JP2020133628A5 - - Google Patents
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- Publication number
- JP2020133628A5 JP2020133628A5 JP2020016016A JP2020016016A JP2020133628A5 JP 2020133628 A5 JP2020133628 A5 JP 2020133628A5 JP 2020016016 A JP2020016016 A JP 2020016016A JP 2020016016 A JP2020016016 A JP 2020016016A JP 2020133628 A5 JP2020133628 A5 JP 2020133628A5
- Authority
- JP
- Japan
- Prior art keywords
- flange
- vacuum
- vacuum device
- axial
- sealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims description 101
- 230000007246 mechanism Effects 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 18
- 230000001681 protective effect Effects 0.000 description 15
- 230000035515 penetration Effects 0.000 description 14
- 238000009434 installation Methods 0.000 description 11
- 239000002826 coolant Substances 0.000 description 10
- 238000005096 rolling process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 230000036961 partial effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004873 anchoring Methods 0.000 description 2
- 230000004323 axial length Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000001012 protector Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 235000018936 Vitellaria paradoxa Nutrition 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000009432 framing Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19156691 | 2019-02-12 | ||
| EP19156691.8A EP3617523A1 (de) | 2019-02-12 | 2019-02-12 | Vakuumgerät und vakuumsystem |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020133628A JP2020133628A (ja) | 2020-08-31 |
| JP2020133628A5 true JP2020133628A5 (https=) | 2021-12-23 |
| JP7111754B2 JP7111754B2 (ja) | 2022-08-02 |
Family
ID=65433474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020016016A Active JP7111754B2 (ja) | 2019-02-12 | 2020-02-03 | 真空装置及び真空システム |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP3617523A1 (https=) |
| JP (1) | JP7111754B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7596936B2 (ja) * | 2021-06-02 | 2024-12-10 | 株式会社島津製作所 | 真空ポンプおよびリークディテクタ |
| GB2623527B (en) * | 2022-10-18 | 2024-12-25 | Edwards Ltd | Turbomolecular pump |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8726885D0 (en) * | 1987-11-17 | 1987-12-23 | Furmanite Int Ltd | Flanged pipeline connections |
| US6485254B1 (en) * | 2000-10-19 | 2002-11-26 | Applied Materials, Inc. | Energy dissipating coupling |
| JP4780859B2 (ja) | 2000-12-18 | 2011-09-28 | 日機装株式会社 | キャンドモータポンプ |
| JP2003148381A (ja) | 2001-11-16 | 2003-05-21 | Boc Edwards Technologies Ltd | 真空ポンプ |
| FR2867823B1 (fr) * | 2004-03-22 | 2006-07-14 | Cit Alcatel | Raccord amortisseur pour pompe a vide |
| EP1837521A4 (en) * | 2004-12-20 | 2009-04-15 | Edwards Japan Ltd | STRUCTURE FOR CONNECTING END PARTS AND VACUUM SYSTEM USING THIS STRUCTURE |
| DE102005059208A1 (de) * | 2005-12-12 | 2007-06-28 | Pfeiffer Vacuum Gmbh | Vakuumgehäuse |
| DE102008035972A1 (de) * | 2008-07-31 | 2010-02-04 | Pfeiffer Vacuum Gmbh | Vakuumpumpanordnung |
| DE102009039120A1 (de) * | 2009-08-28 | 2011-03-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
| US9336990B2 (en) * | 2013-08-29 | 2016-05-10 | Varian Semiconductor Equipment Associates, Inc. | Semiconductor process pumping arrangements |
| EP3034881B1 (de) * | 2014-12-18 | 2018-10-31 | Pfeiffer Vacuum GmbH | Vakuumpumpe |
| EP3244068B1 (de) | 2016-05-10 | 2020-01-01 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
| JP6882623B2 (ja) | 2017-03-21 | 2021-06-02 | 株式会社島津製作所 | センターリングおよび真空ポンプ |
-
2019
- 2019-02-12 EP EP19156691.8A patent/EP3617523A1/de active Pending
-
2020
- 2020-02-03 JP JP2020016016A patent/JP7111754B2/ja active Active
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