JP2020024335A5 - - Google Patents

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Publication number
JP2020024335A5
JP2020024335A5 JP2018149680A JP2018149680A JP2020024335A5 JP 2020024335 A5 JP2020024335 A5 JP 2020024335A5 JP 2018149680 A JP2018149680 A JP 2018149680A JP 2018149680 A JP2018149680 A JP 2018149680A JP 2020024335 A5 JP2020024335 A5 JP 2020024335A5
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JP
Japan
Prior art keywords
optical system
illumination optical
integrator
optical integrator
illumination
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Application number
JP2018149680A
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English (en)
Japanese (ja)
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JP2020024335A (ja
JP7185440B2 (ja
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Priority to JP2018149680A priority Critical patent/JP7185440B2/ja
Priority claimed from JP2018149680A external-priority patent/JP7185440B2/ja
Priority to TW108126728A priority patent/TWI841580B/zh
Priority to KR1020190095910A priority patent/KR102554101B1/ko
Publication of JP2020024335A publication Critical patent/JP2020024335A/ja
Publication of JP2020024335A5 publication Critical patent/JP2020024335A5/ja
Application granted granted Critical
Publication of JP7185440B2 publication Critical patent/JP7185440B2/ja
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JP2018149680A 2018-08-08 2018-08-08 照明光学系、露光装置および物品製造方法 Active JP7185440B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018149680A JP7185440B2 (ja) 2018-08-08 2018-08-08 照明光学系、露光装置および物品製造方法
TW108126728A TWI841580B (zh) 2018-08-08 2019-07-29 照明光學系統、曝光裝置及物品製造方法
KR1020190095910A KR102554101B1 (ko) 2018-08-08 2019-08-07 조명 광학계, 노광 장치 및 물품 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018149680A JP7185440B2 (ja) 2018-08-08 2018-08-08 照明光学系、露光装置および物品製造方法

Publications (3)

Publication Number Publication Date
JP2020024335A JP2020024335A (ja) 2020-02-13
JP2020024335A5 true JP2020024335A5 (enExample) 2021-09-02
JP7185440B2 JP7185440B2 (ja) 2022-12-07

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ID=69618635

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JP2018149680A Active JP7185440B2 (ja) 2018-08-08 2018-08-08 照明光学系、露光装置および物品製造方法

Country Status (3)

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JP (1) JP7185440B2 (enExample)
KR (1) KR102554101B1 (enExample)
TW (1) TWI841580B (enExample)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4005380B2 (ja) 2002-02-15 2007-11-07 フジノン株式会社 ハイブリッドインテグレータ、照明光学系および投写型画像表示装置
JP4229747B2 (ja) 2003-04-22 2009-02-25 シャープ株式会社 ロッドインテグレータ及びこれを用いた照明装置
JP2005032909A (ja) 2003-07-10 2005-02-03 Fuji Photo Film Co Ltd 照明光学系およびそれを用いた露光装置
US7158305B2 (en) 2004-06-29 2007-01-02 Anvik Corporation Illumination system optimized for throughput and manufacturability
TWM265652U (en) * 2004-08-03 2005-05-21 Premier Image Technology Corp Solid integration rod for DLP
JP4796803B2 (ja) 2005-08-18 2011-10-19 Ｎｅｃディスプレイソリューションズ株式会社 投写型表示装置の光学系とその光学系を備えた投写型表示装置
JP6544972B2 (ja) * 2015-04-08 2019-07-17 キヤノン株式会社 照明光学装置、およびデバイス製造方法
JP6700982B2 (ja) * 2016-06-01 2020-05-27 キヤノン株式会社 光学系、露光装置および物品製造方法

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