JP2020501358A5 - - Google Patents

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JP2020501358A5
JP2020501358A5 JP2019528902A JP2019528902A JP2020501358A5 JP 2020501358 A5 JP2020501358 A5 JP 2020501358A5 JP 2019528902 A JP2019528902 A JP 2019528902A JP 2019528902 A JP2019528902 A JP 2019528902A JP 2020501358 A5 JP2020501358 A5 JP 2020501358A5
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optical modes
defect
defects
focal planes
semiconductor wafer
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JP2019528902A
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JP7080884B2 (ja
JP2020501358A (ja
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JP2019528902A 2016-11-30 2017-11-30 三次元半導体構造の検査用の欠陥発見およびレシピ最適化 Active JP7080884B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201662427973P 2016-11-30 2016-11-30
US201662427917P 2016-11-30 2016-11-30
US62/427,973 2016-11-30
US62/427,917 2016-11-30
US15/826,019 US11047806B2 (en) 2016-11-30 2017-11-29 Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures
US15/826,019 2017-11-29
PCT/US2017/064040 WO2018102596A2 (en) 2016-11-30 2017-11-30 Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures

Publications (3)

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JP2020501358A JP2020501358A (ja) 2020-01-16
JP2020501358A5 true JP2020501358A5 (enExample) 2021-01-14
JP7080884B2 JP7080884B2 (ja) 2022-06-06

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JP2019528902A Active JP7080884B2 (ja) 2016-11-30 2017-11-30 三次元半導体構造の検査用の欠陥発見およびレシピ最適化

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US (1) US11047806B2 (enExample)
JP (1) JP7080884B2 (enExample)
KR (1) KR102438824B1 (enExample)
CN (1) CN109964116B (enExample)
TW (1) TWI774708B (enExample)
WO (1) WO2018102596A2 (enExample)

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