KR20100000787A - Multifuction grinding machine for grinding, lapping and polishing - Google Patents

Abstract

PURPOSE: Multifunctional grinding equipment capable of a grinding, a wrapping and a polishing work is provided to improve cost efficiency and operation efficiency by implementing a grinding, a wrapping, and a polishing work by one equipment. CONSTITUTION: Multifunctional grinding equipment(1) comprises a body(110), plate parts(120), spindle parts(130), spindle transfer parts(140), an user input part(150), and a control part. The plate parts comprise a plate which holds and manufactures an object and a first driving part which drives the plate. The spindle parts comprise a spindle which detaches and attaches a grinding wheel selectively and a second driving part which drives the spindle. The spindle transfer parts control the grinding depth of the object by transferring the spindle parts. When a work is selected through the user input part, the control part controls the elements of the work for corresponding to the selected work.

Description

Multifuction grinding machine for grinding, lapping and polishing

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a machine tool for cutting a machine material, and more particularly, to a polishing machine for performing a work of grinding a material.

Polishing equipment is a type of machine tool that performs grinding polishing, lapping polishing, polishing polishing, and is increasingly utilized not only in the machining field but also in the material processing field.

However, in the conventional grinding equipment, in order to perform the above various operations, there is a cost problem that a user must separately purchase each dedicated equipment, a grinding machine, a lapping machine, and a polishing machine. Is occurring.

In addition, the vacuum chuck used in the conventional polishing equipment has a problem of generating a vacuum depression on the object to be processed in the polishing process, and the problem that the components such as the surface plate used in the polishing equipment are limited in the processing operation is limited. have.

In addition, the conventional polishing equipment has a small number of spindles used for polishing, and there is a lack of research on a technique for effectively controlling these spindles as a unit.

An object of the present invention for solving the above problems is to reduce the equipment investment cost by performing a variety of polishing operations in one polishing equipment, improve productivity by increasing the polishing efficiency of the conventional polishing equipment and reduce the manufacturing cost It is to provide a polishing device that can be lowered.

A feature of the present invention for achieving the above-described technical problem relates to a grinding machine capable of grinding, lapping and polishing, the polishing apparatus includes a body portion for supporting and protecting the respective components of the polishing equipment; A surface plate including a surface plate for holding the object or processing the object and a first drive unit for driving the surface plate; A spindle unit including a chuck holding the object and a spindle capable of selectively detaching a polishing wheel for processing the object, and a second drive unit for driving the spindle; A spindle feeder for feeding the spindle to adjust the polishing depth of the object; A user input unit; And a controller for controlling the components to correspond to the selected task when one of a predetermined task is selected through the user input unit.

The user input unit includes a menu screen for selecting one of a grinding operation, a lapping operation, and a polishing operation, and the control unit is equipped with the polishing wheel on the spindle and grinding through the menu screen of the user input unit. A first control routine for controlling the surface plate of the surface plate to hold the object when the job is selected, and controlling the first drive unit and the second drive unit so that the polishing wheel of the spindle unit polishes the object; Is installed in the chuck and a lapping operation is selected through a menu screen of the user input unit, the chuck controls the holding of the object, and the first plate and the second drive unit make the surface of the platen to polish the object. The second control routine to control the, and the chuck is mounted on the spindle and the user When the polishing operation is selected through the force portion, the surface plate controls the holding pad of the polishing pad, the chuck controls the holding of the object, and the first polishing portion and the second driving part so that the held polishing pad plate polishes the object. And a third control routine for controlling.

The above-mentioned body portion includes a frame formed of a casting, and the rib of the frame is formed in a honeycomb shape.

The above-mentioned plate has a first drive motor, a plate drive shaft which connects the first drive motor and the plate to transmit power, and a first hollow is formed in the plate drive shaft in the axial direction, and the first The hollow is a passage through which the internal air flows out so that the surface sucks the object when the surface plate holds the object, and a passage for supplying coolant to the surface plate when the surface plate processes the object. Can be.

Here, the surface plate is provided with a pipe for passing air and coolant through the first hollow and a rotary joint valve for preventing twist of the pipe under the plate drive shaft.

The surface plate of the surface plate is made of a porous ceramic through which air and a coolant are permeated.

In addition, the above-mentioned spindle portion, using a second drive motor, the timing belt for connecting power to the second drive motor and the spindle, the second hollow is formed in the spindle in the axial direction, 2 The hollow is a passage through which the chuck is mounted on the spindle in a lapping and polishing polishing operation and when the mounted chuck holds the object, the chuck sucks out the object and flows the internal air to the outside, When the polishing operation is performed may be a passage for supplying a slurry. Here, the spindle portion is provided with angular ball bearings on the upper side and the lower side of the spindle to prevent the axial fluctuation of the spindle.

A plurality of the above-described spindle unit may be installed, and the plurality of spindle units may be integrally adjusted by the spindle transfer unit.

The above-described spindle transfer unit includes a third drive unit and a transfer module transferring the power transmitted from the third drive unit to the spindle to move the spindle in the axial direction to adjust the polishing depth.

Here, the spindle feeder, the linear scale is assembled to the third drive unit for measuring the axial movement distance of the spindle, and the electronic clutch for accurately stopping the spindle, the control unit, the user input unit When the polishing depth of the object to be processed is input, the third drive unit, the transfer module, and the electromagnetic clutch so that the axial movement distance of the spindle measured by the linear scale corresponds to the input polishing depth. To control.

The above-described polishing equipment may further include a fine adjustment handle portion for manually adjusting the polishing depth of the spindle.

In addition, the above-described polishing equipment may further include a facing portion for processing the surface of the surface plate so that the flatness of the surface of the surface plate is uniform.

Here, the facing unit includes a facing driving motor, a facing polishing tool mounted to process the surface of the surface plate, a horizontal transfer module for horizontally moving the facing polishing tool by the movement of the facing driving motor, and the facing. And a vertical adjustment module for vertically moving the polishing tool, wherein the controller is configured to move the facing polishing tool to a non-uniform point of the surface of the surface when the flattening operation of the surface plate is selected through the user input unit. A pacing driving routine for controlling the control unit; and when the facing polishing tool is moved to the non-uniform point by the control of the driving routine, the controller controls the first driving unit of the platen so that the polishing tool polishes the non-uniform point. And a planarization drive routine for driving the surface plate.

As described above, the polishing equipment according to the present invention can perform the grinding, lapping, polishing polishing operation in one equipment, thereby increasing the equipment investment cost and equipment operation efficiency.

In addition, by using a porous ceramic material, the polishing apparatus according to the present invention can minimize processing defects due to vacuum depression of the micropore portion generated in the conventional polishing process.

In addition, the polishing apparatus according to the present invention can realize various polishing processes by using the surface plate as a means of polishing processing as well as holding the object to be processed, and can improve the efficiency of polishing processing.

In addition, the polishing apparatus according to the present invention is provided with a plurality of spindle portion and they can improve the productivity by performing the machining in a group at the same time.

And, the polishing apparatus according to the present invention can manually fine-tune the polishing depth by performing the vertical axis transfer of the spindle portion through the fine adjustment handle portion.

In addition, the polishing apparatus according to the present invention is provided with a facing portion capable of correcting the flatness of the surface plate can minimize the processing defect that the plane of the processing object becomes uneven.

Hereinafter, with reference to the accompanying drawings, it will be described the configuration and operation in the polishing equipment according to an embodiment of the present invention.

1 and 2 are a front view and a plan view of a polishing apparatus according to an embodiment of the present invention.

As shown in Figure 1 and 2, the polishing equipment according to an embodiment of the present invention is the body portion 110, the surface plate 120, the spindle unit 130, the spindle feeder 140, the user input unit ( 150, a control unit 160, a fine adjustment handle unit 170, and a facing unit 180.

The polishing apparatus 1 according to the present embodiment is a kind of a machine tool which mainly performs polishing, and the work directed by the user input unit 150 may be performed by the control routine 160 in advance by the control routine. The spindle unit 130 and the spindle transfer unit 140 are controlled to perform the indicated grinding process. The fine adjustment handle 170 manually adjusts the polishing depth, and the facing unit 180 corrects the flatness of the surface plate 120 during polishing.

Hereinafter, each configuration of the polishing apparatus 1 according to the present embodiment will be described in detail with reference to FIGS. 1 and 2.

First, the body portion 110 will be described.

Body portion 110, as shown in Figure 1, serves to support and protect each component of the polishing equipment (1). Here, the body portion 110 includes a frame formed of a casting (not shown), the rib (not shown) of the frame is formed in a hexagonal honeycomb shape. The cast structure prevents torsion due to residual stresses that may occur in the weld frame, and the honeycomb of the frame ribs reinforces the stress.

Next, the surface plate 120 will be described.

As shown in FIG. 3, the surface plate 120 includes a surface plate 121 and a first driving unit 122.

Here, the surface plate 121 performs a function of holding the object to be processed or processing the object itself. As shown in FIG. 4, the porous ceramics 121b are coupled to the surface pads 121a, and a vacuum groove 121c is formed in the lower layer of the porous ceramics 121b.

Since the surface plate 121 is made of a porous ceramic material as described above, it is used for adsorbing and holding a workpiece during grinding, for polishing tools for lapping, for polishing pads for polishing, and for cerium. It can be used for adsorption and mounting of the pad plate.

The first driving unit 122 mainly serves to drive the surface plate 121, and the first driving unit 122 includes a first driving motor 122a, a surface driving shaft 122b, and a first hollow 122c. have.

The first drive motor 122a uses an electric motor capable of general precision control. And the surface drive shaft 122b serves to transmit the rotational force of the first drive motor 122a to the surface plate 121. Moreover, the 1st hollow 122c is formed in the axial direction inside the surface plate drive shaft 122b.

Here, the first hollow 122c performs various functions according to the type of work indicated by the controller 160.

For example, when the surface 121 intends to hold a cerium pad plate, which is a processing object or a polishing pad plate, for grinding or polishing, the air of the surface plate 121 is sucked outward so that the surface 121 adsorbs an object. Function as a discharge passage. The vacuum groove 121c shown in FIG. 4 will be in a vacuum state. In addition, when the surface plate 121 is used as an abrasive tool to perform a lapping operation, the surface plate 121 performs a function of a passage for supplying a coolant such as air and water to the surface plate 121.

Next, the spindle unit 130 will be described.

As shown in FIG. 1, the spindle unit 130 is positioned on the upper plate 120 and serves to hold or process the object to be processed according to the type of work performed by the controller 160.

As shown in FIG. 1, the spindle unit 130 includes a spindle 131 and a second driving unit 132.

Here, the spindle 131, as shown in Figure 5, the second hollow 131a formed in the axial direction therein, and is installed on the upper side and the lower side of the spindle 131, the axial direction of the spindle 131 An angular ball bearing 131b which prevents fluctuation is included.

Here, the second hollow 131a performs various functions according to the type of work indicated by the controller 160.

For example, when the chuck is mounted at the end of the spindle 131, and the mounted chuck is to hold the object to be processed, the second hollow 131a is a passage through which the air of the chuck is discharged to the outside to adsorb the object. Performs the function of. The chuck is a plate 121 shown in Figure 4 is made of the same material as the porous ceramic 121b.

In addition, when the polishing tool is mounted at the end of the spindle 131, it functions as a passage for supplying a slurry to the polishing tool.

The second driving unit 132 performs a function of providing power to the spindle 131, and includes a second driving motor 132a and a timing belt 132b. The second drive motor 132a is usually capable of precise control using an electric motor, and the timing belt 132b transmits power of the second drive motor 132a to the spindle 131. The timing belt 132b has an advantage of relatively low noise and vibration.

At the end of the spindle 131, the chuck or the polishing tool may be attached or detached according to the type of work performed by the controller 160.

The polishing equipment 1 according to the present embodiment includes three spindle units 130 as described above in order to increase work efficiency.

Next, the spindle feeder 140 will be described.

The spindle feeder 140 controls the polishing depth of the object to be processed by transferring the above-described spindle unit 130 in the vertical axis direction.

The spindle transfer unit 140 includes a third drive unit 141 and a transfer module 142 as shown in FIG. 1. 6 is a structural diagram showing in detail the third drive unit 141 of the spindle transfer unit 140, Figure 7 is a view showing the structure of the transfer module 142 of the spindle transfer unit 140.

As illustrated in FIG. 6, the third driving unit 141 includes a second gear 141c that connects the power generated from the third driving motor 141a and the third driving motor 141a to the third driving shaft 141b. , A linear scale for measuring a moving distance corresponding to the driving of the electromagnetic clutch 141d, the third driving shaft 141b and the second feed shaft 142b, which is operated to stop the third driving shaft 141b precisely (not shown) ).

6 and 7, the operation of the spindle feed unit 140 will be described.

First, when the controller 160 applies a control signal corresponding to the polishing depth of the object to be processed input through the user input unit 150 to the third drive unit 141, the third drive motor 141a in response to the applied control signal. ) Is driven. Next, the thrust gear 141c transmits the driving force of the third drive motor 141a to the third drive shaft 141b, and the driving force transmitted to the third drive shaft 141b is the first feed shaft of the transfer module 142. 142a). The driving force transmitted to the first feed shaft 142a is transmitted to the square slide guide 142c and the spindle hinge shaft 142d through the second feed shaft 142b.

The driving force transmitted to the square slide guide 142c as described above transfers the above-mentioned spindle unit 130 in the axial direction.

Next, the user input unit 150 will be described. The user input unit 150 is an input device for instructing a desired task from the user to the controller 160. The user input unit 150 may include a task menu and a keypad for inputting a desired value. have.

Hereinafter, the fine adjustment handle unit 170 will be described.

As shown in FIG. 8, the fine adjustment handle unit 170 includes an adjustment handle 171 and a handle shaft 172, and the driving force generated by the adjustment handle 171 is provided through the handle shaft 172. The first feed shaft 142a and the second feed shaft 142b of the spindle feeder 140 are transmitted. Accordingly, the fine adjustment handle 170 may manually adjust the polishing feed amount of the spindle 131.

Hereinafter, the facing unit 180 will be described.

As shown in FIG. 9, the facing unit 180 may include a facing driving motor 181, a belt 182, a facing feed shaft 183, a facing square guide rail 184, and a facing polishing tool 185. And a vertical adjuster (not shown) for adjusting the inclination angle of the facing abrasive tool 185.

The operation of the pacing unit 180 will be described.

First, when the flattening operation of the surface plate 121 is selected through the user input unit 150, the controller 160 moves the facing driving motor 181 to move the facing polishing tool 185 horizontally to a non-uniform point of the surface plate 121. Drive it.

Next, the belt 182 of the pacing unit 180 transfers the driving force generated by the pacing drive motor 181 to the pacing feed shaft 183 to horizontally move the pacing square guide rails 184 to face the facing polishing tool 185. ) To the desired position.

Next, when the facing grinding tool 185 reaches the non-uniform point by the operation of the control unit 160 described above, the controller 160 uses a vertical adjuster (not shown) to adjust the inclination angle of the grinding tool 185. To move the facing abrasive tool 185 vertically to a non-uniform point.

Next, the controller 160 drives the first driving unit 122 of the surface plate 120 so that the facing grinding tool 185 polishes the non-uniform point.

Hereinafter, the control unit 160 will be described. Herein, when a predetermined job is selected through the user input unit 150 described above, the controller 160 controls the components of the polishing machine to correspond to the selected job. The controller 160 may include a switching element such as a programmable logic controller (PLC), a relay, and an inverter.

Hereinafter, three processings performed by the polishing apparatus 1 according to the present embodiment will be described with reference to FIG. 10. The three control routines performed by the controller 160 will be described below. The first control routine is a grinding operation, the second control routine is a wrapping operation, and the third control routine is a polishing operation.

First, the controller 160 determines which of the three control routines is selected through the user input unit 150.

When the first control routine is selected, as shown in FIG. 10A, the controller 160 performs a grinding operation that is a first control routine. In this case, in order to perform the first control routine, the grinding wheel B should be mounted at the end of the spindle 131 as a premise.

First, the controller 160 controls the surface plate 121 of the surface plate 120 to hold the object A to be processed. This is achieved by the porous surface plate 121 adsorbing the object A.

Next, the controller 160 may drive any one of the first driver 122 and the second driver 132 so that the upper portion of the object A is processed. In addition, when the first driving unit 122 and the second driving unit 132 are simultaneously driven in opposite directions to each other, polishing can be performed in less time than driving one.

When the second control routine is selected, as shown in (b) of FIG. 10, the controller 160 performs a lapping operation as the second control routine. In this case, in order to perform the second control routine, the chuck C should be mounted at the end of the spindle 131 as a premise.

First, the controller 160 controls the chuck C to hold the object A to be processed. This is achieved by the porous chuck C absorbing the object A.

Next, the control unit 160 drives one of the first drive unit 122 and the spindle 131 so that the surface plate 121 of the surface plate 120 processes the lower portion of the object A. FIG. In addition, when the first driving unit 122 and the spindle 131 are simultaneously driven in opposite directions, polishing can be performed in a faster time than driving one.

When the third control routine is selected, as shown in FIG. 10C, the controller 160 performs a polishing operation. Here, in order to perform the third control routine, the chuck C should be mounted on the spindle 131 as a premise.

First, the controller 160 controls the surface plate 121 to hold the cerium pad plate D, which is a polishing tool. This is accomplished by the porous surface plate 121 adsorbing the cerium pad plate (D).

Next, the controller 160 controls the chuck C to hold the object A, and the first pad 122 and the spindle so that the cerium pad plate D adsorbed on the surface plate 121 polishes the object. One of 131 is driven. When the first driving unit 122 and the spindle 131 are simultaneously driven in opposite directions, polishing can be performed in less time than driving one.

As described above, in this embodiment, the ceramic of the porous material is used for the chuck C and the surface plate 121. When the lapping operation and the polishing operation according to the present embodiment are performed, the chuck C of the porous material is used to adsorb the object to be processed. In addition, in the lapping operation, the surface plate 121 of the porous material serves as an abrasive tool and at the same time serves to eject coolant such as water and air through the porous pores. In the polishing operation, the surface plate 121 serves to adsorb the cerium pad plate (D).

Polishing equipment according to the present invention can be widely used in the field of machine tools capable of a variety of abrasive machining, a field processing materials that require a variety of abrasive machining.

1 is a front view of a polishing apparatus according to an embodiment of the present invention.

2 is a plan view of a polishing apparatus according to an embodiment of the present invention.

3 is a cross-sectional view of the surface plate according to an embodiment of the present invention.

4 is a cross-sectional view of the surface plate of the surface plate according to an embodiment of the present invention.

5 is a structural diagram of the spindle unit according to an embodiment of the present invention.

6 is a structural diagram of a third drive unit of the spindle transfer unit according to an embodiment of the present invention.

7 is a structural diagram of a transfer module of the spindle transfer unit according to an embodiment of the present invention.

8 is a structural diagram of a fine adjustment handle unit according to an embodiment of the present invention.

9 is a structural diagram of a facing unit according to an embodiment of the present invention.

10 is a view for explaining a machining operation performed by the polishing equipment according to an embodiment of the present invention.

<Description of main parts of drawing>

110: body portion 120: table part

130: spindle portion 140: spindle feed portion

150: user input unit 160: control unit

170: fine adjustment handle portion 180: facing portion

Claims (14)

In the polishing equipment for polishing the object, A body part which supports and protects each component of the polishing equipment; A surface plate including a surface plate for holding the object or processing the object and a first drive unit for driving the surface plate; A spindle unit including a chuck holding the object and a spindle capable of selectively detaching a polishing wheel for processing the object, and a second drive unit for driving the spindle; A spindle feeder for feeding the spindle to adjust the polishing depth of the object; A user input unit; And A controller for controlling the components to correspond to the selected task when one of a predetermined task is selected through the user input unit; Polishing equipment, characterized in that provided. The method of claim 1, The user input unit includes a menu screen for selecting one of grinding, lapping and polishing operations. The control unit, When the grinding wheel is mounted on the spindle and a grinding operation is selected through the menu screen of the user input unit, the surface plate of the surface plate is controlled to hold the object, and the grinding wheel of the spindle unit polishes the object. A first control routine for controlling the first driving unit and the second driving unit; When the chuck is mounted on the spindle and a lapping operation is selected through a menu screen of the user input unit, the chuck is controlled to hold the object, and the first drive unit and the first plate to polish the object. A second control routine for controlling the second drive unit; When the chuck is mounted on the spindle and a polishing operation is selected through a menu screen of the user input unit, the surface plate is controlled to hold the polishing pad plate, the chuck is controlled to hold the object, and the held polishing pad And a third control routine for controlling the first drive unit and the second drive unit so that the plate polishes the object. The method of claim 1, The body portion includes a frame formed of a cast, the rib of the frame is polishing equipment, characterized in that formed in a hexagonal honeycomb shape. The method of claim 1, The platen portion, A first drive motor, a plate drive shaft for transmitting power by connecting the first drive motor and the base plate, The first hollow is formed in the axial direction on the surface plate drive shaft, The first hollow serves as a passage through which the interior air flows outward so that the surface adsorbs the object when the surface plate holds the object, and when the surface plate processes the object, Polishing equipment, characterized in that serves as a coolant supply passage. The method of claim 4, wherein The platen portion, And a pipe for passing air and a coolant through the first hollow and a rotary joint valve for preventing the pipe from being twisted. The method of claim 4, wherein The surface plate of the surface plate is polished equipment, characterized in that provided with a porous ceramic permeable to air and coolant. The method of claim 1, The spindle unit, A second driving motor, a timing belt which connects the second driving motor and the spindle to transmit power; A second hollow is formed in the spindle in the axial direction, When the chuck is mounted on the spindle and the mounted chuck holds the object, the second hollow is a passage through which the air flows out to the outside so that the chuck sucks the object. If it is a polishing equipment, characterized in that the passage for supplying a slurry. The method of claim 7, wherein The spindle unit, Polishing equipment, characterized in that the angular ball bearing is installed on the upper side and the lower side of the spindle to prevent the axial variation of the spindle. The method of claim 1, The spindle unit is provided with a plurality, the plurality of spindle unit is characterized in that the grinding apparatus is integrally adjusted by the spindle conveying unit. The method of claim 1, The spindle transfer unit, And a third drive unit and a transfer module transferring the power transmitted from the third drive unit to the spindle to move the spindle in the axial direction. The method of claim 10, The spindle transfer unit, A linear scale assembled to the third drive unit to measure the axial movement distance of the spindle, and an electromagnetic clutch for accurately stopping the spindle, The controller may include the third driving unit and the third driving unit such that an axial movement distance of the spindle measured by the linear scale corresponds to the input polishing depth when the polishing depth of the object to be processed is input through the user input unit. Polishing equipment, characterized in that for controlling the transfer module and the electronic clutch. The method of claim 1, The polishing equipment further comprises a fine adjustment handle portion for manually adjusting the polishing depth of the spindle. The method of claim 1, The polishing equipment, And a facing portion for processing the surface of the surface plate such that the flatness of the surface surface of the surface plate is uniform. The method of claim 13, The facing unit, A facing driving motor, a facing polishing tool mounted to machine the surface of the surface plate, a horizontal transfer module for moving the facing polishing tool horizontally by the movement of the facing driving motor, and a moving of the facing polishing tool vertically. Equipped with a vertical adjustment module, The control unit, A pacing drive routine for controlling the pacing drive motor to move the facing polishing tool to a non-uniform point of the surface of the surface when the flattening operation of the surface plate is selected through the user input unit; When the facing polishing tool is moved to the non-uniform point by the control of the driving routine, and the user vertically moves the facing polishing tool to the non-uniform point by using a vertical adjustment module, the controller controls the polishing tool to be at the non-uniform point. And a planarization driving routine for driving the surface plate by controlling the first drive unit of the surface plate to polish the surface.

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