JP2019517017A - フィルファクタ変調によるプロセス適合性改善 - Google Patents
フィルファクタ変調によるプロセス適合性改善 Download PDFInfo
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- JP2019517017A JP2019517017A JP2018552155A JP2018552155A JP2019517017A JP 2019517017 A JP2019517017 A JP 2019517017A JP 2018552155 A JP2018552155 A JP 2018552155A JP 2018552155 A JP2018552155 A JP 2018552155A JP 2019517017 A JP2019517017 A JP 2019517017A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/30—Circuit design
- G06F30/39—Circuit design at the physical level
- G06F30/398—Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM]
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
- G03F7/705—Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70625—Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70633—Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70681—Metrology strategies
- G03F7/70683—Mark designs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Theoretical Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Geometry (AREA)
- Evolutionary Computation (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
Description
本願は2016年4月4日付米国仮特許出願第62/318086号の利益を主張する出願であるので、この参照を以てその全容を本願に繰り入れることにする。
Claims (21)
- ターゲットデザイン方法であって、ピッチpを有する周期パターンに属する要素を、置換されるその要素に対し少なくとも一通りの幾何学的差異を有するアシスト要素により置換し、それによりターゲット要素を画定することで、そのピッチpが単一ピッチとして維持される混成周期構造を形成するステップを、有する方法。
- 請求項1に記載の方法であって、上記少なくとも一通りの幾何学的差異が限界寸法である方法。
- 請求項1に記載の方法であって、更に、禁制リソグラフィピッチが回避されるよう上記ターゲット要素間のスペース及び/又はピッチpを調整するステップを有する方法。
- 請求項1に記載の方法であって、更に、リソグラフィシミュレーションを用い上記ターゲット要素のエッジ配置をデザインするステップを有する方法。
- 請求項1に記載の方法であって、更に、上記混成周期構造複数個を素材にして計量オーバレイイメージングターゲットをデザインするステップを有する方法。
- 請求項5に記載の方法であって、更に、モデルデバイスに対する上記ターゲットの回折パターンにて密整合が得られるよう上記ターゲット要素間のスペース及び/又はピッチpを調整するステップを有する方法。
- 請求項5に記載の方法であって、更に、モデルデバイスに対する上記ターゲットの回折パターンにて密整合が得られるよう構成されたアシスト要素を上記混成周期構造に付加するステップを有する方法。
- 請求項1乃至7のうちいずれか一項に記載の方法であって、少なくとも1個のコンピュータプロセッサにより実行される方法。
- 請求項1乃至8のうちいずれか一項に記載の方法に係る混成周期構造デザイン。
- 請求項9に記載の混成周期ターゲット構造デザインを複数個備える計量オーバレイイメージングターゲット。
- 非一時的コンピュータ可読格納媒体を備えるコンピュータプログラム製品であり、その非一時的コンピュータ可読格納媒体で以てコンピュータ可読プログラムが体現されており、請求項1乃至8のうちいずれか一項に記載の方法を実行するようそのコンピュータ可読プログラムが構成されているコンピュータプログラム製品。
- ターゲット要素及びアシスト要素を備え、それらが少なくとも1個の幾何学的特徴による相違を有し且つ単一のピッチpにて配置されており、それにより混成周期ターゲット構造が形成されている混成周期ターゲット構造デザイン。
- 請求項12に記載の混成周期ターゲット構造デザインであって、上記少なくとも1個の幾何学的特徴が限界寸法である混成周期ターゲット構造デザイン。
- 請求項12に記載の混成周期ターゲット構造デザインであって、禁制リソグラフィピッチが回避されるよう上記ターゲット要素間のスペース及び/又はピッチpが調整された混成周期ターゲット構造デザイン。
- 請求項12に記載の混成周期ターゲット構造デザインであって、上記ターゲット要素のエッジ配置がリソグラフィシミュレーションを用いデザインされた混成周期ターゲット構造デザイン。
- 請求項12乃至15のうちいずれか一項に記載の混成周期ターゲット構造デザインを複数個備える計量ターゲットデザイン。
- 請求項16に記載の計量ターゲットデザインであって、モデルデバイスに対する上記ターゲットデザインの回折パターンにて密整合が得られるよう上記ターゲット要素間のスペース及び/又はピッチpが調整された計量ターゲットデザイン。
- 請求項16に記載の計量ターゲットデザインであって、上記混成周期構造が、更に、モデルデバイスに対する上記ターゲットデザインの回折パターンにて密整合が得られるよう構成された少なくとも1個のアシスト要素を備える計量ターゲットデザイン。
- 請求項12乃至18のうちいずれか一項に記載の計量ターゲットデザインから多重パターニングによりもたらされるターゲット。
- 請求項19に記載のターゲットによる計量計測。
- 請求項20に記載の計量計測であり、偏向照明を用い実行される計量計測。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662318086P | 2016-04-04 | 2016-04-04 | |
US62/318,086 | 2016-04-04 | ||
PCT/US2016/060626 WO2017176314A1 (en) | 2016-04-04 | 2016-11-04 | Process compatibility improvement by fill factor modulation |
Publications (3)
Publication Number | Publication Date |
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JP2019517017A true JP2019517017A (ja) | 2019-06-20 |
JP2019517017A5 JP2019517017A5 (ja) | 2019-12-12 |
JP6952711B2 JP6952711B2 (ja) | 2021-10-20 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2018552155A Active JP6952711B2 (ja) | 2016-04-04 | 2016-11-04 | ターゲットデザイン方法、製造方法及び計量ターゲット |
Country Status (8)
Country | Link |
---|---|
US (1) | US10579768B2 (ja) |
EP (1) | EP3440511B1 (ja) |
JP (1) | JP6952711B2 (ja) |
KR (1) | KR20180123156A (ja) |
CN (1) | CN109073981B (ja) |
IL (1) | IL261879B (ja) |
TW (1) | TWI710860B (ja) |
WO (1) | WO2017176314A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11112704B2 (en) * | 2017-02-10 | 2021-09-07 | Kla-Tencor Corporation | Mitigation of inaccuracies related to grating asymmetries in scatterometry measurements |
KR102447611B1 (ko) | 2017-06-06 | 2022-09-26 | 케이엘에이 코포레이션 | 레티클 최적화 알고리즘들 및 최적의 타겟 설계 |
US10628544B2 (en) * | 2017-09-25 | 2020-04-21 | International Business Machines Corporation | Optimizing integrated circuit designs based on interactions between multiple integration design rules |
US20190250504A1 (en) * | 2017-10-23 | 2019-08-15 | Kla-Tencor Corporation | Reduction or elimination of pattern placement error in metrology measurements |
EP3853665B1 (en) * | 2018-10-30 | 2023-12-20 | Kla-Tencor Corporation | Estimation of asymmetric aberrations |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US20020045106A1 (en) * | 2000-07-21 | 2002-04-18 | Baselmans Johannes Jacobus Matheus | Assist features for use in lithographic projection |
JP2006048067A (ja) * | 2001-02-28 | 2006-02-16 | Asml Masktools Bv | 極端相互作用ピッチ領域を識別する方法、マスクパターンを設計する方法およびマスクを製造する方法、デバイス製造方法およびコンピュータプログラム |
JP2006293081A (ja) * | 2005-04-12 | 2006-10-26 | Toshiba Corp | 集積回路のパターンレイアウト、フォトマスク、半導体装置の製造方法、及びデータ作成方法 |
WO2015109036A1 (en) * | 2014-01-15 | 2015-07-23 | Kla-Tencor Corporation | Overlay measurement of pitch walk in multiply patterned targets |
WO2016030255A2 (en) * | 2014-08-29 | 2016-03-03 | Asml Netherlands B.V. | Metrology method, target and substrate |
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US6303252B1 (en) * | 1999-12-27 | 2001-10-16 | United Microelectronics Corp. | Reticle having assist feature between semi-dense lines |
TW512424B (en) * | 2000-05-01 | 2002-12-01 | Asml Masktools Bv | Hybrid phase-shift mask |
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SG108975A1 (en) * | 2003-07-11 | 2005-02-28 | Asml Netherlands Bv | Marker structure for alignment or overlay to correct pattern induced displacement, mask pattern for defining such a marker structure and lithographic projection apparatus using such a mask pattern |
SG111289A1 (en) * | 2003-11-05 | 2005-05-30 | Asml Masktools Bv | A method for performing transmission tuning of a mask pattern to improve process latitude |
WO2005069082A1 (en) * | 2003-12-19 | 2005-07-28 | International Business Machines Corporation | Differential critical dimension and overlay metrology apparatus and measurement method |
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JP2009109581A (ja) * | 2007-10-26 | 2009-05-21 | Toshiba Corp | 半導体装置の製造方法 |
JP5529391B2 (ja) * | 2008-03-21 | 2014-06-25 | ルネサスエレクトロニクス株式会社 | ハーフトーン型位相シフトマスク、そのハーフトーン型位相シフトマスクを有する半導体装置の製造装置、およびそのハーフトーン型位相シフトマスクを用いた半導体装置の製造方法 |
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NL2017300A (en) * | 2015-08-27 | 2017-03-01 | Asml Netherlands Bv | Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method |
US10670975B2 (en) * | 2015-12-17 | 2020-06-02 | Asml Netherlands B.V. | Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured |
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2016
- 2016-11-04 JP JP2018552155A patent/JP6952711B2/ja active Active
- 2016-11-04 CN CN201680084437.5A patent/CN109073981B/zh active Active
- 2016-11-04 EP EP16898139.7A patent/EP3440511B1/en active Active
- 2016-11-04 KR KR1020187031153A patent/KR20180123156A/ko not_active Application Discontinuation
- 2016-11-04 US US15/502,950 patent/US10579768B2/en active Active
- 2016-11-04 WO PCT/US2016/060626 patent/WO2017176314A1/en active Application Filing
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2017
- 2017-03-31 TW TW106110992A patent/TWI710860B/zh active
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2018
- 2018-09-20 IL IL261879A patent/IL261879B/en active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020045106A1 (en) * | 2000-07-21 | 2002-04-18 | Baselmans Johannes Jacobus Matheus | Assist features for use in lithographic projection |
JP2006048067A (ja) * | 2001-02-28 | 2006-02-16 | Asml Masktools Bv | 極端相互作用ピッチ領域を識別する方法、マスクパターンを設計する方法およびマスクを製造する方法、デバイス製造方法およびコンピュータプログラム |
JP2006293081A (ja) * | 2005-04-12 | 2006-10-26 | Toshiba Corp | 集積回路のパターンレイアウト、フォトマスク、半導体装置の製造方法、及びデータ作成方法 |
WO2015109036A1 (en) * | 2014-01-15 | 2015-07-23 | Kla-Tencor Corporation | Overlay measurement of pitch walk in multiply patterned targets |
WO2016030255A2 (en) * | 2014-08-29 | 2016-03-03 | Asml Netherlands B.V. | Metrology method, target and substrate |
Also Published As
Publication number | Publication date |
---|---|
IL261879A (en) | 2018-10-31 |
US20180157784A1 (en) | 2018-06-07 |
JP6952711B2 (ja) | 2021-10-20 |
CN109073981A (zh) | 2018-12-21 |
KR20180123156A (ko) | 2018-11-14 |
EP3440511B1 (en) | 2024-03-06 |
TWI710860B (zh) | 2020-11-21 |
WO2017176314A1 (en) | 2017-10-12 |
CN109073981B (zh) | 2021-09-24 |
US10579768B2 (en) | 2020-03-03 |
EP3440511A4 (en) | 2019-12-18 |
IL261879B (en) | 2021-01-31 |
EP3440511A1 (en) | 2019-02-13 |
TW201800873A (zh) | 2018-01-01 |
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