JP2019515141A5 - - Google Patents
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- Publication number
- JP2019515141A5 JP2019515141A5 JP2018557825A JP2018557825A JP2019515141A5 JP 2019515141 A5 JP2019515141 A5 JP 2019515141A5 JP 2018557825 A JP2018557825 A JP 2018557825A JP 2018557825 A JP2018557825 A JP 2018557825A JP 2019515141 A5 JP2019515141 A5 JP 2019515141A5
- Authority
- JP
- Japan
- Prior art keywords
- electromagnetic pump
- container
- interposed
- vacuum
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP16168167 | 2016-05-03 | ||
| EP16168167.1 | 2016-05-03 | ||
| PCT/EP2017/060316 WO2017191082A1 (en) | 2016-05-03 | 2017-05-01 | Apparatus for feeding a liquid material to an evaporator device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019515141A JP2019515141A (ja) | 2019-06-06 |
| JP2019515141A5 true JP2019515141A5 (https=) | 2021-08-12 |
| JP7069039B2 JP7069039B2 (ja) | 2022-05-17 |
Family
ID=56083902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018557825A Expired - Fee Related JP7069039B2 (ja) | 2016-05-03 | 2017-05-01 | 蒸発装置に液体材料を供給するための装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US11220739B2 (https=) |
| EP (1) | EP3452633B1 (https=) |
| JP (1) | JP7069039B2 (https=) |
| KR (1) | KR102357447B1 (https=) |
| CN (1) | CN109072414B (https=) |
| AU (1) | AU2017260147B2 (https=) |
| ES (1) | ES2787924T3 (https=) |
| WO (1) | WO2017191082A1 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3452631B1 (en) | 2016-05-03 | 2020-03-25 | Tata Steel Nederland Technology B.V. | Method to operate an apparatus for feeding liquid metal to an evaporator device |
| EP3452632B1 (en) | 2016-05-03 | 2020-07-08 | Tata Steel Nederland Technology B.V. | Method to control the temperature of an electromagnetic pump |
| JP7315218B2 (ja) * | 2019-12-24 | 2023-07-26 | 株式会社ヂーマグ | 金属溶湯駆動装置および金属溶湯駆動方法 |
| US12557243B2 (en) * | 2023-05-23 | 2026-02-17 | Microsoft Technology Licensing, Llc | Systems and methods for magnetic pumping in thermal management devices |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US847395A (en) | 1906-04-30 | 1907-03-19 | Ernest Boehm | Light-transmitting and light-diffusing object. |
| US2664852A (en) | 1950-04-27 | 1954-01-05 | Nat Res Corp | Vapor coating apparatus |
| US3059612A (en) | 1959-10-19 | 1962-10-23 | Wean Engineering Co Inc | Vacuum coating apparatus |
| US3408224A (en) | 1964-06-25 | 1968-10-29 | Pennsalt Chemicals Corp | Vapor coating employing degassing of coating metal |
| US3581766A (en) | 1968-08-02 | 1971-06-01 | Jones & Laughlin Steel Corp | Supplying liquid to a vacuum chamber |
| US3550924A (en) | 1968-12-06 | 1970-12-29 | United States Steel Corp | Mechanism for controlling flow of liquid to a vacuum-treating vessel |
| IT1130947B (it) * | 1980-03-10 | 1986-06-18 | De Dionigi Manlio | Perfezionamenti alle pompe elettromagnetiche alternative in particolare per fluidi non viscosi |
| US4392786A (en) | 1980-10-16 | 1983-07-12 | Merenkov Jury F | Electromagnetic induction pump |
| JPS5938379A (ja) | 1982-08-26 | 1984-03-02 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置のスタ−トアツプ法 |
| FR2562099B1 (fr) * | 1984-03-30 | 1986-06-20 | Commissariat Energie Atomique | Cellule d'evaporation d'un compose liquide adaptee a l'epitaxie par jets moleculaires |
| JP3452617B2 (ja) * | 1993-12-10 | 2003-09-29 | 真空冶金株式会社 | ガスデポジション装置 |
| US6362098B1 (en) * | 2001-02-28 | 2002-03-26 | Motorola, Inc. | Plasma-enhanced chemical vapor deposition (CVD) method to fill a trench in a semiconductor substrate |
| US6749906B2 (en) * | 2002-04-25 | 2004-06-15 | Eastman Kodak Company | Thermal physical vapor deposition apparatus with detachable vapor source(s) and method |
| US7339139B2 (en) | 2003-10-03 | 2008-03-04 | Darly Custom Technology, Inc. | Multi-layered radiant thermal evaporator and method of use |
| DE102004041855B4 (de) * | 2004-04-27 | 2007-09-13 | Von Ardenne Anlagentechnik Gmbh | Vorrichtung und Verfahren zur kontinuierlichen thermischen Vakuumbeschichtung |
| US20100124022A1 (en) * | 2008-11-14 | 2010-05-20 | Suad Causevic | Thermoelectric cooling apparatus and method for cooling an integrated circuit |
| WO2012081738A1 (en) | 2010-12-13 | 2012-06-21 | Posco | Continuous coating apparatus |
| US8920566B2 (en) * | 2010-12-30 | 2014-12-30 | United Technologies Corporation | Wire feed pressure lock system |
| EP2663665B1 (fr) * | 2011-01-14 | 2015-03-11 | Arcelormittal Investigacion y Desarrollo | Dispositif d'alimentation automatique d'un generateur de vapeur metallique industriel |
| CN103188912A (zh) * | 2011-12-27 | 2013-07-03 | 刘源 | 使用液态金属工质的藕状规则多孔金属微通道热沉 |
| AU2013242397B2 (en) | 2012-03-30 | 2017-06-15 | Posco | Method and apparatus for feeding liquid metal to an evaporator device |
| WO2015067662A1 (en) | 2013-11-05 | 2015-05-14 | Tata Steel Nederland Technology B.V. | Method and apparatus for controlling the composition of liquid metal in an evaporator device |
| CN204805055U (zh) | 2015-04-29 | 2015-11-25 | 周小林 | 电磁泵 |
| EP3452632B1 (en) | 2016-05-03 | 2020-07-08 | Tata Steel Nederland Technology B.V. | Method to control the temperature of an electromagnetic pump |
| EP3452631B1 (en) | 2016-05-03 | 2020-03-25 | Tata Steel Nederland Technology B.V. | Method to operate an apparatus for feeding liquid metal to an evaporator device |
-
2017
- 2017-05-01 AU AU2017260147A patent/AU2017260147B2/en not_active Ceased
- 2017-05-01 ES ES17720142T patent/ES2787924T3/es active Active
- 2017-05-01 JP JP2018557825A patent/JP7069039B2/ja not_active Expired - Fee Related
- 2017-05-01 US US16/098,523 patent/US11220739B2/en not_active Expired - Fee Related
- 2017-05-01 WO PCT/EP2017/060316 patent/WO2017191082A1/en not_active Ceased
- 2017-05-01 CN CN201780027343.9A patent/CN109072414B/zh not_active Expired - Fee Related
- 2017-05-01 EP EP17720142.3A patent/EP3452633B1/en active Active
- 2017-05-01 KR KR1020187033590A patent/KR102357447B1/ko not_active Expired - Fee Related
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