JP2019515140A5 - - Google Patents
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- Publication number
- JP2019515140A5 JP2019515140A5 JP2018557815A JP2018557815A JP2019515140A5 JP 2019515140 A5 JP2019515140 A5 JP 2019515140A5 JP 2018557815 A JP2018557815 A JP 2018557815A JP 2018557815 A JP2018557815 A JP 2018557815A JP 2019515140 A5 JP2019515140 A5 JP 2019515140A5
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- electromagnetic pump
- liquid metal
- supply pipe
- evaporator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 47
- 238000000034 method Methods 0.000 claims description 28
- 230000008020 evaporation Effects 0.000 claims description 7
- 238000001704 evaporation Methods 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 3
- 230000035699 permeability Effects 0.000 description 3
- 238000003915 air pollution Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP16168162.2 | 2016-05-03 | ||
| EP16168162 | 2016-05-03 | ||
| PCT/EP2017/060317 WO2017191083A1 (en) | 2016-05-03 | 2017-05-01 | Method to operate an apparatus for feeding liquid metal to an evaporator device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019515140A JP2019515140A (ja) | 2019-06-06 |
| JP2019515140A5 true JP2019515140A5 (https=) | 2021-08-12 |
| JP7182466B2 JP7182466B2 (ja) | 2022-12-02 |
Family
ID=56083901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018557815A Active JP7182466B2 (ja) | 2016-05-03 | 2017-05-01 | 液体金属を蒸発装置に供給するための装置を操作するための方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US11414744B2 (https=) |
| EP (1) | EP3452631B1 (https=) |
| JP (1) | JP7182466B2 (https=) |
| KR (1) | KR102360308B1 (https=) |
| CN (1) | CN109072410B (https=) |
| AU (1) | AU2017260148B2 (https=) |
| ES (1) | ES2786975T3 (https=) |
| WO (1) | WO2017191083A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2017260147B2 (en) | 2016-05-03 | 2022-08-25 | Tata Steel Nederland Technology B.V. | Apparatus for feeding a liquid material to an evaporator device |
| EP3452632B1 (en) | 2016-05-03 | 2020-07-08 | Tata Steel Nederland Technology B.V. | Method to control the temperature of an electromagnetic pump |
| CN107761058B (zh) * | 2017-11-14 | 2018-11-13 | 中国科学院光电研究院 | 多元合金薄膜的制备装置及其制备方法 |
| CN113930738B (zh) * | 2020-06-29 | 2023-09-12 | 宝山钢铁股份有限公司 | 一种真空镀膜用的金属蒸汽调制装置及其调制方法 |
| CN115094385A (zh) * | 2022-07-21 | 2022-09-23 | 浙江艾微普科技有限公司 | 一种含有液体供给系统的镀膜设备和镀膜方法 |
| CN118756099B (zh) * | 2024-09-09 | 2024-12-17 | 湘潭宏大真空技术股份有限公司 | 一种用于af膜的蒸发镀膜装置 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2664852A (en) | 1950-04-27 | 1954-01-05 | Nat Res Corp | Vapor coating apparatus |
| US3059612A (en) | 1959-10-19 | 1962-10-23 | Wean Engineering Co Inc | Vacuum coating apparatus |
| US3408224A (en) | 1964-06-25 | 1968-10-29 | Pennsalt Chemicals Corp | Vapor coating employing degassing of coating metal |
| US3581766A (en) | 1968-08-02 | 1971-06-01 | Jones & Laughlin Steel Corp | Supplying liquid to a vacuum chamber |
| US3550924A (en) | 1968-12-06 | 1970-12-29 | United States Steel Corp | Mechanism for controlling flow of liquid to a vacuum-treating vessel |
| JPS5938379B2 (ja) | 1979-09-14 | 1984-09-17 | 松下電工株式会社 | 屋根材 |
| US4392786A (en) * | 1980-10-16 | 1983-07-12 | Merenkov Jury F | Electromagnetic induction pump |
| JPS5938379A (ja) | 1982-08-26 | 1984-03-02 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置のスタ−トアツプ法 |
| JP3452617B2 (ja) * | 1993-12-10 | 2003-09-29 | 真空冶金株式会社 | ガスデポジション装置 |
| US7339139B2 (en) | 2003-10-03 | 2008-03-04 | Darly Custom Technology, Inc. | Multi-layered radiant thermal evaporator and method of use |
| DE102004041855B4 (de) * | 2004-04-27 | 2007-09-13 | Von Ardenne Anlagentechnik Gmbh | Vorrichtung und Verfahren zur kontinuierlichen thermischen Vakuumbeschichtung |
| JP5259452B2 (ja) * | 2008-06-19 | 2013-08-07 | 一般財団法人電力中央研究所 | 電磁ポンプ吐出量測定方法 |
| US20100124022A1 (en) * | 2008-11-14 | 2010-05-20 | Suad Causevic | Thermoelectric cooling apparatus and method for cooling an integrated circuit |
| KR101639811B1 (ko) | 2009-09-28 | 2016-07-15 | 주식회사 포스코 | 용융금속 공급장치 |
| WO2012081738A1 (en) | 2010-12-13 | 2012-06-21 | Posco | Continuous coating apparatus |
| AU2013242397B2 (en) * | 2012-03-30 | 2017-06-15 | Posco | Method and apparatus for feeding liquid metal to an evaporator device |
| WO2015067662A1 (en) | 2013-11-05 | 2015-05-14 | Tata Steel Nederland Technology B.V. | Method and apparatus for controlling the composition of liquid metal in an evaporator device |
| CN204805055U (zh) * | 2015-04-29 | 2015-11-25 | 周小林 | 电磁泵 |
| AU2017260147B2 (en) | 2016-05-03 | 2022-08-25 | Tata Steel Nederland Technology B.V. | Apparatus for feeding a liquid material to an evaporator device |
| EP3452632B1 (en) | 2016-05-03 | 2020-07-08 | Tata Steel Nederland Technology B.V. | Method to control the temperature of an electromagnetic pump |
-
2017
- 2017-05-01 EP EP17721357.6A patent/EP3452631B1/en active Active
- 2017-05-01 WO PCT/EP2017/060317 patent/WO2017191083A1/en not_active Ceased
- 2017-05-01 KR KR1020187033592A patent/KR102360308B1/ko not_active Expired - Fee Related
- 2017-05-01 AU AU2017260148A patent/AU2017260148B2/en not_active Ceased
- 2017-05-01 ES ES17721357T patent/ES2786975T3/es active Active
- 2017-05-01 CN CN201780027325.0A patent/CN109072410B/zh not_active Expired - Fee Related
- 2017-05-01 JP JP2018557815A patent/JP7182466B2/ja active Active
- 2017-05-01 US US16/098,461 patent/US11414744B2/en active Active
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