JP2020527379A5 - - Google Patents
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- Publication number
- JP2020527379A5 JP2020527379A5 JP2019570101A JP2019570101A JP2020527379A5 JP 2020527379 A5 JP2020527379 A5 JP 2020527379A5 JP 2019570101 A JP2019570101 A JP 2019570101A JP 2019570101 A JP2019570101 A JP 2019570101A JP 2020527379 A5 JP2020527379 A5 JP 2020527379A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- region
- ultrasonic transducer
- ultrasound imaging
- micromachine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 22
- 238000005530 etching Methods 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000012285 ultrasound imaging Methods 0.000 claims 12
- 238000000034 method Methods 0.000 claims 11
- 238000000926 separation method Methods 0.000 claims 7
- 239000000463 material Substances 0.000 claims 5
- 238000000151 deposition Methods 0.000 claims 3
- 238000002604 ultrasonography Methods 0.000 claims 3
- 238000000708 deep reactive-ion etching Methods 0.000 claims 2
- 238000003384 imaging method Methods 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 230000002457 bidirectional effect Effects 0.000 description 4
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762527143P | 2017-06-30 | 2017-06-30 | |
| US62/527,143 | 2017-06-30 | ||
| US201862679134P | 2018-06-01 | 2018-06-01 | |
| US62/679,134 | 2018-06-01 | ||
| PCT/EP2018/067006 WO2019002231A1 (en) | 2017-06-30 | 2018-06-26 | INTRALUMINAL ULTRASONIC IMAGING DEVICE COMPRISING A SUBSTRATE SEPARATED IN A PLURALITY OF SPACED SEGMENTS, INTRALUMINAL ULTRASONIC IMAGING DEVICE COMPRISING A TRENCH, AND METHOD OF MANUFACTURING |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020527379A JP2020527379A (ja) | 2020-09-10 |
| JP2020527379A5 true JP2020527379A5 (https=) | 2021-07-26 |
| JP7145892B2 JP7145892B2 (ja) | 2022-10-03 |
Family
ID=62791733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019570101A Active JP7145892B2 (ja) | 2017-06-30 | 2018-06-26 | 複数の離間されたセグメントに分離された基板を有する腔内超音波撮像装置、溝を有する腔内超音波撮像装置、及び製造する方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US11413008B2 (https=) |
| EP (1) | EP3645176A1 (https=) |
| JP (1) | JP7145892B2 (https=) |
| CN (1) | CN110958916B (https=) |
| WO (1) | WO2019002231A1 (https=) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11039814B2 (en) | 2016-12-04 | 2021-06-22 | Exo Imaging, Inc. | Imaging devices having piezoelectric transducers |
| US10656007B2 (en) | 2018-04-11 | 2020-05-19 | Exo Imaging Inc. | Asymmetrical ultrasound transducer array |
| US10648852B2 (en) | 2018-04-11 | 2020-05-12 | Exo Imaging Inc. | Imaging devices having piezoelectric transceivers |
| EP3797412B1 (en) | 2018-05-21 | 2024-10-09 | Exo Imaging Inc. | Ultrasonic transducers with q spoiling |
| EP3590437A1 (en) | 2018-07-02 | 2020-01-08 | Koninklijke Philips N.V. | Acoustically transparent window for intraluminal ultrasound imaging device |
| CA3108024A1 (en) | 2018-08-01 | 2020-02-06 | Exo Imaging, Inc. | Systems and methods for integrating ultrasonic transducers with hybrid contacts |
| EP3908194B1 (en) * | 2019-01-07 | 2026-02-18 | Koninklijke Philips N.V. | Increased flexibility substrate for intraluminal ultrasound imaging assembly |
| KR20250069990A (ko) | 2019-09-12 | 2025-05-20 | 엑소 이미징, 인크. | 에지 홈, 가상 피봇, 및 자유 경계를 통한 증가된 mut 커플링 효율성 및 대역폭 |
| EP4185210B1 (en) * | 2020-07-24 | 2024-11-13 | Koninklijke Philips N.V. | Curved circuit substrate for intraluminal ultrasound imaging assembly |
| CN111884647B (zh) * | 2020-08-13 | 2023-09-29 | 中国工程物理研究院电子工程研究所 | 一种压电微机械声波换能器阵列耦合隔离方法 |
| CN116761554A (zh) * | 2021-01-14 | 2023-09-15 | 飞利浦影像引导治疗公司 | 用于管腔内成像设备的加固层 |
| CN113120854B (zh) * | 2021-03-03 | 2024-01-23 | 复旦大学 | 一种背衬型高频宽带pmut单元及pmut阵列 |
| KR20230162525A (ko) * | 2021-03-29 | 2023-11-28 | 엑소 이미징, 인크. | Mut 어레이에서의 크로스 토크의 감소를 위한 기술 |
| US11819881B2 (en) | 2021-03-31 | 2023-11-21 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
| US11951512B2 (en) | 2021-03-31 | 2024-04-09 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
| US12486159B2 (en) | 2021-06-30 | 2025-12-02 | Exo Imaging, Inc. | Micro-machined ultrasound transducers with insulation layer and methods of manufacture |
| US12599360B2 (en) * | 2022-10-24 | 2026-04-14 | Boston Scientific Scimed, Inc. | Ultrasonic imaging ablation catheter system and method |
| CN115721341B (zh) * | 2022-11-23 | 2025-05-02 | 苏州法兰克曼医疗器械有限公司 | 一种具有引导结构的体内影像采集装置、系统和制备方法 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2287375B (en) | 1994-03-11 | 1998-04-15 | Intravascular Res Ltd | Ultrasonic transducer array and method of manufacturing the same |
| US7226417B1 (en) | 1995-12-26 | 2007-06-05 | Volcano Corporation | High resolution intravascular ultrasound transducer assembly having a flexible substrate |
| JP4123192B2 (ja) * | 2004-06-03 | 2008-07-23 | セイコーエプソン株式会社 | 超音波トランスデューサ、および超音波トランスデューサの製造方法 |
| US7745973B2 (en) | 2006-05-03 | 2010-06-29 | The Board Of Trustees Of The Leland Stanford Junior University | Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion |
| CN101868185B (zh) | 2007-12-03 | 2013-12-11 | 科隆科技公司 | 用于超声系统的cmut封装 |
| US8475379B2 (en) * | 2008-11-17 | 2013-07-02 | Vytronus, Inc. | Systems and methods for ablating body tissue |
| JP5770100B2 (ja) | 2008-12-23 | 2015-08-26 | コーニンクレッカ フィリップス エヌ ヴェ | スプリアス音響モード抑制を持つ集積回路及びその製造方法 |
| JP6069798B2 (ja) | 2011-12-20 | 2017-02-01 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | 超音波トランスデューサデバイス及びこれを製造する方法 |
| US20130310679A1 (en) * | 2012-04-23 | 2013-11-21 | The Regents Of The University Of California | 3d transurethral ultrasound system for multi-modal fusion |
| CN105122488B (zh) | 2013-03-14 | 2018-01-26 | 火山公司 | 晶片级换能器涂覆和方法 |
| KR102126033B1 (ko) | 2013-10-23 | 2020-06-23 | 삼성전자주식회사 | 초음파 변환기 및 이를 채용한 초음파 진단장치 |
| WO2015074032A1 (en) * | 2013-11-18 | 2015-05-21 | Jeremy Stigall | Guided thrombus dispersal catheter |
| US9525119B2 (en) | 2013-12-11 | 2016-12-20 | Fujifilm Dimatix, Inc. | Flexible micromachined transducer device and method for fabricating same |
| CA2946133A1 (en) * | 2014-04-18 | 2015-10-22 | Butterfly Network, Inc. | Ultrasonic transducers in complementary metal oxide semiconductor (cmos) wafers and related apparatus and methods |
| US9067779B1 (en) * | 2014-07-14 | 2015-06-30 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
| US10828673B2 (en) * | 2014-07-17 | 2020-11-10 | Koninklijke Philips N.V. | Ultrasound transducer arrangement and assembly, coaxial wire assembly, ultrasound probe and ultrasonic imaging system |
| JP7090607B2 (ja) * | 2016-11-11 | 2022-06-24 | コーニンクレッカ フィリップス エヌ ヴェ | ワイヤレス管腔内撮像デバイス及びシステム |
| WO2019110699A1 (en) | 2017-12-08 | 2019-06-13 | Koninklijke Philips N.V. | Rolled flexible substrate for intraluminal ultrasound imaging device |
| JP2021505263A (ja) | 2017-12-08 | 2021-02-18 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | 腔内超音波撮像装置のための統合されたウインドウを備える巻取型可撓性基板 |
| WO2019110698A1 (en) | 2017-12-08 | 2019-06-13 | Koninklijke Philips N.V. | Rolled flexible substrate with non-perpendicular transducer separation for intraluminal ultrasound imaging device |
| WO2019110776A1 (en) | 2017-12-08 | 2019-06-13 | Koninklijke Philips N.V. | Rolled flexible substrate with integrated support member for intraluminal ultrasound imaging device |
-
2018
- 2018-06-26 JP JP2019570101A patent/JP7145892B2/ja active Active
- 2018-06-26 WO PCT/EP2018/067006 patent/WO2019002231A1/en not_active Ceased
- 2018-06-26 EP EP18735537.5A patent/EP3645176A1/en not_active Withdrawn
- 2018-06-26 US US16/622,416 patent/US11413008B2/en active Active
- 2018-06-26 CN CN201880049313.2A patent/CN110958916B/zh active Active
-
2022
- 2022-08-15 US US17/887,937 patent/US11883233B2/en active Active
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