JP2021012117A - Electrical inspection device and holding unit - Google Patents

Electrical inspection device and holding unit Download PDF

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Publication number
JP2021012117A
JP2021012117A JP2019126813A JP2019126813A JP2021012117A JP 2021012117 A JP2021012117 A JP 2021012117A JP 2019126813 A JP2019126813 A JP 2019126813A JP 2019126813 A JP2019126813 A JP 2019126813A JP 2021012117 A JP2021012117 A JP 2021012117A
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Prior art keywords
electrical inspection
switching unit
electrical
bearing
target substrate
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JP2019126813A
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JP7371885B2 (en
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石井　徹
Toru Ishii
徹 石井
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Yamaha Fine Technologies Co Ltd
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Yamaha Fine Technologies Co Ltd
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Priority to JP2019126813A priority Critical patent/JP7371885B2/en
Priority to KR1020200077514A priority patent/KR102311432B1/en
Priority to CN202010632526.7A priority patent/CN112198414B/en
Priority to TW109122881A priority patent/TWI748549B/en
Publication of JP2021012117A publication Critical patent/JP2021012117A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

To provide an electrical inspection device capable of easily improving efficiency of an electrical inspection of a board to be inspected.SOLUTION: An electrical inspection device includes: an electrical inspection head 11 having plural probes 11a that can abut on a board P to be inspected from a normal line direction of the board P to be inspected; a switching unit 12 having a circuit capable of switching connection with the plural probes 11a; and a bearing 13 for supporting the electrical inspection head 11 and the switching unit 12 so as to be rotatable around an axis parallel to the normal line of the board P to be inspected. The electrical inspection head 11 and the switching unit 12 are detachably and directly connected in the nominal line direction of the board P to be inspected.SELECTED DRAWING: Figure 1

Description

本発明は、電気検査装置及び保持ユニットに関する。 The present invention relates to an electrical inspection device and a holding unit.

プリント基板等の製造現場では、複数のプローブ（電気接触子）を検査対象基板の測定点に接触させて検査対象基板の電気的な特性を検査する電気検査装置が使用されている。 At the manufacturing site of printed circuit boards and the like, an electrical inspection device is used in which a plurality of probes (electrical contacts) are brought into contact with measurement points of the substrate to be inspected to inspect the electrical characteristics of the substrate to be inspected.

この電気検査装置としては、複数のプローブを有する電気検査ヘッドと複数のプローブへの接続を切り替え可能な回路を有する切替ユニットとを備えるものが公知である。この電気検査装置は、検査対象基板の導電パターンに対応するよう切替ユニットによって複数のプローブへの電気的な接続を切り替えることで、検査対象基板の電気的な特性を効率的に検査することができる。 As this electrical inspection device, a device including an electrical inspection head having a plurality of probes and a switching unit having a circuit capable of switching the connection to the plurality of probes is known. This electrical inspection device can efficiently inspect the electrical characteristics of the substrate to be inspected by switching the electrical connection to a plurality of probes by a switching unit so as to correspond to the conductive pattern of the substrate to be inspected. ..

このような電気検査装置として、複数のプローブを有する検査治具と、複数のプローブへの電気的な接続を切り替え可能な選出手段とを保持する保持部を有するものが発案されている（特開２００８−１７５５９５号公報参照）。この公報に記載の電気検査装置は、前記保持部が検査対象基板の法線と平行な回転軸の回りに回転可能に構成されている。 As such an electrical inspection device, one having an inspection jig having a plurality of probes and a holding unit for holding a selection means capable of switching electrical connection to the plurality of probes has been proposed (Japanese Patent Laid-Open No. 2008-175595 (see). In the electrical inspection apparatus described in this publication, the holding portion is configured to be rotatable around a rotation axis parallel to the normal line of the substrate to be inspected.

特開２００８−１７５５９５号公報JP-A-2008-175595

前記公報に記載の電気検査装置は、前記保持部を回転させることで、前記検査治具及び選出手段を保持部と一体的に回転させることができる。 The electrical inspection apparatus described in the publication can rotate the inspection jig and the selection means integrally with the holding portion by rotating the holding portion.

しかしながら、この電気検査装置は、前記選出手段が前記検査治具よりも回転軸の径方向外側で前記保持部に保持されている。そのため、この電気検査装置は、前記選出手段の回転による慣性モーメントが大きくなるので、前記検査治具の回転速度を大きくし難い。その結果、前記電気検査装置は、電気検査効率を十分に高め難い。また、前記電気検査装置は、前記選出手段が前記検査治具よりも回転軸の径方向外側で保持されるので、前記選出手段を回転する際に比較的大きな干渉回避用の空間が必要となる。さらに、前記電気検査装置は、前記選出手段の回転による慣性モーメントが大きくなりやすく、回転によって各部に負荷が掛かりやすくなる。 However, in this electrical inspection device, the selection means is held by the holding portion on the radial side of the rotation axis with respect to the inspection jig. Therefore, in this electric inspection device, since the moment of inertia due to the rotation of the selection means becomes large, it is difficult to increase the rotation speed of the inspection jig. As a result, it is difficult for the electrical inspection device to sufficiently improve the electrical inspection efficiency. Further, in the electrical inspection device, since the selection means is held on the radial side of the rotation axis with respect to the inspection jig, a relatively large space for avoiding interference is required when rotating the selection means. .. Further, in the electrical inspection device, the moment of inertia due to the rotation of the selection means tends to be large, and the rotation tends to apply a load to each part.

本発明の課題は、検査対象基板の電気検査の効率を容易に高めることができる電気検査装置及び保持ユニットを提供することにある。 An object of the present invention is to provide an electrical inspection device and a holding unit capable of easily increasing the efficiency of electrical inspection of a substrate to be inspected.

前記課題を解決するためになされた本発明の一態様に係る電気検査装置は、検査対象基板に対し、この検査対象基板の法線方向から接触可能な複数のプローブを有する電気検査ヘッドと、前記複数のプローブへの接続を切り替え可能な回路を有する切替ユニットと、前記電気検査ヘッド及び切替ユニットを前記法線と平行な軸の回りに回転可能に支持する軸受とを備え、前記電気検査ヘッドと切替ユニットとが、着脱可能に、前記法線方向に直結される。 The electrical inspection apparatus according to one aspect of the present invention, which has been made to solve the above problems, includes an electrical inspection head having a plurality of probes capable of contacting the inspection target substrate from the normal direction of the inspection target substrate, and the above. The electrical inspection head includes a switching unit having a circuit capable of switching connections to a plurality of probes, and a bearing that rotatably supports the electrical inspection head and the switching unit around an axis parallel to the normal. The switching unit is detachably connected directly in the normal direction.

前記電気検査ヘッド及び切替ユニットが、平面視で前記軸受の内周縁内に包含されるとよい。 The electrical inspection head and the switching unit may be included in the inner peripheral edge of the bearing in a plan view.

前記切替ユニットが前記軸受を前記法線方向に貫通した状態で配置されているとよい。 It is preferable that the switching unit is arranged so as to penetrate the bearing in the normal direction.

当該電気検査装置は、前記法線と平行な中心軸を有する筒状の胴部と、この胴部の前記検査対象基板側の端部に設けられる底部とを有する筐体を備え、前記底部が、前記切替ユニットが貫通する開口を有し、前記軸受が、前記胴部の外周面の前記検査対象基板側の端部を支持しているとよい。 The electrical inspection device includes a housing having a tubular body having a central axis parallel to the normal and a bottom provided at the end of the body on the inspection target substrate side, and the bottom is provided. It is preferable that the switching unit has an opening through which the switching unit penetrates, and the bearing supports an end portion of the outer peripheral surface of the body portion on the inspection target substrate side.

当該電気検査装置は、前記電気検査ヘッドを３次元で位置決め可能な駆動機構をさらに備えるとよい。 The electrical inspection device may further include a drive mechanism capable of positioning the electrical inspection head in three dimensions.

本発明の他の一態様に係る保持ユニットは、検査対象基板に対し、この検査対象基板の法線方向から接触可能な複数のプローブを有する電気検査ヘッドと前記複数のプローブへの接続を切り替え可能な回路を有する切替ユニットとを前記法線方向に直結した状態で保持可能な筐体と、前記筐体を前記法線と平行な軸の回りに回転可能に支持する軸受とを備える。 The holding unit according to another aspect of the present invention can switch the connection of the inspection target substrate to the electrical inspection head having a plurality of probes that can be contacted from the normal direction of the inspection target substrate and the plurality of probes. It is provided with a housing capable of holding a switching unit having such a circuit in a state of being directly connected in the normal direction, and a bearing that rotatably supports the housing around an axis parallel to the normal.

本発明の一態様に係る電気検査装置及び他の一態様に係る保持ユニットは、検査対象基板の電気検査の効率を容易に高めることができる。 The electrical inspection device according to one aspect of the present invention and the holding unit according to the other aspect can easily increase the efficiency of electrical inspection of the substrate to be inspected.

図１は、本発明の一実施形態に係る電気検査装置の本体を示す模式的一部断面斜視図である。FIG. 1 is a schematic partial cross-sectional perspective view showing the main body of the electrical inspection device according to the embodiment of the present invention. 図２は、図１の本体の一部断面正面図である。FIG. 2 is a partial cross-sectional front view of the main body of FIG. 図３は、図１の本体の底面図である。FIG. 3 is a bottom view of the main body of FIG. 図４は、図１の本体を駆動可能な駆動機構を示す模式的平面図である。FIG. 4 is a schematic plan view showing a drive mechanism capable of driving the main body of FIG. 図５は、図１の本体の検査ヘッドと切替ユニットとの接続構造を示す模式的断面図である。FIG. 5 is a schematic cross-sectional view showing a connection structure between the inspection head of the main body of FIG. 1 and the switching unit. 図６は、図１の本体とは異なる形態に係る本体を示す図２に対応する模式的断面図である。FIG. 6 is a schematic cross-sectional view corresponding to FIG. 2 showing a main body having a form different from that of the main body of FIG.

以下、適宜図面を参照しつつ、本発明の実施の形態を詳説する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings as appropriate.

［第一実施形態］
＜電気検査装置＞
図１〜図３に示すように、当該電気検査装置は、検査対象基板Ｐに対し、この検査対象基板Ｐの法線方向から接触可能な複数のプローブ１１ａを有する電気検査ヘッド１１と、複数のプローブ１１ａへの接続を切り替え可能な回路（以下、「切替回路」ともいう）を有する切替ユニット１２と、電気検査ヘッド１１及び切替ユニット１２を検査対象基板Ｐの法線と平行な軸の回りに回転可能に支持する軸受１３とを備える。また、当該電気検査装置は、電気検査ヘッド１１及び切替ユニット１２を保持する筐体１４を備える。電気検査ヘッド１１、切替ユニット１２、軸受１３及び筐体１４は、当該電気検査装置の本体１を構成する。また、軸受１３及び筐体１４は、それ自体本発明の一態様である保持ユニット３を構成する。さらに、当該電気検査装置は、図４に示すように、電気検査ヘッド１１を３次元で位置決め可能な駆動機構２を備える。加えて、当該電気検査装置は、電気検査ヘッド１１及び切替ユニット１２を軸受１３の中心軸（以下、単に「軸Ａ」ともいう）の回りに回転させるモータ等の駆動源（不図示）と、検査対象基板Ｐの導電パターンの導通や絶縁、電気抵抗、インピーダンス等を計測可能な計測部（不図示）と、軸受１３の外輪を固定可能な枠体１５とを備える。前記駆動源は、筐体１４を回転させることで、この筐体１４に保持される電気検査ヘッド１１及び切替ユニット１２を筐体１４と一体的に回転させる。なお、当該電気検査装置は、検査対象基板Ｐの位置情報を取得する画像処理デバイス（不図示）、この画像処理デバイスにより取得した位置情報に基づいて駆動機構２を駆動制御するコントローラ（不図示）、検査対象基板Ｐを複数のプローブ１１ａと対向する位置に搬送する搬送機構（不図示）等をさらに備えていてもよい。 [First Embodiment]
<Electrical inspection equipment>
As shown in FIGS. 1 to 3, the electrical inspection apparatus includes an electrical inspection head 11 having a plurality of probes 11a capable of contacting the inspection target substrate P from the normal direction of the inspection target substrate P, and a plurality of electrical inspection heads 11. The switching unit 12 having a circuit (hereinafter, also referred to as “switching circuit”) capable of switching the connection to the probe 11a, and the electrical inspection head 11 and the switching unit 12 are placed around an axis parallel to the normal of the inspection target substrate P. A bearing 13 that rotatably supports the bearing 13 is provided. Further, the electrical inspection device includes a housing 14 that holds the electrical inspection head 11 and the switching unit 12. The electrical inspection head 11, the switching unit 12, the bearing 13, and the housing 14 constitute the main body 1 of the electrical inspection device. Further, the bearing 13 and the housing 14 constitute the holding unit 3 which is one aspect of the present invention. Further, as shown in FIG. 4, the electrical inspection device includes a drive mechanism 2 capable of positioning the electrical inspection head 11 in three dimensions. In addition, the electrical inspection device includes a drive source (not shown) such as a motor that rotates the electrical inspection head 11 and the switching unit 12 around the central axis of the bearing 13 (hereinafter, also simply referred to as “axis A”). It includes a measuring unit (not shown) capable of measuring the continuity, insulation, electrical resistance, impedance, etc. of the conductive pattern of the substrate P to be inspected, and a frame 15 capable of fixing the outer ring of the bearing 13. By rotating the housing 14, the drive source rotates the electrical inspection head 11 and the switching unit 12 held in the housing 14 integrally with the housing 14. The electrical inspection device is an image processing device (not shown) that acquires the position information of the substrate P to be inspected, and a controller (not shown) that drives and controls the drive mechanism 2 based on the position information acquired by the image processing device. , A transport mechanism (not shown) for transporting the substrate P to be inspected to a position facing the plurality of probes 11a may be further provided.

（検査対象基板）
検査対象基板Ｐは、板状又はシート状である。検査対象基板Ｐとしては、例えばプリント基板が挙げられる。このプリント基板としては、例えば薄膜状の基板の上に複数の機能部が形成され、各機能部を含む部分を切り出して複数の電子部品を形成可能なものが挙げられる。 (Substrate to be inspected)
The substrate P to be inspected has a plate shape or a sheet shape. Examples of the substrate P to be inspected include a printed circuit board. Examples of this printed circuit board include those in which a plurality of functional parts are formed on a thin film-shaped substrate, and a portion including each functional part can be cut out to form a plurality of electronic components.

（電気検査ヘッド）
電気検査ヘッド１１は、複数のプローブ１１ａと、複数のプローブ１１ａを保持する保持部１１ｂとを有する。保持部１１ｂは、検査対象基板Ｐに対向する底面を有している。複数のプローブ１１ａは、この底面から検査対象基板Ｐ側に突出している。複数のプローブ１１ａは、検査対象基板Ｐの導電パターンに接触可能に配置されている。複数のプローブ１１ａは、例えば０．１ｍｍ前後から２ｍｍ以下程度のピッチで配置されている。複数のプローブ１１ａの合計本数としては、例えば２０００本以上とすることができる。 (Electrical inspection head)
The electrical inspection head 11 has a plurality of probes 11a and a holding portion 11b that holds the plurality of probes 11a. The holding portion 11b has a bottom surface facing the inspection target substrate P. The plurality of probes 11a project from the bottom surface toward the inspection target substrate P side. The plurality of probes 11a are arranged so as to be in contact with the conductive pattern of the substrate P to be inspected. The plurality of probes 11a are arranged at a pitch of, for example, about 0.1 mm to about 2 mm or less. The total number of the plurality of probes 11a can be, for example, 2000 or more.

（切替ユニット）
切替ユニット１２は、検査対象基板Ｐの種類や検査項目に応じて複数のプローブ１１ａと前述の計測部との接続を切り替え可能な切替回路（図１〜図３では不図示）を有する。切替ユニット１２は、例えば検査対象基板Ｐの導電パターンに応じて選定された１又は複数のプローブ１１ａと前記計測部との電気的な接続を選択的にＯＮにする。切替ユニット１２は、例えばコンピュータを含む制御部（不図示）で選定された１又は複数のプローブ１１ａと前記計測部との電気的な接続を、この制御部の指示に従って選択的にＯＮにする。 (Switching unit)
The switching unit 12 has a switching circuit (not shown in FIGS. 1 to 3) capable of switching the connection between the plurality of probes 11a and the above-mentioned measuring unit according to the type of the substrate P to be inspected and the inspection items. The switching unit 12 selectively turns on the electrical connection between one or a plurality of probes 11a selected according to the conductive pattern of the substrate P to be inspected and the measuring unit, for example. The switching unit 12 selectively turns on the electrical connection between one or a plurality of probes 11a selected by a control unit (not shown) including a computer and the measurement unit according to the instruction of the control unit.

（筐体）
筐体１４は、検査対象基板Ｐの法線と平行な中心軸を有する筒状の胴部１４ａと、胴部１４ａの検査対象基板Ｐ側の端部に設けられる底部１４ｂとを有する。また、筐体１４は、胴部１４ａの検査対象基板Ｐと反対側の端部に設けられる蓋部１４ｃと、底部１４ｂに設けられ、電気検査ヘッド１１を着脱可能に支持する支持部１４ｄとを有する。なお、胴部１４ａ、底部１４ｂ、蓋部１４ｃ及び支持部１４ｄは、互いに着脱可能であってもよく、着脱不能に一体的に形成されてもよい。 (Case)
The housing 14 has a tubular body portion 14a having a central axis parallel to the normal line of the inspection target substrate P, and a bottom portion 14b provided at an end portion of the body portion 14a on the inspection target substrate P side. Further, the housing 14 includes a lid portion 14c provided at an end of the body portion 14a opposite to the inspection target substrate P, and a support portion 14d provided on the bottom portion 14b to detachably support the electrical inspection head 11. Have. The body portion 14a, the bottom portion 14b, the lid portion 14c, and the support portion 14d may be detachable from each other, or may be integrally formed so as not to be detachable.

胴部１４ａは、検査対象基板Ｐ側の端部に拡径部１４ｅを有する。胴部１４ａは、好ましくは円筒状である。胴部１４ａの中心軸は、軸受１３の軸Ａと一致している。胴部１４ａは、その内部に切替ユニット１２を収容するための収容スペースを有する。 The body portion 14a has a diameter-expanded portion 14e at an end portion on the inspection target substrate P side. The body portion 14a is preferably cylindrical. The central axis of the body portion 14a coincides with the axis A of the bearing 13. The body portion 14a has a storage space for accommodating the switching unit 12 inside.

底部１４ｂは、板状、好ましくは円板状である。底部１４ｂは、胴部１４ａの検査対象基板Ｐ側の端部開口を塞いでいる。底部１４ｂは、胴部１４ａの中心軸と垂直に配置される。底部１４ｂは、切替ユニット１２が貫通する開口１４ｆを有する。開口１４ｆは、例えば対向する一対の側縁を有する矩形状である。なお、筐体１４は、切替ユニット１２を開口１４ｆを貫通した状態で固定する固定部（不図示）を有していてもよい。 The bottom portion 14b has a plate shape, preferably a disk shape. The bottom portion 14b closes the end opening of the body portion 14a on the inspection target substrate P side. The bottom portion 14b is arranged perpendicular to the central axis of the body portion 14a. The bottom portion 14b has an opening 14f through which the switching unit 12 penetrates. The opening 14f is, for example, rectangular with a pair of opposing side edges. The housing 14 may have a fixing portion (not shown) for fixing the switching unit 12 in a state of penetrating the opening 14f.

支持部１４ｄは、底部１４ｂの底面（検査対象基板Ｐと対向する側の面）に取り付けられる一対のガイド壁１４ｇと、これらのガイド壁１４ｇの底面に取り付けられ、この底面から検査対象基板Ｐ側に突出する一対のフック１４ｈとを有する。一対のガイド壁１４ｇは、開口１４ｆの前記一対の側縁に沿って左右方向（検査対象基板Ｐの法線と垂直な方向）に延びている。一対のガイド壁１４ｇは、電気検査ヘッド１１を両側から支持する。一対のフック１４ｈは、電気検査ヘッド１１を両側から挟み込み可能に構成されている。一対のフック１４ｈは、電気検査ヘッド１１を挟み込んだ状態でガイド壁１４ｇに対して胴部１４ａの中心軸方向（つまり、検査対象基板Ｐの法線方向）に移動可能に構成されている。 The support portion 14d is attached to a pair of guide walls 14g attached to the bottom surface of the bottom portion 14b (the surface facing the inspection target substrate P) and the bottom surfaces of these guide walls 14g, and is attached to the bottom surface of the inspection target substrate P side. It has a pair of hooks 14h protruding from the surface. The pair of guide walls 14g extend in the left-right direction (direction perpendicular to the normal line of the substrate P to be inspected) along the pair of side edges of the opening 14f. The pair of guide walls 14g support the electrical inspection head 11 from both sides. The pair of hooks 14h are configured so that the electrical inspection head 11 can be sandwiched from both sides. The pair of hooks 14h are configured to be movable in the central axis direction of the body portion 14a (that is, the normal direction of the inspection target substrate P) with respect to the guide wall 14g in a state where the electrical inspection head 11 is sandwiched.

〔接続構造〕
以下に、電気検査ヘッド１１と切替ユニット１２との接続構造について詳説する。電気検査ヘッド１１と切替ユニット１２とは、着脱可能に検査対象基板Ｐの法線方向に直結されている。 [Connection structure]
The connection structure between the electrical inspection head 11 and the switching unit 12 will be described in detail below. The electrical inspection head 11 and the switching unit 12 are detachably directly connected to each other in the normal direction of the inspection target substrate P.

〈着脱機構〉
図１及び図２を参照して、電気検査ヘッド１１及び切替ユニット１２の着脱機構について説明する。まず、切替ユニット１２は、筐体１４の底部１４ｂの開口１４ｆを貫通した状態で筐体１４に対して固定される。この固定状態において、切替ユニット１２の検査対象基板Ｐと対向する側の端面１２ａは、筐体１４の底部１４ｂから検査対象基板Ｐ側に突出した状態で保持される。前記固定状態において、切替ユニット１２の端面１２ａと底部１４ｂの底面とは平行である。前記固定状態において、切替ユニット１２の開口１４ｆよりも検査対象基板Ｐと反対側の部分は、筐体１４の胴部１４ａ内（前述の収容スペース内）に位置している。 <Detachment mechanism>
The attachment / detachment mechanism of the electrical inspection head 11 and the switching unit 12 will be described with reference to FIGS. 1 and 2. First, the switching unit 12 is fixed to the housing 14 in a state of penetrating the opening 14f of the bottom 14b of the housing 14. In this fixed state, the end surface 12a of the switching unit 12 facing the inspection target substrate P is held in a state of protruding from the bottom 14b of the housing 14 toward the inspection target substrate P. In the fixed state, the end surface 12a of the switching unit 12 and the bottom surface of the bottom portion 14b are parallel. In the fixed state, the portion of the switching unit 12 opposite to the inspection target substrate P from the opening 14f is located in the body portion 14a of the housing 14 (in the above-mentioned accommodation space).

次に、前述した切替ユニット１２の固定状態で、一対のフック１４ｈによって電気検査ヘッド１１を挟み込む。電気検査ヘッド１１は、一対のフック１４ｈの間を一対のガイド壁１４ｇの長手方向（一対のガイド壁１４ｇが延びている方向）にスライドすることで一対のフック１４ｈに挟み込まれる。そして、電気検査ヘッド１１を挟み込んだ状態で一対のフック１４ｈを切替ユニット１２側に移動させ、切替ユニット１２の端面１２ａと、電気検査ヘッド１１の切替ユニット１２と対向する側の端面１１ｃ（より詳しくは、保持部１１ｂの切替ユニット１２と対向する側の端面１１ｃ）とを押し当てる。これにより、電気検査ヘッド１１と切替ユニット１２とが接続される。なお、電気検査ヘッド１１を切替ユニット１２から取り外す場合には、一対のフック１４ｈを切替ユニット１２と反対側に移動させたうえ、一対のフック１４ｈから電気検査ヘッド１１を抜き出せばよい。当該電気検査装置は、このように電気検査ヘッド１１を切替ユニット１２から容易に着脱することができるので、検査対象基板Ｐの種類等に対応して電気検査ヘッド１１を容易に取り換えることができる。 Next, in the fixed state of the switching unit 12 described above, the electrical inspection head 11 is sandwiched by the pair of hooks 14h. The electrical inspection head 11 is sandwiched between the pair of hooks 14h by sliding between the pair of hooks 14h in the longitudinal direction of the pair of guide walls 14g (the direction in which the pair of guide walls 14g extend). Then, the pair of hooks 14h are moved to the switching unit 12 side with the electrical inspection head 11 sandwiched between them, and the end surface 12a of the switching unit 12 and the end surface 11c of the electrical inspection head 11 facing the switching unit 12 (more specifically). Presses against the switching unit 12 of the holding portion 11b and the end surface 11c) on the side facing the switching unit 12. As a result, the electrical inspection head 11 and the switching unit 12 are connected. When removing the electrical inspection head 11 from the switching unit 12, the pair of hooks 14h may be moved to the opposite side of the switching unit 12, and then the electrical inspection head 11 may be pulled out from the pair of hooks 14h. Since the electrical inspection head 11 can be easily attached to and detached from the switching unit 12 in this way, the electrical inspection head 11 can be easily replaced according to the type of the inspection target substrate P and the like.

〈電気的接続構造〉
続いて、電気検査ヘッド１１及び切替ユニット１２の電気的な接続構造について説明する。当該電気検査装置は、電気検査ヘッド１１と切替ユニット１２とが直結されている。換言すると、当該電気検査装置は、電気検査ヘッド１１と切替ユニット１２とが互いに押し当てられることで、同時に複数のプローブ１１ａと、複数のプローブ１１ａへの電気的な接続を切り替え可能な切替回路とが電気的に接続される。 <Electrical connection structure>
Subsequently, the electrical connection structure of the electrical inspection head 11 and the switching unit 12 will be described. In the electrical inspection device, the electrical inspection head 11 and the switching unit 12 are directly connected. In other words, the electrical inspection device includes a switching circuit capable of switching between a plurality of probes 11a and electrical connections to the plurality of probes 11a at the same time by pressing the electrical inspection head 11 and the switching unit 12 against each other. Is electrically connected.

図５を参照して、電気検査ヘッド１１及び切替ユニット１２の電気的な接続構造について詳説する。図５に示すように、電気検査ヘッド１１は、切替ユニット１２と対向する端面１１ｃから切替ユニット１２側に突出する複数のピン１１ｄを有している。ピン１１ｄは、端面１１ｃに設けられる貫通孔１１ｅを貫通した状態で保持部１１ｂに保持されている。ピン１１ｄは、それぞれ１対１でプローブ１１ａに接続されている。 The electrical connection structure of the electrical inspection head 11 and the switching unit 12 will be described in detail with reference to FIG. As shown in FIG. 5, the electrical inspection head 11 has a plurality of pins 11d protruding from the end surface 11c facing the switching unit 12 toward the switching unit 12. The pin 11d is held by the holding portion 11b in a state of penetrating the through hole 11e provided in the end surface 11c. The pins 11d are connected to the probe 11a on a one-to-one basis.

また、切替ユニット１２は、複数のピン１１ｄと検査対象基板Ｐの法線方向に１対１で対応する複数の接触子１２ｃと、この接触子１２ｃを電気検査ヘッド１１側に押すスプリング１２ｄとを有している。切替回路１２ｂは、複数のピン１１ｄと１対１で対応する接点を有している。接触子１２ｃは、スプリング１２ｄが復元力に抗して圧縮された状態で切替回路１２ｂの前記接点と電気的に接続される。 Further, the switching unit 12 has a plurality of contacts 12c corresponding to the plurality of pins 11d in the normal direction of the inspection target substrate P on a one-to-one basis, and a spring 12d that pushes the contacts 12c toward the electrical inspection head 11. Have. The switching circuit 12b has one-to-one correspondence with a plurality of pins 11d. The contactor 12c is electrically connected to the contact of the switching circuit 12b in a state where the spring 12d is compressed against the restoring force.

当該電気検査装置は、切替ユニット１２の端面１２ａと、電気検査ヘッド１１の端面１１ｃとが押し当たることで、ピン１１ｄが接触子１２ｃを押圧する。これにより、接触子１２が切替回路１２ｂ側に押し込まれ、プローブ１１ａと切替回路１２ｂとが電気的に接続される。当該電気検査装置は、スプリング１２ｄと切替回路１２ｂとの間にフレキシブル基板やワイヤ等の電気配線を有しない。当該電気検査装置は、ピン１１ｄで接触子１２ｃを押圧することで、電気検査ヘッド１１と切替ユニット１２とを検査対象基板Ｐの法線方向に容易に直結することができる。 In the electrical inspection device, the pin 11d presses the contactor 12c when the end surface 12a of the switching unit 12 and the end surface 11c of the electrical inspection head 11 are pressed against each other. As a result, the contactor 12 is pushed toward the switching circuit 12b, and the probe 11a and the switching circuit 12b are electrically connected. The electrical inspection device does not have electrical wiring such as a flexible substrate or a wire between the spring 12d and the switching circuit 12b. By pressing the contactor 12c with the pin 11d, the electrical inspection device can easily directly connect the electrical inspection head 11 and the switching unit 12 in the normal direction of the inspection target substrate P.

なお、プローブ１１ａと切替回路１２ｂとの電気的な接続構造としては、例えば切替ユニット１２の端面１２ａにソケット（不図示）が設けられ、このソケットに複数のピン１１ｄが嵌まり込むことで電気的に接続される構成を採用することも可能である。 As an electrical connection structure between the probe 11a and the switching circuit 12b, for example, a socket (not shown) is provided on the end surface 12a of the switching unit 12, and a plurality of pins 11d are fitted into the socket to electrically connect the probe 11a and the switching circuit 12b. It is also possible to adopt a configuration connected to.

（軸受）
軸受１３は、筐体１４の胴部１４ａを支持している。軸受１３の中心軸（軸Ａ）は、検査対象基板Ｐの法線と平行に配置される。軸受１３は、検査対象基板Ｐと近接して設けられることが好ましい。軸受１３と検査対象基板Ｐとの距離の上限としては、１８０ｍｍが好ましく、１２５ｍｍがより好ましく、１００ｍｍがさらに好ましい。前記距離を前記上限以下とすることで、軸受１３の傾きに起因する検査対象基板Ｐの測定点に対する複数のプローブ１１ａの位置ズレを十分に小さくすることができる。これにより、当該電気検査装置は、検査対象基板Ｐの電気検査精度を十分に高めることができる。一方、前記距離の下限としては、特に限定されるものではないが、例えば複数のプローブ１１ａと検査対象基板Ｐとの意図しない接触を抑制する観点から、１０ｍｍとすることができる。なお、「軸受と検査対象基板との距離」とは、軸受と検査対象基板の測定点との平均距離を意味し、例えば検査対象基板の法線方向における軸受と任意の５つの測定点との距離の平均値をいう。 (bearing)
The bearing 13 supports the body portion 14a of the housing 14. The central axis (axis A) of the bearing 13 is arranged parallel to the normal line of the substrate P to be inspected. The bearing 13 is preferably provided in close proximity to the substrate P to be inspected. The upper limit of the distance between the bearing 13 and the substrate P to be inspected is preferably 180 mm, more preferably 125 mm, and even more preferably 100 mm. By setting the distance to the upper limit or less, the positional deviation of the plurality of probes 11a with respect to the measurement point of the inspection target substrate P due to the inclination of the bearing 13 can be sufficiently reduced. As a result, the electrical inspection device can sufficiently improve the electrical inspection accuracy of the substrate P to be inspected. On the other hand, the lower limit of the distance is not particularly limited, but may be, for example, 10 mm from the viewpoint of suppressing unintended contact between the plurality of probes 11a and the substrate P to be inspected. The "distance between the bearing and the substrate to be inspected" means the average distance between the bearing and the measurement points of the substrate to be inspected. For example, the bearing in the normal direction of the substrate to be inspected and any five measurement points. The average value of the distance.

軸受１３は、胴部１４ａの外周面を支持している。軸受１３は、胴部１４ａの外周面の検査対象基板Ｐ側の端部を支持しており、より詳しくは胴部１４ａの拡径部１４ｅの外周面を支持している。当該電気検査装置は、軸受１３が胴部１４ａの検査対象基板Ｐ側の端部を支持しているので、軸受１３と検査対象基板Ｐとの距離を小さくしやすい。また、当該電気検査装置は、軸受１３が拡径部１４ｅの外周面を支持しているので、軸受１３の径を大きくして、軸Ａの回りの回転角度を高精度で調節しやすく、複数のプローブ１１ａを検査対象基板Ｐに対して高精度で位置決めしやすい。 The bearing 13 supports the outer peripheral surface of the body portion 14a. The bearing 13 supports the end portion of the outer peripheral surface of the body portion 14a on the inspection target substrate P side, and more specifically, supports the outer peripheral surface of the enlarged diameter portion 14e of the body portion 14a. In the electrical inspection device, since the bearing 13 supports the end portion of the body portion 14a on the inspection target substrate P side, the distance between the bearing 13 and the inspection target substrate P can be easily reduced. Further, in the electrical inspection device, since the bearing 13 supports the outer peripheral surface of the enlarged diameter portion 14e, it is easy to increase the diameter of the bearing 13 and adjust the rotation angle around the shaft A with high accuracy. The probe 11a can be easily positioned with respect to the inspection target substrate P with high accuracy.

軸受１３の外輪は、枠体１５に固定されている。具体的には、軸受１３の外輪は、複数のねじによって枠体１５に固定されている。 The outer ring of the bearing 13 is fixed to the frame body 15. Specifically, the outer ring of the bearing 13 is fixed to the frame body 15 by a plurality of screws.

図１〜図３に示すように、当該電気検査装置は、電気検査ヘッド１１及び切替ユニット１２が、平面視で軸受１３の内周縁内に包含されている。具体的には、切替ユニット１２は、検査対象基板Ｐと対向する端面１２ａ側で開口１４ｆに嵌まり込んだ状態で、筐体１４に固定されている。当該電気検査装置は、電気検査ヘッド１１及び切替ユニット１２が、平面視で軸受１３の内周縁内に包含されていることで、電気検査ヘッド１１及び切替ユニット１２の質量が胴部１４ａの中心軸近傍に集まりやすい。これにより、当該電気検査装置は、電気検査ヘッド１１及び切替ユニット１２を小さい慣性モーメントで回転させることができ、偏心が小さくなり回転が安定する。その結果、複数のプローブ１１ａを検査対象基板Ｐに対して高精度で素早く位置決めすることができる。 As shown in FIGS. 1 to 3, in the electrical inspection device, the electrical inspection head 11 and the switching unit 12 are included in the inner peripheral edge of the bearing 13 in a plan view. Specifically, the switching unit 12 is fixed to the housing 14 in a state of being fitted into the opening 14f on the end surface 12a side facing the inspection target substrate P. In the electrical inspection device, the electrical inspection head 11 and the switching unit 12 are included in the inner peripheral edge of the bearing 13 in a plan view, so that the mass of the electrical inspection head 11 and the switching unit 12 is the central axis of the body portion 14a. Easy to gather in the vicinity. As a result, the electric inspection device can rotate the electric inspection head 11 and the switching unit 12 with a small moment of inertia, the eccentricity becomes small, and the rotation becomes stable. As a result, the plurality of probes 11a can be quickly and accurately positioned with respect to the substrate P to be inspected.

切替ユニット１２は、軸受１３を検査対象基板Ｐの法線方向に貫通した状態で配置されている。より詳しくは、切替ユニット１２は、検査対象基板Ｐと対向する端面１２ａ側で軸受１３の内周縁内を貫通している。当該電気検査装置は、切替ユニット１２が軸受１３を貫通していることで、軸受１３を検査対象基板Ｐに近づけやすい。これにより、当該電気検査装置は、電気検査精度を十分に高めることができる。 The switching unit 12 is arranged in a state where the bearing 13 penetrates the inspection target substrate P in the normal direction. More specifically, the switching unit 12 penetrates the inner peripheral edge of the bearing 13 on the end surface 12a side facing the substrate P to be inspected. In the electrical inspection device, since the switching unit 12 penetrates the bearing 13, the bearing 13 can be easily brought close to the inspection target substrate P. As a result, the electrical inspection device can sufficiently improve the electrical inspection accuracy.

（駆動機構）
駆動機構２としては、直交座標型システムが用いられる。図４に示すように、駆動機構２は、Ｚ軸（図１における軸Ａと平行な軸）と垂直なＸ軸方向に延びる固定レール２１と、一対の固定レール２１上をそれぞれ移動する一対のスライダー２２と、一対のスライダー２２の間にＺ軸方向及びＸ軸方向に垂直なＹ軸方向に掛け渡される一対の可動レール２３と、一対の可動レール２３上を移動可能な第１移動体２４と、第１移動体２４に接続され、筐体１４が嵌まり込む開口２５ａを有する第２移動体２５とを有する。第２移動体２５は、筐体１４をＺ軸と平行な方向に移動可能に保持する。当該電気検査装置は、駆動機構２が電気検査ヘッド１１を３次元で位置決め可能であるので、所望の測定点に対して複数のプローブ１１ａを容易に位置合わせすることができる。 (Drive mechanism)
A Cartesian coordinate system is used as the drive mechanism 2. As shown in FIG. 4, the drive mechanism 2 includes a fixed rail 21 extending in the X-axis direction perpendicular to the Z axis (axis parallel to the axis A in FIG. 1) and a pair of fixed rails 21 moving on the pair of fixed rails 21, respectively. A pair of movable rails 23 that are hung between the sliders 22 and the pair of sliders 22 in the Y-axis direction perpendicular to the Z-axis direction and the X-axis direction, and a first moving body 24 that can move on the pair of movable rails 23. And a second moving body 25 which is connected to the first moving body 24 and has an opening 25a into which the housing 14 fits. The second moving body 25 holds the housing 14 so as to be movable in a direction parallel to the Z axis. In the electrical inspection device, since the drive mechanism 2 can position the electrical inspection head 11 in three dimensions, the plurality of probes 11a can be easily aligned with respect to a desired measurement point.

当該電気検査装置は、駆動機構２によって電気検査ヘッド１１の３次元での位置決めが可能であり、さらに前述の駆動源によって電気検査ヘッド１１を軸Ａの回りに回転可能に構成されている。電気検査ヘッド１１の軸Ａの回りの回転角度としては、特に限定されないが３６０°超が好ましい。当該電気検査装置は、電気検査ヘッド１１と切替ユニット１２とが検査対象基板Ｐの法線方向に直結されるので、電気検査ヘッド１１及び切替ユニット１２を回転させるための干渉回避用の空間を小さくできる。そのため、当該電気検査装置は、電気検査ヘッド１１の軸Ａの回りの回転角度を大きくしやすい。 In the electric inspection device, the electric inspection head 11 can be positioned in three dimensions by the drive mechanism 2, and the electric inspection head 11 can be rotated around the shaft A by the above-mentioned drive source. The rotation angle of the electrical inspection head 11 around the axis A is not particularly limited, but is preferably more than 360 °. In the electrical inspection device, since the electrical inspection head 11 and the switching unit 12 are directly connected in the normal direction of the inspection target substrate P, the space for avoiding interference for rotating the electrical inspection head 11 and the switching unit 12 is reduced. it can. Therefore, the electrical inspection device tends to increase the rotation angle of the electrical inspection head 11 around the axis A.

＜利点＞
当該電気検査装置は、電気検査ヘッド１１及び切替ユニット１２が検査対象基板Ｐの法線方向に直結されているので、電気検査ヘッド１１及び切替ユニット１２を小さい慣性モーメントで回転させることができ、複数のプローブ１１ａを検査対象基板Ｐに対して素早くかつ高精度で位置決めすることができる。従って、当該電気検査装置は、検査対象基板Ｐの電気検査効率を容易に高めることができる。また、当該電気検査装置は、電気検査ヘッド１１及び切替ユニット１２を小さい慣性モーメントで回転させることができるので、この回転に起因する各部の負荷を小さくすることができる。さらに、当該電気検査装置は、電気検査ヘッド１１及び切替ユニット１２が直結されているので、電気的接続の信頼性を高めると共に、部品点数の増加を抑え、装置の小型化を図ることができる。 <Advantage>
In the electric inspection device, since the electric inspection head 11 and the switching unit 12 are directly connected in the normal direction of the inspection target substrate P, the electric inspection head 11 and the switching unit 12 can be rotated with a small moment of inertia, and a plurality of such electric inspection devices can be rotated. The probe 11a can be positioned quickly and with high accuracy with respect to the substrate P to be inspected. Therefore, the electrical inspection device can easily improve the electrical inspection efficiency of the substrate P to be inspected. Further, since the electric inspection device can rotate the electric inspection head 11 and the switching unit 12 with a small moment of inertia, the load of each part due to this rotation can be reduced. Further, since the electrical inspection head 11 and the switching unit 12 are directly connected to the electrical inspection device, the reliability of the electrical connection can be improved, the increase in the number of parts can be suppressed, and the device can be miniaturized.

＜保持ユニット＞
図１及び図２に示すように、当該保持ユニット３は、検査対象基板Ｐに対し、この検査対象基板Ｐの法線方向から接触可能な複数のプローブ１１ａを有する電気検査ヘッド１１と複数のプローブ１１ａへの接続を切り替え可能な回路を有する切替ユニット１２とを検査対象基板Ｐの法線方向に直結した状態で保持可能な筐体１４と、筐体１４を検査対象基板Ｐの法線と平行な軸Ａの回りに回転可能に支持する軸受１３とを備える。 <Holding unit>
As shown in FIGS. 1 and 2, the holding unit 3 has an electrical inspection head 11 having a plurality of probes 11a capable of contacting the inspection target substrate P from the normal direction of the inspection target substrate P, and a plurality of probes. A housing 14 capable of holding a switching unit 12 having a circuit capable of switching the connection to 11a in a state of being directly connected in the normal direction of the inspection target substrate P, and a housing 14 parallel to the normal of the inspection target substrate P. A bearing 13 that rotatably supports the shaft A is provided.

＜利点＞
当該保持ユニット３は、電気検査ヘッド１１及び切替ユニット１２を検査対象基板Ｐの法線方向に直結した状態で保持できるので、電気検査ヘッド１１及び切替ユニット１２を小さい慣性モーメントで回転させることができ、複数のプローブ１１ａを検査対象基板Ｐに対して素早くかつ高精度で位置決めすることができる。従って、当該保持ユニット３は、検査対象基板Ｐの電気検査効率を容易に高めることができる。 <Advantage>
Since the holding unit 3 can hold the electrical inspection head 11 and the switching unit 12 in a state of being directly connected to the normal direction of the inspection target substrate P, the electrical inspection head 11 and the switching unit 12 can be rotated with a small moment of inertia. , A plurality of probes 11a can be positioned quickly and with high accuracy with respect to the substrate P to be inspected. Therefore, the holding unit 3 can easily improve the electrical inspection efficiency of the inspection target substrate P.

［その他の実施形態］
前記実施形態は、本発明の構成を限定するものではない。従って、前記実施形態は、本明細書の記載及び技術常識に基づいて前記実施形態各部の構成要素の省略、置換又は追加が可能であり、それらは全て本発明の範囲に属するものと解釈されるべきである。 [Other Embodiments]
The embodiments do not limit the configuration of the present invention. Therefore, it is possible to omit, replace or add components of each part of the embodiment based on the description of the present specification and common general technical knowledge, and all of them are construed as belonging to the scope of the present invention. Should be.

当該電気検査装置は、例えば図６に示すように、電気検査ヘッド１１及び切替ユニット１２が平面視で軸受３３の内周縁内に内包されない構成を採用することも可能である。図６の電気検査装置は、筐体３４が、検査対象基板Ｐの法線と平行な中心軸を有する筒状の胴部３４ａと、胴部３４ａの検査対象基板Ｐ側の端部に設けられる底部３４ｂと、胴部３４ａの検査対象基板Ｐと反対側の端部に設けられる蓋部３４ｃと、底部３４ｂに設けられ、電気検査ヘッド１１を着脱可能に支持する支持部３４ｄとを有している。当該電気検査装置は、蓋部３４ｃの外面に軸受３３が配置されている。当該電気検査装置は、図１の電気検査装置と同様、電気検査ヘッド１１及び切替ユニット１２が直結されていることで、電気的接続の信頼性を高めることができる。また、当該電気検査装置は、電気検査ヘッド１１及び切替ユニット１２の質量を胴部３４ａの中心軸近傍に集めやすく、電気検査ヘッド１１及び切替ユニット１２を小さい慣性モーメントで回転させることができ、偏心が小さくなり回転が安定する。さらに、当該電気検査装置は、軸受３３が蓋部３４ｃの外面に配置されるので、装置の小型化を図りやすい。 As shown in FIG. 6, for example, the electrical inspection device can adopt a configuration in which the electrical inspection head 11 and the switching unit 12 are not included in the inner peripheral edge of the bearing 33 in a plan view. In the electrical inspection device of FIG. 6, the housing 34 is provided at a tubular body portion 34a having a central axis parallel to the normal line of the inspection target substrate P and an end portion of the body portion 34a on the inspection target substrate P side. It has a bottom portion 34b, a lid portion 34c provided at an end portion of the body portion 34a opposite to the inspection target substrate P, and a support portion 34d provided on the bottom portion 34b to detachably support the electrical inspection head 11. There is. In the electrical inspection device, a bearing 33 is arranged on the outer surface of the lid portion 34c. Similar to the electrical inspection device of FIG. 1, the electrical inspection device is directly connected to the electrical inspection head 11 and the switching unit 12, so that the reliability of the electrical connection can be improved. Further, the electric inspection device can easily collect the mass of the electric inspection head 11 and the switching unit 12 near the central axis of the body portion 34a, can rotate the electric inspection head 11 and the switching unit 12 with a small moment of inertia, and is eccentric. Becomes smaller and the rotation becomes stable. Further, in the electrical inspection device, the bearing 33 is arranged on the outer surface of the lid portion 34c, so that the device can be easily miniaturized.

前記切替ユニットは、必ずしも軸受を検査対象基板の法線方向に貫通した状態で配置されていなくてもよい。例えば当該電気検査装置は、電気検査ヘッドが軸受を検査対象基板の法線方向に貫通した状態で配置されてもよい。この構成によると、軸受と検査対象基板との距離を小さくしやすい。また、当該電気検査装置は、図６に示すように、電気検査ヘッド１１及び切替ユニット１２がいずれも軸受３３を貫通しない構成を採用することも可能である。 The switching unit does not necessarily have to be arranged so as to penetrate the bearing in the normal direction of the substrate to be inspected. For example, the electrical inspection device may be arranged with the electrical inspection head penetrating the bearing in the normal direction of the substrate to be inspected. According to this configuration, it is easy to reduce the distance between the bearing and the substrate to be inspected. Further, as shown in FIG. 6, the electrical inspection device can adopt a configuration in which neither the electrical inspection head 11 nor the switching unit 12 penetrates the bearing 33.

前記筐体の具体的構成は前述の実施形態の構成に限定されるものではない。例えば前記胴部は、必ずしも検査対象基板側の端部に拡径部を有していなくてもよい。また、前記筐体は、複数の電気検査ヘッド及び／又は複数の切替ユニットを保持可能に構成されていてもよい。例えば、前記筐体は、筒状の胴部と、この胴部の検査対象基板側の端部に設けられる底部とを有し、この底部に複数の切替ユニットが貫通する複数の開口が形成されていてもよい。さらに、前述の筐体に代えて複数のフレームを組み合わせた枠体を用いることも可能である。 The specific configuration of the housing is not limited to the configuration of the above-described embodiment. For example, the body portion does not necessarily have to have a diameter-expanded portion at an end portion on the inspection target substrate side. Further, the housing may be configured to be able to hold a plurality of electrical inspection heads and / or a plurality of switching units. For example, the housing has a tubular body portion and a bottom portion provided at an end portion of the body portion on the inspection target substrate side, and a plurality of openings through which a plurality of switching units penetrate are formed in the bottom portion. You may be. Further, it is also possible to use a frame body in which a plurality of frames are combined instead of the above-mentioned housing.

前記駆動機構の具体的構成は前述の実施形態の構成に限定されるものではない。例えば前記駆動機構として、多関節ロボットを用いることも可能である。 The specific configuration of the drive mechanism is not limited to the configuration of the above-described embodiment. For example, an articulated robot can be used as the drive mechanism.

以上説明したように、本発明の一態様に係る電気検査装置は、プリント基板の電気検査に好適に用いられる。 As described above, the electrical inspection apparatus according to one aspect of the present invention is suitably used for electrical inspection of printed circuit boards.

１ 本体
２ 駆動機構
３ 保持ユニット
１１ 電気検査ヘッド
１１ａ プローブ
１１ｂ 保持部
１１ｃ 端面
１１ｄ 対向面
１１ｅ 貫通孔
１２ 切替ユニット
１２ａ 端面
１２ｂ 切替回路
１２ｃ 接触子
１２ｄ スプリング
１３，３３ 軸受
１４，３４ 筐体
１４ａ，３４ａ 胴部
１４ｂ，３４ｂ 底部
１４ｃ，３４ｃ 蓋部
１４ｄ，３４ｄ 支持部
１４ｅ 拡径部
１４ｆ 開口
１４ｇ ガイド壁
１４ｈ フック
１５ 枠体
２１ 固定レール
２２ スライダー
２３ 可動レール
２４ 第１移動体
２５ 第２移動体
２５ａ 開口
Ｐ 検査対象基板
Ａ 軸 1 Main body 2 Drive mechanism 3 Holding unit 11 Electrical inspection head 11a Probe 11b Holding part 11c End surface 11d Opposing surface 11e Through hole 12 Switching unit 12a End surface 12b Switching circuit 12c Contact 12d Spring 13, 33 Bearing 14, 34 Housing 14a, 34a Body 14b, 34b Bottom 14c, 34c Lid 14d, 34d Support 14e Expanded diameter 14f Opening 14g Guide wall 14h Hook 15 Frame 21 Fixed rail 22 Slider 23 Movable rail 24 First moving body 25 Second moving body 25a Opening P Inspected substrate A axis

Claims (6)

検査対象基板に対し、この検査対象基板の法線方向から接触可能な複数のプローブを有する電気検査ヘッドと、
前記複数のプローブへの接続を切り替え可能な回路を有する切替ユニットと、
前記電気検査ヘッド及び切替ユニットを前記法線と平行な軸の回りに回転可能に支持する軸受と
を備え、
前記電気検査ヘッドと切替ユニットとが、着脱可能に、前記法線方向に直結される電気検査装置。 An electrical inspection head having a plurality of probes capable of contacting the inspection target substrate from the normal direction of the inspection target substrate,
A switching unit having a circuit capable of switching the connection to the plurality of probes, and
It is provided with a bearing that rotatably supports the electrical inspection head and the switching unit around an axis parallel to the normal.
An electrical inspection device in which the electrical inspection head and a switching unit are detachably connected directly in the normal direction. 前記電気検査ヘッド及び切替ユニットが、平面視で前記軸受の内周縁内に包含される請求項１に記載の電気検査装置。 The electrical inspection device according to claim 1, wherein the electrical inspection head and the switching unit are included in the inner peripheral edge of the bearing in a plan view. 前記切替ユニットが、前記軸受を前記法線方向に貫通した状態で配置されている請求項２に記載の電気検査装置。 The electrical inspection device according to claim 2, wherein the switching unit is arranged in a state of penetrating the bearing in the normal direction. 前記法線と平行な中心軸を有する筒状の胴部と、この胴部の前記検査対象基板側の端部に設けられる底部とを有する筐体を備え、
前記底部が、前記切替ユニットが貫通する開口を有し、
前記軸受が、前記胴部の外周面の前記検査対象基板側の端部を支持している請求項３に記載の電気検査装置。 A housing having a tubular body having a central axis parallel to the normal and a bottom provided at the end of the body on the inspection target substrate side is provided.
The bottom has an opening through which the switching unit penetrates.
The electrical inspection apparatus according to claim 3, wherein the bearing supports an end portion of the outer peripheral surface of the body portion on the inspection target substrate side. 前記電気検査ヘッドを３次元で位置決め可能な駆動機構をさらに備える請求項１から請求項４のいずれか１項に記載の電気検査装置。 The electrical inspection apparatus according to any one of claims 1 to 4, further comprising a drive mechanism capable of positioning the electrical inspection head in three dimensions. 検査対象基板に対し、この検査対象基板の法線方向から接触可能な複数のプローブを有する電気検査ヘッドと前記複数のプローブへの接続を切り替え可能な回路を有する切替ユニットとを前記法線方向に直結した状態で保持可能な筐体と、
前記筐体を前記法線と平行な軸の回りに回転可能に支持する軸受と
を備える保持ユニット。 With respect to the inspection target substrate, an electrical inspection head having a plurality of probes that can be contacted from the normal direction of the inspection target substrate and a switching unit having a circuit capable of switching the connection to the plurality of probes are provided in the normal direction. A housing that can be held in a directly connected state and
A holding unit comprising a bearing that rotatably supports the housing around an axis parallel to the normal.
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