JP2019522906A - 水素プラズマを用いたシリコン抽出方法 - Google Patents
水素プラズマを用いたシリコン抽出方法 Download PDFInfo
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Abstract
Description
本出願は、2016年5月29日に出願された米国仮特許出願第62/342,992号に関連し、これに基づく優先権を主張する。
その全体の内容は参照により本明細書に組み込まれる。
一実施形態において、第2材料は、SiN、SiO2及びそれらの組み合わせからなる群から選択される、
さらに、「SiO2」の表記は、主成分としてケイ素及び酸素を含有する層を含むことを意味し、その層はある範囲のSi及びOの組成物を有することができる。SiO2は酸化ケイ素の中で最も熱力学的に安定であり、従って酸化ケイ素の中で最も商業的に重要である。
substrate)が、依然として原子状水素が支配的なエッチャント種である。本発明の実施形態によれば、プロセス条件は13.56MHzにおいて75〜250Wの下部電極電力を含むことができる。
マルチオリフィスシャワーヘッドガス注入プレート(図示せず)を介して供給される。
Claims (19)
- 基板プロセス方法であって、
元素Siを含む第1材料と、前記第1材料とは異なる第2材料とを含む基板を提供するステップと、
H2及び任意でArを含むプラズマ励起プロセスガスを形成するステップと、
前記第2材料と比較して前記第1材料を選択的にエッチングするために、前記プラズマ励起プロセスガスに前記基板を曝露するステップと、
を含む、方法。 - 前記プロセスガスがH2を含む、
請求項1記載の方法。 - 前記プロセスガスがH2及びArを含む、
請求項1記載の方法。 - 前記第2材料は、SiN、SiO2及びそれらの組み合わせからなる群から選択される、
請求項1記載の方法。 - 前記第2材料は有機材料を含む、
請求項1記載の方法。 - 前記第1材料は前記基板上の隆起フィーチャを含み、
前記第2材料は前記隆起フィーチャの垂直部分上の側壁スペーサを形成し、
前記曝露するステップは、前記第1材料の前記隆起フィーチャを除去するが前記側壁スペーサは除去しない、
請求項1記載の方法。 - 前記第2材料は、SiN及びSiO2を含む群から選択される、
請求項6記載の方法。 - 前記第1材料及び前記第2材料は、下地のSiO2材料と直接接触し、
前記第2材料はSiNを含む、
請求項6記載の方法。 - 前記プラズマ励起プロセスガスを形成するステップは、上部プレート電極と前記基板を支持する下部プレート電極とを含む容量結合プラズマ源を用いてプラズマを生成するステップを含む、
請求項1記載の方法。 - 前記プラズマ励起プロセスガスを形成するステップは、高いラジカル対イオンフラックス比率を作り出す遠隔プラズマ源を使用してプラズマを生成するステップを含む、
請求項1記載の方法。 - 基板プロセス方法であって、
元素Siを含む第1材料と、SiN、SiO2及びそれらの組み合わせからなる群から選択される第2材料とを含む基板を提供するステップと、
H2及びArを含むプラズマ励起プロセスガスを形成するステップと、
前記第2材料と比較して前記第1材料を選択的にエッチングするために、前記プラズマ励起プロセスガスに前記基板を曝露するステップと、
を含む、方法。 - 前記第1材料は前記基板上の隆起フィーチャを含み、
前記第2材料は前記隆起フィーチャの垂直部分上の側壁スペーサを形成し、
前記曝露するステップは、前記第1材料の前記隆起フィーチャを除去するが前記側壁スペーサは除去しない、
請求項11記載の方法。 - 前記プラズマ励起プロセスガスを形成するステップは、上部プレート電極と前記基板を支持する下部プレート電極とを含む容量結合プラズマ源を用いてプラズマを生成するステップを含む、
請求項11記載の方法。 - 前記プラズマ励起プロセスガスを形成するステップは、高いラジカル対イオンフラックス比率を作り出す遠隔プラズマ源を使用してプラズマを生成するステップを含む、
請求項11記載の方法。 - 基板プロセス方法であって、
基板を提供するステップであって、前記基板は、該基板上に隆起フィーチャを有する第1材料と、前記隆起フィーチャの垂直部分上の側壁スペーサを形成する第2材料と、を含み、前記第1材料及び前記第2材料は、下地のSiO2第3材料と直接接触し、前記第1材料は元素Siを含み、前記第2材料はSiNを含み、前記第3材料はSiO2を含む、ステップと、
H2及び任意でArを含むプラズマ励起プロセスガスを形成するステップと、
前記第2材料及び前記第3材料と比較して前記第1材料を選択的にエッチングするために、前記プラズマ励起プロセスガスに前記基板を曝露するステップと、
を含む、方法。 - 前記プラズマ励起プロセスガスを形成するステップは、上部プレート電極と前記基板を支持する下部プレート電極とを含む容量結合プラズマ源を用いてプラズマを生成するステップを含む、
請求項15記載の方法。 - 前記プラズマ励起プロセスガスを形成するステップは、高いラジカル対イオンフラックス比率を作り出す遠隔プラズマ源を使用してプラズマを生成するステップを含む、
請求項15記載の方法。 - 前記プロセスガスがH2を含む、
請求項15記載の方法。 - 前記プロセスガスがH2及びArを含む、
請求項15記載の方法。
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US201662342992P | 2016-05-29 | 2016-05-29 | |
US62/342,992 | 2016-05-29 | ||
PCT/US2017/034852 WO2017210139A1 (en) | 2016-05-29 | 2017-05-26 | Method of silicon extraction using a hydrogen plasma |
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JP6958980B2 JP6958980B2 (ja) | 2021-11-02 |
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JP (1) | JP6958980B6 (ja) |
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KR20190030181A (ko) * | 2017-09-13 | 2019-03-21 | 도쿄엘렉트론가부시키가이샤 | 자기 정렬된 다중 패터닝을 위한 선택적 질화물 에칭 방법 |
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KR20190038945A (ko) * | 2016-08-29 | 2019-04-09 | 도쿄엘렉트론가부시키가이샤 | 실리콘 질화물의 준원자 층 에칭 방법 |
US10446405B2 (en) | 2017-02-23 | 2019-10-15 | Tokyo Electron Limited | Method of anisotropic extraction of silicon nitride mandrel for fabrication of self-aligned block structures |
US10431470B2 (en) | 2017-02-23 | 2019-10-01 | Tokyo Electron Limited | Method of quasi-atomic layer etching of silicon nitride |
US20220130641A1 (en) * | 2019-02-06 | 2022-04-28 | Evatec Ag | Method of producing ions and apparatus |
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JP2014011357A (ja) * | 2012-06-29 | 2014-01-20 | Tokyo Electron Ltd | 成膜方法、成膜装置及び記憶媒体 |
US20150279687A1 (en) * | 2014-03-31 | 2015-10-01 | Applied Materials, Inc. | Halogen-free gas-phase silicon etch |
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KR100607409B1 (ko) * | 2004-08-23 | 2006-08-02 | 삼성전자주식회사 | 기판 식각 방법 및 이를 이용한 반도체 장치 제조 방법 |
US8808563B2 (en) * | 2011-10-07 | 2014-08-19 | Applied Materials, Inc. | Selective etch of silicon by way of metastable hydrogen termination |
US8969212B2 (en) * | 2012-11-20 | 2015-03-03 | Applied Materials, Inc. | Dry-etch selectivity |
US9773649B2 (en) * | 2014-11-17 | 2017-09-26 | Lam Research Corporation | Dry development and image transfer of si-containing self-assembled block copolymers |
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JP2014011357A (ja) * | 2012-06-29 | 2014-01-20 | Tokyo Electron Ltd | 成膜方法、成膜装置及び記憶媒体 |
US20150279687A1 (en) * | 2014-03-31 | 2015-10-01 | Applied Materials, Inc. | Halogen-free gas-phase silicon etch |
Cited By (2)
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KR20190030181A (ko) * | 2017-09-13 | 2019-03-21 | 도쿄엘렉트론가부시키가이샤 | 자기 정렬된 다중 패터닝을 위한 선택적 질화물 에칭 방법 |
KR102448699B1 (ko) | 2017-09-13 | 2022-09-28 | 도쿄엘렉트론가부시키가이샤 | 자기 정렬된 다중 패터닝을 위한 선택적 질화물 에칭 방법 |
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WO2017210139A1 (en) | 2017-12-07 |
JP6958980B2 (ja) | 2021-11-02 |
JP6958980B6 (ja) | 2021-12-22 |
US20170345667A1 (en) | 2017-11-30 |
KR20190003795A (ko) | 2019-01-09 |
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