JPH0915302A - Method and device for positioning circuit board inspection device - Google Patents

Method and device for positioning circuit board inspection device

Info

Publication number
JPH0915302A
JPH0915302A JP7165412A JP16541295A JPH0915302A JP H0915302 A JPH0915302 A JP H0915302A JP 7165412 A JP7165412 A JP 7165412A JP 16541295 A JP16541295 A JP 16541295A JP H0915302 A JPH0915302 A JP H0915302A
Authority
JP
Japan
Prior art keywords
circuit board
positioning
points
coordinates
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP7165412A
Other languages
Japanese (ja)
Inventor
Takeshi Noda
武司 野田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP7165412A priority Critical patent/JPH0915302A/en
Publication of JPH0915302A publication Critical patent/JPH0915302A/en
Withdrawn legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

PURPOSE: To precisely position at high speed with a single compensation by rotating a fixture fixing a probe pin group. CONSTITUTION: A circuit board 54, acting as an inspection object and fixed on an inspection table 11, is, based on an instruction from a computer 23, moved by an X/Y table, so that image recognizing two points patterns 55 and 56 of the substrate 54 are introduced into a field of view of a CCD camera 16. The patterns 55 and 56 are made into pictures by the camera 16, and converted into a binary image by an image processor device 22, and respective centroid coordinate positions 43 and 44 are stored (23). Then the table 20 is moved by deviation amount between a middle point 45, of the coordinates 43 and 44, and a middle point 48, of two reference position coordinates 46 and 47 set in advance, so as to coincide the points 45 and 48. Then, by the angle formed by both straight lines linking the coordinates 43 and 44, and the coordinates 46 and 47 respectively, a fixture consisting of a probe pin group 14 and a holding member 15 is rotated (17), for positioning a probe point. Thus the coordinate of the table 11 does not vary, with no feedback control required, so that precise positioning is enabled at high speed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、回路基板の電気的特性
を試験する回路基板検査機の位置決め装置および位置決
め方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning device and a positioning method for a circuit board inspection machine for testing the electrical characteristics of a circuit board.

【0002】[0002]

【従来の技術】回路基板検査機の位置決めに関する技術
として、特開平2−1576号公報がある。図9に、従
来技術の構成を示す。特開平2−1576号公報の回路
基板検査機の位置決め技術は、回路基板8の位置決め用
の撮像手段6A,6Bと、回路基板8を載置した検査台
2に駆動手段10A,10B,10Cを有し、撮像手段
6A,6Bで得られた回路基板8の位置情報を学習し
て、その画像を基準画像として記憶し、撮像手段6A,
6Bで得られた画像が前記の基準画像に近づくまで、検
査台2を駆動手段10CによりX方向、駆動手段10A
および駆動手段10BによりY方向、駆動手段10Aと
駆動手段10Bと駆動手段10Cとの駆動比によりθ方
向に移動させ、正確な位置決めを行うというものであ
る。
2. Description of the Related Art As a technique relating to the positioning of a circuit board inspection machine, there is JP-A-2-1576. FIG. 9 shows the configuration of the conventional technique. The positioning technique of the circuit board inspection machine disclosed in Japanese Patent Laid-Open No. 215776/1989 includes image pickup means 6A, 6B for positioning the circuit board 8 and drive means 10A, 10B, 10C on the inspection table 2 on which the circuit board 8 is mounted. The position information of the circuit board 8 obtained by the image pickup means 6A and 6B is learned, and the image is stored as a reference image.
Until the image obtained by 6B approaches the reference image, the inspection table 2 is driven by the driving means 10C in the X direction and the driving means 10A.
Further, the driving means 10B is moved in the Y direction, and the driving ratio of the driving means 10A, the driving means 10B, and the driving means 10C is moved in the θ direction to perform accurate positioning.

【0003】また、撮像手段で得られた位置情報と予め
教示された基準位置とのずれ量を算出し、そのずれ量だ
け、回路基板を載置した検査台を、上記の従来技術のよ
うな駆動手段により移動させるという位置決め技術が知
られている。
Further, the deviation amount between the position information obtained by the image pickup means and the reference position taught in advance is calculated, and the inspection table on which the circuit board is mounted is moved by the deviation amount as in the above-mentioned prior art. There is known a positioning technique of moving by a driving means.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、前述の
従来技術においては、θ方向駆動とX,Y方向の駆動と
を10A,10B,10Cの3つのモータの駆動量の差
で行っているため、θ方向の駆動手段を移動させると、
それにつれてX,Yの方向の座標が変化してしまい、一
度の位置補正では正確な位置決めは行えない。このた
め、正確な位置決めを行おうとすると、これらの駆動手
段と検査台の位置とをフィードバック制御を行う必要が
有り、複雑な補正計算を必要とするとともに、位置決め
に時間を要するという欠点があった。
However, in the above-mentioned conventional technique, the θ direction drive and the X and Y direction drive are performed by the difference in the drive amounts of the three motors 10A, 10B, and 10C. When the drive means in the θ direction is moved,
Along with this, the coordinates in the X and Y directions change, and accurate positioning cannot be performed with a single position correction. Therefore, in order to perform accurate positioning, it is necessary to perform feedback control of these driving means and the position of the inspection table, which requires complicated correction calculation and has a drawback that positioning takes time. .

【0005】本発明は、上記従来技術の問題点に鑑みて
なされたもので、回路基板検査機のプローブポイントの
位置決めを高速かつ、容易に行える回路基板検査機の位
置決め装置および位置決め方法を提供することを目的と
する。
The present invention has been made in view of the above-mentioned problems of the prior art, and provides a positioning device and a positioning method for a circuit board inspecting machine which can easily and quickly position a probe point of the circuit board inspecting machine. The purpose is to

【0006】[0006]

【課題を解決するための手段】上記課題を解決するため
に、本発明は以下のように構成した。請求項1の発明
は、位置決め用の2点のパターンを有する回路基板の検
査機の位置決め装置において、検査対象である回路基板
を固定する検査台と、検査台を移動させる駆動機構と、
回路基板上の位置決め用のパターンを映像化する撮像手
段と、撮像手段からの出力を2値画素情報として処理お
よび記憶する画像処理装置と、検査用プローブピン群と
その保持部材とからなるフィクスチャを回転方向に移動
させる回転駆動機構と、前記回転駆動機構の回転中心を
前記回路基板上の2点の位置決め用パターンの中点と合
致させたフィクスチャと、前記画像処理装置で得られた
位置情報をもとに、前記検査台駆動機構および前記回転
駆動機構の補正移動量の演算および補正移動の制御を行
う制御手段とにより構成した。
Means for Solving the Problems In order to solve the above problems, the present invention is configured as follows. According to a first aspect of the present invention, in a positioning device for a circuit board inspection machine having a two-point pattern for positioning, an inspection stand for fixing a circuit board to be inspected, a drive mechanism for moving the inspection stand,
An image pickup device for visualizing a positioning pattern on a circuit board, an image processing device for processing and storing the output from the image pickup device as binary pixel information, a fixture including an inspection probe pin group and a holding member thereof. A rotation drive mechanism for moving the lens in a rotation direction, a fixture in which a rotation center of the rotation drive mechanism is aligned with a midpoint of two positioning patterns on the circuit board, and a position obtained by the image processing apparatus. Based on information, the inspection table drive mechanism and the rotation drive mechanism are configured to calculate a correction movement amount and control means for controlling the correction movement.

【0007】請求項2の発明は、検査対象である回路基
板上の2点の画像認識用のプローブ、部品、パターンの
一部等のマークを撮像手段と画像処理装置により位置認
識し、予め測定しておいた基準のマーク認識位置とのず
れ量から、プローブピン群がプローブに当接する位置を
X,Y,θの三次元の方向に補正をかける回路基板検査
機の位置決め方法において、回路基板上の2点のマーク
を映像化する第1の過程と、第1の過程における2点の
映像信号を2点の二値画像情報として記憶する第2の過
程と、第2の過程における2点の二値画像情報より、そ
れぞれの重心位置を算出し、2点の実際の位置情報とし
て記憶する第3の過程と、第3の過程で得られた2点の
座標位置の中点を予め教示しておいたこれらの2点の基
準座標の中点の座標に合致するように、請求項1記載の
駆動機構を制御する第4の過程と、第4の過程で移動し
た2点の座標を結んだ直線と、前記2点の基準座標を結
んだ直線とのなす角度の分だけ、請求項1記載のフィク
スチャの回転駆動機構を制御する第5の過程とから構成
した。
According to a second aspect of the present invention, two points of an image recognition probe on the circuit board to be inspected, a part, a mark such as a part of the pattern are recognized by the image pickup means and the image processing device, and are measured in advance. In the positioning method of the circuit board inspection machine, the position where the probe pin group abuts on the probe is corrected in the three-dimensional directions of X, Y, and θ based on the deviation amount from the reference mark recognition position. A first process of visualizing the above two marks, a second process of storing the two video signals in the first process as binary image information of the two processes, and two processes in the second process. Teaching in advance the third process of calculating the respective barycentric positions from the binary image information of 3 and storing as the actual position information of the two points, and the midpoint of the coordinate positions of the two points obtained in the third process. The center point of these two reference coordinates And a straight line connecting the coordinates of the two points moved in the fourth step and a straight line connecting the reference coordinates of the two points. And a fifth step of controlling the rotary drive mechanism of the fixture according to the first aspect.

【0008】[0008]

【作用】請求項1,2の構成にあっては、撮像手段を介
し、画像認識された2点の画像認識のポイントの位置座
標の中点と、この2点の画像認識のポイントの基準座標
の中点すなわち、回転中心の座標とのずれ量だけ、X,
Yの方向に検査台を移動させ、画像認識された2点の画
像認識のポイントの位置座標と、この2点の画像認識の
ポイントとの傾き分だけ、検査台ではなく、プローブピ
ン群を固定しているフィクスチャを回動させる。すなわ
ち、検査台のX,Y方向の駆動機構と、θ方向の駆動機
構とが、分離されていて、θの位置補正を行っても、検
査台のX,Y方向の座標が変化することがないため、駆
動機構と位置とのフィードバック制御の必要がなく、一
度の位置補正だけで、高速かつ正確な位置決めが行え
る。
According to the present invention, the midpoint of the position coordinates of the image recognition points of the two points which are image-recognized by the image pickup means, and the reference coordinates of the two image recognition points. X, the amount of deviation from the coordinate of the center of rotation
The inspection table is moved in the Y direction, and the probe pin group is fixed instead of the inspection table by the inclination of the position coordinates of the two image recognition points that have been image-recognized and the image recognition points of these two points. Rotate the fixture you are doing. That is, the X- and Y-direction drive mechanisms of the inspection table are separated from the θ-direction drive mechanism, and even if the θ position is corrected, the X- and Y-direction coordinates of the inspection table may change. Since there is no need for feedback control of the drive mechanism and the position, high-speed and accurate positioning can be performed with only one position correction.

【0009】[0009]

【実施例】【Example】

[実施例1]本発明の実施例1を図1〜図6に基づいて
説明する。図1は本実施例の回路基板検査機の位置決め
装置を示す構成図、図2は本実施例装置に備えた検査用
接触ピンであるプローブピン群の一部を下からみて示す
図、図3は本実施例装置に備えたX−Yテーブルを示す
斜視図、図4および図5は重心位置座標と基準位置座標
との関係を示す図、図6は検査対象である回路基板を示
す斜視図である。
[Embodiment 1] Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1 is a configuration diagram showing a positioning device of a circuit board inspecting machine of this embodiment, FIG. 2 is a diagram showing a part of a probe pin group which is a contact pin for inspection provided in the device of this embodiment as seen from below, and FIG. Is a perspective view showing an XY table provided in the apparatus of the present embodiment, FIGS. 4 and 5 are diagrams showing a relationship between barycentric position coordinates and reference position coordinates, and FIG. 6 is a perspective view showing a circuit board to be inspected. Is.

【0010】図8に示すように、検査対象基板54は、
位置決め用の2点の画像認識用のパターン55,56を
有し、2点のパターン55,56は位置決め精度向上の
ため、極力、離れた位置に配置されていることを前提と
する。
As shown in FIG. 8, the inspection target substrate 54 is
It has two image recognition patterns 55 and 56 for positioning, and it is premised that the two patterns 55 and 56 are arranged as far apart as possible in order to improve the positioning accuracy.

【0011】図1において、17はプローブピン群14
とその保持部材15とからなるフィクスチャを回動させ
るモータで、支持体21の上壁上面に固定されている。
回動モータ17のシャフト18は支持体21の上壁を貫
通して配置されており、その先部にはプローブピン群1
4の保持部材15が連結されている。
In FIG. 1, 17 is a probe pin group 14
It is fixed to the upper surface of the upper wall of the support body 21 by a motor that rotates a fixture composed of the holding member 15 and the holding member 15.
The shaft 18 of the rotation motor 17 is arranged so as to penetrate the upper wall of the support body 21, and the probe pin group 1 is provided at the tip thereof.
4 holding members 15 are connected.

【0012】プローブピン群14は、図2に示すよう
に、画像認識用のパターンの1点目55に当接するプロ
ーブピン30と画像認識用のパターンの2点目56に当
接するプローブピン31とを結んだ直線33の中点32
が図1におけるフィクスチャの回動モータ17の回転中
心19と一致するように、その先部を下に向けて保持部
材15により保持されている。
As shown in FIG. 2, the probe pin group 14 includes a probe pin 30 contacting a first point 55 of an image recognition pattern and a probe pin 31 contacting a second point 56 of an image recognition pattern. Midpoint 32 of straight line 33
Is held by the holding member 15 with its tip facing downward so that it coincides with the rotation center 19 of the rotation motor 17 of the fixture in FIG.

【0013】16は、画像認識用のパターン55,56
を映像化するためのCCDカメラであり、支持体21の
上壁下面に固定されている。CCDカメラ16には、C
CD16カメラで取り込んだ映像信号を二値信号として
取り出す画像処理装置22が接続されている。
Reference numeral 16 is a pattern 55, 56 for image recognition.
Is a CCD camera for visualizing the image of, and is fixed to the lower surface of the upper wall of the support 21. The CCD camera 16 has C
An image processing device 22 for extracting a video signal captured by a CD16 camera as a binary signal is connected.

【0014】プローブピン群14とCCDカメラ16の
下方には、支持体21の下壁上面に設けられたX−Yテ
ーブル20が配置されている。X−Yテーブル20上に
は検査台11が載置され、図示されない搬送機構によ
り、矢印12の方向から検査対象の回路基板54が載置
されるように構成されている。
Below the probe pin group 14 and the CCD camera 16, an XY table 20 provided on the upper surface of the lower wall of the support 21 is arranged. The inspection table 11 is placed on the XY table 20, and the circuit board 54 to be inspected is placed from the direction of the arrow 12 by a transport mechanism (not shown).

【0015】また、前記回動モータ17、X−Yテーブ
ル20および画像処理装置22にはコンピュータ23が
接続されており、このコンピュータ23は、画像処理装
置22で得られた二値信号より画像認識用のパターン5
5,56の位置情報と補正移動量を演算し、フィクスチ
ャの回動用モータ17およびX−Yテーブル20の補正
移動の制御を行うためのものである。
A computer 23 is connected to the rotary motor 17, the XY table 20 and the image processing device 22. The computer 23 recognizes an image from a binary signal obtained by the image processing device 22. Pattern 5 for
The position information of 5, 56 and the correction movement amount are calculated, and the correction movement of the motor 17 for rotating the fixture and the XY table 20 is controlled.

【0016】図3に、X−Yテーブル20および検査台
11の詳細な図を示す。20bはX軸テーブルで検査台
11が設けられており、X軸モータ40bにより、X方
向42に検査台11が移動できる構成になっている。2
0aは支持体21の上壁上面に固定されたY軸テーブル
で、X軸テーブル20bが設けられており、Y軸モータ
40aにより、Y方向41にXテーブル20bおよび検
査台11を移動できる構成になっている。
FIG. 3 shows a detailed view of the XY table 20 and the inspection table 11. 20b is an X-axis table provided with the inspection table 11, and the inspection table 11 can be moved in the X direction 42 by an X-axis motor 40b. 2
Reference numeral 0a denotes a Y-axis table fixed to the upper surface of the upper wall of the support body 21, which is provided with an X-axis table 20b. The Y-axis motor 40a can move the X table 20b and the inspection table 11 in the Y direction 41. Has become.

【0017】次に、本実施例の位置決め装置により回路
基板の位置決めを行う手順について説明する。図1にお
いて、検査対象である回路基板54は、図示されない搬
送装置によって矢印12の方向に図示されないガイド溝
上を搬送され、検査台11上に図示されない固定機構に
より固定される。
Next, a procedure for positioning the circuit board by the positioning device of this embodiment will be described. In FIG. 1, the circuit board 54 to be inspected is conveyed in the direction of arrow 12 on a guide groove (not shown) by a conveying device (not shown), and is fixed on the inspection table 11 by a fixing mechanism (not shown).

【0018】上記回路基板54の位置決めを行う前に、
マスターとなる回路基板を前記搬送機構および前記固定
機構により検査台11に載置し、マスター回路基板の画
像認識用のパターン55,56がCCDカメラ16の視
野の中心にくるX−Yテーブル20のそれぞれの座標を
教示しておく。以後、これらの座標を予め教示された基
準位置座標と呼び、図4に46,47で示す。この基準
位置座標46,47にあって、パターン55とプローブ
ピン30およびパターン56とプローブピン31が当接
し、基準位置座標46,47の中点48が回動モータ1
7の回転中心19と一致している。
Before positioning the circuit board 54,
A circuit board to be a master is placed on the inspection table 11 by the transfer mechanism and the fixing mechanism, and the patterns 55 and 56 for image recognition of the master circuit board are at the center of the visual field of the CCD camera 16 of the XY table 20. Each coordinate is taught. Hereinafter, these coordinates will be referred to as pre-instructed reference position coordinates, which are indicated by 46 and 47 in FIG. At the reference position coordinates 46 and 47, the pattern 55 and the probe pin 30 and the pattern 56 and the probe pin 31 are in contact with each other, and the midpoint 48 of the reference position coordinates 46 and 47 is the rotation motor 1.
It coincides with the center of rotation 19 of 7.

【0019】検査対象の固定された回路基板54は、図
6に示すように2点の画像認識用のパターン55,56
を有し、その中の1点目55がCCDカメラ16の視野
内にくるように予め教示された位置にコンピュータ23
の指令を受けたX−Yテーブル20により、移動される
(図4参照)。そして、CCDカメラ16により、この
パターン55が映像化され、画像処理装置22により、
二値画像に変換され、その重心位置座標43がコンピュ
ータ23に記憶される。
As shown in FIG. 6, the fixed circuit board 54 to be inspected has two patterns 55 and 56 for image recognition.
And a computer 23 is placed at a position taught in advance so that the first point 55 of them is in the field of view of the CCD camera 16.
It is moved by the XY table 20 that has received the command (see FIG. 4). Then, the CCD camera 16 visualizes this pattern 55, and the image processing device 22
It is converted into a binary image, and its barycentric position coordinate 43 is stored in the computer 23.

【0020】次に、もう1点の画像認識用のパターン5
6がCCDカメラ16の視野内にくるように予め教示さ
れた位置にコンピュータ23の指令を受けたX−Yテー
ブル20により、移動される。そして、CCDカメラ1
6により、この画像認識用のパターン56が映像化さ
れ、画像処理装置22により、二値画像に変換され、そ
の重心位置座標43,44がコンピュータ23に記憶さ
れる。
Next, another pattern 5 for image recognition is used.
6 is moved by the XY table 20 instructed by the computer 23 to a position taught in advance so that the CCD 6 is within the field of view of the CCD camera 16. And CCD camera 1
6, the image recognition pattern 56 is visualized, converted into a binary image by the image processing device 22, and the barycentric position coordinates 43 and 44 thereof are stored in the computer 23.

【0021】次に、この2点の重心位置座標43,44
の中点45と、マスターとなる回路基板に基づいて予め
教示しておいた2点の基準位置座標46,47の中点4
8とのずれ量分、すなわちΔX,ΔYだけ、X−Yテー
ブル20を移動させる。
Next, the barycentric position coordinates 43, 44 of these two points
Midpoint 45, and the midpoint 4 of two reference position coordinates 46, 47 taught in advance based on the master circuit board.
The XY table 20 is moved by the amount of deviation from 8, that is, ΔX and ΔY.

【0022】これにより、図5のように、回路基板13
上の2点の画像認識用のパターン55,56の中点45
と、予め教示しておいた、この2点の基準位置座標4
3,44の中点48とが一致したことになり、次に、重
心位置座標43,44を結ぶ直線49と基準位置座標4
6,47を結ぶ直線50とがなす角度θだけ、フィクス
チャを回動モータ17により回動させれば良い。
As a result, as shown in FIG.
Midpoint 45 of the patterns 55 and 56 for image recognition of the above two points
And the reference position coordinates 4 of these two points
The midpoint 48 of 3, 44 coincides, and next, the straight line 49 connecting the center-of-gravity position coordinates 43, 44 and the reference position coordinate 4
It suffices to rotate the fixture by the rotation motor 17 by an angle θ formed by the straight line 50 connecting 6 and 47.

【0023】なお、本実施例では、回動モータ17のシ
ャフト18と保持部材15とを直結した場合を例示した
が、回動モータ17の回転速度をウォーム・ギアで減速
させて保持部材15を回動させる構成とすることで、よ
り回転の精度を向上させることができる。
In this embodiment, the shaft 18 of the turning motor 17 and the holding member 15 are directly connected to each other. However, the rotation speed of the turning motor 17 is reduced by the worm gear to hold the holding member 15. By making it rotate, the accuracy of rotation can be further improved.

【0024】[実施例2]本発明の実施例2を図7およ
び図8に基づいて説明する。図7は本実施例の回路基板
検査機の位置決め装置を示す構成図、図8は重心位置座
標と基準位置座標との関係を示す図である。本実施例
は、CCDカメラを2台設けた点のみが実施例1とは異
なるので、この点について説明する。
[Second Embodiment] A second embodiment of the present invention will be described with reference to FIGS. 7 and 8. FIG. 7 is a block diagram showing the positioning device of the circuit board inspection machine of this embodiment, and FIG. 8 is a diagram showing the relationship between the barycentric position coordinates and the reference position coordinates. This embodiment is different from the first embodiment only in that two CCD cameras are provided, and this point will be described.

【0025】本実施例において、16aは画像認識用の
1点目のパターン55を映像化するための第1CCDカ
メラであり、16bは画像認識用の2点目のパターン5
6を映像化するための第2CCDカメラである。第1C
CDカメラ16aと第2CCDカメラ16bは、前記回
路基板上の2点のパターン55,56の位置関係と同じ
位置関係にあり、2点のパターン55,56が第1CC
Dカメラ16aまたは第2CCDカメラ16bに同時に
映像化される位置で支持体21の上壁下面に固定されて
いる。
In this embodiment, 16a is a first CCD camera for visualizing the first pattern 55 for image recognition, and 16b is a second pattern 5 for image recognition.
6 is a second CCD camera for visualizing 6. 1st C
The CD camera 16a and the second CCD camera 16b have the same positional relationship as the positional relationship between the two-point patterns 55 and 56 on the circuit board, and the two-point patterns 55 and 56 correspond to the first CC.
It is fixed to the lower surface of the upper wall of the support 21 at a position where it is simultaneously imaged by the D camera 16a or the second CCD camera 16b.

【0026】次に、本実施例の位置決め装置により回路
基板の位置決めを行う手順について説明する。実施例1
と同様にして検査台11に固定された回路基板54は、
2点の画像認識用のパターン55,56が第1CCDカ
メラ16aおよび第2CCDカメラ16bの視野内にく
るように、予め教示された位置にコンピュータ23の指
令を受けたX−Yテーブル20により移動される。そし
て、第1CCDカメラ16aおよび第2CCDカメラ1
6bにより、この2点のパターン55,56が映像化さ
れ、画像処理装置22により、2点のパターン55,5
6が二値画像に変換され、それぞれの重心位置座標がコ
ンピュータ23に記憶される。
Next, a procedure for positioning the circuit board by the positioning apparatus of this embodiment will be described. Example 1
The circuit board 54 fixed to the inspection table 11 in the same manner as
The two patterns for image recognition 55 and 56 for image recognition are moved by the XY table 20 instructed by the computer 23 to a pre-instructed position so that the patterns 55 and 56 for image recognition come within the visual fields of the first CCD camera 16a and the second CCD camera 16b. It Then, the first CCD camera 16a and the second CCD camera 1
6b visualizes these two-point patterns 55, 56, and the image processing device 22 produces two-point patterns 55, 5
6 is converted into a binary image, and the respective barycentric position coordinates are stored in the computer 23.

【0027】図8は、2点のパターン55,56が画像
認識され、求められた重心位置座標とそれぞれの基準位
置座標との関係を示す図で、図8(a)はパターン5
5、図8(b)はパターン56によるものである。図8
において、2点の重心位置座標50,51と、それぞれ
マスターとなる回路基板に基づいて予め教示しておいた
2点の基準位置座標52,53とのずれ量のX,Y方向
の平均値であるΔX3,ΔY3(式1,式2参照)を求
め、ΔX3,ΔY3の分だけX−Yテーブル20を移動
させる。ここで、ΔX3およびΔY3は、重心位置座標
50と基準位置座標52および重心位置座標50と基準
位置53とを画像認識し、求めた重心位置との差分をそ
れぞれΔX1,ΔY1およびΔX2,ΔY2とすると、 ΔX3=(ΔX1+ΔX2)/2・・・・式1 ΔY3=(ΔY1+ΔY2)/2・・・・式2 となる。
FIG. 8 is a diagram showing the relationship between the barycentric position coordinates obtained by image recognition of the two-point patterns 55 and 56 and the respective reference position coordinates. FIG.
5 and FIG. 8B are based on the pattern 56. FIG.
In the X- and Y-direction average values of the amounts of deviation between the barycentric position coordinates 50 and 51 of the two points and the reference position coordinates 52 and 53 of the two points taught beforehand based on the master circuit board, respectively. Certain ΔX3 and ΔY3 (see Formula 1 and Formula 2) are obtained, and the XY table 20 is moved by the amount of ΔX3 and ΔY3. Here, ΔX3 and ΔY3 are obtained by image-recognizing the barycentric position coordinate 50 and the reference position coordinate 52 and the barycentric position coordinate 50 and the reference position 53, and the differences from the calculated barycentric position are ΔX1, ΔY1 and ΔX2, ΔY2, respectively. , ΔX3 = (ΔX1 + ΔX2) / 2 ... Equation 1 ΔY3 = (ΔY1 + ΔY2) / 2 ...

【0028】これにより、実施例1と同様に、X,Y方
向の座標が合ったことになり、次に、基準位置座標5
2,53を結んだ直線と、重心位置座標50,51を結
んだ直線とがなす角度だけ、フィクスチャを回動モータ
17により回せば良い。
As a result, as in the first embodiment, the coordinates in the X and Y directions are matched, and then the reference position coordinates 5
It is only necessary to rotate the fixture by the rotation motor 17 by an angle formed by the straight line connecting 2, 53 and the straight line connecting the center-of-gravity position coordinates 50, 51.

【0029】本実施例によると、実施例1の効果に加
え、2点の画像取り込みが座標の移動を伴わずにできる
分、高速に位置決めができる。
According to the present embodiment, in addition to the effects of the first embodiment, the image can be captured at two points without the movement of the coordinates, so that the positioning can be performed at high speed.

【0030】[0030]

【発明の効果】本発明によれば、回路基板テスタのプロ
ーブポイントの位置決めをフィードバック制御すること
なく、高速かつ容易に実現できる。
According to the present invention, the positioning of the probe points of the circuit board tester can be realized quickly and easily without feedback control.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例1の回路基板検査機の位置決め
装置を示す構成図である。
FIG. 1 is a configuration diagram showing a positioning device of a circuit board inspection machine according to a first embodiment of the present invention.

【図2】本発明の実施例1の回路基板検査機の位置決め
装置に備えた検査用接触ピンであるプローブピン群の一
部を下からみて示す図である。
FIG. 2 is a diagram showing a part of a probe pin group, which is a contact pin for inspection provided in the positioning device of the circuit board inspection machine according to the first embodiment of the present invention, as seen from below.

【図3】本発明の実施例1の回路基板検査機の位置決め
装置に備えたX−Yテーブルを示す斜視図である。
FIG. 3 is a perspective view showing an XY table provided in the positioning device of the circuit board inspection machine according to the first embodiment of the present invention.

【図4】本発明の実施例1の回路基板検査機の位置決め
方法における重心位置座標と基準位置座標との関係を示
す図である。
FIG. 4 is a diagram showing a relationship between barycentric position coordinates and reference position coordinates in the positioning method for the circuit board inspection machine according to the first embodiment of the present invention.

【図5】本発明の実施例1の回路基板検査機の位置決め
方法における重心位置座標と基準位置座標との関係を示
す図である。
FIG. 5 is a diagram showing a relationship between barycentric position coordinates and reference position coordinates in the positioning method for the circuit board inspection machine according to the first embodiment of the present invention.

【図6】検査対象である回路基板を示す斜視図である。FIG. 6 is a perspective view showing a circuit board to be inspected.

【図7】本発明の実施例2の回路基板検査機の位置決め
装置を示す構成図である。
FIG. 7 is a configuration diagram showing a positioning device of a circuit board inspection machine according to a second embodiment of the present invention.

【図8】本発明の実施例2の回路基板検査機の位置決め
方法における重心位置座標と基準位置座標との関係を示
す図である。
FIG. 8 is a diagram showing a relationship between barycentric position coordinates and reference position coordinates in a positioning method for a circuit board inspection machine according to a second embodiment of the present invention.

【図9】従来の回路基板検査機の位置決め装置を示す構
成図である。
FIG. 9 is a configuration diagram showing a positioning device of a conventional circuit board inspection machine.

【符号の説明】[Explanation of symbols]

11 検査台 14 ピローブピン群 15 保持部材 16 CCDカメラ 17 回動モータ 20 X−Yテーブル 22 画像処理装置 23 コンピュータ 43,44,50,51 重心位置座標 45,48 中点 46,47,52,53 基準位置座標 54 検査対象基板 55,56 画像認識用のパターン 11 Inspection table 14 Pillow pin group 15 Holding member 16 CCD camera 17 Rotating motor 20 XY table 22 Image processing device 23 Computer 43,44,50,51 Center of gravity position coordinate 45,48 Midpoint 46,47,52,53 Reference Position coordinates 54 Inspection target board 55, 56 Image recognition pattern

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 位置決め用の2点のパターンを有する回
路基板の検査機の位置決め装置において、検査対象であ
る回路基板を固定する検査台と、検査台を移動させる駆
動機構と、回路基板上の位置決め用のパターンを映像化
する撮像手段と、撮像手段からの出力を2値画素情報と
して処理および記憶する画像処理装置と、検査用プロー
ブピン群とその保持部材とからなるフィクスチャを回転
方向に移動させる回転駆動機構と、前記回転駆動機構の
回転中心を前記回路基板上の2点の位置決め用パターン
の中点と合致させたフィクスチャと、前記画像処理装置
で得られた位置情報をもとに、前記検査台駆動機構およ
び前記回転駆動機構の補正移動量の演算および補正移動
の制御を行う制御手段とにより構成したことを特徴とす
る回路基板検査機の位置決め装置。
1. A positioning device for a circuit board inspection machine having a positioning two-point pattern, an inspection stand for fixing a circuit board to be inspected, a drive mechanism for moving the inspection stand, and a circuit board on the circuit board. An image pickup device for visualizing a positioning pattern, an image processing device for processing and storing the output from the image pickup device as binary pixel information, and a fixture composed of a probe pin group for inspection and a holding member thereof in a rotation direction. Based on the rotation drive mechanism to be moved, the fixture in which the center of rotation of the rotation drive mechanism is aligned with the midpoint of the two positioning patterns on the circuit board, and the position information obtained by the image processing apparatus. And a control means for calculating the correction movement amount and controlling the correction movement of the inspection table drive mechanism and the rotation drive mechanism. Positioning device.
【請求項2】 検査対象である回路基板上の2点の画像
認識用のプローブ、部品、パターンの一部等のマークを
撮像手段と画像処理装置により位置認識し、予め測定し
ておいた基準のマーク認識位置とのずれ量から、プロー
ブピン群がプローブに当接する位置をX,Y,θの三次
元の方向に補正をかける回路基板検査機の位置決め方法
において、回路基板上の2点のマークを映像化する第1
の過程と、第1の過程における2点の映像信号を2点の
二値画像情報として記憶する第2の過程と、第2の過程
における2点の二値画像情報より、それぞれの重心位置
を算出し、2点の実際の位置情報として記憶する第3の
過程と、第3の過程で得られた2点の座標位置の中点を
予め教示しておいたこれらの2点の基準座標の中点の座
標に合致するように、請求項1記載の駆動機構を制御す
る第4の過程と、第4の過程で移動した2点の座標を結
んだ直線と、前記2点の基準座標を結んだ直線とのなす
角度の分だけ、請求項1記載のフィクスチャの回転駆動
機構を制御する第5の過程とを備えたことを特徴とする
回路基板検査機の位置決め方法。
2. A reference measured in advance by recognizing positions of two image recognition probes, parts, marks of a part of a pattern, etc. on a circuit board to be inspected by an image pickup means and an image processing device. In the positioning method of the circuit board inspection machine for correcting the position where the probe pin group abuts on the probe in the three-dimensional directions of X, Y, and θ based on the amount of deviation from the mark recognition position of No. The first to visualize the mark
And the second step of storing the two-point video signals in the first step as binary image information of two points, and the two-point binary image information in the second step, the respective barycentric positions are determined. The third process of calculating and storing as the actual position information of the two points, and the reference coordinates of these two points that have been taught in advance the midpoint of the coordinate positions of the two points obtained in the third process A fourth step of controlling the drive mechanism according to claim 1 so as to match the coordinates of the middle point, a straight line connecting the coordinates of the two points moved in the fourth step, and the reference coordinates of the two points A fifth step of controlling the rotary drive mechanism of the fixture according to claim 1 by an angle formed by the connected straight line, and a positioning method of the circuit board inspection machine.
JP7165412A 1995-06-30 1995-06-30 Method and device for positioning circuit board inspection device Withdrawn JPH0915302A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7165412A JPH0915302A (en) 1995-06-30 1995-06-30 Method and device for positioning circuit board inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7165412A JPH0915302A (en) 1995-06-30 1995-06-30 Method and device for positioning circuit board inspection device

Publications (1)

Publication Number Publication Date
JPH0915302A true JPH0915302A (en) 1997-01-17

Family

ID=15811929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7165412A Withdrawn JPH0915302A (en) 1995-06-30 1995-06-30 Method and device for positioning circuit board inspection device

Country Status (1)

Country Link
JP (1) JPH0915302A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6486689B1 (en) 1999-05-26 2002-11-26 Nidec-Read Corporation Printed circuit board testing apparatus and probe device for use in the same
US7512260B2 (en) 2004-09-06 2009-03-31 Omron Corporation Substrate inspection method and apparatus
JP2009099937A (en) * 2007-09-28 2009-05-07 Tokyo Electron Ltd Probe apparatus and probing method
CN103501141A (en) * 2013-10-10 2014-01-08 中国科学院上海技术物理研究所 Angle position error detecting and compensating device of round angle position sensor and compensating method
JP2014159978A (en) * 2013-02-19 2014-09-04 Hioki Ee Corp Substrate inspection device and correction information acquisition method
KR20180010480A (en) * 2016-07-21 2018-01-31 세메스 주식회사 Method of testing semiconductor devices
CN109596971A (en) * 2018-11-28 2019-04-09 大族激光科技产业集团股份有限公司 The alignment method of flying probe tester
JP2021012117A (en) * 2019-07-08 2021-02-04 ヤマハファインテック株式会社 Electrical inspection device and holding unit
CN113091813A (en) * 2021-03-31 2021-07-09 杭州智缤科技有限公司 Intelligent hardware tool detection system
CN115824312A (en) * 2023-01-29 2023-03-21 苏州有道芯量智能科技有限公司 Detection equipment for vehicle-mounted screen circuit board

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6486689B1 (en) 1999-05-26 2002-11-26 Nidec-Read Corporation Printed circuit board testing apparatus and probe device for use in the same
US7512260B2 (en) 2004-09-06 2009-03-31 Omron Corporation Substrate inspection method and apparatus
JP2009099937A (en) * 2007-09-28 2009-05-07 Tokyo Electron Ltd Probe apparatus and probing method
JP2014159978A (en) * 2013-02-19 2014-09-04 Hioki Ee Corp Substrate inspection device and correction information acquisition method
CN103501141A (en) * 2013-10-10 2014-01-08 中国科学院上海技术物理研究所 Angle position error detecting and compensating device of round angle position sensor and compensating method
KR20180010480A (en) * 2016-07-21 2018-01-31 세메스 주식회사 Method of testing semiconductor devices
CN109596971A (en) * 2018-11-28 2019-04-09 大族激光科技产业集团股份有限公司 The alignment method of flying probe tester
CN109596971B (en) * 2018-11-28 2020-12-18 深圳市大族数控科技有限公司 Alignment method of flying probe tester
JP2021012117A (en) * 2019-07-08 2021-02-04 ヤマハファインテック株式会社 Electrical inspection device and holding unit
CN113091813A (en) * 2021-03-31 2021-07-09 杭州智缤科技有限公司 Intelligent hardware tool detection system
CN113091813B (en) * 2021-03-31 2023-04-18 杭州智缤科技有限公司 Intelligent hardware tool detection system
CN115824312A (en) * 2023-01-29 2023-03-21 苏州有道芯量智能科技有限公司 Detection equipment for vehicle-mounted screen circuit board

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