JP2020524236A - 多段式回転ピストンポンプ - Google Patents
多段式回転ピストンポンプ Download PDFInfo
- Publication number
- JP2020524236A JP2020524236A JP2019566303A JP2019566303A JP2020524236A JP 2020524236 A JP2020524236 A JP 2020524236A JP 2019566303 A JP2019566303 A JP 2019566303A JP 2019566303 A JP2019566303 A JP 2019566303A JP 2020524236 A JP2020524236 A JP 2020524236A
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- pump
- rotary piston
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- piston pump
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- 238000001816 cooling Methods 0.000 claims description 12
- 229910000831 Steel Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/10—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by changing the positions of the inlet or outlet openings with respect to the working chamber
- F04C28/16—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by changing the positions of the inlet or outlet openings with respect to the working chamber using lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
- F04C18/165—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type having more than two rotary pistons with parallel axes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/30—Casings or housings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/19—Temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/02—Light metals
- F05C2201/021—Aluminium
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Rotary Pumps (AREA)
Abstract
Description
尚、nはポンプ段の数であり、VRは固有の容積比である。
A>400 mm2/(m3/h)*S/VR
尚、Aは、終圧動作中に200 mbarを超える時間平均圧力を好ましくは有するポンプチャンバの内面の一部であり、Sは、1〜50 mbar のポンプ入口での入口圧力間の真空ポンプの最も高い測定送出性能であり、VRは容積比である。所与の送出容積で相応して広い表面を実現するために、ロータの適度な回転速度は有利である。特に、回転速度は6000 1/minより低く、好ましくは4500 1/minより低く、特に好ましくは3000 1/minより低い。
Claims (12)
- ハウジング(10)に配置されて、複数の回転ピストン(20)を支持している2本の軸
を備えており、
対応する回転ピストン(20)は回転ピストン対を構成しており、ポンプ段(12, 14, 16, 18)を夫々構成する複数の回転ピストン対が設けられており、
隣り合うポンプ段を互いに夫々連結する複数の連結チャネル(38)と、
第1のポンプ段に連結されているポンプ入口(34)と、
最後のポンプ段に連結されているポンプ出口(36)と
を更に備えており、
固有の容積比(VR)が少なくとも15であり、好ましくは少なくとも20であり、特に好ましくは少なくとも25であることを特徴とする多段式回転ピストンポンプ。 - ポンプ段の数(n)は少なくとも3であり、特には少なくとも5であることを特徴とする請求項1に記載の多段式回転ピストンポンプ。
- n>√(VR)−1がポンプ段の数(n)に適用されていることを特徴とする請求項2に記載の多段式回転ピストンポンプ。
- 過剰圧縮を避けるために、前記ポンプ段の少なくとも1つが、逃し弁(46, 48, 50)が配置されている逃しチャネル(52)に連結されていることを特徴とする請求項1〜3のいずれか1つに記載の多段式回転ピストンポンプ。
- 少なくとも第2のポンプ段及び第3のポンプ段、特には更に第4のポンプ段が逃しチャネル(52)に連結されていることを特徴とする請求項1〜4のいずれか1つに記載の多段式回転ピストンポンプ。
- 前記逃しチャネル(52)は周囲環境及び/又は前記ポンプ出口に連結されていることを特徴とする請求項4又は5に記載の多段式回転ピストンポンプ。
- 隣り合うポンプ段の圧力差が500 mbar未満であることを特徴とする請求項1〜6のいずれか1つに記載の多段式回転ピストンポンプ。
- 前記ハウジング(10)は、外側に配置された冷却フィン、及び/又はハウジング壁に配置された冷却チャネルを有していることを特徴とする請求項1〜7のいずれか1つに記載の多段式回転ピストンポンプ。
- 前記連結チャネル(38)は前記ハウジング(10)に、特には前記冷却チャネルの近くに配置されていることを特徴とする請求項1〜8のいずれか1つに記載の多段式回転ピストンポンプ。
- 前記回転ピストンポンプ全体の送出性能は少なくとも1500 m3/h であり、特には少なくとも2500 m3/h であることを特徴とする請求項1〜9のいずれか1つに記載の多段式回転ピストンポンプ。
- 回転ピストン対(20)が配置されており、時間平均圧力が200 mbarを超えるポンプチャンバの表面(A) に、
A>400 mm2/(m3/h)*S/VR
が適用されており、
尚、Sは、1〜50 mbar の終圧間のポンプの最も高い測定送出性能であり、VRは内部容積比であることを特徴とする請求項1〜10のいずれか1つに記載の多段式回転ピストンポンプ。 - 終圧動作中、最後のポンプ段の直後で測定されたガス温度が、300 ℃未満であり、特には250 ℃未満であり、特に好ましくは200 ℃未満であることを特徴とする請求項1〜11のいずれか1つに記載の多段式回転ピストンポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE202017003212.0U DE202017003212U1 (de) | 2017-06-17 | 2017-06-17 | Mehrstufige Wälzkolbenpumpe |
DE202017003212.0 | 2017-06-17 | ||
PCT/EP2018/063572 WO2018228784A1 (de) | 2017-06-17 | 2018-05-23 | Mehrstufige wälzkolbenpumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2020524236A true JP2020524236A (ja) | 2020-08-13 |
Family
ID=62244496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019566303A Pending JP2020524236A (ja) | 2017-06-17 | 2018-05-23 | 多段式回転ピストンポンプ |
Country Status (8)
Country | Link |
---|---|
US (1) | US20210140430A1 (ja) |
EP (1) | EP3638906A1 (ja) |
JP (1) | JP2020524236A (ja) |
KR (1) | KR102581752B1 (ja) |
CN (1) | CN110770444B (ja) |
DE (1) | DE202017003212U1 (ja) |
TW (1) | TWI770196B (ja) |
WO (1) | WO2018228784A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111561447A (zh) * | 2020-04-23 | 2020-08-21 | 浙江佳成机械有限公司 | 一种螺杆压缩机及其控制方法 |
JP2023116194A (ja) * | 2022-02-09 | 2023-08-22 | 株式会社荏原製作所 | 真空ポンプ |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0270990A (ja) * | 1988-09-05 | 1990-03-09 | Unozawagumi Tekkosho:Kk | 冷却水路を内蔵する逆流冷却式多段ロータリー形真空ポンプ |
JP2004300964A (ja) * | 2003-03-28 | 2004-10-28 | Aisin Seiki Co Ltd | 真空ポンプ |
JP2006520873A (ja) * | 2003-03-19 | 2006-09-14 | 株式会社荏原製作所 | 容積型真空ポンプ |
JP2009503358A (ja) * | 2005-08-02 | 2009-01-29 | エドワーズ リミテッド | 真空ポンプ |
JP2014141966A (ja) * | 2013-01-18 | 2014-08-07 | Adixen Vacuum Products | 多段真空ポンプ |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2951591A1 (de) * | 1979-12-21 | 1981-07-02 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | Mehrstufige waelzkolbenpumpe |
JP3673743B2 (ja) * | 2001-09-27 | 2005-07-20 | 大晃機械工業株式会社 | スクリュー式真空ポンプ |
FR2883934B1 (fr) * | 2005-04-05 | 2010-08-20 | Cit Alcatel | Pompage rapide d'enceinte avec limitation d'energie |
GB0519742D0 (en) * | 2005-09-28 | 2005-11-09 | Boc Group Plc | Method of pumping gas |
GB0705971D0 (en) * | 2007-03-28 | 2007-05-09 | Boc Group Plc | Vacuum pump |
CN102472285A (zh) * | 2009-08-14 | 2012-05-23 | 株式会社爱发科 | 干泵 |
ES2818976T3 (es) * | 2009-12-24 | 2021-04-14 | Sumitomo Seika Chemicals | Dispositivo de supresión de vibraciones del gas de escape en un aparato con doble bomba de vacío |
TWI518245B (zh) * | 2010-04-19 | 2016-01-21 | 荏原製作所股份有限公司 | 乾真空泵裝置、排氣單元,以及消音器 |
KR101173168B1 (ko) * | 2010-11-17 | 2012-08-16 | 데이비드 김 | 다단형 건식 진공펌프 |
JP5677202B2 (ja) * | 2011-06-02 | 2015-02-25 | 株式会社荏原製作所 | 真空ポンプ |
FR2978214B1 (fr) * | 2011-07-21 | 2013-08-16 | Adixen Vacuum Products | Pompe a vide multi-etagee de type seche |
FR2984423A1 (fr) * | 2011-12-15 | 2013-06-21 | Adixen Vacuum Products | Dispositif de pompage et equipement de fabrication d'ecrans plats correspondant |
KR101385954B1 (ko) * | 2012-11-14 | 2014-04-16 | 데이비드 김 | 다단형 건식 진공펌프 |
US9541091B2 (en) * | 2013-11-13 | 2017-01-10 | Baker Hughes Incorporated | Instrument subs for centrifugal well pump assemblies |
-
2017
- 2017-06-17 DE DE202017003212.0U patent/DE202017003212U1/de active Active
-
2018
- 2018-05-23 JP JP2019566303A patent/JP2020524236A/ja active Pending
- 2018-05-23 WO PCT/EP2018/063572 patent/WO2018228784A1/de active Application Filing
- 2018-05-23 KR KR1020197036597A patent/KR102581752B1/ko active IP Right Grant
- 2018-05-23 EP EP18726990.7A patent/EP3638906A1/de not_active Withdrawn
- 2018-05-23 US US16/617,355 patent/US20210140430A1/en active Pending
- 2018-05-23 CN CN201880032421.9A patent/CN110770444B/zh active Active
- 2018-06-15 TW TW107120760A patent/TWI770196B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0270990A (ja) * | 1988-09-05 | 1990-03-09 | Unozawagumi Tekkosho:Kk | 冷却水路を内蔵する逆流冷却式多段ロータリー形真空ポンプ |
JP2006520873A (ja) * | 2003-03-19 | 2006-09-14 | 株式会社荏原製作所 | 容積型真空ポンプ |
JP2004300964A (ja) * | 2003-03-28 | 2004-10-28 | Aisin Seiki Co Ltd | 真空ポンプ |
JP2009503358A (ja) * | 2005-08-02 | 2009-01-29 | エドワーズ リミテッド | 真空ポンプ |
JP2014141966A (ja) * | 2013-01-18 | 2014-08-07 | Adixen Vacuum Products | 多段真空ポンプ |
Also Published As
Publication number | Publication date |
---|---|
CN110770444B (zh) | 2021-10-08 |
DE202017003212U1 (de) | 2018-09-18 |
KR20200019620A (ko) | 2020-02-24 |
TW201907091A (zh) | 2019-02-16 |
TWI770196B (zh) | 2022-07-11 |
US20210140430A1 (en) | 2021-05-13 |
EP3638906A1 (de) | 2020-04-22 |
CN110770444A (zh) | 2020-02-07 |
KR102581752B1 (ko) | 2023-09-21 |
WO2018228784A1 (de) | 2018-12-20 |
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