JP2020038856A - スイッチング素子 - Google Patents
スイッチング素子 Download PDFInfo
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- JP2020038856A JP2020038856A JP2018163960A JP2018163960A JP2020038856A JP 2020038856 A JP2020038856 A JP 2020038856A JP 2018163960 A JP2018163960 A JP 2018163960A JP 2018163960 A JP2018163960 A JP 2018163960A JP 2020038856 A JP2020038856 A JP 2020038856A
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- 239000004020 conductor Substances 0.000 claims abstract description 79
- 239000004065 semiconductor Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 33
- 239000010410 layer Substances 0.000 description 226
- 238000010586 diagram Methods 0.000 description 7
- 239000002344 surface layer Substances 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Abstract
Description
12 :半導体基板
20 :ゲート絶縁膜
23 :ゲート電極
23a :第1導電体
23b :第2導電体
24 :層間絶縁膜
26 :上部電極
26a :ソースコンタクト部
26b :ボディコンタクト部
28 :下部電極
30 :ドレイン層
32 :ドリフト層
32a :窓部ドリフト層
32b :基部ドリフト層
34 :ボディ層
36 :ソース層
40 :チャネル部
Claims (5)
- スイッチング素子であって、
n型のソース層と、
前記ソース層に接するp型のボディ層と、
前記ボディ層に接し、前記ボディ層によって前記ソース層から分離されているn型のドリフト層と、
前記ソース層の表面、前記ボディ層の表面、及び、前記ドリフト層の表面に跨る範囲を覆っているゲート絶縁膜と、
前記ゲート絶縁膜を介して前記ソース層、前記ボディ層、及び、前記ドリフト層に対向しているゲート電極、
を有しており、
前記ゲート電極が、第1導電体と、前記第1導電体よりも仕事関数が低い第2導電体を有しており、
前記第1導電体が、前記ボディ層を覆っている部分の前記ゲート絶縁膜に接しており、
前記第2導電体が、前記ドリフト層を覆っている部分の前記ゲート絶縁膜に接している、
スイッチング素子。 - 前記第2導電体が、前記ボディ層と前記ドリフト層の境界を覆っている部分の前記ゲート絶縁膜に接している、請求項1のスイッチング素子。
- 半導体基板をさらに有し、
前記ボディ層を複数有し、
前記ソース層を複数有し、
複数の前記ボディ層が、前記半導体基板の表面に露出するとともに互いから分離するように前記半導体基板内に配置されており、
複数の前記ソース層が、対応する前記ボディ層に囲まれるとともに前記半導体基板の前記表面に露出するように前記半導体基板内に配置されており、
前記ドリフト層が、複数の前記ボディ層の間で前記半導体基板の前記表面に露出するように前記半導体基板内に配置されている、
請求項1または2のスイッチング素子。 - 前記第2導電体が、複数の前記ボディ層の間に位置する部分の前記ドリフト層を覆っている部分の前記ゲート絶縁膜の表面全体に接している、請求項3のスイッチング素子。
- 前記ボディ層に接し、前記第1導電体により構成されている第1コンタクト電極と、
前記ソース層に接し、前記第2導電体により構成されている第2コンタクト電極、
をさらに有する請求項3または4のスイッチング素子。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018163960A JP7095500B2 (ja) | 2018-08-31 | 2018-08-31 | スイッチング素子 |
CN201910777379.XA CN110875395B (zh) | 2018-08-31 | 2019-08-22 | 开关元件 |
US16/557,299 US10978586B2 (en) | 2018-08-31 | 2019-08-30 | Switching device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018163960A JP7095500B2 (ja) | 2018-08-31 | 2018-08-31 | スイッチング素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020038856A true JP2020038856A (ja) | 2020-03-12 |
JP7095500B2 JP7095500B2 (ja) | 2022-07-05 |
Family
ID=69639659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2018163960A Active JP7095500B2 (ja) | 2018-08-31 | 2018-08-31 | スイッチング素子 |
Country Status (3)
Country | Link |
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US (1) | US10978586B2 (ja) |
JP (1) | JP7095500B2 (ja) |
CN (1) | CN110875395B (ja) |
Citations (7)
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JP2000082812A (ja) * | 1998-06-22 | 2000-03-21 | Denso Corp | 炭化珪素半導体装置及びその製造方法 |
JP2001156288A (ja) * | 1999-11-25 | 2001-06-08 | Toyota Motor Corp | 半導体装置 |
US20060273379A1 (en) * | 2005-06-06 | 2006-12-07 | Alpha & Omega Semiconductor, Ltd. | MOSFET using gate work function engineering for switching applications |
JP2013201401A (ja) * | 2012-03-26 | 2013-10-03 | Toshiba Corp | 半導体装置 |
JP2016167537A (ja) * | 2015-03-10 | 2016-09-15 | 富士電機株式会社 | 縦型mosfet |
WO2017163881A1 (ja) * | 2016-03-23 | 2017-09-28 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
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