CN85107031B - Coordinate-measuring instrument - Google Patents
Coordinate-measuring instrument Download PDFInfo
- Publication number
- CN85107031B CN85107031B CN85107031A CN85107031A CN85107031B CN 85107031 B CN85107031 B CN 85107031B CN 85107031 A CN85107031 A CN 85107031A CN 85107031 A CN85107031 A CN 85107031A CN 85107031 B CN85107031 B CN 85107031B
- Authority
- CN
- China
- Prior art keywords
- mentioned
- measuring head
- measurement axis
- described coordinate
- measuring apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Images
Abstract
The present invention relates to a coordinate measuring apparatus which comprises a working table 50, a slide seat 110, a Z axis device 180, a measuring head storage device and a measuring head mounting / dismounting mechanism 200, wherein the working table 50 is arranged on a bottom plate 10 and moves along the Y axis direction; the slide seat 110 moves along the X axis direction by an upright post 90 and a cross beam 100; the Z axis device 180 is supported by the slide seat 110 and moves along the Z axis direction; the measuring head storage device is fixed on the working table 50, a plurality of measuring head holding devices 250 are arranged on the measuring head storage device, and each measuring head holding device is provided with a signalling measuring head 280; the measuring head mounting / dismounting mechanism 200 is arranged in the Z axis device 180. The optimum signalling measuring head 280 can be selected to be arranged on the Z axis device by the mounting / dismounting mechanism 200 according to the shape of measured workpieces.
Description
The present invention relates to a kind of coordinate measuring apparatus, relate to the automatic mounting mechanism of a kind of measuring head more precisely, this mechanism can automatically mount and dismount the signalling measuring head.
Up to the present, known coordinate measuring apparatus, its signalling measuring head is to use the activation signal measuring head directly to produce signal, perhaps uses the approach signal measuring head to produce predetermined approach signal indirectly, goes out the shape of measured workpiece by the traverse measurement of three-dimensional.For example at United States Patent (USP) 4,369, the measuring head described in 581 " determining the method and apparatus of circular turntable turning axle in the multidimensional coordinate measuring instrument ", and first-class in the measurement described in the clear 58-173425 of Japanese patent gazette " three coordinate measuring machine ".Usually, such coordinate measuring apparatus is to arrange in the following manner: portal frame places on the base plate, and it can be longitudinally, and promptly Y direction moves; A slide is installed on the crossbeam on this portal frame top, and it can be along horizontal, and promptly X-direction moves; And Z can be vertically to measurement axis, and promptly Z-direction moves.This class coordinate measuring apparatus has adopted a kind of modular construction, promptly at first portal frame is installed on the base plate, refills slide on this portal frame, at last Z is contained on this slide to measurement axis.
Consequently, unless all adopt rigid structure from base plate to Z to measurement axis, otherwise to guarantee that the accuracy of instrument is very difficult.All adopt in each measurement axis on the automatic coordinate measuring apparatus of automatic type of drive, this structure will produce the following shortcoming: owing to heavy duty, need to improve the power of driving power; Because inertia is big, need to adopt senior control system; And high speed feed also becomes very difficult.In addition, the general structure size is big, and is economical inadequately.
Also have, in coordinate measuring apparatus, need often to change the activation signal measuring head, the mode of mounting or dismounting is normal to adopt spiral, taper pin formula, pressure type or similar structure, and this mode is not automatically, need take man-hour.In addition, this activation signal measuring head will be changed according to operating position, and change measuring head all must be ready at every turn, and the angle of the measuring sensor of the activation signal measuring head of installing also will be according to the change of shape of workpiece.In a word, to take man-hour be a shortcoming to the action need that relates to the activation signal measuring head.
The purpose of this invention is to provide a kind of coordinate measuring apparatus, it can increased work efficiency on installation and removal activation signal measuring head, the direction that is changing measuring sensor and the similar operation on the coordinate measuring apparatus.
In order to achieve the above object, imagination of the present invention is: worktable is made movably with respect to base plate; A kind of measuring head mounting mechanism that can install or dismantle the signalling measuring head automatically is contained in the Z shaft device, so that reach the actual effect of automatic mounting or dismounting; A kind of measuring head storing unit is installed on the above-mentioned travelling table; And a kind of measuring head clamping device that the signalling measuring head is housed is placed on the above-mentioned measuring head storing unit.Rely on above-mentioned imagination, because the moving-member compact dimensions, so the structure of feed mechanism can be made small-sized; And driving mechanism for example is used for that the worktable of travelling workpiece uses, and just can be used to mount and dismount measuring head, thereby has saved the specialized agency that carries out feeding and use, operation circuit or similar device in above-mentioned measuring head mounting mechanism.
Fig. 1 is the general layout skeleton view of an embodiment of the present invention;
Fig. 2 is the front view behind the local parting of Fig. 1;
Fig. 3 to Fig. 5 is the zoomed-in view of Fig. 2 major part;
Fig. 6 is the amplification view of Y direction driving mechanism;
Fig. 7 and Fig. 8 are the amplification plan view of X-direction driving mechanism and the amplification front view of part section;
Fig. 9 is the amplification partial sectional view of slide;
Figure 10 is the amplification view of locking device;
Figure 11 is the amplification view of air balance weight mechanism;
Figure 12 is the amplification view of measuring head mounting mechanism;
Figure 13 is the amplification view of measuring head clamping device;
Figure 14 is the vertical view of Figure 13;
Figure 15 is the amplification plan view of measuring head storing unit;
Figure 16 is the amplification plan view behind the local parting of Figure 15 major part;
Figure 17 is the amplification front view behind the local parting of Figure 15;
Figure 18 is the amplification view that Figure 16 looks from below;
Figure 19 is among the another kind of embodiment of the present invention, the amplification view of measuring head mounting mechanism;
Figure 20 is the backplan of Figure 19;
Figure 21 and Figure 22 are the amplification views of major part among Figure 20;
Figure 23 is among another embodiment of the present invention, the amplification view of measuring head mounting mechanism;
Figure 24 is the general layout skeleton view of the another kind of embodiment of the present invention.
Be described with regard to various embodiment of the present invention with reference to each accompanying drawing below.
The general layout of this instrument has been shown in Fig. 1 and Fig. 2.Base plate 10 by similar stone (for example, natural stone or pottery) is made by a plurality of horizontal adjustment facility 30, lies in a horizontal plane in and installs on the table top 1.Usually, this base plate 10 is made the shape of middle body projection.First guide 11 is made by the building stones that are similar to base plate 10, forms spigot surface in Y direction, it by screw retention in the end face of the base plate 10 that has the center projections part in the heart.In addition, a pair of straight, second guide of being made by similar building stones 12 is fixed on two sides relative with first guide 11 symmetrically with screw, and upwards partly protrudes from the end face of the center projections part of base plate 10.Under as the sort of situation shown in Figure 3, one in first guide 11 or second guide 12 is to pass first guide 11 or second guide 12 by screw 16, screws in the screw 15 of the fixture 14 in the glued blind hole 13 on base plate 10 and is fixed on the base plate 10.In addition, in this description, X-direction be meant shown in Fig. 2 by the right side to a left side direction; Y direction is meant and the vertical direction of the residing paper of Fig. 2; And Z-direction is meant the direction from the top to the bottom, i.e. vertical direction among Fig. 2.Consequently, X, Y and Z axle are three coordinate axis, and wherein X, Y-axis are in surface level, and the Z axle is perpendicular to this surface level, and three axles are vertical each other.
As shown in Figure 4: each horizontal adjustment facility 30 comprises: pedestal 31, make the U type usually; Slide block 33 is contained in this pedestal 31, its end face beveling 32; Be threaded into the screw 34 of the part that pedestal 31 protrudes upward, move linearly and cause slide block 33 to move along the bottom surface of pedestal 31; Supporting member 36 places on the pedestal 31 in the sidewall that two relative sides constitute, and can slide in vertical direction, and it has an inclined-plane 35 that engages with inclined-plane 32 on the slide block 33, it tightly withstand on base plate 10 below; By rotating screw 34, through the inclined- plane 32 and 35, can adjust base plate 10 with respect to the height that table top 1 is installed, so that base plate 10 is adjusted on the horizontal level.
On two of first guide 11 relative lateral location, be arranged with a plurality of linearity adjusting gears 40, for example three pairs or, in fact adopt 16 pairs or 32 pairs of this adjusting gears, so that reach the linearity of first guide 11 more than three pairs.As shown in Figure 5, each linearity adjusting gear 40 all comprises: fixed block 42, and its adopts cementation method to be fixed on the side of groove 17 of upper surface of base plate 10, and the side relative with its stationary plane is an inclined-plane 41 on this fixed block; An inclined-plane 43 that engages with the inclined-plane 41 of fixed block 42 is also arranged on the movable block 45, also has a vertical plane 44 on the movable block 45, it abuts against on the parallel spigot surface 18, is used to regulate first guide 11 in X-direction, moving on a side relative with inclined-plane 43; Fixture 47 adopts glued mode to be fixed in the blind hole 19 on the base plate 10, and screw 46 is arranged on this fixture; And screw 48 passes in the screw 46 of movable block 45 screw-in fixtures 47; For a change the bonding station between the inclined-plane 41 and 43 by how much regulating that screw 48 screws in, thereby makes parallel spigot surface 18 adjust the linearity of first guide 11 by the passing of vertical plane 44.
Metallic work table 50 places on the base plate 10, and can move along Y direction.The air bearing 51 relative with the parallel spigot surface 18 of first guide 11 is fixed on the carriage 52 that this worktable stretches out below.In the outside of parallel spigot surface 20 up and down, facing to last spigot surface 20 bigger comparatively speaking air bearing 53 is housed, be used to regulate second guide 12 and on Z-direction, move.In addition, outside at parallel spigot surface 20, facing toward down, spigot surface 20 also is equipped with air bearing 54, this bearing is fixed on the worktable 50 through carriage 55, this worktable 50 just can move on base plate 10 by very little power by means of each air bearing 51,53 and 54, by first guide 11 and air bearing 51, the displacement of adjustable full employment platform on X-direction, by second guide 12 and air bearing 53 and 54, the displacement of adjustable full employment platform on Z-direction, thus worktable can be moved along the Y direction straight line.
In addition, between base plate 10 and worktable 50, Y direction driving mechanism 60 is housed on Y direction, is used to drive worktable 50.As shown in Figure 6, Y direction driving mechanism 60 comprises: motor 62, and it is fixed on the base plate 10 by carriage 61; Feed screw 64, it is connected with the output shaft of motor 62 by clutch coupling 63; Feed screw nut 66, it and feed screw 64 mesh, and can move thereon, and this feed screw nut is fixed on the worktable 50 through carriage 65; Electromagnetic brake 67, it comprises that one is fixed on the rotating disk on the feed screw 64 and stops the brake portion that this disk rotates, and is used for the rotation of feed-disabling leading screw 64; Bearing 68, it is contained on the carriage 61, and is supporting an end of feed screw 64; Bearing 69, it is fixed in the groove 21 that forms on first guide 11, and is supporting the other end of feed screw 64; Electric wiring part 70, it be contained in carriage 61 below, be used to transmit predetermined electric signal to motor 62 or the like.
As shown in Figure 2, the amount of feeding of the worktable 50 that drives by motor 62, measure by Y direction displacement measurement device 75, this device comprises the detection part 77 on rule 76 that is contained on first guide 11 and the carriage 52 that is contained in worktable 50, and for the reference position of surveying work platform 50, be the absolute position, place null position by zero setting device 80, this zero setting device comprises zero mark 81 that is contained on first guide 11 and the detector switch 82 that is contained on the worktable 50.In addition, the moving range of worktable 50 is regulated (not drawing among the figure) by being configured in block 85 on the base plate 10 and the limit switch that is configured on the worktable 50.
With reference to Fig. 2, two columns 90 are separately fixed on two relative sides of base plate 10.These columns are to pass through hole 24 by screw 25 to screw in the fixture 23, it is fixed on the base plate 10, these fixtures are double end pestle (double-headed pounders) style usually, they are bumped into respectively are positioned at the relative two sides of base plate 10, along in a plurality of locational holes 22 of Y direction.These columns are made by metal (for example cast iron), and crossbeam 100 is to be made by a kind of structured material of similar base plate 10, it as moving member not laterally frame on the top of column 90, and fixed thereon.It is similar that this crossbeam 100 is fixed to the mode that mode on the column 90 and column 90 be fixed on the base plate 10, its fixed sturcture comprises: the hole 101 on the crossbeam of being made by the material of similar natural stone 100, usually the fixture 102 and the screw 104 that are double end pestle 102 styles, this screw pass through hole 103 and screw in the screw on the fixtures 102.
As shown in Figure 7 and Figure 8, at the back side of crossbeam 100, an X-direction driving mechanism 120 is arranged, it is used for driving slide 110 in X-direction.This X-direction driving mechanism 120 comprises: motor 122, and it is bearing on the column 90 through carriage 121; Feed screw 124, it drives its rotation by motor 122 through toothed belt (synchronous belt) 123; Bearing 126, it is supporting an end of feed screw 124 pivotally, and is fixed on the carriage 121 through bracket 125; Bearing 128.It is supporting the other end of feed screw 124 pivotally, and is fixed on another root post 90 through carriage 127; Feed screw nut 129, it and feed screw 124 luer engages with, and can axially move; Web joint 130, it is fixed on this feed screw nut 129; Carriage 133, it is inverted U on vertical view, it is fixed on the slide 110, and supporting the opposite face of web joint 130 projections, its support pattern is, web joint 130 can not move on axially at feed screw 124, its directly upwards by thrust bearing 131 and adjust screw 132(and a spherical part arranged at its front end) then can move; Be fixed on connector 134 on the web joint 130 with the one end, in its vertical view, be crank-like; A pair of rotatable roller 135, they are fixed on the other end of connector 134, abut against on the guide rail 105 of crossbeam 100 back, and with its clamping, under the low condition of friction force, feed screw nut 129 can be along the moving axially of feed screw 124, and can pin the rotation of feed screw nut 129; Electromagnetic brake 139.It comprises the rotating disk 136 of a front end that is fixed on feed screw 124 other ends and is fixed on brake component 138 on the carriage 127 through carriage 137 that by the effect of electromagnetic force, it can stop rotating disk; By the rotation of motor 122, drive slide 110 and move along X-direction, like this can by rule 106 with relative with it place optics on the slide 110 or similarly sensor 118(with reference to Fig. 9) measure the displacement of this slide 110.In addition, the rotary locking of feed screw nut 129 is not finished by slide 110, and, feed screw nut 129 is by crossbeam 100 supportings, it becomes a device on dynamic component one side not, thereby eliminated in the power that affacts on the gyratory directions on the slide 110, made that the accuracy of measurement that is bearing in the measuring sensor part on the slide 110 is unaffected.In addition, thrust bearing 131, adjustment screw 132 and carriage 133 have constituted coupling arrangement.
As shown in Figure 9, slide 110 comprises: an X-direction guide bearing case 112, and it surrounds crossbeam 110, and air bearing 111 wherein is housed, and each air bearing is facing to each face of square beam 100; In the front of this X-direction guide bearing case 112, up and down a pair of Z-direction guide bearing box 114 is housed, air bearing 113 wherein is housed, these bearings arrangement that is square in vertical view; Be inserted in these Z-direction guide bearing boxes 114, and the Z shaft device 180 that can move along Z-direction; Z-direction driving mechanism 140, it is by support 115 supportings that vertically are contained on the X-direction guide bearing case 112; With a latch mechanism 160, it is installed on the top of support 115, freely rotates to stop the Z-direction driving mechanism, thereby prevents 180 landing of Z shaft device.
Z-direction driving mechanism 140 comprises: motor 141, and it is bearing on the support 115; Feed screw 145, it has bigger pitch, and for example 4 millimeters or bigger, it drives its rotation by motor 141 by synchronous belt 142, this leading screw thereon, following two ends, support rotationally by the bearing 143 and 144 of the upper and lower that is contained in support 115; Feed screw nut 146, it is by 145 supportings of this leading screw, but and axial rotation; A pair of rotating roller 148, they are being supported pivotally by this feed screw nut 146, and abut against on two relative sides of guide rail 147, this guide rail is fixed on the wall and (does not draw among the figure), in Fig. 9, on this side of support 115, above-mentioned a pair of roller folder is toward the relative side of guide rail 147, and the guiding feed screw nut is mobile on Z-direction easily, but can not rotate; A web joint 149, it is fixed on the feed screw nut 146; Carriage 152, it is spherical by thrust bearing 150 and the front end of adjusting each screw of screw 151() link to each other with the bottom surface with the end face of the protruding end of web joint 149, and being fixed on the head portion of Z shaft device 180, the Z shaft device can be driven in Z-direction by carriage 152 thus.In this case, because thrust bearing 150 parts are made at feed screw 145 and can not be moved in the axial direction with respect to web joint 149, and transportable diametrically structure, the result is, because of the moving with sudden force of feed screw 145, eccentric or similarly the harmful effect that causes of defect be absorbed.
As shown in figure 10, latch mechanism 160 comprises: a disk 161, and it is fixed on the top of feed screw 145; A pair of swing component 163, they separate a predetermined distance to each other, this swing component swingingly supports part in the central by a carriage, and this carriage 162 is fixed on the top of support 115, and two ends of swing component relatively place a side of disk 161; Bolt 164 is connected with its end at an end of swing component 163 by screw thread, the front end of bolt 164 is spherical in shape facing to disk 161, the other end at swing component, be limited between the end of swing component 163 by a spring 165, be used for to bolt 164 biasing pressurization, pressure on the upper and lower faces that is pressed in disk 161 is equated and keep it constant; Elongate articles 166 is on the other end that it one of is fixed in this a pair of swing component 163; And cylinder 169 is fixed in this a pair of swing component 163 on another the other end through carriage 167, and the front end of piston rod 168 links to each other with elongate articles 166.When pressurized air is sent in the cylinder 169, piston rod 168 withdrawals, this a pair of swing component overcomes the elastic force action of spring 165, that end of this swing component that is installed in bolt 164 is opened, so disk 161 just can freely rotate.Otherwise, the pressurized air in the cylinder 169 is sent in cut-out, this a pair of swing component 163 is towards moving with above-mentioned opposite direction, disk 161 is clamped between the leading section of bolt 164 by spring 165, so feed screw just can not freely rotate, meanwhile, the feed screw nut 146 that meshes with feed screw 145 can not rotate, and has so just stoped the Z shaft device 180 that is connected with this feed screw nut 146 through web joint 149, carriage 152 etc. owing to action of gravity is landed.
As shown in Figure 9, this Z shaft device 180 has a shell 181, and it is a socket that xsect is square, and air balance weight mechanism 190 and measuring head mounting mechanism 200 are equipped with successively in portion within it.In addition, a rule 185 is contained in the back of shell 181 among this figure, the scale value that detecting device 186 is used for reading rule 185 is housed on support 115, and Z shaft device 180 just can be detected by rule 185 and detecting device 186 along the amount of movement of Z-direction like this.
As shown in figure 11, air balance weight mechanism 190 comprises: a cylinder 191 is open type down in its bottom; A piston 192, it can slide in this cylinder; A piston rod 194, the one end is connected with piston 192, the outwardly directed other end, promptly cylinder 191 is passed on the top of piston rod, and is bearing in the head portion of support 115 rotationally through thrust bearing 193; A top board 196, it lives the top closure of cylinder 191, also has a pipe adapter 195 on this top board, can make cylinder 191 inside communicate (not drawing among the figure) with compressed air source or atmosphere through solenoid valve.Use such structure, be stored in the air in the cylinder 191 of air balance weight mechanism 190, just play effect as padded coaming, balance the weight of Z shaft device 180, so, as long as just can on Z-direction, drive Z shaft device 180 with very little power.
As shown in figure 12, measuring head mounting mechanism 200 comprises: calibration motor 202.Its encapsulation also is bearing in the cover 201, and cover is fixed on the shell 181 on this; Intermediate sleeve 204, it links to each other through the output shaft of gear train 203 with this calibration motor 202, and is bearing in rotationally on the cover 201; Sleeve 207, it is can the axially movable mode of transmitting gyration simultaneously being connected through unitor 205 and this intermediate sleeve 204, and be bearing in down rotationally on the cover 206, and this time cover is bearing on the shell 181, this sleeve 207 and motor 202, gear train 203, intermediate sleeve 204 and unitor 205 common formation rotary motion mechanisms; First gear 211, it is fixed on the bottom of sleeve 207, constitutes a joggle piece as the unitor 210 of polygonal position engaging mechanism; Second gear 212, it can mesh on polygonal position with first gear 211, and constitutes another joggle piece of unitor 210; One diaphragm 213, it is as rotary locking spare, guarantees that second gear 212 can vertical moving and do not rotate; The mechanism of a vertically moving piston 214 rigidly fixes with this diaphragm 213 in its bottom, and can cooperate with the cylindrical vertical moving ground of sleeve 207; The mechanism of a vertical moving cylinder 215 has the mechanism of sliding and laying vertically moving piston 214 within it, and the piston 214 on being fixed on down cover 206 is formed axial drive means; A spring 216, it is limited between the mechanism of the mechanism of this vertical moving cylinder 215 and this vertically moving piston 214, is used to make second gear (being fixed to the bottom of the mechanism of vertically moving piston 214 through diaphragm 213) towards first gear, 211 direction constant offsets; The Z of a hollow is to measurement axis 220, its top is fixed on the bottom of sleeve 207, so that it is rotated with first gear 211, this measurement axis is rotatably supported in down on the cover 206 through a radial air bearing 217 and a thrust air bearing 218 of positioned vertical, Z in this hollow has a taper hole 219 to the bottom of measurement axis, become the mounting portion of measuring head clamping device, an end of measuring head clamping device 250 is put into wherein; Air duct 222 is used for pressurized air is gone up radial air bearing 217 and following thrust air bearing 218 through each passages supply of covering down in 206 respectively; A driving stem, it is contained in Z in measurement axis 220, and can endwisely slip, and in its bottom a ball seat 226 is arranged, as the measuring head fulcrum arrangement, this device have a lot of radially removable, and can prevent its spheroid that drops out 225; A kind of Ju Shi spring 228, it is as draw-gear, be limited in the top of driving stem 227 and Z between measurement axis 220, make ball seat 226 move into Z to measurement axis 220 in owing to minor diameter pilot hole 221 is arranged on measurement axis 220 at Z, cause all spheroids 225 to projecting inward, engage with the bolt head 251 of measuring head clamping device 250 thus; Intermediate shaft 230, its bottom abuts against through the top of spheroid 229 with driving stem 227, and can axially move in sleeve 207; Piston rod 232, its bottom abuts against through the top of spheroid 231 with intermediate shaft 230, and can vertically move; Actuator 235, the a plurality of slidably pistons 233 of encapsulation in it, these pistons are fixed on the upper end of piston rod 232, and with each piston 233 be placed on dividing plate 234 be separated into a plurality of indoor, make it have a plurality of stringing multistage pressure receiving planes, and this actuator is fixed on the cover 201; Piston rod is to positional detecting device 238, and it has the block 236 that is fixed on piston rod 232 center sections and the detector 237 of a pair of relative arrangement, and this block 236 is placed on the centre of this a pair of detector, and whole sniffer then is bearing on the cover 201; Projection 239 is outwards given prominence to the bottom of measurement axis 220 by Z, is used for the location of measuring head clamping device 250; Pin 241 is hidden in the bottom of Z to measurement axis 220, and its effect on the direction of giving prominence to, leans on the elasticity of spring 240 to make the pin systematic offset with above-mentioned protruding similar, and it and measuring head clamping device have conductivity to get in touch; A rotary encoder 245, it comprises the rotating disk 242 and the detecting device 243 that is bearing on the cover 201 that are fixed on the intermediate sleeve 204, be used to detect the angle of revolution of the intermediate sleeve 204 that causes by calibration motor 202, and then the angle of revolution of learning first gear 211.
In having the measuring head mounting mechanism 200 of said apparatus, actuator 235 overcomes the elastic force of Belleville spring 228 and moves, driving stem 227 descends, ball seat 226 gets loose from pilot hole 221, make each spheroid 225 to move radially, at this moment the bolt head 251 of measuring head clamping device 250 inserts in this ball seat 226.In this case, when actuator 235 is discharged by duty, driving stem 227 is risen by the effect of Belleville spring 228, the bolt head 251 of measuring head clamping device 250 is drawn in Z in the hole 219 of measurement axis by ball seat 226, be subjected to the effect of pilot hole 221 and each spheroid 225, this bolt head 251 can engage and be held, and the mechanism of vertical moving cylinder 215, engaging and holding measuring head clamping device 250, perhaps do not hold the state action down of measuring head clamping device 250, the elastic force that makes the mechanism of vertically moving piston 214 overcome spring 216 is mentioned, so second gear 212 and first gear 211 of unitor 210 are disconnected from each other, in this case, when calibration motor 202 rotated, first gear 211 was by gear train 203, intermediate sleeve 204, unitor 205 and sleeve 207 and rotate.When the mechanism of vertical moving cylinder 215 is unclamped by its duty, under the state that turns over a predetermined angle, second gear 212 is subjected to the bias force of spring 216 and diaphragm 213 with the mechanism of vertically moving piston 214 and descends, cause second gear 212 and first gear 211 to mesh being different from other positions of initial position each other, so the angle of engagement changes between first gear 211 and second gear 212, when first gear 211 rotates, Z also rotates through sleeve 207 together to measurement axis 220, so the measuring head clamping device of being held by ball seat 226 also rotates, so just can change the position, angle of measuring head clamping device 250, perhaps change and be fixed on the position of Z to the projection 239 of measurement axis 220 bottoms, so that when installing next time, change the arrangement angle of measuring head clamping device 250.In this case, the corner of first gear 211 is detected by rotary encoder 245, and this scrambler comprises the rotating disk 242 of the center section that is fixed on intermediate sleeve 204 and is contained in the detecting device 243 that covers on 201.
As Figure 13 and shown in Figure 14, measuring head clamping device 250 comprises: a pedestal 256 of being made up of upper parts 254 and lower part 255, wherein upper parts 254 has bolt head 251 on its top, in its bottom a ring flange 252 is arranged, part has a conical surface 253 therebetween, and lower part 255 is fixed on the bottom surface of this upper parts 254; Having the groove 257 that can engage on the ring flange 252 of upper parts 254, and constituting locating devices with projection 239 with the projection 239 on the bottom of measuring head mounting mechanism 200; Conducting sleeve 260, it is inserted and secured on the bottom of lower part 255 through insulation sleeve 258, has internal thread 259 in its underpart; Conductive pin 263, it can axially move in the insulating bushing 261 in this conducting sleeve 260, and on the direction of stretching out, by the effect maintenance systematic offset of spring 262; Contact plug 266, it is contained on the ring flange 252 through an insulating bushing 265, by with the bottom that is contained in measuring head mounting mechanism 200 on pin 241 contact conduction, and be electrically connected with conductive pin 263; On the bottom surface of ring flange 252, be provided with pin-and-hole 268 and engaging groove 269.Internal thread 259 in measuring head clamping device 250 bottoms, be used for screwing activation signal measuring head 270 or 280, these two kinds of measuring heads all are the signalling measuring heads, it is the profile difference, measuring sensor 271 or 281 all are equipped with in the bottom of every kind of measuring head, and external thread 272 or 282 are all arranged at its top.In addition, but close contact signal measurement head 280 also has the rotating part 283 of band measuring sensor 281, and this rotating part 283 is made and can be rotated, and can be fixing on a certain position of rotating with respect to the main body 284 that external thread 282 is arranged.
See figures.1.and.2, measuring head storing unit 290 is contained on the worktable 50.Shown in Figure 15 to 18, this measuring head storing unit comprises: storing unit pedestal 291, and it is fixed on an end of worktable, the just rear end of worktable 50; Polylith is deposited plate 293, and they are fixed on the top of this pedestal 291, and depositing plate for every all has an otch 292, and its opening is towards the other end, and just towards the front end of worktable 50, depositing plate has a predetermined distance apart from worktable 50; On the end face of depositing plate 293, the pin 294 and 295 of protrusion is housed in the relative both sides of otch 292, it is engaged with pin-and-hole 268 and engaging groove 269 on the bottom surface of the ring flange 252 of measuring head clamping device 250, and constitute the measuring head Attitude Retention Unit with pin-and-hole 268 and engaging groove 269; Companion flange support 296, they are contained in the relative both sides of depositing plate 293 otch 292, and they are made by insulating material, are used to support the bottom surface of the ring flange 252 of measuring head clamping device 250; Detector 297, it is a kind of reed switch or like, is placed in the otch of every pair of flange bracket 296, is used for surveying the existence of measuring head clamping device 250; Clamping element 300, in the middle of them each is bearing on the carriage 298 pivotally at the one end, this carriage is fixed on each side in the relative both sides of bottom surface upper cut of depositing plate 293, the holder other end can be swung in the angle that the control of the swing on placing carriage 298 pin 299 limits, and its inside surface is reached the inside of otch 292; Sheet spring 301 is limited between clamping element 300 and the carriage 298, is used to make clamping element 300 to produce skew, thereby its inside towards otch 292 is stretched out.Measuring head clamping device 250 through adjusting the position places depositing on the plate 293 of this measuring head storing unit 290.In this case, because the effect of sheet spring 301 makes clamping element 300 produce skew, thereby stops each measuring head clamping device 250 to fall down from depositing plate 293.
With reference to Fig. 1, control device that has display part 311 of label 310 expressions, by external unit, for example printer, cathode-ray tube (CRT) or the like can carry out image demonstration (not drawing among the figure), and then have formed the computer system of functions such as having calculating, storage.Can control the operation of each several part according to preset program, being placed on the worktable 50 is measured workpiece 320, and numbering 26 is the collapsible dust cover that are used for Y direction driving mechanism 60, is side cover plates and number 27.In addition, measuring head mounting mechanism 200 and measuring head storing unit 290 are formed a measuring head automatic detaching apparatus.
The operational circumstances of this embodiment will be described below.Measuring head clamping device 250 is fitted together with the activation signal measuring head 270 or 280 with reservation shape, place the depositing on the plate 293 of the measuring head storing unit 290 that is fixed on worktable 50 table tops, workpiece 300 also to be placed on the table top of worktable 50 and fix.In this state, when control device 310 sent predetermined instruction, the motor 62 of Y direction driving mechanism 60 drove by this instruction, so the worktable 50 in Fig. 1, by feed screw 64 grades towards left movement so that make measuring head storing unit 290 place Z shaft device 180 under.On the other hand, carry out when driving with Y direction driving mechanism 120, slide 110 moves in the X-axis direction, so as to make Z shaft device 180 move to the preliminary election that places on the measuring head storing unit 290 measuring head clamping device 250 directly on the position.
In this state, Z shaft device 180 is fallen in 141 actions of the motor of the Z-direction driving mechanism in slide 110, so measuring head clamping device 250 enters in the hole 219, this hole is to be contained in Z in the Z shaft device 180 to the measuring head mounting portion of measurement axis 220.Actuator 235 actions, the elastic force that overcomes Belleville spring 228 pushes driving stem 227, so ball seat 226 shifts out from pilot hole 221, all spheroids 225 are in free state, so that the bolt head 251 on measuring head clamping device 250 tops can easily be inserted in the ball seat 226.
Subsequently, when actuator 235 breaks away from duty, driving stem 227 is mentioned by the elastic force of Belleville spring 228, so bolt head 251 is drawn in by ball seat 226, the conical surface 253 of measuring head clamping device 250 engages with hole 219 at this moment, projection 239 on measuring head mounting mechanism 200 bottoms is inserted in the engagement grooves 257 on the measuring head clamping devices, and then the contact plug on the measuring head clamping device 250 266 contacts with the pin 241 of measuring head mounting mechanism 200, so that conduct electricity.
Aforesaid measuring head clamping device, under the state of holding by the measuring head mounting mechanism 200 of Z shaft device 180, the position of the measuring sensor 281 of activation signal measuring head 280 for a change, can adopt the following step: make the mechanism action of measuring the vertical moving cylinder 215 on the mounting mechanism 200, overcome the elastic force of spring 216, the mechanism of upwards mentioning vertically moving piston 214, first and second gears 211 and 212 are disconnected from each other, at this moment, drive calibration motor 202 and turn over a predetermined angle by gear train 203 and intermediate sleeve 204 drives first gear 211.
Measuring head clamping device 250 is contained on the measuring head mounting mechanism 200, adjust given angle as mentioned above, the Y direction driving mechanism 60 then, X-direction driving mechanism 120 and Z-direction driving mechanism 140 drive according to the instruction of control device 310, be contained in the measuring sensor 281 of the activation signal measuring head 280 of Z shaft device 180 bottoms, precalculated position contact with workpiece 320, when contact, this measuring sensor 281 is at X, position on Y and the Z-direction is stored by control device 310, and the surveying work of each contact point of this measuring sensor 281 and work 320 carries out continuously, has finished the measurement of workpiece 320 like this.When this work 320 of measurement needs to change contact measurement head 280, foregoing such, Z shaft device 180 will place the top of measuring head storing unit 290, and the preliminary election measuring head clamping device 250 that is placed on the measuring head storing unit 290 is installed on the Z shaft device 180.In this case, used measuring head clamping device 250 is put back on the otch of vacating on the measuring head storing unit 290 292.Yet, putting back to operation should carry out like this: Z shaft device 180 is placed on the room of otch 292, after this, make actuator 235 actions, overcome the elastic force of Belleville spring 228, fall driving stem 227, decontroled by the bolt head 251 that ball seat 226 clamps, under the state that unclamps, Z shaft device 180 is risen.
The above embodiments have some following advantages:
More precisely, in the present embodiment, worktable is made movably, Ben Chong column 90 grades just do not need to have moved like this, and driving mechanism, promptly the power of Y direction driving mechanism 60 needs is just little, and because inertia is little, the position that worktable 50 stops can be accurate.Because worktable 50 is to lead by two parallel planes respectively, these two parallel surfaces are by being contained on the base plate 10, constituting as first guide 11 of X-direction control parts of motion with as second guide 12 of Z-direction control parts of motion, two guides can be adjusted independently of one another, these are different with traditional V-type rail, so the guiding accuracy of worktable 50 can improve.In addition, in first guide 11, the linearity of parallel spigot surface 18 can be adjusted by coalignment 40, thus, equally also can improve guiding accuracy.Have, first guide 11 and second guide 12 are to be contained in respectively on the base plate 10 again, and when the processing spigot surface, each face refine is easier comparatively speaking, and can have high precision like this.Also have, measuring head mounting mechanism 200 is contained in Z shaft device 180 the insides, and the measuring head storing unit is placed on the worktable, and worktable is made movably, therefore just can realize changing automatically mutually of activation signal measuring head 270 and 280 easily.In addition, a plurality of activation signal measuring heads are placed on the measuring head storing unit 290 after being adjusted to different attitudes with it, activation signal measuring head 270 and 280 is changed the required time mutually, as many as with activation signal measuring head 270 or 280 times that point is required of measurement, therefore, although activation signal measuring head 270 and 280 is changed mutually, measuring operation still can be finished soon.In this case, each activation signal measuring head 270 and 280 o'clock changed mutually, activation signal measuring head 270 or 280 can contact (not drawing among the figure) with origin position, so that carry out the origin position inspection.As mentioned above, if all carry out the origin position inspection after changing measuring head at every turn, accuracy of measurement can also further improve so.In addition, syndeton between base plate 10, crossbeam 100 and the column made from the material of similar stone 90 adopts screw 25 and 104 to pass through hole 23 and 103 respectively, screws in the fixture 23 and 102 that is set in hole 22 and 101, like this, can reach fastening reliably by simple device.In addition, at the X-direction driving mechanism that is used for along X-direction moving sliding base 110, with the rotary locking of the feed screw nut 129 of feed screw 124 engagement be the guide rail 105 that is mounted on the fixed cross beam 100, realize by connector 134 and roller 135, therefore, with traditional texture ratio, slide 110 is out of shape on torsional direction and the shortcoming that reduces accuracy has been eliminated, in traditional structure, rotary locking is finished by slide itself.And, with the motion guidance of feed screw nut 129 to slide, be to realize by the web joint 130 that is fixed on the feed screw nut 129, thrust bearing 131 on this web joint 130, adjustment screw 132 and carriage 133 upwards is transportable in the footpath of feed screw 124, so, all adverse factors that influence accuracy of measurement owing to the radial deflection of feed screw 124, off-centre etc. all are absorbed by the radial displacement of web joint 130 and thrust bearing 131, and the adverse effect that is added to like this on the slide 110 is avoided.In addition, air balance weight mechanism 190 is housed on Z shaft device 180, and it is minimum that the operational forces that for this reason drives Z shaft device 180 can be reduced to, and the motor that is used to drive this Z shaft device 180 like this can become the motor of miniature dimensions, the size of slide 110 also can diminish thereupon, and weight lightens.Have again, in Z-direction driving mechanism 140, because the adverse effects such as off-centre of feed screw 145, can sponge by means of web joint 149 and thrust bearing 150, this situation to X-direction driving mechanism 120 is similar, therefore, can avoid the adverse effect of accuracy of measurement.For high-speed driving Z shaft device 180.Require the pitch of feed screw 145 to adopt 4 millimeters or bigger.Yet, when adopting big like this pitch, if the balance air in air balance weight mechanism 190, the words of running away for a certain reason, so just might occur because the action of gravity of Z shaft device, feed screw 145 is rotated, cause feed screw nut 146 and Z shaft device 180 1 sides that the deadweight landing takes place.Therefore, in the present embodiment, when pressurized air was run away, locking device 160 can rely on the spring 165 of locking device 160, was fixedly clamped forcefully at the disk 161 at the top of feed screw 145 by swing component 163 and bolt 164.Like this, when air was run away, the backward rotation of feed screw 145 can be stoped effectively, and had avoided because the parts damages that landing caused of Z shaft device.In addition, in measuring head mounting mechanism 200, the drive source of driving stem 227 is to adopt the actuator 235 that a plurality of pressure receiving planes are arranged, therefore, even owing to use the low-pressure compressed air of general factory, make that the elastic force of this Belleville spring 228 also can be overcome satisfactorily and drive driving stem 227, and measuring head clamping device 250 is loaded onto reliably when the Belleville spring of clamping measuring head clamping device 250 became brute spring.In addition, owing to adopt the mechanism of device, unitor 210 and the vertical moving cylinder 215 of measuring head mounting mechanism 200, calibration motor 202, make Z become possibility to the measurement axis indexing.Therefore, the direction that is fixed to the activation signal measuring head 280 on the measuring head clamping device 250 can accurately and reliably be adjusted.The intermediate sleeve 204 of measuring head mounting mechanism 200 and sleeve 207 are each other by coupling together by axially movable unitor 205, so, sleeve 207 move axially and the rising of second gear of unitor 210 can not exert an influence to the rotary encoder 245 that is contained in intermediate sleeve 204 1 sides, the precision of this rotary encoder 245 can not reduce like this.Z is to measurement axis 220 and measuring head clamping device 250 usefulness projection 239 and engagement grooves 257 location, and therefore being installed to the position of Z on measurement axis 220 can accurately control.When measuring head clamping device 250 was installed on the measuring head storing unit 290, carried out between pin-and-hole 268, engagement grooves 269 and pin 294,295 location, and the position of installation can accurately obtain.The clamp device that comprises a pair of clamping element 300, be contained on the measuring head storing unit 290, thereby limited the inertial force that produces owing to reasons such as working table movement and made the possibility that measuring head clamping device 250 falls down from measuring head storing unit 290, so just avoided mishap in advance.Whether measuring head storing unit 290 is equipped with detector 297, be placed thereby can judge measuring head clamping device 250 at once, when used measuring head clamping device 250 is put back to, can detect at an easy rate from otch 292 like this.In addition, base plate 10 and crossbeam 100 are to be made by the material of similar stone, can prevent the situation along with the variation precise decreasing of time so effectively.Being connected between base plate 10 and first guide 11 or second guide 12 is that to pass first guide 11 or second guide 12 and fixture 14 in the glued blind hole 13 on base plate 10 fixing, the such convenient fixing that spins with screw 16 reliable.When pressurized air is run away, prevent that Z shaft device landing is achieved in that when Z shaft device itself not during stop motion, and feed screw 145 stop motions are locked with regard to realizing with very little strength like this, and the structure of latch mechanism 160 is also simple.
Figure 19 to Figure 22 is an alternative embodiment of the invention.In this embodiment, the Z of Z shaft device 180 can not rotate to measurement axis.In the present embodiment, when identical or corresponding, in the following description,, describe so that simplify with using same Arabic number numbering with each ingredient shown in front the embodiment.
With reference to these accompanying drawings, air balance weight mechanism 190 is contained in the top of the shell 181 of Z shaft device 180, and Z is fixed to the bottom of shell 181 to measurement axis 220, Z has a taper hole 219 to measurement axis 220, as the measuring head mounting portion, and portion is equipped with at axially movable ball seat 226 within it, as the measuring head fulcrum arrangement.This ball seat 226 can vertically move by piston rod 232.This piston rod 232 places in the actuator 235 that has dividing plate 234, and under the condition of actuator 235 actions, it can overcome the elastic force of Belleville spring 228, releases ball seat 226 in minor diameter pilot hole 221, thereby decontrols the bolt head of measuring head clamping device 250.Moving of this piston rod 232 can be detected by the axial location sniffer 238 that comprises block 236 and a pair of probe portion 237.
The contact that 239 and two types of projectioies are arranged to the bottom surface of measurement axis 220 at Z.More precisely, as shown in figure 21, locational two appearance that the contact is a pin 241 of No.1 in Figure 20 and No.2, it and Z be to measurement axis 220 insulation, makes hidden, and make its skew by spring 240.On the other hand, No.3 is the appearance of the pin 243 fixed to locational each contact of No.12 in Figure 20, is fixed on Z on measurement axis 220 to their insulation.
The same with above-mentioned coordinate measuring apparatus, the substitute mode of measuring head clamping device 250 is the same with the mode of the foregoing description, and different is that measuring head clamping device 250 can not rotate in this example.Yet, do not needing under the rotating measuring condition this measuring instrument simple in structure, and correspondingly production cost is also low, the advantage of Here it is present embodiment more precisely.
Figure 23 shows another embodiment of the present invention.In this embodiment, Z is not with the air bearing supporting to measurement axis 220, but supports with plain ball bearing.In addition, driving stem 227 has been omitted, and the function of piston rod 232 is identical with driving stem 227, and the axial location sniffer of installing along piston 232 238 also has been omitted.Intermediate sleeve 204 also has been omitted, and the function of sleeve 207 is identical with intermediate sleeve 204, and other each several parts are substantially the same with the each several part among in front the embodiment, just at aspects such as shapes difference arranged.
The same with above-mentioned coordinate measuring apparatus, the replacing of measuring head clamping device 250 is the same with the mode of each embodiment of front to be realized easily.
Figure 24 shows another embodiment of the present invention.Wherein a kind of automatic revolution turntable 58 that is driven by common rotary motion mechanism (not drawing among the figure) is contained on the worktable 50.Other each several parts of this instrument are identical with the embodiment shown in Fig. 1.Use this instrument can realize automatic measurement more satisfactorily.
In addition, when enforcement is of the present invention, in measuring head mounting mechanism 200, the supporting part of bolt head 251, promptly ball seat 226 not necessarily must adopt said structure, also can adopt electromagnetic mechanism supporting or collet chuck supporting.In addition, in measuring head mounting mechanism 200, the sort of method that the method for supporting bolt head 251 not necessarily is limited in the above-described embodiments to be adopted, it is bolt head 251 supporting that is fixed, and can adopt following method, promptly when withdrawing fully, bolt head 251 is clamped to the taper hole 219 of measurement axis 220 with Z by the conical surface 253 of measuring head clamping device 250.Have, the driving mechanism 60,120 of X-direction, Y direction and Z-direction and 160 motor 62,122 and 141 that adopt not only can adopt AC motor, direct current motor, pulse motor, also can adopt air motor, oil motor etc. again.In addition, in X-axis, Y-axis and the Z axle of three quadratures that are perpendicular to one another, the Z axle not necessarily is restricted to Z-axis, and X-axis can be a Z-axis, and in this case, Z should be horizontally disposed to measurement axis.In addition, in the description in conjunction with example, adopt the signalling measuring head according to activation signal measuring head of the present invention.Yet the mode of detection signal not necessarily must adopt activation signal, also can adopt Photoelectric Detection or non-contact detection.In addition, the activation signal measuring head not necessarily be limited to activation signal measuring head 270 or 280 itself, but comprise this notion of various devices that is installed on the measuring head clamping device 250.Have again, in aforesaid several embodiment, in Y direction driving mechanism 60, connection between feed screw nut 64 and the carriage 65 is fixed, but the invention is not restricted to this, also can adopt to be similar to X-direction or Y direction driving mechanism 120 or 140 such a kind of structures, promptly the Y direction driving mechanism 60.Only allow and move in radial direction.
Such just as described above, coordinate measuring apparatus provided by the invention in the mounting or dismounting of signalling measuring head operation, and all shows advantage in the change of the operative orientation of measuring sensor, and work efficiency also is improved.
The present invention can use when workpiece is carried out three-dimensional measurement, and is specially adapted in measurement, is suitable for the shape of measured workpiece for making measuring head, needs the situation of replacing signalling measuring head mutually.
Claims (43)
1, a kind of coordinate measuring apparatus, it comprises:
Pedestal;
Worktable, this worktable is positioned on the pedestal, and can move along Y direction at least;
Place the crane span structure spare of pedestal top, it comprises a pair of posts and a crossbeam, and its middle cross beam is positioned at the pillar top;
Slide, this slide is slidably mounted on the crossbeam along X-direction;
The signalling measuring head, this measuring head is supported by the Z shaft device on the slide, and removable along Z-direction;
Mutual perpendicular X-axis, Y-axis and Z axle;
Measurement mechanism, be used for measuring workpieces size, shape and measuring head and place the relative shift of the workpiece on the worktable, it is characterized in that: described coordinate measuring apparatus also comprises:
A measuring head storing unit, it is fixed on the above-mentioned worktable, is used for erectly depositing a plurality of measuring head clamping devices that different each other signalling measuring head is housed;
A measuring head mounting mechanism, it is contained on the above-mentioned Z axle measurement mechanism, and above-mentioned signalling measuring head can be contained in this mechanism or with it and pull down; Utilize the signalling measuring head that it selects stored a plurality of signalling measuring heads from above-mentioned measuring head storing unit, can automatically change and be installed in the above-mentioned Z shaft device.
2, in the described coordinate measuring apparatus of claim 1, wherein above-mentioned measuring head storing unit has a plurality of measuring heads of opening towards Y direction one side to deposit otch, and engages with above-mentioned measuring head clamping device on the periphery of each otch.
3, in the described coordinate measuring apparatus of claim 1, wherein above-mentioned measuring head storing unit comprises:
A storing unit pedestal, it is fixed on an end of above-mentioned worktable;
A kind of plate of depositing, it and above-mentioned storing unit pedestal leave predetermined spacing each other, and the otch of opening towards the above-mentioned worktable other end is arranged; With
Attitude Retention Unit, it is used for the measuring head clamping device and engages with above-mentioned otch with a preposition.
4, in the described coordinate measuring apparatus of claim 1, wherein above-mentioned measuring head storing unit comprises a detector, is used to survey the existence that is placed on the above-mentioned measuring head clamping device on this measuring head storing unit.
5, in the described coordinate measuring apparatus of claim 1, wherein above-mentioned measuring head mounting mechanism comprises:
The Z of a hollow is to measurement axis, and it is useful on the part that above-mentioned measuring head clamping device is installed; With
A driving stem, it can be installed in above-mentioned Z axially slidably in measurement axis, and has the measuring head supporting device that can move radially.
6, in the described coordinate measuring apparatus of claim 5, wherein above-mentioned measuring head supporting device is a ball seat that a plurality of spheroids are arranged.
7, in the described coordinate measuring apparatus of claim 6, wherein be drawn into above-mentioned Z in measurement axis the time when above-mentioned driving stem, owing to the minor diameter pilot hole is arranged on the inside surface of measurement axis at above-mentioned Z, each spheroid of above-mentioned ball seat partly protrudes to the hollow space of above-mentioned ball seat, whereby, the footstalk that will be positioned at the activation signal measuring head in the hollow space partly clamps, and when above-mentioned driving stem from Z when measurement axis is extrapolated, each spheroid is positioned at the large diameter hole of Z to measurement axis, and it can be moved freely.
8, in the described coordinate measuring apparatus of claim 5, wherein above-mentioned driving stem is under spring action, on an axial direction, be maintained fixed skew, and above-mentioned driving stem overcomes the biasing force of above-mentioned spring by actuator, on another axial direction, can force to move.
9, in the described coordinate measuring apparatus of claim 8, wherein the offset direction of above-mentioned spring is that the activation signal measuring head is drawn into the direction of above-mentioned Z in measurement axis.
10, in the described coordinate measuring apparatus of claim 8, wherein a plurality of pressure receiving planes of above-mentioned actuator be fixed on stringingly above-mentioned driving stem axially on, and control air is defeated by each pressure receiving plane simultaneously.
11, in the described coordinate measuring apparatus of claim 1, wherein above-mentioned measuring head mounting mechanism comprises whether be used to survey above-mentioned measuring head clamping device is installed in the mechanism of above-mentioned Z on the mounting portion of measurement axis.
12, in the described coordinate measuring apparatus of claim 1, wherein also comprise an angle orientation mechanism, be used to rotate the direction of the measuring sensor that changes above-mentioned signalling measuring head.
13, in the described coordinate measuring apparatus of claim 12, wherein above-mentioned angle orientation mechanism comprises:
A rotary locking spare, it is contained on the above-mentioned Z shaft device, can axially be shifted but can not rotate;
A polygonal position engaging mechanism, it has the pair of meshing part, each other can be on the polygonal position of circumferencial direction tight engagement, one of them joggle piece is contained in above-mentioned Z on measurement axis, another joggle piece is contained on the rotary locking spare;
Biasing mechanism is used in the fixed engagement direction, is offset the pair of meshing part of above-mentioned polygonal position engaging mechanism;
Axial actuating mechanism is used to overcome above-mentioned biasing mechanism, makes in the joggle piece one to break away from from engagement with another part; With
Rotary motion mechanism is used for joggle piece being under the disengaged position by above-mentioned axial drive means at this with Z to the joggle piece of measurement axis, turns over a predetermined angle, thereby changes this position, angle to the joggle piece engagement.
14, in the described coordinate measuring apparatus of claim 13, wherein above-mentioned joggle piece comprises first gear and second gear, and above-mentioned second gear can be in polygonal position and above-mentioned first gearing mesh, and can vertically move but can not rotate.
15, in the described coordinate measuring apparatus of claim 14, wherein above-mentioned angle orientation mechanism comprises a rotary encoder, is used to detect the angle of revolution of above-mentioned first gear.
16, in the described coordinate measuring apparatus of claim 1, wherein also comprise:
The Z of a hollow is to measurement axis, and it has the part that is used to install above-mentioned measuring head clamping device;
A driving stem that has the measuring head supporting device, it can be installed in above-mentioned Z in measurement axis with moving axially, by the above-mentioned installation and removal that move axially realization measuring head clamping device;
An actuator, it has stringing a plurality of pressure receiving planes, is used for moving vertically above-mentioned driving stem;
Driving mechanism is used for rotation and drives above-mentioned Z to measurement axis;
First gear, it rotates to measurement axis with above-mentioned Z by above-mentioned drive mechanism;
Second gear, it can mesh on polygonal position with first gear, and it can vertically move by a diaphragm but can not rotate;
A spring is used for being offset said gear regularly on the engagement direction; With
Axial actuating mechanism, it comprises a cylinder and a piston, is used to throw off above-mentioned second gear and the above-mentioned first gear meshing state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85107031A CN85107031B (en) | 1985-09-20 | 1985-09-20 | Coordinate-measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN85107031A CN85107031B (en) | 1985-09-20 | 1985-09-20 | Coordinate-measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN85107031A CN85107031A (en) | 1987-04-01 |
| CN85107031B true CN85107031B (en) | 1988-08-24 |
Family
ID=4795410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN85107031A Expired CN85107031B (en) | 1985-09-20 | 1985-09-20 | Coordinate-measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN85107031B (en) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101590576B (en) * | 2008-05-28 | 2013-08-21 | 如冈自动化控制技术(上海)有限公司 | Soft-touch initial height floating adjustment system of bevel welding-cutting mechanical hand |
| CN101362364B (en) * | 2008-09-25 | 2011-07-27 | 台州市双辉机械设备有限公司 | High precision translational worktable of hard and brittle cut-off machine |
| JP5843531B2 (en) * | 2010-09-27 | 2016-01-13 | 株式会社ミツトヨ | Coordinate measuring head unit and coordinate measuring machine |
| US8701298B2 (en) * | 2011-06-01 | 2014-04-22 | Tesa Sa | Coordinate measuring machine |
| CN102853734A (en) * | 2011-06-30 | 2013-01-02 | 深圳富泰宏精密工业有限公司 | Support structure |
| JP5863475B2 (en) | 2012-01-20 | 2016-02-16 | 三菱重工業株式会社 | Hole shape measuring apparatus and hole shape measuring method |
| CN102636136A (en) * | 2012-04-13 | 2012-08-15 | 苏州怡信光电科技有限公司 | Z-axis test structure for three-coordinate testing instrument |
| CN104048691A (en) * | 2014-05-28 | 2014-09-17 | 苏州科技学院 | 3D mobile platform for refrigerator |
| CN104677265A (en) * | 2015-03-12 | 2015-06-03 | 苏州市吴中区木渎华利模具加工店 | Detection machine for belt pulley of compressor |
| CN104677263A (en) * | 2015-03-12 | 2015-06-03 | 苏州市吴中区木渎华利模具加工店 | Work method of detection machine for belt pulley of compressor |
| CN104677264A (en) * | 2015-03-12 | 2015-06-03 | 苏州市吴中区木渎华利模具加工店 | Electronically controlled dual-axis measuring head of detection machine for belt pulley of compressor |
| CN107429997B (en) * | 2015-03-26 | 2019-10-11 | 卡尔蔡司工业测量技术有限公司 | Method and apparatus for determining the dimensional characteristic of measurement object |
| CN107548449B (en) * | 2015-04-21 | 2019-11-12 | 卡尔蔡司工业测量技术有限公司 | Method and apparatus for determining the actual size feature of measurand |
| CN104973296B (en) * | 2015-07-01 | 2017-07-07 | 金东纸业（江苏）股份有限公司 | Corner protector packing machine and corner protector packing method |
| CN105258593A (en) * | 2015-10-28 | 2016-01-20 | 广州嘉诺工业技术有限公司 | Instrument for measuring A value of connector and measuring method thereof |
| JP6738661B2 (en) * | 2016-06-16 | 2020-08-12 | 株式会社ミツトヨ | Industrial machinery |
| DE102016115305B4 (en) * | 2016-08-18 | 2021-07-22 | Carl Zeiss Industrielle Messtechnik Gmbh | Coordinate measuring machine |
| JP2018031754A (en) * | 2016-08-26 | 2018-03-01 | 株式会社ミツトヨ | Three-dimensional measurement device and coordinate correction method |
| JP6883446B2 (en) * | 2017-03-02 | 2021-06-09 | 株式会社ミツトヨ | Lifting drive device and measuring machine using it |
| US10352679B2 (en) * | 2017-03-31 | 2019-07-16 | Mitutoyo Corporation | Compact coordinate measurement machine configuration with large working volume relative to size |
| CN107816945A (en) * | 2017-10-30 | 2018-03-20 | 大连民族大学 | Five-coordinate measuring machine |
| CN112050767A (en) * | 2020-08-28 | 2020-12-08 | 南京昆程仕科技有限公司 | Miniature coordinate measuring machine for education edition |
-
1985
- 1985-09-20 CN CN85107031A patent/CN85107031B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CN85107031A (en) | 1987-04-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN85107031B (en) | Coordinate-measuring instrument | |
| US4631834A (en) | Coordinate measuring instrument | |
| US4805314A (en) | Method and apparatus for spatial coordinate measurement | |
| TW389715B (en) | Workpiece clamping bed | |
| US4305207A (en) | Three-axis inspection machine | |
| US4611403A (en) | Surface tracer | |
| JPS6450904A (en) | Inspection head for coordinates measuring apparatus | |
| CN110702006B (en) | Device for automatically detecting position precision of peripheral cloth holes | |
| US11709045B1 (en) | Surface texture probe and measurement apparatus with a vibrational membrane | |
| CN205482795U (en) | Aspheric surface measuring apparatu | |
| CN210850550U (en) | Adjusting device for optical centering instrument | |
| CN114734392A (en) | Flexible clamp and method for measuring shape and position of columnar part | |
| CN201040357Y (en) | Grinding process automatic positioning device for circular grinding machine | |
| CN111215646B (en) | Horizontal ultra-precise optical lens centering lathe | |
| CN1005168B (en) | Contacting signal probe | |
| CN113245904A (en) | Coaxiality adjusting tool and method for automatic quick-change fixture tail end tool | |
| JPS60224005A (en) | Three-dimensional automatic measuring machine | |
| CN206818103U (en) | A kind of wall thickness measuring device | |
| CN216925365U (en) | High-precision cam circular runout detection device for eccentric main shaft | |
| CN2264894Y (en) | Portable shape and position detector | |
| CN220289483U (en) | Magnetic flux leakage detector for adjusting detection probe rocker arm | |
| JPH032405B2 (en) | ||
| CN216206182U (en) | Diameter detection device of column | |
| CN216348800U (en) | Length, runout tolerance and quality composite measurement system | |
| CN220162239U (en) | Buckle fixing device for automobile inspection tool |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C13 | Decision | ||
| GR02 | Examined patent application | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |