JP2020536238A5 - - Google Patents
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- Publication number
- JP2020536238A5 JP2020536238A5 JP2020518642A JP2020518642A JP2020536238A5 JP 2020536238 A5 JP2020536238 A5 JP 2020536238A5 JP 2020518642 A JP2020518642 A JP 2020518642A JP 2020518642 A JP2020518642 A JP 2020518642A JP 2020536238 A5 JP2020536238 A5 JP 2020536238A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- metal layer
- gate electrodes
- dielectric
- elongated gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023044919A JP7823898B2 (ja) | 2017-09-29 | 2023-03-22 | ３ｄナノポアデバイス |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762566313P | 2017-09-29 | 2017-09-29 | |
| US62/566,313 | 2017-09-29 | ||
| US201762593840P | 2017-12-01 | 2017-12-01 | |
| US62/593,840 | 2017-12-01 | ||
| PCT/US2018/053624 WO2019068034A2 (en) | 2017-09-29 | 2018-09-28 | NANOPORA DEVICE AND METHOD FOR MANUFACTURING THE SAME |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023044919A Division JP7823898B2 (ja) | 2017-09-29 | 2023-03-22 | ３ｄナノポアデバイス |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020536238A JP2020536238A (ja) | 2020-12-10 |
| JP2020536238A5 true JP2020536238A5 (https=) | 2021-11-04 |
| JP7254366B2 JP7254366B2 (ja) | 2023-04-10 |
Family
ID=63963484
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020518642A Active JP7254366B2 (ja) | 2017-09-29 | 2018-09-28 | ナノポア装置およびその製造方法 |
| JP2023044919A Active JP7823898B2 (ja) | 2017-09-29 | 2023-03-22 | ３ｄナノポアデバイス |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023044919A Active JP7823898B2 (ja) | 2017-09-29 | 2023-03-22 | ３ｄナノポアデバイス |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US11041844B2 (https=) |
| EP (1) | EP3688464A2 (https=) |
| JP (2) | JP7254366B2 (https=) |
| KR (1) | KR102433301B1 (https=) |
| CN (2) | CN111194408B (https=) |
| WO (1) | WO2019068034A2 (https=) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11034847B2 (en) | 2017-07-14 | 2021-06-15 | Samsung Electronics Co., Ltd. | Hardmask composition, method of forming pattern using hardmask composition, and hardmask formed from hardmask composition |
| KR102433666B1 (ko) | 2017-07-27 | 2022-08-18 | 삼성전자주식회사 | 하드마스크 조성물, 이를 이용한 패턴의 형성방법 및 상기 하드마스크 조성물을 이용하여 형성된 하드마스크 |
| KR102486388B1 (ko) * | 2017-07-28 | 2023-01-09 | 삼성전자주식회사 | 그래핀 양자점의 제조방법, 상기 제조방법에 따라 얻어진 그래핀 양자점을 포함한 하드마스크 조성물, 이를 이용한 패턴의 형성방법 및 상기 하드마스크 조성물을 이용하여 형성된 하드마스크 |
| WO2019133998A1 (en) | 2017-12-31 | 2019-07-04 | Biothlon, Inc. | Nanopore device and methods of electrical array addressing and sensing |
| EP3830572B1 (en) * | 2018-07-27 | 2024-12-25 | Palogen, Inc. | Nanopore device and methods of detecting charged particles using same |
| US11701619B2 (en) * | 2018-10-12 | 2023-07-18 | MIS IP Holdings, LLC | Diagnostic methods and apparatus for electrodialysis |
| US11686701B2 (en) | 2019-07-16 | 2023-06-27 | Palogen, Inc. | Nanopore device and methods of detecting and classifying charged particles using same |
| US11674919B2 (en) * | 2019-07-17 | 2023-06-13 | Taiwan Semiconductor Manufacturing Company Ltd. | Detector, detection device and method of using the same |
| CN111044574B (zh) * | 2019-12-02 | 2022-03-04 | 东南大学 | 一种超灵敏塑胶炸弹侦测传感器 |
| KR20220134015A (ko) * | 2020-02-06 | 2022-10-05 | 팔로젠 인코포레이티드 | 나노포어 센서 디바이스 및 그 제조 방법들 |
| JP2022015499A (ja) | 2020-07-09 | 2022-01-21 | キオクシア株式会社 | 記憶装置 |
| WO2022020206A1 (en) * | 2020-07-24 | 2022-01-27 | Palogen, Inc. | Nanochannel systems and methods for detecting pathogens using same |
| CN112251343A (zh) * | 2020-11-11 | 2021-01-22 | 深圳市儒翰基因科技有限公司 | 一种dna测序装置、固态纳米孔组件及其制备方法 |
| JP2022129253A (ja) | 2021-02-24 | 2022-09-05 | キオクシア株式会社 | 記憶装置 |
| KR102416152B1 (ko) | 2021-03-12 | 2022-07-06 | 고려대학교 산학협력단 | 나노 층상 구조막이 결합된 나노포어 소자 |
| KR102547706B1 (ko) | 2021-03-16 | 2023-06-29 | 주식회사 멤스팩 | 신속 바이오 진단키트 |
| CN115141749A (zh) * | 2021-03-29 | 2022-10-04 | 上海近观科技有限责任公司 | 基于电致发光材料的纳米孔阵列结构及其制备方法 |
| CN115125132B (zh) * | 2021-03-29 | 2026-03-31 | 上海近观科技有限责任公司 | 基于固态纳米孔阵列的测序芯片及其制备方法 |
| CN113552332B (zh) | 2021-09-22 | 2022-04-22 | 成都齐碳科技有限公司 | 用于感测包含在液体中的分析物的装置和设备 |
| WO2023056437A1 (en) * | 2021-09-30 | 2023-04-06 | California Institute Of Technology | Systems and methods for molecular measurements |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8986928B2 (en) | 2009-04-10 | 2015-03-24 | Pacific Biosciences Of California, Inc. | Nanopore sequencing devices and methods |
| US8828138B2 (en) * | 2010-05-17 | 2014-09-09 | International Business Machines Corporation | FET nanopore sensor |
| US8138068B2 (en) * | 2010-08-11 | 2012-03-20 | International Business Machines Corporation | Method to form nanopore array |
| US9240328B2 (en) * | 2010-11-19 | 2016-01-19 | Alphabet Energy, Inc. | Arrays of long nanostructures in semiconductor materials and methods thereof |
| CN102242062B (zh) * | 2011-04-19 | 2012-12-19 | 浙江大学 | 一种高分辨率的生物传感器 |
| US9070758B2 (en) * | 2011-06-20 | 2015-06-30 | Imec | CMOS compatible method for manufacturing a HEMT device and the HEMT device thereof |
| EP3385992B1 (en) | 2011-07-27 | 2024-09-04 | The Board of Trustees of the University of Illinois | Nanopore sensors for biomolecular characterization |
| JP5758744B2 (ja) * | 2011-08-25 | 2015-08-05 | 株式会社日立製作所 | 相変化メモリ |
| US20130057557A1 (en) * | 2011-09-07 | 2013-03-07 | Qualcomm Mems Technologies, Inc. | High area stacked layered metallic structures and related methods |
| CN103165613A (zh) * | 2011-12-12 | 2013-06-19 | 中国科学院微电子研究所 | 半导体存储器及其制造方法 |
| JP6054604B2 (ja) * | 2011-12-20 | 2016-12-27 | 株式会社日立製作所 | マイクロ・ナノ流体解析デバイスおよびその製造方法 |
| EP2836828B1 (en) * | 2012-04-09 | 2022-12-14 | Takulapalli, Bharath | Field effect transistor, device including the transistor, and methods of forming and using same |
| KR101927415B1 (ko) * | 2012-11-05 | 2019-03-07 | 삼성전자주식회사 | 나노갭 소자 및 이로부터의 신호를 처리하는 방법 |
| US9377431B2 (en) * | 2013-07-24 | 2016-06-28 | Globalfoundries Inc. | Heterojunction nanopore for sequencing |
| JP6247064B2 (ja) * | 2013-09-20 | 2017-12-13 | 株式会社日立ハイテクノロジーズ | 生体分子計測装置 |
| WO2015111760A1 (en) | 2014-01-24 | 2015-07-30 | Osaka University | Devices, systems and methods for sequencing biomolecules |
| US9691849B2 (en) * | 2014-04-10 | 2017-06-27 | Alphabet Energy, Inc. | Ultra-long silicon nanostructures, and methods of forming and transferring the same |
| US9921181B2 (en) | 2014-06-26 | 2018-03-20 | International Business Machines Corporation | Detection of translocation events using graphene-based nanopore assemblies |
| WO2016161402A1 (en) * | 2015-04-03 | 2016-10-06 | Abbott Laboratories | Devices and methods for sample analysis |
| DE112016005255B4 (de) * | 2015-12-17 | 2023-06-15 | Hitachi High-Tech Corporation | Biomolekülmesseinrichtung |
| CN106929565A (zh) * | 2015-12-30 | 2017-07-07 | 北京大学 | 基于纳米结构的蛋白质单分子电子器件及其制备和应用 |
| US10669579B2 (en) * | 2016-07-15 | 2020-06-02 | International Business Machines Corporation | DNA sequencing with stacked nanopores |
| US10319635B2 (en) * | 2017-05-25 | 2019-06-11 | Sandisk Technologies Llc | Interconnect structure containing a metal slilicide hydrogen diffusion barrier and method of making thereof |
-
2018
- 2018-09-28 WO PCT/US2018/053624 patent/WO2019068034A2/en not_active Ceased
- 2018-09-28 JP JP2020518642A patent/JP7254366B2/ja active Active
- 2018-09-28 CN CN201880063003.6A patent/CN111194408B/zh active Active
- 2018-09-28 EP EP18792689.4A patent/EP3688464A2/en active Pending
- 2018-09-28 CN CN202211439098.1A patent/CN116042789B/zh active Active
- 2018-09-28 US US16/147,362 patent/US11041844B2/en not_active Expired - Fee Related
- 2018-09-28 KR KR1020207012259A patent/KR102433301B1/ko active Active
-
2021
- 2021-06-21 US US17/352,832 patent/US11371981B2/en active Active
-
2022
- 2022-05-18 US US17/747,420 patent/US12379369B2/en active Active
-
2023
- 2023-03-22 JP JP2023044919A patent/JP7823898B2/ja active Active
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