JP2020122713A - センサ装置 - Google Patents
センサ装置 Download PDFInfo
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- JP2020122713A JP2020122713A JP2019014734A JP2019014734A JP2020122713A JP 2020122713 A JP2020122713 A JP 2020122713A JP 2019014734 A JP2019014734 A JP 2019014734A JP 2019014734 A JP2019014734 A JP 2019014734A JP 2020122713 A JP2020122713 A JP 2020122713A
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- 239000010410 layer Substances 0.000 claims abstract description 83
- 230000004888 barrier function Effects 0.000 claims abstract description 64
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 238000009792 diffusion process Methods 0.000 claims abstract description 47
- 239000004065 semiconductor Substances 0.000 claims abstract description 43
- 239000002344 surface layer Substances 0.000 claims abstract description 10
- 239000012535 impurity Substances 0.000 claims description 18
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000001514 detection method Methods 0.000 description 133
- 230000003014 reinforcing effect Effects 0.000 description 50
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000011229 interlayer Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Pressure Sensors (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Micromachines (AREA)
Abstract
Description
(概略構成)
図1及び図2は、第1実施形態に係る力覚センサに用いられるセンサ素子としてのセンサチップ110の概略を示す図である。
拡散配線17の周囲には空乏層DLが生じるが、配線16と半導体基板200との電位差等により、空乏層DLが薄くなり、寄生MOS構造が生じることにより、隣接する拡散配線17にリークパスが発生する可能性がある。本実施形態に係るセンサチップ110では、隣接する拡散配線17に、拡散配線17とは極性が反対の第1バリア層19が形成されているので、逆方向バイアスにより空乏層DLが広がり、リーク電流の発生が抑制される。同様に、本実施形態に係るセンサチップ110では、隣接するピエゾ抵抗素子間にもピエゾ抵抗素子とは極性が反対の第1バリア層19が形成されているので、ピエゾ抵抗素子間におけるリーク電流の発生が抑制される。
Claims (8)
- 半導体基板内に形成され、前記半導体基板とは反対の極性を有するピエゾ抵抗素子と、
前記半導体基板内に形成され、前記半導体基板とは反対の極性を有する拡散配線と、
前記半導体基板内の隣接する前記拡散配線の間に形成され、前記半導体基板と同一の極性を有する第1バリア層と、
前記ピエゾ抵抗素子と前記拡散配線との表層に形成され、前記第1バリア層と同一の極性を有する第2バリア層と、
を有するセンサ装置。 - 前記第1バリア層は、さらに隣接する前記ピエゾ抵抗素子の間に形成されている請求項1に記載のセンサ装置。
- 前記第1バリア層は前記半導体基板より不純物濃度が高く、前記第2バリア層は前記第1バリア層より不純物濃度より高い請求項1または2に記載のセンサ装置。
- 前記拡散配線は、前記ピエゾ抵抗素子より不純物濃度が高い請求項3に記載のセンサ装置。
- 前記半導体基板上に、絶縁膜を介して形成された配線を有し、前記配線は、前記絶縁膜を貫通するコンタクトプラグを介して前記拡散配線に接続されている請求項1ないし4いずれか1項に記載のセンサ装置。
- 前記絶縁膜上に形成されたプルアップ用の電極パッドを有し、前記電極パッドは、前記絶縁膜を貫通するコンタクトプラグを介して前記第1バリア層に接続されている請求項5に記載のセンサ装置。
- 前記半導体基板の極性はn型である請求項6に記載のセンサ装置。
- 多軸方向の力及び/又は力のモーメントを検知可能な請求項1ないし7いずれか1項に記載のセンサ装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019014734A JP7298092B2 (ja) | 2019-01-30 | 2019-01-30 | センサ装置 |
US16/739,356 US11320324B2 (en) | 2019-01-30 | 2020-01-10 | Sensor device |
CN202010031653.1A CN111504540B (zh) | 2019-01-30 | 2020-01-13 | 传感器装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019014734A JP7298092B2 (ja) | 2019-01-30 | 2019-01-30 | センサ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020122713A true JP2020122713A (ja) | 2020-08-13 |
JP7298092B2 JP7298092B2 (ja) | 2023-06-27 |
Family
ID=71732369
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2019014734A Active JP7298092B2 (ja) | 2019-01-30 | 2019-01-30 | センサ装置 |
Country Status (3)
Country | Link |
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US (1) | US11320324B2 (ja) |
JP (1) | JP7298092B2 (ja) |
CN (1) | CN111504540B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022142118A (ja) * | 2021-03-16 | 2022-09-30 | ミネベアミツミ株式会社 | センサチップ、力覚センサ装置 |
JP2022142117A (ja) * | 2021-03-16 | 2022-09-30 | ミネベアミツミ株式会社 | センサチップ、力覚センサ装置 |
US20240079240A1 (en) * | 2022-09-01 | 2024-03-07 | Honeywell International Inc. | Method for applying a cap layer to protect electrical components of a semiconductor device from e-beam irradiation |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59195135A (ja) * | 1983-04-21 | 1984-11-06 | Nec Corp | 力の方向検出器 |
JPH0637187A (ja) * | 1992-07-15 | 1994-02-10 | Nippondenso Co Ltd | 半導体歪みセンサ |
JPH07302917A (ja) * | 1994-05-10 | 1995-11-14 | Fuji Electric Co Ltd | 半導体圧力センサ |
JP2000223717A (ja) * | 1999-02-04 | 2000-08-11 | Yokogawa Electric Corp | 半導体センサ |
JP2004109112A (ja) * | 2002-07-22 | 2004-04-08 | Denso Corp | 半導体センサ |
JP2004109114A (ja) * | 2002-07-26 | 2004-04-08 | Matsushita Electric Works Ltd | 半導体多軸加速度センサ |
JP2008082835A (ja) * | 2006-09-27 | 2008-04-10 | Oki Electric Ind Co Ltd | 半導体歪測定装置、歪測定方法、圧力センサ及び加速度センサ |
JP2012083304A (ja) * | 2010-10-14 | 2012-04-26 | Rohm Co Ltd | Memsセンサ |
JP2014135391A (ja) * | 2013-01-10 | 2014-07-24 | Mitsumi Electric Co Ltd | ピエゾ抵抗素子及び半導体センサ |
US20170261567A1 (en) * | 2016-03-10 | 2017-09-14 | Allegro Microsystems, Llc | Electronic circuit for compensating a sensitivity drift of a hall effect element due to stress |
JP2018021796A (ja) * | 2016-08-02 | 2018-02-08 | アイシン精機株式会社 | 半導体歪ゲージ |
JP2018044811A (ja) * | 2016-09-13 | 2018-03-22 | 株式会社村田製作所 | ピエゾ抵抗型センサ |
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JPH0831608B2 (ja) * | 1987-03-25 | 1996-03-27 | 日本電装株式会社 | 半導体圧力センサの製造方法 |
JPS641345A (en) | 1987-06-24 | 1989-01-05 | Nippon Hoso Kyokai <Nhk> | Fm multiplex receiver |
JP2901253B2 (ja) * | 1988-09-02 | 1999-06-07 | 山口日本電気株式会社 | 圧力センサ |
JP3447826B2 (ja) * | 1994-11-30 | 2003-09-16 | 株式会社東芝 | 半導体記憶装置 |
JP3344138B2 (ja) * | 1995-01-30 | 2002-11-11 | 株式会社日立製作所 | 半導体複合センサ |
JP4011345B2 (ja) | 2002-01-11 | 2007-11-21 | 本田技研工業株式会社 | 多軸力センサチップ |
US6823744B2 (en) | 2002-01-11 | 2004-11-30 | Honda Giken Kogyo Kabushiki Kaisha | Six-axis force sensor |
TWI416739B (zh) * | 2006-05-01 | 2013-11-21 | Tanita Seisakusho Kk | 半導體型應變檢測器及其製造方法 |
JP2011013179A (ja) * | 2009-07-06 | 2011-01-20 | Yamatake Corp | 圧力センサ及び圧力センサの製造方法 |
US10634695B2 (en) | 2017-04-26 | 2020-04-28 | Minebea Mitsumi Inc. | Force sensor |
JP6940037B2 (ja) | 2017-04-26 | 2021-09-22 | ミネベアミツミ株式会社 | 力覚センサ装置 |
EP3581903B1 (en) * | 2018-06-14 | 2021-04-07 | Melexis Technologies NV | N-implant electrical shield for piezo-resistor sensor |
-
2019
- 2019-01-30 JP JP2019014734A patent/JP7298092B2/ja active Active
-
2020
- 2020-01-10 US US16/739,356 patent/US11320324B2/en active Active
- 2020-01-13 CN CN202010031653.1A patent/CN111504540B/zh active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59195135A (ja) * | 1983-04-21 | 1984-11-06 | Nec Corp | 力の方向検出器 |
JPH0637187A (ja) * | 1992-07-15 | 1994-02-10 | Nippondenso Co Ltd | 半導体歪みセンサ |
JPH07302917A (ja) * | 1994-05-10 | 1995-11-14 | Fuji Electric Co Ltd | 半導体圧力センサ |
JP2000223717A (ja) * | 1999-02-04 | 2000-08-11 | Yokogawa Electric Corp | 半導体センサ |
JP2004109112A (ja) * | 2002-07-22 | 2004-04-08 | Denso Corp | 半導体センサ |
JP2004109114A (ja) * | 2002-07-26 | 2004-04-08 | Matsushita Electric Works Ltd | 半導体多軸加速度センサ |
JP2008082835A (ja) * | 2006-09-27 | 2008-04-10 | Oki Electric Ind Co Ltd | 半導体歪測定装置、歪測定方法、圧力センサ及び加速度センサ |
JP2012083304A (ja) * | 2010-10-14 | 2012-04-26 | Rohm Co Ltd | Memsセンサ |
JP2014135391A (ja) * | 2013-01-10 | 2014-07-24 | Mitsumi Electric Co Ltd | ピエゾ抵抗素子及び半導体センサ |
US20170261567A1 (en) * | 2016-03-10 | 2017-09-14 | Allegro Microsystems, Llc | Electronic circuit for compensating a sensitivity drift of a hall effect element due to stress |
JP2018021796A (ja) * | 2016-08-02 | 2018-02-08 | アイシン精機株式会社 | 半導体歪ゲージ |
JP2018044811A (ja) * | 2016-09-13 | 2018-03-22 | 株式会社村田製作所 | ピエゾ抵抗型センサ |
Also Published As
Publication number | Publication date |
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CN111504540B (zh) | 2023-10-03 |
US11320324B2 (en) | 2022-05-03 |
CN111504540A (zh) | 2020-08-07 |
US20200240857A1 (en) | 2020-07-30 |
JP7298092B2 (ja) | 2023-06-27 |
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