JP2019505472A - Fzシリコンおよびfzシリコンを準備する方法 - Google Patents
Fzシリコンおよびfzシリコンを準備する方法 Download PDFInfo
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 62
- 239000010703 silicon Substances 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title claims abstract description 46
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 61
- 238000000137 annealing Methods 0.000 claims abstract description 41
- 238000012545 processing Methods 0.000 claims abstract description 26
- 235000012431 wafers Nutrition 0.000 claims description 29
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000002344 surface layer Substances 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 28
- 230000007547 defect Effects 0.000 description 16
- 239000000463 material Substances 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 9
- 230000006698 induction Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000001773 deep-level transient spectroscopy Methods 0.000 description 5
- 239000002019 doping agent Substances 0.000 description 5
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 230000001590 oxidative effect Effects 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 238000009377 nuclear transmutation Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 238000001953 recrystallisation Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000002231 Czochralski process Methods 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005389 semiconductor device fabrication Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
Description
・高い少数キャリア寿命
・低い酸素含有量
・低い抵抗変化量
である。
a)900℃以上のアニール温度でFZシリコンをアニールすることと、
b)900℃未満の加工温度でアニールされたFZシリコンを加工することと、を備える。
さらなる実施形態では、FZシリコンは、GFZ法を用いて多結晶の粒状シリコンから成長する。
本発明に係るFZシリコンを準備する方法の上記に特定された実施形態に関して特定される特徴は、本発明に係るFZシリコンに対応して当てはまり得る。さらに、したがって、本発明に係るFZシリコンを準備する方法の実施形態に関連する上記に特定された利点は、本発明に係るFZシリコンの対応する実施形態にも関する。本発明の特定された実施形態のこれらのおよび他の特徴は、請求項および明細書に記載される。個々の特徴は、本発明の実施形態として単独または組み合わせのいずれかで実施されてもよく、または、本願の他の分野で実施されてもよい。さらに、それらは、提出時の出願において主張され、または本願および/もしくは継続出願の係属中に主張され得る保護について、それ自体で保護可能である有利な実施形態を表し得る。
FZ結晶が引き上げられた。引上げ装置の窒素レベルは、最終結晶で約1014cm-3の範囲になるように選択された。窒素の役割を確認するために、いくつかの結晶は引上げ装置に窒素が加えられない状態で引き上げられた。
ロヂン−エタノール−不動態化が表面再結晶を抑制し、その後真のバルク寿命特性を明らかにするために用いられた。適度にドープされたFZウェハは、典型的にはこの測定条件設定で>3ms寿命に達する。
・900℃未満の温度でのアニールは、「成長したままの」寿命を減少させる。これが酸化または非酸化炉雰囲気で行なわれるか否かは問題とならない。
・900℃以上の温度でのアニールは、寿命を減少させない。
・900℃以上の温度でのアニールは、900℃未満の温度での前のアニールによって減少されたサンプルの元々高い寿命を再設定することができる。
・この高温アニールステップ(900℃以上の温度)を経験したサンプルは、後の900℃未満のより低い温度でのアニールに対して広く影響を受けないままである。それらの寿命は、著しく減少することはない。
結果は、以下に要約されることができる。
・900℃未満でのアニールは、205Kおよび127Kで準位を生成する。
・900℃以上でのアニールは、これらの欠陥準位を「消去する」。
Claims (14)
- FZシリコンを準備する方法であって、
900℃以上のアニール温度で前記FZシリコンをアニールするステップと、
900℃未満の加工温度で前記アニールされたFZシリコンを加工するステップとを備える、方法。 - FZ引上げされたインゴットから複数のFZシリコンウェハを機械的に形成するステップを備える、請求項1に記載の方法。
- 900℃以上のアニール温度でFZ引上げされたインゴットをアニールする、請求項1または請求項2に記載の方法。
- 酸素を含む環境で前記FZシリコンをアニールするステップを備える、請求項1から請求項3のいずれか1項に記載の方法。
- 900℃未満の加工温度で前記FZシリコンから形成される少なくとも1つのFZウェハを加工する、請求項1から請求項4のいずれか1項に記載の方法。
- 前記アニールするステップは、急速熱加工室で行なわれる、請求項1から請求項5のいずれか1項に記載の方法。
- 900℃未満の加工温度で前記アニールされたFZシリコンを加工するステップは、FZウェハの表面上への多結晶シリコンの堆積ステップを備える、請求項1から請求項6のいずれか1項に記載の方法。
- 前記FZシリコンは、窒素でドープされている、請求項1から請求項7のいずれか1項に記載の方法。
- FZシリコンであって、
前記FZシリコンは、900℃未満の加工温度での加工ステップ後に、その少数キャリア寿命の減少を示さない、FZシリコン。 - 窒素でドープされた、請求項9に記載のFZシリコン。
- 75mm、125mm、150mmまたは200mmの直径を有するウェハを備える、請求項9または請求項10に記載のFZシリコン。
- 前記ウェハは、多結晶シリコン表面層を含む、請求項11に記載のFZシリコン。
- 半導体デバイスの製造のための、請求項9から請求項12のいずれか1項に記載のFZシリコンの使用。
- 高効率太陽電池の製造のための、請求項9から請求項12のいずれか1項に記載のFZシリコンの使用。
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EP16155959.6 | 2016-02-16 | ||
EP16155959.6A EP3208366A1 (en) | 2016-02-16 | 2016-02-16 | Fz silicon and method to prepare fz silicon |
PCT/EP2017/052229 WO2017140507A1 (en) | 2016-02-16 | 2017-02-02 | Fz silicon and method to prepare fz silicon |
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JP2021015905A (ja) * | 2019-07-12 | 2021-02-12 | 信越半導体株式会社 | シリコン単結晶基板中の炭素濃度評価方法 |
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JPH07106611A (ja) * | 1993-09-29 | 1995-04-21 | Tonen Corp | Bsf型太陽電池の製造方法 |
WO2005010243A1 (ja) * | 2003-07-29 | 2005-02-03 | Shin-Etsu Handotai Co., Ltd. | シリコン単結晶基板の製造方法及び抵抗特性測定方法並びに抵抗特性保証方法 |
JP2011155258A (ja) * | 2009-12-29 | 2011-08-11 | Siltronic Ag | シリコンウエハ及びその製造方法 |
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Also Published As
Publication number | Publication date |
---|---|
EP3208366A1 (en) | 2017-08-23 |
TWI629384B (zh) | 2018-07-11 |
WO2017140507A1 (en) | 2017-08-24 |
TW201730387A (zh) | 2017-09-01 |
KR20180115281A (ko) | 2018-10-22 |
CN108699725A (zh) | 2018-10-23 |
US20190006190A1 (en) | 2019-01-03 |
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