JP2020004782A5 - - Google Patents

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Publication number
JP2020004782A5
JP2020004782A5 JP2018120444A JP2018120444A JP2020004782A5 JP 2020004782 A5 JP2020004782 A5 JP 2020004782A5 JP 2018120444 A JP2018120444 A JP 2018120444A JP 2018120444 A JP2018120444 A JP 2018120444A JP 2020004782 A5 JP2020004782 A5 JP 2020004782A5
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JP
Japan
Prior art keywords
plasma processing
processing apparatus
tubular member
vacuum vessel
plasma
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JP2018120444A
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English (en)
Japanese (ja)
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JP2020004782A (ja
JP7102252B2 (ja
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Publication of JP2020004782A5 publication Critical patent/JP2020004782A5/ja
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JP2018120444A 2018-06-26 2018-06-26 プラズマ処理装置 Active JP7102252B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018120444A JP7102252B2 (ja) 2018-06-26 2018-06-26 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018120444A JP7102252B2 (ja) 2018-06-26 2018-06-26 プラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2020004782A JP2020004782A (ja) 2020-01-09
JP2020004782A5 true JP2020004782A5 (enExample) 2021-07-26
JP7102252B2 JP7102252B2 (ja) 2022-07-19

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JP2018120444A Active JP7102252B2 (ja) 2018-06-26 2018-06-26 プラズマ処理装置

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JP (1) JP7102252B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12444582B2 (en) * 2020-04-21 2025-10-14 Hitachi High-Tech Corporation Plasma processing apparatus

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06101072A (ja) * 1992-09-22 1994-04-12 Sumitomo Metal Ind Ltd プラズマ装置
JP5074741B2 (ja) * 2006-11-10 2012-11-14 株式会社日立ハイテクノロジーズ 真空処理装置
JP2008187062A (ja) * 2007-01-31 2008-08-14 Hitachi High-Technologies Corp プラズマ処理装置

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