turntable 60, respectively. Further, in the turntable 60, three chuck tables 50 are arranged in the concentric direction in the present embodiment. The turntable 60 is provided with an appropriate rotation mechanism (not shown), and the turntable 60 can be intermittently rotated every 120 degrees.

In the turntable 60, a supply / discharge position 62, a first grinding position 63, and a second grinding position 64 of the workpiece W are set every 120 degrees. The two grinding units 20 are arranged at the first grinding position 63 and the second grinding position 64, respectively. Therefore, the chuck table 50 is sequentially positioned at the supply / discharge position 62, the first grinding position 63, and the second grinding position 64 of the workpiece W by rotating the turntable 60 intermittently every 120 degrees.

The two grinding units 20 may have the same conditions, or may have different conditions, for example, roughing and finishing. Further, the chuck table 50 and the grinding unit 20 may be provided in a required number according to the intended use.

Next, the operation of the grinding device 10 in the second embodiment will be described below based on FIGS. 10A and 10B.

FIG. 10A is an explanatory view showing a state in which the workpiece W is ground by using the large-diameter grinding wheel 45. In this case, as shown in FIGS. 6A and 7A in the first embodiment, the position of the spindle 35 is located in the horizontal direction and in the direction away from the chuck table 50 (also referred to as the first position 47). )doing. At this time, the workpiece W is ground while the outer circumference of the grindstone 46 of the grinding wheel 45 is in contact with the vicinity of the center of the workpiece W.

FIG. 10B shows a state in which the workpiece W is ground by using a small-diameter grinding wheel 45 for one grinding portion 20 and a large-diameter grinding wheel 45 for the other grinding portion 20. It is a figure. In this case, in the grinding portion 20 on the left side of the drawing, as shown in FIGS. 6 (b) and 7 (b), the position of the spindle 35 is horizontal and close to the chuck table 50 (both the second position 48). It is located in). In this way, by making it possible to change the axial center position of the spindle 35 of the grinding unit 20, it is possible to process the workpiece W using the grinding wheels 45 having different diameters. In addition to the diameter of the grinding wheel 45, it is also possible to use a grindstone 46 having a different grindstone 46 for each grinding portion 20.

In the grinding apparatus 10 of the present invention, in the first and second embodiments, the grinding unit 20 and the chuck table 50 are configured to be independently tilted in the horizontal direction. The horizontal inclination of the grinding unit 20 and the chuck table 50 will be described in detail with reference to FIG.

FIG. 11 is an explanatory view of an inclined state of the grinding unit 20 and the chuck table 50 in the second embodiment. In FIG. 11, the workpiece W is drawn thicker than it actually is for easy understanding. Further, it should be noted that in FIG. 11, the swelling of the central portion of the holding surface 51 and the amount of inclination of the grinding wheel 45 and the chuck table 50 are also exaggerated to make it easier to understand.

As described above, the chuck table 50 has a holding surface 51 formed in a conical shape. This is because if the holding surface 51 is flat, the amount of grinding at the center of the workpiece W increases due to the difference in peripheral speed between the workpiece W and the grindstone 46, and the workpiece W cannot be ground flat. .. As the holding surface 51, a flat one or one having various shapes can be used depending on the grinding conditions. In the grinding portion 20 on the left side of the drawing, the axis 45a of the grinding wheel 45 (corresponding to the axis 35a of the spindle 35) is set in the vertical direction. That is, the grinding surface of the grindstone 46 is set to be in the horizontal direction. The axis 45a of the grinding wheel 45 can be tilted by inclining the axis 35a of the spindle 35 by adjusting the adjusting bolt 14 and the nut 13. Here, the axis 50a of the chuck table 50 is adjusted so as to be inclined with respect to the horizontal plane so that the grindstone 46 of the grinding wheel 45 and the workpiece W are in parallel contact with each other at the grinding position.

On the other hand, the grinding portion 20 on the right side of the drawing is set so that the axis 45a of the grinding wheel 45 is inclined by θ degrees to the right in the drawing with respect to the axis 61 in the vertical direction of the chuck table 50. As a result, the workpiece W and the grindstone 46 come into contact with the outer peripheral side of the workpiece W in large numbers at the grinding position. Therefore, the outer peripheral side is ground more than the central portion of the workpiece W. Although not shown, the central portion of the workpiece W can be ground more than the outer peripheral side by setting the axial center 45a of the grinding wheel 45 to be inclined to the left in the drawing on the opposite side to the above. is there. The above-mentioned angle θ can be arbitrarily set according to the grinding conditions.

As described above, in the grinding apparatus 10 of the present invention, since the grinding unit 20 and the chuck table 50 are configured to be independently inclined in the horizontal direction, the workpiece W is ground into various shapes. It is possible. Further, in the grinding device 10 including the plurality of grinding portions 20, even when a different grinding wheel 45 is used for each grinding portion 20, it is possible to set the grinding conditions suitable for each grinding portion 20.

As shown in FIG. 9, the grinding device 10 is arranged so that the two grinding portions 20 are oriented at 120 degrees with respect to the center of the turntable 60. Further, the chuck table 50 is also arranged so as to be in the direction of 120 degrees with respect to the center of the turntable 60. By arranging the grinding section 20 and the chuck table 50 as described above and unifying the inclination direction of the chuck table 50, it becomes easy to set the grinding conditions in each grinding section 20. This is because the chuck table 50 is positioned in the same axial direction at each of the supply / discharge position 62, the first grinding position 63, and the second grinding position 64 by the rotation of the turntable 60.

The above is the embodiment of the present invention, but the above-described embodiment is merely an embodiment, and the present invention is not limited to the above-described embodiment.

As the shape of the elongated hole 26a or the opening in the support portion 22a of the grinding device 10 described above, various shapes can be adopted as long as they are opened in the horizontal direction and in the direction of approaching and separating from the chuck table 50. For example, the front end side of the support portion 22a may be opened in a U-shape or a U-shape. That is, an opening may be provided so that the position of the axis 35a of the spindle 35 can move in the horizontal direction and in the direction of approaching and separating from the chuck table 50. Further, as the shape of the elongated hole 26a and the opening, various shapes such as a rectangular shape and an elliptical shape can be adopted according to the shape of the spindle 35 itself and the shape of the flange.

Although the above-described embodiment has been described mainly for grinding, it can also be used in the polishing field where a similar mechanism can be adopted. Further, although the workpiece W has been described as an example of a circular one, it is possible to grind the workpiece W having various shapes such as a quadrangle, a triangle, and an ellipse. In this case, the shape of the chuck table 50 may be appropriately changed according to the outer shape of the workpiece W.

Further, in the present embodiment, the holding surface 51 of the chuck table 50 is a plurality of regions 53 partitioned by concentric partition walls 52, but various types are used depending on the shape of the workpiece W to be held. It is possible to partition the region 53 into shapes. For example, when the workpiece W has an orientation flare, the portion of the orientation flare may be set as a separate area. The region 53 is not limited to a circular shape, and may have various shapes such as an ellipse, a triangle, and a quadrangle.

Further, in the second embodiment of the present invention, a plurality of chuck tables 50 are provided on the turntable 60, and two grinding portions 20 are arranged in a row. Instead of the turntable 60, a plurality of tables are connected in series or The workpiece W may be arranged in parallel and fed to the grinding unit 20.

In the above-described embodiment, a plurality of block-shaped grindstones 46 are arranged in an annular shape, but the present invention is not limited to this, and grindstones of various shapes can be used. For example, one in which the entire surface of the circular shape is formed of a grindstone, or one in which a plurality of block-shaped grindstones are arranged at an appropriate angle can be adopted.

In the above-described embodiment, the flange portion 29 of the first connecting portion 36 is provided upright on the base portion 28, but the flange portion 29 is integrally formed flat on the base portion 28. You may. Further, the shape of the flange portion 29 and the shape of the second connecting portion 37 in the first connecting portion 36 are not limited to a circular shape, and various shapes such as an ellipse and a quadrangle can be adopted. Further, various shapes of the base portion 28 in the first connecting portion 36 can be adopted. Further, in the present embodiment, the connection portion 27 is moved in advance and fixed to the support portion 22a, and then the first connection portion 36 and the second connection portion 37 are connected to each other. The connecting portion 27 may be moved after connecting the second connecting portion 37 to the second connecting portion 37.

Further, the base portion opening 28a in the base portion 28 can be formed into various shapes. For example, the base portion opening 28a may be formed in a rectangular or elliptical shape along the direction of the elongated hole 26a, or may be formed in a circular shape communicating with the opening 29a of the flange portion 29.

In the above-described embodiment, the grinding portion 20 and the chuck table 50 are tilted in the horizontal direction by the adjusting bolts 14 at three points, but they may be adjusted by a spacer, a jack, or the like. Further, the height may be adjusted by providing an appropriate gauge and using the gauge scale according to the conditions.

When the grinding device 10 of the present invention is used, a grindstone 46 for rough grinding is mounted on one grinding wheel 45, and a grindstone 46 for finish grinding is mounted on another grinding wheel 45, whereby the inside of one grinding device 10 It is possible to continuously perform rough grinding and finish grinding. The grinding method in this case is, for example, a step of determining the rotation of the grinding wheel 45, a step of determining the rotation speed of the chuck table 50, a step of switching the suction region 53 of the chuck table 50, and adjusting the inclination of the grinding wheel 45. This includes a step of adjusting the inclination of the chuck table 50, a step of rotating the turntable 60, and a step of moving the workpiece W from the rough grinding position of the turntable 60 to the finish grinding position.

The present invention can be applied to a general grinding apparatus for grinding a workpiece, and can be particularly suitably used for grinding wafers such as semiconductors.

W Work piece 10 Grinding device 12 Column 20 Grinding part 22 Support part 22a Support part 22b Support part 26a Long hole (arrangement part)
27 Connection 28 Base 28a Base opening 29 Flange 35 Spindle 35a Axial center 36 First connection 37 Second connection 41 Screw hole (fixing part)
45 Grinding wheel 46 Grinding stone 47 First position 48 Second position 50 Chuck table 51 Holding surface 52 Partition wall 53 Area 57 Tilt adjustment mechanism 60 Turntable

Claims (11)

A chuck table with a holding surface for holding the work piece,
A grinding unit for grinding the workpiece held on the holding surface of the chuck table, and
A grinding device including a column that supports the grinding portion with respect to the holding surface so as to be able to grind and feed.
The grinding part is
A grinding wheel having a grindstone for grinding the workpiece,
A spindle that holds the grinding wheel in a rotatable and removable manner,
It is formed so as to extend along the chuck table and has at least one support portion for supporting the spindle.
The support portion is characterized in that an arrangement portion is formed along an arrangement direction that is horizontal and approaches and separates from the chuck table, and the arrangement of the spindle can be changed along the arrangement portion. Grinding equipment. The grinding apparatus according to claim 1, wherein the arrangement portion is formed with elongated holes or openings along the arrangement direction. The holding surface of the chuck table is
A plurality of regions partitioned according to a plurality of types of outer shapes of the work piece, and
It is equipped with a holding unit that generates an independent holding force for each area.
The grinding apparatus according to claim 1 or 2, wherein the holding force by the holding portion is configured to be switchable for each region. The grinding apparatus according to any one of claims 1 to 3, wherein at least one grinding portion is provided and a plurality of chuck tables are provided. It has a turntable in which multiple chuck tables are arranged in the concentric direction.
The grinding apparatus according to any one of claims 1 to 3, wherein at least one grinding unit is arranged in the vicinity of the turntable. 4. Claim 4 characterized in that at least one of the plurality of grinding wheels constituting the grinding unit is different from the other one or a plurality of grinding wheels in either or both of the shape and material of the grindstone. Or the grinding device according to any one of 5. The support part
It has a connection part that allows the spindle to be detachably and freely connected.
The grinding apparatus according to any one of claims 1 to 6, wherein the position of the connection portion can be changed in the arrangement portion. The connection part
The first connection portion provided on the support portion and
It has a second connection provided on the spindle and has
The first connection portion and the second connection portion are detachably connected to each other.
The support part
It has a fixing portion for fixing the first connecting portion to the supporting portion.
The arrangement part
The grinding apparatus according to claim 7, wherein the first connecting portion can be rearranged in the arrangement direction. The connection part
The first connection portion provided on the support portion and
A second connection provided on the spindle and
It has a base portion that is fixed to the support portion and supports the first connection portion.
The base part
It is possible to change the position in the circumferential direction with a predetermined axis intersecting with the chuck table as the axial center position, and to support the first connection portion at a position deviated from the axial center position. And
The arrangement part
In a state where the first connecting portion arranged at a different position can be connected to the second connecting portion according to the position change of the connecting portion in the circumferential direction of the base portion centered on the axial center position. The grinding apparatus according to claim 7, wherein the grinding apparatus can be arranged. The ninth aspect of the present invention, wherein the base portion has a base portion opening formed along the arrangement direction, and the first connection portion can be rearranged along the base portion opening. Grinding device. The grinding apparatus according to any one of claims 1 to 10, wherein the grinding unit and the chuck table are independently configured to be inclined with respect to the horizontal direction.

Images