JP2020128950A - 多層膜回折格子 - Google Patents
多層膜回折格子 Download PDFInfo
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- JP2020128950A JP2020128950A JP2019022387A JP2019022387A JP2020128950A JP 2020128950 A JP2020128950 A JP 2020128950A JP 2019022387 A JP2019022387 A JP 2019022387A JP 2019022387 A JP2019022387 A JP 2019022387A JP 2020128950 A JP2020128950 A JP 2020128950A
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Abstract
Description
2…基本反射膜層
3…薄膜層A
4…薄膜層B
Claims (4)
- 軟X線分光計測に用いる表面に周期的な凹凸を持つ回折格子において、波長1nm〜20nm内の目的電磁波の浸透深さよりも厚い金(Au)、白金(Pt)、ロジウム(Rh)、タングステン(W)の基本反射膜層上に多層膜層として炭素(C)、炭化ボロン(B4C)、コバルト(Co)、ニッケル(Ni)のいずれか、もしくはそのいずれかを含む化合物の薄膜層Aとオスミウム(Os)、イリジウム(Ir)、タングステン(W)のいずれか、もしくはそのいずれかを含む化合物の薄膜層Bを1周期以上付加した多層膜層を有することを特徴とする多層膜回折格子。
- 請求項1記載の多層膜回折格子において溝形状が矩形型であるラミナー型多層膜回折格子。
- 前記請求項1に記載の多層膜回折格子の多層膜層の周期が半整数(例:1.5、2.5周期)であることを特徴とする多層膜回折格子。
- 前記請求項1に記載の多層膜回折格子の多層膜層を構成する物質の膜厚が膜層ごとに異なることを特徴とする多層膜回折格子。
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JP2020128950A true JP2020128950A (ja) | 2020-08-27 |
JP2020128950A5 JP2020128950A5 (ja) | 2021-07-26 |
JP7259379B2 JP7259379B2 (ja) | 2023-04-18 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007119852A1 (ja) * | 2006-04-14 | 2007-10-25 | Japan Atomic Energy Agency | 多層膜型回折格子 |
JP2008090030A (ja) * | 2006-10-03 | 2008-04-17 | Japan Atomic Energy Agency | 高効率耐熱性多層膜回折格子 |
JP2011075850A (ja) * | 2009-09-30 | 2011-04-14 | Japan Atomic Energy Agency | 多層膜ラミナー型回折格子及び分光器 |
JP2015094892A (ja) * | 2013-11-13 | 2015-05-18 | 独立行政法人日本原子力研究開発機構 | 回折格子 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2007119852A1 (ja) * | 2006-04-14 | 2007-10-25 | Japan Atomic Energy Agency | 多層膜型回折格子 |
JP2008090030A (ja) * | 2006-10-03 | 2008-04-17 | Japan Atomic Energy Agency | 高効率耐熱性多層膜回折格子 |
JP2011075850A (ja) * | 2009-09-30 | 2011-04-14 | Japan Atomic Energy Agency | 多層膜ラミナー型回折格子及び分光器 |
JP2015094892A (ja) * | 2013-11-13 | 2015-05-18 | 独立行政法人日本原子力研究開発機構 | 回折格子 |
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